JPS61100318A - Method of forming and grinding hole with use of ultrasonic wave, electrolysis and electric discharge - Google Patents
Method of forming and grinding hole with use of ultrasonic wave, electrolysis and electric dischargeInfo
- Publication number
- JPS61100318A JPS61100318A JP22108384A JP22108384A JPS61100318A JP S61100318 A JPS61100318 A JP S61100318A JP 22108384 A JP22108384 A JP 22108384A JP 22108384 A JP22108384 A JP 22108384A JP S61100318 A JPS61100318 A JP S61100318A
- Authority
- JP
- Japan
- Prior art keywords
- drill
- current
- ultrasonic
- discharge grinding
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
【発明の詳細な説明】
挟亙立互
本発明は、超音波電解放電研削孔あit°加工方法及び
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic electrolytic discharge grinding hole machining method and apparatus.
災米五更
従来、回転するドリルに軸方向に超音波を加えて被加工
物に孔をあける超音波孔あけ装置が知られている。第3
図は従来の超音波孔あけ装置の側面図を示したもので、
ケーシングlの上部に直流モータ2が固着され、直流モ
ータ2の軸3にカップリング4を介して圧電素子6の一
端が固着された軸゛’m’/a ’l 67 b゛6・
01”6L!& −>y’j”′°!・固着されたベア
リング7によって支持されている。Ultrasonic drilling devices have been known that apply ultrasonic waves in the axial direction to a rotating drill to drill holes in a workpiece. Third
The figure shows a side view of a conventional ultrasonic drilling device.
A DC motor 2 is fixed to the upper part of the casing l, and one end of a piezoelectric element 6 is fixed to the shaft 3 of the DC motor 2 via a coupling 4.
01"6L! &->y'j"'°! - Supported by a fixed bearing 7.
また軸5には圧電素子6に電力を供給するスリップリン
グ8が設けられ、このスリップリング8はケーシングl
に装着された炭素棒9と接触され、高周波型g(図示せ
ず)から高周波が供給される。圧電素子6の他端に設け
られた軸10の周りに液槽11が設けられ、研削液が供
給管12から液槽11に供給されると、軸10の周囲か
ら中心に設けられたダクト13を通って軸9の端部に設
けられたドリル14の中心から被加工体表面に流出され
る。Further, the shaft 5 is provided with a slip ring 8 that supplies power to the piezoelectric element 6, and this slip ring 8 is attached to the casing l.
The carbon rod 9 attached to the carbon rod 9 is brought into contact with the carbon rod 9, and high frequency waves are supplied from a high frequency type g (not shown). A liquid tank 11 is provided around a shaft 10 provided at the other end of the piezoelectric element 6, and when the grinding fluid is supplied from a supply pipe 12 to the liquid tank 11, a duct 13 provided from around the shaft 10 to the center is provided. The water flows through the center of the drill 14 provided at the end of the shaft 9 to the surface of the workpiece.
このように構成された従来の超音波孔あけ装置は、直流
モータ2を回転させるとともに、炭素子棒9及びスリッ
プリング8を介して高周波電源から圧電素子6に高周波
を印加すると、ドリル14は回転しながら圧電素子6か
らの超音波振動によって被加工物に対して軸方向に振動
するので、単にドリル14を回転して孔あけ加工をする
孔あけ装置より加工速度が早いという利点があるが、こ
の加工速度はドリルを回転するだけの孔あけ装置より幾
らか速いという程度であり、加工精度が悪く、さらに軟
かい材料は加工することができないという欠点があった
。In the conventional ultrasonic drilling device configured as described above, when the DC motor 2 is rotated and a high frequency is applied from a high frequency power source to the piezoelectric element 6 via the carbon rod 9 and the slip ring 8, the drill 14 is rotated. However, since the ultrasonic vibration from the piezoelectric element 6 causes the workpiece to vibrate in the axial direction, it has the advantage that the processing speed is faster than a drilling device that simply rotates the drill 14 to perform the drilling process. This machining speed is only slightly faster than that of a drilling device that only rotates a drill, and has the disadvantage of poor machining accuracy and inability to process soft materials.
目的
本発明は、上記従来例の欠点を解消するためになされた
もので、その目的は電解、放電、超音波、機械研削の作
用が相乗的に被加工物に作用させることによって、低電
圧で、小さな電流で、加工速度が大であり、ドリルの摩
耗が小さく、寿命が大で、加工精度が高く、更に被加工
物の性質(硬、軟、脆、粘、導電、非導電等)によらず
、金属。Purpose The present invention was made in order to eliminate the drawbacks of the above-mentioned conventional examples.The purpose of the present invention is to synergistically act on the workpiece by the effects of electrolysis, electric discharge, ultrasonic waves, and mechanical grinding. , small current, high machining speed, low drill wear, long life, high machining accuracy, and even better properties of the workpiece (hard, soft, brittle, viscous, conductive, non-conductive, etc.) Regardless, metal.
半導体、複合成分等の加工が可能であり、ワーク加工面
に歪や偏を残さない超音波電解放電研削孔あけ加工方法
及び装置を提供するものである6構成
本発明は、上記の目的を達成するために、回転するドリ
ルと該ドリルで加工する被加工物との間に電圧または電
流を印加するとともに、前記ドリルに回転軸方向の超音
波を印加して前記被加工物に孔あけ加工をすることを特
徴とし、また回転軸を回転するモータと、前記回転軸に
装着されて前記回転軸の軸方向に超音波を発生する超音
波発生素子と、前記回転軸の軸端に装着されたドリルチ
ャックと、該ドリルチャックに絶縁材を介して固着され
るドリルと、前記ドリルチャック及び前記ドリルの中心
を通して電解液を供給する手段と、前記ドリルと被加工
物の間に電圧または電流を印加する手段とを有すること
を特徴とする。以下、本発明の実施例に基づいて構成を
説明する。The present invention, which has six configurations, achieves the above objects by providing an ultrasonic electrolytic discharge grinding drilling method and device that is capable of processing semiconductors, composite components, etc. and does not leave any distortion or deviation on the machined surface of the workpiece. In order to do this, a voltage or current is applied between a rotating drill and a workpiece to be machined by the drill, and an ultrasonic wave is applied to the drill in the direction of the rotation axis to drill a hole in the workpiece. A motor that rotates a rotating shaft; an ultrasonic generating element that is attached to the rotating shaft and generates ultrasonic waves in the axial direction of the rotating shaft; and an ultrasonic generating element that is attached to the shaft end of the rotating shaft. a drill chuck, a drill fixed to the drill chuck via an insulating material, means for supplying an electrolyte through the center of the drill chuck and the drill, and applying a voltage or current between the drill and the workpiece. It is characterized by having a means for. The configuration will be described below based on embodiments of the present invention.
第1図は9本発明の1実施例の超音波電解放電研削孔あ
け加工方法及び装置のための説明図を示すもので、直流
モータ15の軸に超音波発振素子16が接続され、図示
しないケーシングで支持されている。また超音波発振素
子16にカップリング17を介してドリルチャック18
が接続され、このドリルチャック18に絶縁体を介して
ドリル19が連結されている。このドリル19には給電
スリップリング20が設けられ、加工電源21から加工
電源供給アーム22、スリップリング20を介してドリ
ル19に加工電力が供給される。またドリル19に加工
する被加工物23にも加工電源21から加工電力が供給
される。FIG. 1 shows an explanatory diagram of an ultrasonic electrolytic discharge grinding drilling method and apparatus according to an embodiment of the present invention, in which an ultrasonic oscillation element 16 is connected to the shaft of a DC motor 15, not shown. supported by the casing. Also, the drill chuck 18 is connected to the ultrasonic oscillation element 16 via the coupling 17.
A drill 19 is connected to this drill chuck 18 via an insulator. This drill 19 is provided with a power supply slip ring 20, and machining power is supplied from a machining power supply 21 to the drill 19 via a machining power supply arm 22 and the slip ring 20. Further, machining power is also supplied from the machining power source 21 to the workpiece 23 to be machined into the drill 19 .
また超音波発振素子16とカップリング17の間の軸に
液供給口24から電解液が供給され、この電解液はカッ
プリング17の中心、ドリルチャック18の中心及びド
リル19の中心を通って被加工物23とドリル19の間
に供給される。Further, an electrolytic solution is supplied from the liquid supply port 24 to the shaft between the ultrasonic oscillation element 16 and the coupling 17, and this electrolytic solution passes through the center of the coupling 17, the center of the drill chuck 18, and the center of the drill 19, and is covered with the electrolytic solution. It is fed between the workpiece 23 and the drill 19.
ドリル19は第2図に示すように先端に研摩部分19′
が設けられ、また中心に電解液を供給する中心孔19”
が設けられている。この研摩部分19′は砥粒に金属粉
末を混ぜ、これにバインダーとしてガラスやレジンを混
入して焼結したものや、砥粒にバインダーを混入して焼
結した一般のドリルに無電解メッキを施して導電性を与
えたものや、金属棒の先端の周囲にダイヤモンド粒子や
CBN粒子を、合金(主に銅合金)をバインダーとして
焼き固めるか、あるいは電着させたものがある。また第
2図(ロ)は第2図(イ)の研摩部分19′に一定の幅
で切り欠き部分25を設けたものである。また第2図(
ハ)は第2図(イ)の研摩部分19′に一定の間隔で通
電帯26を設けたものである。また、この通電帯26は
第2図(ニ)に示すように中心孔19″に伸びるものや
、第2図(ホ)に示すように研摩部分19・の
1表面と中心孔19″側にずらして設けてもよい
。The drill 19 has a ground portion 19' at the tip as shown in FIG.
and a center hole 19" for supplying the electrolyte to the center.
is provided. This polished part 19' is made by mixing metal powder with abrasive grains and sintering the mixture with glass or resin as a binder, or by electroless plating on a general drill made by mixing a binder with abrasive grains and sintering the mixture. There are those in which diamond particles or CBN particles are baked or electrodeposited around the tip of a metal rod using an alloy (mainly copper alloy) as a binder. Further, FIG. 2(b) shows a cutout portion 25 having a constant width provided in the polished portion 19' of FIG. 2(a). Also, Figure 2 (
In c), energizing bands 26 are provided at regular intervals on the polished portion 19' of FIG. 2(a). In addition, this current-carrying band 26 may extend to the center hole 19'' as shown in FIG.
1 surface and the center hole 19'' side.
また加工電源21から供給される加工電圧または電流は
、交流、直流及び交流を半波または余波整流した電圧ま
たは電流でもよいし、パルス(矩形波)、鋸歯状波、高
調波を含む歪波、あるいはこれらの複合波である。The processing voltage or current supplied from the processing power source 21 may be AC, DC, voltage or current obtained by half-wave or after-wave rectification of AC, pulse (rectangular wave), sawtooth wave, distorted wave including harmonics, Or a composite wave of these.
このように構成された本実施例の超音波電解放電研削孔
あけ加工では、直流モータ15を回転してドリル19を
回転するとともに、ドリル19と被加工物23との間に
加工電源21がら加工電力が供給され、さらに超音波発
振素子16で発生した超音波がドリル19の軸方向に印
加されるので、孔あけ加工がスムーズで、非常に速く行
なわれる。従って、加工精度が良く、被加工物23の被
加工面に歪や傷を残さないという利点がある。In the ultrasonic electrolytic discharge grinding drilling process of this embodiment configured as described above, the DC motor 15 is rotated to rotate the drill 19, and the machining power source 21 is connected between the drill 19 and the workpiece 23. Since electric power is supplied and the ultrasonic waves generated by the ultrasonic oscillation element 16 are applied in the axial direction of the drill 19, drilling is performed smoothly and very quickly. Therefore, there is an advantage that the processing accuracy is good and that no distortion or scratches are left on the processed surface of the workpiece 23.
効果
以上の説明から明らかなように1本発明は、電解、放電
、超音波1機械研削の作用が相乗的に被加工物に作用さ
せることによって、低電圧で、小さな電流で、加工速度
が大であり、ドリルの摩耗が小さく、寿命が大で、加工
精度が高く、更に被加工物の性質(硬、軟、脆、粘、導
電、非導電等)によらず、金属、半導体、複合成分等の
加工が可能であり、ワーク加工面に歪や傷を残さないと
いう利点がある。Effects As is clear from the above explanation, the present invention allows electrolytic, electrical discharge, and ultrasonic mechanical grinding to act synergistically on the workpiece, thereby achieving high machining speeds with low voltage and small current. It has low drill wear, long life, high machining accuracy, and can be used regardless of the nature of the workpiece (hard, soft, brittle, viscous, conductive, non-conductive, etc.), including metals, semiconductors, and composite components. It has the advantage of not leaving distortions or scratches on the processed surface of the workpiece.
第1図は本発明の1実施例の超音波電解放電研削孔あけ
加工方法及び装置を説明するための図、第2図は第1図
の方法及び装置に使用されるドリルの構成を示した図、
第3図は従来の超音波孔あけ装置の側面図である。
15・・・直流モータ、16・・・超音波発振素子、1
7・・・カップリング、18・・・ドリルチャック、1
9・・・ドリル、19′・・・研摩部分、19″・・・
中心孔、2o・・・給電スリップリング、21・・・加
工電源、22・・・電源供給アーム、23・・・被加工
物、24・・・液供給口25・・・切り欠き部分、26
・・・通電帯。
特許出願人 有限会社応用磁気研究所第2図
(イ) (0) (ハ)(ニ)
(ホ)
19′/19″Fig. 1 is a diagram for explaining an ultrasonic electrolytic discharge grinding drilling method and apparatus according to an embodiment of the present invention, and Fig. 2 shows the configuration of a drill used in the method and apparatus shown in Fig. 1. figure,
FIG. 3 is a side view of a conventional ultrasonic drilling device. 15... DC motor, 16... Ultrasonic oscillation element, 1
7...Coupling, 18...Drill chuck, 1
9...Drill, 19'...Grinded part, 19''...
Center hole, 2o... Power supply slip ring, 21... Processing power source, 22... Power supply arm, 23... Workpiece, 24... Liquid supply port 25... Notch portion, 26
...Electrifying belt. Patent applicant Applied Magnetic Research Institute Ltd. Figure 2 (a) (0) (c) (d)
(E) 19′/19″
Claims (16)
の間に電圧または電流を印加するとともに、前記ドリル
に回転軸方向の超音波を印加して前記被加工物に孔あけ
加工をすることを特徴とする超音波電解放電研削孔あけ
加工方法。(1) Applying voltage or current between a rotating drill and the workpiece to be machined by the drill, and applying ultrasonic waves in the direction of the rotational axis to the drill to drill holes in the workpiece. An ultrasonic electrolytic discharge grinding hole drilling method characterized by:
る特許請求の範囲第1項記載の超音波電解放電研削孔あ
け加工方法。(2) The ultrasonic electrolytic discharge grinding/drilling method according to claim 1, wherein the voltage or current is a direct current.
る特許請求の範囲第1項記載の超音波電解放電研削孔あ
け加工方法。(3) The ultrasonic electrolytic discharge grinding/drilling method according to claim 1, wherein the voltage or current is alternating current.
する特許請求の範囲第1項記載の超音波電解放電研削孔
あけ加工方法。(4) The ultrasonic electrolytic discharge grinding/drilling method according to claim 1, wherein the voltage or current is a pulse.
とする特許請求の範囲第1項記載の超音波電解放電研削
孔あけ加工方法。(5) The ultrasonic electrolytic discharge grinding/drilling method according to claim 1, wherein the voltage or current is a sawtooth wave.
とを特徴とする特許請求の範囲第1項記載の超音波電解
放電研削孔あけ加工方法。(6) The ultrasonic electrolytic discharge grinding/drilling method according to claim 1, wherein the voltage or current is a distorted wave containing harmonics.
れて前記回転軸の軸方向に超音波を発生する超音波発生
素子と、前記回転軸の軸端に装着されたドリルチャック
と、該ドリルチャックに絶縁材を介して固着されるドリ
ルと、前記ドリルチャック及び前記ドリルの中心を通し
て電解液を供給する手段と、前記ドリルと被加工物の間
に電圧または電流を印加する手段とを有することを特徴
とする超音波電解放電研削孔あけ加工装置。(7) a motor that rotates a rotating shaft; an ultrasonic generation element that is attached to the rotating shaft and generates ultrasonic waves in the axial direction of the rotating shaft; and a drill chuck that is attached to the end of the rotating shaft; A drill fixed to the drill chuck via an insulating material, means for supplying an electrolyte through the center of the drill chuck and the drill, and means for applying voltage or current between the drill and the workpiece. An ultrasonic electrolytic discharge grinding/drilling device comprising:
導電性砥石であることを特徴とする特許請求の範囲第7
項記載の超音波電解放電研削孔あけ加工装置。(8) The abrasive portion of the drill is a conductive grindstone made by adding a conductive material to an abrasive material.
The ultrasonic electrolytic discharge grinding/drilling device described in 2.
部分が設けられていることを特徴とする特許請求の範囲
第7項記載の超音波電解放電研削孔あけ加工装置。(9) The ultrasonic electrolytic discharge grinding/drilling device according to claim 7, wherein the drill has a conductive material added to the polished portion and a cutout portion.
けて通電帯が設けられていることを特徴とする特許請求
の範囲第7項記載の超音波電解放電研削孔あけ加工装置
。(10) The ultrasonic electrolytic discharge grinding/drilling apparatus according to claim 7, wherein the drill is provided with conductive bands at desired intervals on the side surface of the polished portion.
所望の間隔をあけて通電帯が設けられていることを特徴
とする特許請求の範囲第10項記載の超音波電解放電研
削孔あけ加工装置。(11) The ultrasonic electrolytic discharge grinding/drilling process according to claim 10, wherein the drill further includes a conductive band provided at a desired interval on a side surface of the center hole of the polished portion. Device.
する特許請求の範囲第7項記載の超音波電解放電研削孔
あけ加工装置。(12) The ultrasonic electrolytic discharge grinding/drilling apparatus according to claim 7, wherein the voltage or current is a direct current.
する特許請求の範囲第7項記載の超音波電解放電研削孔
あけ加工装置。(13) The ultrasonic electrolytic discharge grinding/drilling apparatus according to claim 7, wherein the voltage or current is alternating current.
とする特許請求の範囲第7項記載の超音波電解放電研削
孔あけ加工装置。(14) The ultrasonic electrolytic discharge grinding/drilling apparatus according to claim 7, wherein the voltage or current is a pulse.
徴とする特許請求の範囲第7項記載の超音波電解放電研
削孔あけ加工方法。(15) The ultrasonic electrolytic discharge grinding/drilling method according to claim 7, wherein the voltage or current is a sawtooth wave.
ことを特徴とする特許請求の範囲第7項記載の超音波電
解放電研削孔あけ加工方法。(16) The ultrasonic electrolytic discharge grinding method according to claim 7, wherein the voltage or current is a distorted wave containing harmonics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22108384A JPS61100318A (en) | 1984-10-20 | 1984-10-20 | Method of forming and grinding hole with use of ultrasonic wave, electrolysis and electric discharge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22108384A JPS61100318A (en) | 1984-10-20 | 1984-10-20 | Method of forming and grinding hole with use of ultrasonic wave, electrolysis and electric discharge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61100318A true JPS61100318A (en) | 1986-05-19 |
Family
ID=16761219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22108384A Pending JPS61100318A (en) | 1984-10-20 | 1984-10-20 | Method of forming and grinding hole with use of ultrasonic wave, electrolysis and electric discharge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61100318A (en) |
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WO2011091119A1 (en) * | 2010-01-22 | 2011-07-28 | General Electric Company | Tool adapter assembly and machining system |
DE102011051772A1 (en) | 2010-07-14 | 2012-01-19 | Denso Corporation | Ultrasound-assisted electrical discharge grinding method for electrical discharge machining of rectangular metal workpiece, involves controlling predetermined depth and predetermined feed rate based on observed voltage and observed current |
EP2829347A1 (en) * | 2013-07-25 | 2015-01-28 | Siemens Aktiengesellschaft | Electrode, and a method for making such an electrode |
EP2829345A1 (en) * | 2013-07-25 | 2015-01-28 | Siemens Aktiengesellschaft | Electrode, and a first method for making such an electrode, a second method for making such an electrode and a third method for making such an electrode |
EP2829346A1 (en) * | 2013-07-25 | 2015-01-28 | Siemens Aktiengesellschaft | Electrode having a head, methods for producing a head and a method for making such an electrode |
WO2015110330A1 (en) * | 2014-01-21 | 2015-07-30 | Siemens Aktiengesellschaft | Ecm electorde having a mechanical cutting edge and method |
TWI594826B (en) * | 2014-02-13 | 2017-08-11 | 國立高雄應用科技大學 | A hybrid micro electrical discharge machining and precise grinding machine table |
RU2684668C1 (en) * | 2018-02-22 | 2019-04-11 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашская государственная сельскохозяйственная академия" | Device for sharpening of spiral drills |
US10562119B2 (en) | 2014-05-15 | 2020-02-18 | General Electric Company | Machining system and tool holding apparatus thereof |
TWI784584B (en) * | 2021-06-18 | 2022-11-21 | 國立臺灣科技大學 | Composite rotary electrode mechanism for electrochemical machining and brush grinding |
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WO2015010958A1 (en) * | 2013-07-25 | 2015-01-29 | Siemens Aktiengesellschaft | Electrode having a head, two methods for producing a head, and method for producing such an electrode |
WO2015010905A1 (en) * | 2013-07-25 | 2015-01-29 | Siemens Aktiengesellschaft | Electrode, and a plurality of methods for producing such an electrode |
WO2015110330A1 (en) * | 2014-01-21 | 2015-07-30 | Siemens Aktiengesellschaft | Ecm electorde having a mechanical cutting edge and method |
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