JPS609964U - プラズマ・化学気相成長装置 - Google Patents

プラズマ・化学気相成長装置

Info

Publication number
JPS609964U
JPS609964U JP9963583U JP9963583U JPS609964U JP S609964 U JPS609964 U JP S609964U JP 9963583 U JP9963583 U JP 9963583U JP 9963583 U JP9963583 U JP 9963583U JP S609964 U JPS609964 U JP S609964U
Authority
JP
Japan
Prior art keywords
electrode
comb
plasma
tooth ring
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9963583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140773Y2 (enrdf_load_stackoverflow
Inventor
荒木　信
裕二 上原
手島　章友
航平 清田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9963583U priority Critical patent/JPS609964U/ja
Publication of JPS609964U publication Critical patent/JPS609964U/ja
Application granted granted Critical
Publication of JPS6140773Y2 publication Critical patent/JPS6140773Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP9963583U 1983-06-27 1983-06-27 プラズマ・化学気相成長装置 Granted JPS609964U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9963583U JPS609964U (ja) 1983-06-27 1983-06-27 プラズマ・化学気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9963583U JPS609964U (ja) 1983-06-27 1983-06-27 プラズマ・化学気相成長装置

Publications (2)

Publication Number Publication Date
JPS609964U true JPS609964U (ja) 1985-01-23
JPS6140773Y2 JPS6140773Y2 (enrdf_load_stackoverflow) 1986-11-20

Family

ID=30236037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9963583U Granted JPS609964U (ja) 1983-06-27 1983-06-27 プラズマ・化学気相成長装置

Country Status (1)

Country Link
JP (1) JPS609964U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6140773Y2 (enrdf_load_stackoverflow) 1986-11-20

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