JPS61100874U - - Google Patents

Info

Publication number
JPS61100874U
JPS61100874U JP18641584U JP18641584U JPS61100874U JP S61100874 U JPS61100874 U JP S61100874U JP 18641584 U JP18641584 U JP 18641584U JP 18641584 U JP18641584 U JP 18641584U JP S61100874 U JPS61100874 U JP S61100874U
Authority
JP
Japan
Prior art keywords
implantation
ion
sections
ion beam
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18641584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18641584U priority Critical patent/JPS61100874U/ja
Publication of JPS61100874U publication Critical patent/JPS61100874U/ja
Pending legal-status Critical Current

Links

JP18641584U 1984-12-08 1984-12-08 Pending JPS61100874U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18641584U JPS61100874U (fr) 1984-12-08 1984-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18641584U JPS61100874U (fr) 1984-12-08 1984-12-08

Publications (1)

Publication Number Publication Date
JPS61100874U true JPS61100874U (fr) 1986-06-27

Family

ID=30743879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18641584U Pending JPS61100874U (fr) 1984-12-08 1984-12-08

Country Status (1)

Country Link
JP (1) JPS61100874U (fr)

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