JPS6279871U - - Google Patents
Info
- Publication number
- JPS6279871U JPS6279871U JP17027785U JP17027785U JPS6279871U JP S6279871 U JPS6279871 U JP S6279871U JP 17027785 U JP17027785 U JP 17027785U JP 17027785 U JP17027785 U JP 17027785U JP S6279871 U JPS6279871 U JP S6279871U
- Authority
- JP
- Japan
- Prior art keywords
- closed space
- hood
- target
- chamber
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17027785U JPS6279871U (ko) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17027785U JPS6279871U (ko) | 1985-11-05 | 1985-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279871U true JPS6279871U (ko) | 1987-05-21 |
Family
ID=31104858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17027785U Pending JPS6279871U (ko) | 1985-11-05 | 1985-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279871U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4724576B2 (ja) * | 2006-03-09 | 2011-07-13 | 株式会社アルバック | 多元薄膜形成装置 |
-
1985
- 1985-11-05 JP JP17027785U patent/JPS6279871U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4724576B2 (ja) * | 2006-03-09 | 2011-07-13 | 株式会社アルバック | 多元薄膜形成装置 |