JPS609358A - Semiconductor linear motor - Google Patents

Abstract

PURPOSE:To simplify the construction and to reduce the cost of a semiconductor linear motor by employing an encoder, detecting the origin of the encoder, and flowing a current of the direction adapted for the adequate position by dividing the frequency of a pulse signal. CONSTITUTION:A movable element 3 is formed of a U-shaped sectional member, and linearly moved along guide rails provided at a stator 2. A 4-pole field magnet is secured to the lower surface of a body 3a of the element 3, and planely opposed to a printed board 6 of a stator armature 5. A linear encoder 8 having a linear scale 9 is mounted. The prescribed number of pulses from the original position of the encoder 8 is counted, and a current of the prescribed direction is flowed to the armature coil 5 on the basis of the counted number, thereby controlling the movement of the element 3.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor linear motor in which either an armature or a field magnet is a stator, and the other is a mover that moves relative to the stator.

Conventionally, in this type of semiconductor linear motor, Hall elements or Hall ICs are provided as the position detection elements of the mover in the same number as the armature coils, and these position detection elements detect the N of the field magnet, which is the driving magnetic pole. , S is detected and a current is applied in a predetermined direction to the armature coil, thereby driving the mover in a predetermined direction according to Fleming's left-hand rule.

Since such a semiconductor linear morph requires the use of one positional λ sensing element for each armature coil, these require, for example, four lead wires.

If the armature is a mover, the number of lead wires is small, but the number of lead wires is still large. However, if the armature is a stator, the number of lead wires is large. , travel of the mover j'7 A large number of armature coils must be arranged along the right direction, wiring of lead wires, etc. are complicated, and assembly takes time, making it unsuitable for mass production. First, there is a disadvantage that the formed semiconductor linear motor is expensive.Also, the armature coil 1
Since one position sensing element is required for each position sensing element, a movable magnet type semiconductor linear motor in which the armature is a stator has the disadvantage of being very expensive. Furthermore,
Since many lead wires are required, there are disadvantages in that the appearance is poor and the device becomes larger.

The present invention has been made based on the above circumstances, and uses a 4M encoder provided for speed detection, etc., and uses the origin of the 4M encoder, thereby eliminating the need for a position detection element and reducing the cost. It is possible to form external IA7. 1, the El! The fourth object of the present invention will become clear from the following description.

The object of the present invention is to provide a linear motor in which either the electric pole or the field fy4 magnet is used as a stator, and the other is used as a movement r that moves relative to the stator. By finding the origin of the near encoder with :;2λ and counting a predetermined number of pulses from the origin 1:? position, a current is applied in a predetermined direction to a predetermined armature/coil based on the J runt number. This is achieved by providing a semiconductor linear motor characterized in that a separate motor is moved in a predetermined direction by being energized.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a movable magnet 7S semiconductor linear motor 1 shown as an embodiment of the present invention. The semiconductor motor is, of course, a direct current linear motor, which has the advantage of having much greater force, better efficiency, and significantly less mechanical vibration than a pulsed linear motor.

Further, by using a furnace=; encoder, the circuit film R1 can be freely controlled from low speed to high speed. For example, the circuit design allows step drive like a pulsed linear motor. However, unlike pulse linear motors, even if the mover is moved at high speed, there are no problems with the work. This has the advantage of not causing the +4 phenomenon. Furthermore, the 411 mole ripple can be removed using a thrust ripple removal circuit, making it easier to mold the mover.
It has the advantage that it can be easily formed into extremely small or large items based on design specifications, is easy to assemble and mass-produce, and can be formed at low cost, and does not require extreme machining accuracy unlike pulse linear motors.

Here, since the semiconductor linear motor 1 shown in FIG. 1 is a coreless type, there is no coking (also, since it is a type that is not a voice coil type linear motor, the voice coil type Unlike linear motors, which have multiple magnetic circuits (i''11) and cannot provide long travel strokes, this model has a simple magnetic circuit and an extremely long travel stroke. .

Further, since this semiconductor linear motor 1 does not require a position detecting element such as a Hall sensor or a Hall IC, there is no lead wire for this purpose, and an external pμ is formed. 2 is a stator, and 3 is a mover that moves relative to the stator 2. The stator 2 is made of a long plate-like member, and on top of it is a stator armature 5, which is made up of four groups of armature coils arranged at equal intervals so as not to overlap each other along the running direction of the movable element B.
has been established. On the upper surface of each armature coil 4 is a printed circuit board 6 having a width approximately equal to the width of the armature coil 4 and approximately the width of the armature coil 4.
is fixed by means of adhesion or the like so that it rests on the upper surface of the adjacent armature coil 4 with a slight deviation. This printed circuit board 6
A suitable wiring flood pattern is formed on the upper or lower surface of the circuit.
A terminal of the A-coil 4 is connected to the J1 circuit via the conductive pattern. The mover 6 is made up of a U-shaped member on one side, and a kite roller (not shown) is rotatably supported on one side of the mover 6, and moves along a guide rail (not shown) provided on the stator 2.
-6 is guided? i'i rakani direct, t,! Run il.

A four-pole magnetizing magnet, which will be described later, is installed on the r-plane of the wooden body roller a of the mover 6, and faces the printed circuit board 6 of the stator electric drive 7-5. 7 is a linear scale support part extending from one side of the stator 2, 8 is a linear encoder, 9 is a linear encoder = I-ta 8? ,”＋
The linear scale that forms the component.

The linear encoder 8 is a linear inductor,
There are magnetic linear encoders such as f and R, and any suitable one may be used as needed, but in this example, an optical encoder is used. There are various kinds of optical linear encoders 8, including a reflection detection type and a transmission detection type, and the transmission detection type is used here. Therefore, the linear scale 9 used has fine slit-like transparent portions and opaque portions formed at regular intervals in the longitudinal direction. As such a linear scale 9, there is known a linear scale 9 made of an opaque material such as an iron plate (A) in which a large number of transparent parts and opaque parts are formed by forming slit-like through holes in A by means such as pressing. The above-mentioned transparent portion and opaque portion are formed by forming a slit-shaped opaque portion (or a reflective portion that performs a similar function) by coating or other means on a long plate-shaped three-light member made of glass or the like. 10 is fixed to the side of the mover 3 and moves integrally with the mover 7-5.
,,',4. The side surface portion 10a facing the 1st IG1 of the near scale 9 marked - with the ID
l'ljr with b has a U-shaped surface. 1
11.11-2 is a photoelectric conversion element such as a CI) S, a phototransistor, a photodiode, etc., and in order to obtain two-phase signals of A phase and B phase, the above-mentioned side surface is Provided in section 10a.Photoelectric transformer 19-Suryo 11
1.degree. 11-2 has its light-receiving surface facing toward the linear scale 9 so that -C can receive lighting light from a light emitting element (not shown) which will be described later through the linear scale 9.

Note that A: does not mean that the photoelectric conversion element γ11-1, 11-2 may be formed integrally. "2 side surface portion 91) contains -1- photoelectric conversion elements -r-11 to 1.
In order to be able to irradiate lighting light to each IL-2 through the linear scale 9,
A small lamp is provided opposite to -2; two light emitting elements (not shown) such as photodiodes are provided. In addition, the light emitting element is 1
Good as individual pieces. Furthermore, similar to the linear scale 9, a small index (not shown) having alternating slit-shaped transparent parts and dark parts is fixed to the support member 10, and faces the linear scale 9.

12 is a unit of armature coil 4 having a printed circuit board 6 on the upper surface, and is mounted on the stator 2 surface as shown in FIG.
l: A screw for fixing, 6a is the screw 12 above.
This is a through hole provided in the printed circuit board 6 for the purpose of inserting a component or the like. Reference numeral 16 denotes a moving element origin signal position return means support member; 14 indicates the movement element 3 supported and fixed to the three supporting members 16 to the origin (this refers to the reference signal position point obtained by the linear encoder 8); The moving element 2 is an origin signal position returning means for returning the moving element 2 to the origin signal position. F
p:H'ff is built-in. 16 is a wire, the - and Sqa are the mover 2, and the other end is the spring 4 (not shown).
It is fixed on bait X'). 17 is a screw. FIG. 2 is a side vertical cross-sectional view of FIG. It will be fixed. The mover 6 is
Its outer surface is formed of a non-magnetic material 20, and a magnetic material 21 is fixed to its inner surface by screws 17, and four field magnets 22 are fixed to the inner surface of the magnetic material 21. They are facing each other. Reference numeral 26 denotes a lubricant (A) that is filled into the cavity 24 within the frame of the armature fill 4 and solidified.
5r1 and FIG. 6), the same oil 23 is filled into the air pressure part 24, and the hub 25 is aligned with the screw hole 26 provided in the stake yoke 19.
ii: Printed on the side of Ft/Tenaru Hub 25,
',''; By fixing plate 6 +ii2, 'i''j7
K! J near motor Kawadenden 4ia child coil unit 27
Fully formed. This weight (;(child fill unit 27
The method described in FIGS.

FIG. 3 is a bottom view of the printed circuit board 6 for forming the five-element coil unit 27 for the linear motor. Wiring conductive patterns 2El, 29 are formed on the lower surface of the printed circuit board B by etching etc. 28a, 281), 29a, 29b
Let the solder part connect the winding start terminal of the armature coil 4 to the solder part 28a, and connect the armature coil 4 to the solder part 29H.
The terminals at the end of the winding are connected to the solder portions 28b and 29b at an angle of 30° to the lead wires. FIG. 4 shows a vertical cross-sectional view of the hub 25 equipped with the printed circuit board 6. Tsuba 2 on hub 25
5a, the printed circuit board 6 can be engaged with the collar 25a with the conductive patterns 728, 29 facing downward as shown in FIG.

Figure 5 shows armature coil unit 2 for semiconductor linear motor.
7, FIG. 6 is a vertical sectional view of FIG. 5, and FIG.
It is a top view of a figure.

After equipping the hub 25 with the printed circuit board 6 as shown in FIG. 4, turn the printed circuit board 6 to the bottom surface, and place the armature coil 4 on this surface so that it slightly protrudes from the printed circuit board 6 as shown in FIG. It is fixedly attached to the lower surface of the substrate A by means of adhesion or the like (FIGS. 5 and 7).

The winding start terminal 62 of the armature coil 4 is connected to the solder portion 28a, and the winding end terminal (not shown) of the armature coil 4 is connected to the semi-IT.
1 portion 29a. Also half 10 parts 28b, 29
Lead wires 30 and 31 are connected to each of the terminals b (FIG. 6). Thereafter, the resin 26 is filled in the frame hollow part 24 of the electric machine r-coil 4 and solidified, thereby forming the semiconductor linear motor armature coil as shown in FIGS. 5 to 7C. The unit 27 can be easily formed. As is clear from this electric 4-12 element fill unit 27, normally at least two IJI glands are required as a Hall element, etc., but this can be made unnecessary and the power supply can be improved. For glue 14i50. ” > 1 only. Therefore,
foreign campaign! This makes the process of setting up buttons easier. In addition, it has a cleaner appearance and a set (:)
It is sufficient to form the conductive pattern on the printed circuit board 6 without taking any additional steps.

FIG. 8 shows a perspective view 1 of the armature coil 4. The armature coil 4 is wound so that the opening angle of the conductor portions 4a and 4b that contribute to the thrust is approximately equal to the magnetic pole width of the field magnet 22, which will be described later. A rectangular frame is used. Conductor parts 4c, 4d
is a conductor portion that does not contribute to thrust. This armature coil 4
It goes without saying that a pattern formed by a printed pattern may also be used.

Figure 9 shows the armature coil unit for a half-body near motor)
27277 is an explanatory diagram of the case where the stator armature 5 is formed by using 27277. FIG. The armature coil cornit 27 is as shown in FIGS. 1, 2, and 9.

It is disposed adjacent to the field magnet 22 in a plane so as to move relative to the field magnet 22. For reasons such as facilitating this arrangement, the armature coil 4 is disposed offset to one side of the substrate 6 so that it protrudes from the coil 4. By doing so, the stator armature 5 of a predetermined length can be easily formed.

FIG. 10 is a perspective view of a four-pole field magnet 22 having alternating N and S magnetic poles, and the field magnet 22 is a rectangular plate-shaped N-pole field magnet magnetized in the thickness direction. Segment 22a and S-pole field magnet segment 22
B and F alternately? ! Although F'ME is used, it may be formed integrally.

FIG. 11 is a block diagram of the energization control circuit for the semiconductor linear motor. In order to explain the energization control circuit 66 of FIG. 11, it will be explained with reference to the drawings from FIG. 12 onwards.

66-1 is the A-phase signal output obtained from the linear encoder 8, and 66-2 is the A-phase signal output obtained from the linear encoder 8. The B-phase signal output 64 is a direction discrimination function that discriminates the direction of the waveform in order to know whether the mover 2 is moving in the left or right direction by inputting the signal from the second output 33 1°66-2. ff1)-35 is a frequency divider that divides the pulse from the direction discrimination circuit 34, and 36 is a frequency division ratio that provides data to the frequency divider 65 so that the frequency divider 65 divides the frequency by a predetermined number of pulses. Data, "1 Frequency divider 35-1: 65-2,
55-5 and 35-4 are the N poles 2 of the field magnet 22.
If you count only the magnetic pole width MW of 2a or S pole 22b, it will be 1
It is designed to output pulses. The output 58-1 of the direction discrimination circuit 4 is input to the up terminal 39a of each frequency divider 35-1°, and the output 68-2 is input to the down terminal 3
9b.

Frequency divider 35 1. . . . are provided in the same number as the armature coils 4, but in FIG. 11, for convenience of drawing, only four are drawn. Next, for convenience of explanation of FIG. 11, FIGS. 12 and 13 will be explained. FIG. 12 shows the field magnet 2.
2 and the electric coils 4-1°..., 4-5. In the figure, only five 7rL4Q" T coils 471, 4-5 are drawn, but the electric coil 4-1°... is the opening angle between the conductor parts 4a and 4b that contributes to the thrust. is the field magnet′
It can be seen that the width is approximately equal to the magnetic pole width MW of the stud 22. Further, the electric coil 701, -f-coil 4-1°, . . . groups are arranged at equal intervals without overlapping each other.

-'s electric fi? = r - Distance from the conductor part 4a that contributes to the thrust of the coil 4 (for example 4-1) to the conductor part 4a that contributes to the thrust of another electric coil 4 (for example 4-2) in the same stage (hereinafter referred to as Assuming that the field magnet 22 moves in the direction of arrow A, the energization timing charts for the armature coils 4-i, 4-2, and 4-5 become 13th, respectively. Figures (a), [b),
(c) Noyouninaru. The coils 4-4, etc. are sequentially energized based on the same principle to obtain a predetermined 1fr force, and the left-hand method of fling I is applied.
The mover 6 having the field magnet 22 is caused to travel in the direction of arrow A according to ll. As a result, the encoder 8 outputs the A-phase output 561. B phase output filter 6-2 is Il'p
It will be done. By the way, is mover 2 a mover origin signal device? ηJ7
j) , T, stage 14, which is always preset or rearward to the origin signal 11'L of the near scale 9 (see FIG. 1); Coil 4-1
etc., a current is applied in a predetermined direction in the direction of arrow A (the first
2) is obtained, and the field magnet 22 can be moved in the direction of arrow A.

As a result, as described in 1-[this frequency divider 55-1,...
. is the shift register 40-1 every time the magnetic pole width IVIW of the field magnet 22 is counted. Outputs one pulse to... 4 la e 41 l); each of the shift registers 40-1. Increased human power,
Down input is a powerful force. shift register 40
-1. .--. is the frequency divider 35-1. There are the same number of shift 1/disk 40-1. ...output terminal 42a of
, 42b... have the same number of losses as the armature coils 4-1, 4-2..., 14. ,46-L,...
・.

46-4 are frequency dividers 35-A, . . . , 65-1, respectively.
, . . . are shift registers 40-1. ...'s first JtJ
l This is predata for presetting state e. here,
As shown in FIG. 12, the field magnet 22 is pointed at arrow A.
It is propelled in the direction (and 4-1 degrees towards the electric car)
corresponds alternately to the N pole of the field magnet 22, St"i.Here, the electric current 4:"S, the child coil 4-1
,... is applied to the field magnet 22 at N tTj
.

It is necessary to perform positive direction energization and negative direction energization depending on the S pole facing state. The time width for energizing each armature coil 4-1, . . . is equal to the magnetic pole width of the field magnet 22. Armature coil 4-1. . . are arranged at equal intervals as shown in FIG. 12, so that each armature coil 4-1 .・・・
The timing of energization of the terminals and terminals must be shifted out of phase as shown in FIG. 13. Conventionally, in order to obtain the energization timing for each 'i, i-coil 4-1, . Therefore, in the present invention, without using the position sensing element r, the physiognomy of the encoder 8,
Using the B-phase signal, each armature coil 4- shown in FIG.
1. The timing of energization of ... is determined by a digital circuit. For this purpose, a frequency divider 351. ....

Shift register 40-1. ...is used. 14th
Figures (A), ..., (D) each show the shift register 4.
0-1. ..., 40-4 output waveform diagram, (al is shift register 40.-1, ..., output 4 of 40-4)
2-1 is the output waveform diagram, tbl is the output waveform diagram of the output 42-2, and (C1 is the output waveform diagram of the output 42-6. Hand coil 4-
1. 14 (T3. (1) l... shows the output waveform for positive direction current to
Child coil 4-2. . . shows the output waveform for energizing in the reverse direction. Now, the position sensing element 4-1. . . . A current in a direction suitable for J1n is sequentially applied.

In this way, each armature coil 4-1. An OR gate circuit 46 is provided to supply a current suitable for . The OR gate circuit 46 consists of ORG)461°... group. As described above, when the field magnet 22 is propelled in the direction of arrow A, for example, the armature coil 4-1 is sequentially
a22 b , corresponding to Ntr'fi22a. Due to this correspondence relationship, it is necessary to supply current in the positive direction or current in the negative direction to the coil 4-1. For example, when one conductor part 41) of the armature coil 4-1 that contributes to the striking r force corresponds to the S pole 2b of the field magnet 22, and the other conductor part 4a corresponds to NtM, when the forward current is applied, When it is reversed, it is assumed that an electric current is generated in the negative direction. Then, considering the armature coil 4-1, this armature coil 4-1 has a fifth
As shown in the figure (A, l), the time for forward energization is the magnetic pole width MW, and after energizing for this MWW time, the MW width is reverse energized (at this time, it is necessary to energize in the reverse direction, so After this MWW period of no energization has elapsed, energization in the forward direction is performed again. , the same can be considered in the case of negative direction energization, so it is necessary to obtain an output waveform as shown in FIG. 15B). What is the output waveform of this j5th 41(A) (13)? q, an OR gate circuit 46 is provided. 15th F4 (In order to create the A+ waveform, the voltage for polarity switching (if we are considering the Otsuko coil 4-1, the output 0iiFJ-421 of the shift register 40-1 and the output terminal 42 of the shift register 40-6) The output signal with -1 is manually input and the OR gate 46-1 performs an OR operation.Similarly,
Fig. 15 (To create the waveform of Bl, the output slope 42-1 of shift register 40-2 and shift register 40
The output signal from the output terminal 42-1 of the output terminal 42-4 is inputted, and the output signal is passed through the output terminal 46-2. Are these two human power waveforms input to the above OR-minus human power 48-2? From this, a forward and reverse energization waveform of the armature coil 4-1 is obtained, such that the armature coil 4-1 is energized in the forward and reverse directions.The energization waveform in FIG. 6 is shown in FIG. The armature coils 4-2.4 to 6 are considered in the same way as above, and the current waveforms of the coils 4-12.4-.15 are formed when the current (41) is completed. The armature coil 4-2 is shifted from the armature coil 4-1 by a coil pitch CP, and the armature coil 4-6 is shifted from the armature coil 4-2 by a pitch C.
Since the forward and reverse energization waveforms of armature coils 4-2 and 4-3 are shifted by pitch CP from armature coils 4-1 and 4-2, respectively, as shown in FIG. 17(b), (cl. This figure 17 ta+, (b), fc
The forward and reverse energization waveforms of the armature coils 4-1.) exactly match the energization timing chart of the armature coils 4-1. Even if there is no position detecting element, the elements are energized appropriately at the timing shown in FIG. 13 to switch the source polarity of the mover (on the magnet 22 side) in a predetermined direction. 501゜Each type (; 1 rod coil 4-
1.4-2. . . . . . . . . . . . . . . . . . . . . . . . . Since the origin is known from the beginning of driving, the encoder can be set based on the origin.
Since the frequency of No. 6 can be divided, armature coil 4-1.・-・ At a suitable position, current can be passed in the forward and reverse directions even without a position detection element.

In the above case, if the moving r origin signal positioning means 14 is not provided, the Z signal of the encoder 8 may be used as the origin. Therefore, the mover is pulsed f7. By moving little by little to the left or right (in FIG. 1) as shown in FIG. 7, the origin can be easily determined by searching for the Z signal of the encoder 8. Incidentally, when there is no Z signal in the encoder 8, another origin determining switch such as a limit switch may be provided. Furthermore, although the linear motor in the above embodiment is of a movable magnet type, it goes without saying that a movable coil or coil type may also be used, and other shapes may also be used.
By using an encoder and detecting the origin of this slope = 4 encoder, the frequency of the pulse signal is divided and the current is passed in the appropriate direction at the appropriate position? Since I am trying to do r+,
Since there is no need for a large number of position sensing elements that were previously required, it can be formed at low cost, and since there are no large numbers of adhesives (FK3',
It has the advantage of being able to be mass-produced at low cost.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of a movable magnet type half-body linear motor shown as an embodiment of the present invention, Fig. 2 is a cross-sectional view of the side root of Fig. 1, and Fig. 3 shows an electric coil unit. Figure 4 is a vertical cross-sectional view of the device 1iiiL with a printed circuit board attached to the hub, and Figure 5 is a 'lj, to' for semiconductor linear morph! , a bottom view of the coil unit, FIG. 6 is a longitudinal sectional view of FIG. 5, FIG. 7 is a two-sided view of FIG. Type for semiconductor linear motor (perspective view of one station building where a stator armature is formed by a group of multiple coil units; Figure 10 is a perspective view of a four-pole field magnet; Figure 1L is a perspective view of a four-pole field magnet; ijJ electric opening control circuit lock diagram, Fig. 12 is a developed view of the field magnet and 7 (7fQ j''-coil group), Fig. 13 is a timing chart of energization to each type (1, Fig. 14) (A) to (I)) are output waveform diagrams of each shift l/sister, Figure 15+A),
+13+ is the - voltage obtained from the OR gate ζ, respectively.
) is a positive/negative direction energization waveform diagram of the - ring 1fi child coil obtained by the two input waveforms, and FIG. 17 is a positive/negative direction energization waveform timing diagram of each armature coil. (Explanation of symbols) 1. Movable magnet type semiconductor linear motor, 2. Stator, 3. Mover, 4. Armature coil, 5. Stake armature, 6. Printed circuit board, 7.・Linear scale support part, 8... linear encoder, 9...
Linear scale, 11-1゜11-2 ・Photoelectric conversion element, 14-・('!, moving r/origin signal position return means, 16
...Wire, 22..Field Macnet, 27.
・・Armature coil unit for semiconductor linear motor, 56
-・Semiconductor IJ near motor energization control circuit, 53-1・
-・Physiognomic signal obtained from incremental t-encoder, 33-2...B patent applicant obtained from incremental encoder I! IPJ Diagram 15 (A) Diagram 15 (B) Diagram 16 Diagram 17 (C) □ Written amendment (voluntary) Date of r. Patent drama (1) 11i Showa SS
-//<ttpE No. 2, @Ming's name Semiconductor linear motor 3, Person making the amendment 4, Amended against acid Akira + TJ %f "Detailed description of the invention"entry; 6 and Eko 5, Amendment IF5 Contents (1) “Linear” on the edge of “Semiconductor” in Line 5 of Specification 5
Insert ``t''. (21, page 6, line 10, ``r'' after ``refreshingly'')
Insert busy. '3) Insert "linear" after "optical" on page 7, line J17. (4) Corrected to page 49, line 5 r9bJtrllbJ. (5) Corrected to l'il, 15th member, line 5 and fJJ page 17, i-th line, 4th line 1, "Movement 2Jk: rg Movement 6". (6) Ibid., No. 20, line 12, r2b”・and corrected to r22bJ. (lg) Ibid., No. 20, line 15, ``j 5 Figure J -, c I
Corrected to ``T'ir Figure 15''. ) Same as 88g, page 22, ig2 line ``!d7 figure'' τ ``Corrected to treetop 17 figure 1. (9) +゛Corrected as shown in the 11th factor on the meat side attached sheet.

Claims (1)

[Claims] 1. In a semiconductor linear motor in which either the armature or the field magnet is a stator and the other is a mover that moves relative to the stator, an encoder is provided, By searching for the origin of the force encoder and counting a predetermined number of pulses from the origin signal position, the mover is moved in a predetermined direction by passing a current in a predetermined direction to a predetermined armature fill based on the counted number. A semiconductor linear motor characterized by being movable. 2. The above field magnet has N and S magnetic poles.
is a positive integer of 7 or more), and the armature is characterized by comprising an armature coil I'r formed such that the opening angle of the conductor portion contributing to the thrust is approximately equal to the magnetic pole width of the field magnet. A semiconductor linear motor according to claim 1. 3. The semiconductor linear motor according to claim 1 or 2, wherein the armature coil group is arranged at equal intervals. 4. The semiconductor linear motor according to any one of claims 1 to 3, wherein the armature is coreless. 5. The semiconductor linear motor according to any one of claims 1 to 5, characterized in that the semiconductor linear motor is equipped with means for returning the mover to the origin signal position.