JPS609300A - Electrostatic type electroacoustic transducer and its manufacture - Google Patents

Electrostatic type electroacoustic transducer and its manufacture

Info

Publication number
JPS609300A
JPS609300A JP11595883A JP11595883A JPS609300A JP S609300 A JPS609300 A JP S609300A JP 11595883 A JP11595883 A JP 11595883A JP 11595883 A JP11595883 A JP 11595883A JP S609300 A JPS609300 A JP S609300A
Authority
JP
Japan
Prior art keywords
vibrating electrode
water
electroacoustic transducer
vibrating
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11595883A
Other languages
Japanese (ja)
Inventor
Sakae Tamura
栄 田村
Shigeru Fujiwara
茂 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11595883A priority Critical patent/JPS609300A/en
Publication of JPS609300A publication Critical patent/JPS609300A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers

Abstract

PURPOSE:To prevent deterioration of a characteristic under the environmental condition in the course of use, storage and transport by sticking a diaphragm extended frame body consisting of a conductive material to a conductivity providing surface of a dielectric thin film, in a state that an electric connection is held, and thereafter, providing a water-repelling material layer on both main faces. CONSTITUTION:A polyethylene terephthalate film 1 of 4mum thick, on which an Ni-Cr alloy is vacuum vapor-deposited 2 is extended as an electric conductive layer on one surface, and a brass-made vibrating electrode fixed ring 4 whose outside diameter and inside diameter are 5mm. and 3.5mm., respectively is stuck to the Ni-Cr vapor-deposited surface by using an electroconductive adhesive agent 3, and they are formed as one body. Subsequently, the vibrating electrode formed in this way is immersed in a toluen solution in which a water-repelling silicone oil is dissolved, and thereafter, it is drawn up from in the solution, and the vibrating electrode is covered with the water-repelling silicone oil. A resonance frequency of said vibrating electrode is stable even after it has been left in a high temperature and a high humidity, and it is possible to prevent deterioration of a characteristic under the environmental condition in the course of use, storage and transport.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は静電型電気音響変換器に係り、特に、エレクト
レット静電型電気音響変換器に使用する\ だめの振動電極の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field to which the Invention Pertains] The present invention relates to an electrostatic electroacoustic transducer, and particularly to an improvement in a vibrating electrode used in an electret electrostatic electroacoustic transducer.

〔従来技術とその問題点〕[Prior art and its problems]

静電型電気音響変換器は音響エネルギーまたは静電的エ
ネルギーを外部から与えた際に振動する振動電極と、外
部からの音響エネルギーや静電的エネルギーを受けても
振動しない固定電極と、振動電極固定電極間隔を一定に
保持するためのスペーサを主要部品として構成されてい
る。
An electrostatic electroacoustic transducer consists of a vibrating electrode that vibrates when acoustic energy or electrostatic energy is applied from the outside, a fixed electrode that does not vibrate even when it receives external acoustic energy or electrostatic energy, and a vibrating electrode. The main component is a spacer to maintain a constant fixed electrode spacing.

静電型電気音響変換器に限らず、電気・機械変換装置に
使用される振動電極の共振周波数は、直接電気・機械変
換装置の周波数特性に影響を及ぼすものであシ、振動電
極の共振周波数は経時的に変化しないことが望まれるこ
とはもちろんのこと、湿度や温度の変化が起っても共振
周波数が一定に保たれることが望まれている。
The resonant frequency of the vibrating electrode used not only in electrostatic electroacoustic transducers but also in electrical-mechanical transducers directly affects the frequency characteristics of the electrical-mechanical transducer. Of course, it is desired that the resonant frequency does not change over time, and it is also desired that the resonant frequency be kept constant even if changes in humidity or temperature occur.

しかしながら、片面に電気導電性層を付与したプ2スナ
ックス・フィルムをエレクトレット化シて振動電極とし
だ通常のエレクトレット静電型電気音響変換器や、エレ
クトレット化したプラスチックス・フィルムを固定電極
側に用い、片面に電気導電性層を付与したプラスチック
ス・フィルムを振動電極材料として用いた、所謂、パッ
クエレクトレット形式の静電型電気音響変換器において
は、いずれも、振動電極を構成するプラスチックス・フ
ィルムが、吸湿によって弛み、振動電極の共振周波数が
著しく低下し、電気音響変換器の特性の劣化を生じさせ
ていた。
However, it is possible to use an ordinary electret electrostatic electroacoustic transducer by converting P2SNAX film, which has an electrically conductive layer on one side, into an electret and using it as a vibrating electrode, or by using an electret-formed plastic film on the fixed electrode side. In the electrostatic electroacoustic transducer of the so-called pack electret type, which uses a plastic film with an electrically conductive layer on one side as the vibrating electrode material, the plastic film constituting the vibrating electrode. However, due to moisture absorption, the electrodes loosened, and the resonant frequency of the vibrating electrodes decreased significantly, causing deterioration of the characteristics of the electroacoustic transducer.

叙上の如き、不都合を解消するための技術として、特開
昭48−61128号ではエレクトレット化された吸湿
弛緩性フィルムの周縁部を吸湿収縮性フィルムで農打ち
して振動電極とする電気音響変換装置が開示されている
As a technique for solving the above-mentioned problems, Japanese Patent Application Laid-Open No. 48-61128 discloses an electroacoustic transducer in which the peripheral edge of an electret moisture-absorbing and relaxing film is covered with a moisture-absorbing shrinkable film to form a vibrating electrode. An apparatus is disclosed.

周知のように薄膜の周縁部を固定した振動電極の共振周
波数を一定に保持するためには、膜にがかる張力を一定
に保持することが必要であって、特開昭48−6112
8号で開示されている技術を実用するには、吸湿弛緩性
フィルムと吸湿収縮性フィルムの組み合せ認定が極めて
困難であるうえ、吸湿弛緩性フィルムの周縁部を吸湿収
縮性フィルムで裏打ちする繁雑な工程が必要であり、更
に、振動部分の質量が増大するなどの不都合があった。
As is well known, in order to maintain a constant resonance frequency of a vibrating electrode with a fixed peripheral edge of a thin film, it is necessary to maintain a constant tension on the membrane.
In order to put the technology disclosed in No. 8 into practice, it is extremely difficult to certify the combination of a moisture-absorbing, relaxing film and a moisture-absorbing, shrinkable film, and it also requires a complicated process of lining the periphery of the moisture-absorbing, relaxing film with a moisture-absorbing, shrinkable film. This method requires additional steps and also has the disadvantage of increasing the mass of the vibrating part.

また、現在、パックエレクトレット形式の静電型電気音
響変換器で、最も数多く市販されているパックエレクト
レット・コンデンサ・マイクロホンの振動電極材料とし
て使用されている片面金属化ポリエチレン・テレ7タレ
ートフイルムは通常のマイクロホン使用温度領域で湿度
が高くなった際は弛緩性を示し、マイクロホンの通常使
用温度を超え、かつ、相対湿度が高い場合、例えば60
℃相対湿度95%の雰囲気中では収縮性を示し、片面全
店化ポリエチレンテレフタレート・フィルムを処理する
ことなしに静電型電気音響変換器の振動電極材料として
使用することは不適当であることを本発明者らは、振動
電極の共振周波数測定とマイクロホンの特性評価試験に
よって発見した。
Additionally, single-sided metallized polyethylene tele7 talate film, which is currently used as the vibrating electrode material for pack electret capacitor microphones, which are the most numerous pack electret electroacoustic transducers on the market, is usually When the humidity is high in the microphone operating temperature range, it shows relaxation, and when the microphone's normal operating temperature is exceeded and the relative humidity is high, for example
It shows shrinkage in an atmosphere of 95% relative humidity, making it unsuitable to use single-sided polyethylene terephthalate film as a vibrating electrode material in electrostatic electroacoustic transducers without treatment. The inventors discovered this by measuring the resonance frequency of a vibrating electrode and testing the characteristics of a microphone.

〔発明の目的〕[Purpose of the invention]

本発明は、静電型電気音響変換器の通常の使用環境東件
でその特性が劣化せず、さらに、静電型電気音響変換器
の保管や輸送中に遭遇する可能性がある苛酷な環境条件
下でさえも、その特性が劣化しない静電型電気音響変換
器を振動電極の改良によって提供することを目的とした
ものである。
The present invention provides that the characteristics of a capacitive electroacoustic transducer do not deteriorate in the normal usage environment, and further, that it does not deteriorate in harsh environments that may be encountered during storage or transportation of the capacitive electroacoustic transducer. The object of the present invention is to provide an electrostatic electroacoustic transducer whose characteristics do not deteriorate even under various conditions by improving the vibrating electrode.

〔発明の概要〕[Summary of the invention]

本発明の静電型電気音響変換器は、誘電体薄膜の少なく
とも片側面に導霜、性薄膜層を設けてなる薄膜材料を振
動電極材料として用いた変換器であって、前記振動電極
材料の両主面を撥水性材料で被覆したことを特徴とする
ものである。
The electrostatic electroacoustic transducer of the present invention is a transducer that uses a thin film material formed by providing a frost-conducting thin film layer on at least one side of a dielectric thin film as a vibrating electrode material. It is characterized in that both main surfaces are coated with a water-repellent material.

通常の静電型電気音響変換器用振動電極材料として実用
に供されている片面金属化プラスチックス・フィルムも
しくは両面金属化グラステックス・フィルムを一対の振
動膜架張用枠体で挾持してから振動膜架張台に載置し、
振動膜架張用枠体の重量によってフィルム面内のシワを
除去した状態のフィルムの金属化面に振動電極固定用電
気導伝性リングを固定する従来方式により第1図に示し
た形状の振動膜1極が得られる。
A single-sided metallized plastic film or double-sided metalized glasstex film, which is used as a vibrating electrode material for ordinary electrostatic electroacoustic transducers, is sandwiched between a pair of diaphragm-stretching frames and then vibrated. Place it on the membrane stand,
Vibration in the shape shown in Figure 1 is achieved using the conventional method of fixing an electrically conductive ring for fixing a vibrating electrode to the metallized surface of the film after removing wrinkles in the film plane due to the weight of the frame for stretching the vibrating membrane. One membrane pole is obtained.

次に、シリコーン油、シリコーン樹脂、弗素系界面活性
剤、溶剤可溶弗素系油および溶剤可溶弗素系樹脂等の撥
水性物質を挿抜性溶剤に溶解した溶液中に絹1図に示し
だ形状の振動電極を浸漬後、溶液中から引き揚げ振動電
極材料の両主面に薄い挿抜性薄膜層を設ける。
Next, a water-repellent substance such as silicone oil, silicone resin, fluorine-based surfactant, solvent-soluble fluorine-based oil, and solvent-soluble fluorine-based resin is dissolved in a removable solvent. After the vibrating electrode is immersed, it is pulled out of the solution and a thin insertable/extractable thin film layer is provided on both main surfaces of the vibrating electrode material.

このようにして得られた静電型電気音響変換器用振動電
極は、静電型電気音響変換器が使用される通常の温度お
よび湿度環境下では一定の共振周波数を示し、温度が6
0℃相対湿度が95%に調製これた恒温恒湿槽内に一昼
夜放置後、常温常湿下に戻せば、共4辰周波数は元の値
に復帰する。
The vibrating electrode for an electrostatic electroacoustic transducer obtained in this manner exhibits a constant resonant frequency under the normal temperature and humidity environment in which the electrostatic electroacoustic transducer is used.
After leaving it in a constant temperature and humidity chamber adjusted to a relative humidity of 95% at 0° C. for a day and night, if it is returned to normal temperature and humidity, the four-axis frequency will return to its original value.

上述のクロ<、従来の振動電極の両主面を表面処理して
撥水性を付与した本発明の静電型電気音響変換器用振動
電極は空気中の湿度によって弛緩することがなく、また
弛緩しても常温常湿下で速やかに元の状態に復帰するの
で本発明による振動電極を用いた静電型電気音響変換器
の特性は実用状態で常に一定に保たれる。
The vibrating electrode for an electrostatic electroacoustic transducer of the present invention, which is made water repellent by surface-treating both main surfaces of the conventional vibrating electrode described above, does not loosen due to humidity in the air, and does not loosen due to humidity in the air. However, the characteristics of the electrostatic electroacoustic transducer using the vibrating electrode according to the present invention are always kept constant in practical use because the transducer quickly returns to its original state at room temperature and humidity.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、チタン箔などの高価な金属箔を振動電
極材料として用いることなく、また、吸湿弛緩性フィル
ムと吸湿収縮性フィルムを重ね合せるなどの繁雑な工程
を経ずに通常使用されている廉価な金鵜化プラスチック
ス・フィルムを振動電極材料として湿度が変化しても弛
緩したシ収縮したりすることのない振動電極を得ること
が可能であり、特性が安定した静電型゛鶴、気音響変換
器を安価に製造することができる。
According to the present invention, an expensive metal foil such as titanium foil is not used as a vibrating electrode material, and it can be normally used without going through a complicated process such as overlapping a moisture-absorbing relaxing film and a moisture-absorbing shrinkable film. It is possible to obtain a vibrating electrode that does not relax or contract even when humidity changes by using inexpensive gold-plated plastic film as a vibrating electrode material, and it is an electrostatic type with stable characteristics. , the air-acoustic transducer can be manufactured at low cost.

また、本発明で使用される撥水性材料は、振動電極構成
材料として用いるプラスチックスの吸湿を防止するのみ
ならず、プラスチックス・フィルム面に電気導電性層を
付与する目的で設けられるアルミニウムやクロムもしく
はニッケ/l/等の@種金鴨薄膜層の腐蝕を防止する効
果もある。
In addition, the water-repellent material used in the present invention not only prevents moisture absorption in the plastics used as the vibrating electrode constituent material, but also aluminum and chromium, which are provided for the purpose of providing an electrically conductive layer on the plastic film surface. Alternatively, it also has the effect of preventing corrosion of a thin film layer such as nickel/l/.

〔発明の実施例〕[Embodiments of the invention]

実施例−1 片面に電気導電性層としてNi−Cr合金を真空蒸着装
置を用いて薄層状に設けた服さ4μmのポリエチレンテ
レフタレート・フィルムを架張L、外径が5 mm内径
が3.5 mmの真作製振動電極固定リングをNi−C
r蒸着面と電気導電性接着剤を用すて固着一体化した。
Example-1 A polyethylene terephthalate film having a thickness of 4 μm and having a Ni-Cr alloy formed in a thin layer on one side as an electrically conductive layer using a vacuum evaporation device is stretched L, with an outer diameter of 5 mm and an inner diameter of 3.5 mm. mm genuine vibrating electrode fixing ring made of Ni-C
The r-evaporated surface and the electrically conductive adhesive were used to fix and integrate it.

使用した電気導電性接着剤は二液型エポキシ接着剤K 
4電性力−ボン微粒子とグラファイト微粒子を分散させ
て得たもので、ポリエチレンテレフタレートの片面に蒸
着したN i −Crと真伶製振動電極固定リングは催
固に固着されていた。
The electrically conductive adhesive used was two-component epoxy adhesive K.
It was obtained by dispersing four-electrode force-Bonn fine particles and graphite fine particles, and the Ni-Cr vapor-deposited on one side of polyethylene terephthalate and the Shinre vibrating electrode fixing ring were firmly fixed.

上記した繰作によって第1図に示した形状の振動電極を
20個製作し、このうちの10個を撥水性シリコーン・
オイル(TSF−484商品名、東芝シリコーン((ワ
製)を溶解したトルエン溶液中に浸漬した後溶液中から
引き揚げ、振動電極を撥水性シリコーン・オイルで被覆
した。用いたシリコーン・オイルの濃度は1.0%であ
シトルエンが揮散した後も振動電極上に油滴は認められ
ず、振動電極は撥水性シリコーン・オイル尚膜で覆れて
ぃた。
By the above-described process, 20 vibrating electrodes with the shape shown in Fig. 1 were manufactured, and 10 of them were made of water-repellent silicone.
Oil (TSF-484 trade name, Toshiba Silicone (manufactured by Wa) was immersed in a toluene solution in which it was dissolved, then removed from the solution, and the vibrating electrode was coated with water-repellent silicone oil.The concentration of the silicone oil used was Even after citoluene was volatilized at 1.0%, no oil droplets were observed on the vibrating electrode, and the vibrating electrode was covered with a film of water-repellent silicone oil.

以上のように、振動電極の全面を撥水性シリコーン・オ
イルで被覆した本発明に係る静電型電気音響変換器用振
動電極10個と、撥水性シリコーン・オイルで表面処理
を施してない残りの振動電極10個の共振周波数を迎1
定したところ、第2図中、曲線Aで示したように、本発
明に係る振動電極の共振周波数は高温高湿中に放g(後
も比較的安定であるのに対して、従来例では、第2図中
曲線Bで示したとおり、共振周波数が著しく上昇してい
た。
As described above, 10 vibrating electrodes for an electrostatic electroacoustic transducer according to the present invention whose entire surface is coated with water-repellent silicone oil, and the remaining vibrating electrodes whose surface has not been surface-treated with water-repellent silicone oil are shown. Pick up the resonance frequency of 10 electrodes 1
As a result, as shown by curve A in FIG. As shown by curve B in FIG. 2, the resonance frequency was significantly increased.

実施例−2 実施例−1と同様の材料を用いて製作した第1図の如き
振動電極の両面に弗素樹脂系撥水剤FC−90’5 (
米国MINESOTA MINING AND MFG
Example 2 A fluororesin water repellent FC-90'5 (
USA MINESOTA MINING AND MFG
.

Co1製)の1.1.1. )リクロルエタン10%溶
液をスプレー塗装した後、80℃で約3時間熱処理を行
なった。
1.1.1. ) After spray painting a 10% solution of lychloroethane, heat treatment was performed at 80° C. for about 3 hours.

得られた振動電極の共振周波数は、実施例−1と同様の
試験を何なった結果、湿度の高い雰囲気中に放置後も比
較的変化が少なかった。
As a result of the same test as in Example 1, the resonant frequency of the obtained vibrating electrode remained relatively unchanged even after being left in a humid atmosphere.

実施例−3 実施例−1、実施例−2で用いた片面にNi−Cr合金
を蒸着したポリエチレンテレフタレート・フィルムの替
シに、アルミニュームを蒸着したポリエチレンテレフタ
レート・フィルム(厚ミー4μm)を使用した以外は実
施例−2と同様にして振動電極を撥水性弗素樹脂で被覆
した。得られた振動電極の共振周波数は、高温高湿雰囲
気中に放置後も変化が少なく、また、60℃相対湿度9
5%の雰囲気中に1週間放置後も蒸着したアルミニー−
ム薄膜は腐蝕されていなかった。
Example-3 A polyethylene terephthalate film (thickness: 4 μm) with aluminum vapor-deposited was used as a replacement for the polyethylene terephthalate film with Ni-Cr alloy vapor-deposited on one side used in Example-1 and Example-2. The vibrating electrode was coated with a water-repellent fluororesin in the same manner as in Example 2, except for the above. The resonant frequency of the obtained vibrating electrode did not change much even after being left in a high-temperature, high-humidity atmosphere.
Aluminum deposited even after being left in a 5% atmosphere for one week.
The thin film was not corroded.

実施例−4 片面に電気導電性層としてN i −Cr合金を薄層状
に真空蒸着装置を用いて設けた厚ざが2.5μmのポリ
エチレンテレフタレート・フィルムト、外径が5 mm
内径が3.5 mの真倫製振動電極固定リングを用いて
、第1図に示した形状の静電型電気音響変換器用振動電
極を得た。得られた振動電極の全面に実施例−2と同様
にして弗素樹脂系撥水剤FC−905をコーティングし
た。
Example 4 A polyethylene terephthalate film with a thickness of 2.5 μm and an outer diameter of 5 mm, on one side of which a thin layer of Ni-Cr alloy was provided as an electrically conductive layer using a vacuum evaporation device.
A vibrating electrode for an electrostatic electroacoustic transducer having the shape shown in FIG. 1 was obtained using a vibrating electrode fixing ring manufactured by Shinrin Co., Ltd. with an inner diameter of 3.5 m. The entire surface of the obtained vibrating electrode was coated with fluororesin water repellent FC-905 in the same manner as in Example-2.

この振動電極の共振周波数は、5.5 KHzであり、
第3図曲線Aで示したように、相対湿度が変化しても共
振周波数は一定に保たれていたが、弗素樹脂系撥水剤で
コーティング処理を施こしてない振動電極の共振周波数
は第3図曲線Bで示したように、相対湿度の上昇と共に
著しく低下した。
The resonant frequency of this vibrating electrode is 5.5 KHz,
As shown by curve A in Figure 3, the resonant frequency remained constant even when the relative humidity changed, but the resonant frequency of the vibrating electrode that was not coated with a fluororesin water repellent was As shown by curve B in Figure 3, it decreased significantly as the relative humidity increased.

以上、本発明の実施方法と具体的実施例を示したが、実
施例−4と同様にして得た直径が60mmのエレクトレ
ット・コンデンサ型ヘッドホン用振動電極でも、実施例
−4と同様の効果が得られている。
The implementation method and specific examples of the present invention have been described above, but the vibrating electrode for electret condenser headphones with a diameter of 60 mm obtained in the same manner as Example-4 also has the same effect as Example-4. It has been obtained.

また、本発明は静電型電気音響変換器用振動電極の改良
を目的として行なったものであるが、吸振性のある材料
を振動部位の部品として使用した変換器、例えば、電磁
型スピーカやカーボン・マイクロホン等においても、コ
ーン紙の改善方法、ポリエステル振動板の改良方法とし
て、本発明を適用することができる。
Furthermore, although the present invention was carried out for the purpose of improving a vibrating electrode for an electrostatic electroacoustic transducer, it can also be applied to a transducer that uses a vibration-absorbing material as a vibrating part, such as an electromagnetic speaker or a carbon transducer. The present invention can also be applied to microphones and the like as a method for improving paper cones and a method for improving polyester diaphragms.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明に用いられる静電型電気音響変換器用
振動電極の一例を示す断面図、第2図は、本発明の実施
効果の一例を示すグラフ、第3図は、本発明の実施効果
の一例を示すグラフ。 1・・・ポリエチレンテレフタレート、3・・・導電接
着剤、2・・・Ni−Cr蒸着膜、4・・・固定リング
FIG. 1 is a cross-sectional view showing an example of a vibrating electrode for an electrostatic electroacoustic transducer used in the present invention, FIG. 2 is a graph showing an example of the effect of implementing the present invention, and FIG. A graph showing an example of implementation effects. DESCRIPTION OF SYMBOLS 1... Polyethylene terephthalate, 3... Conductive adhesive, 2... Ni-Cr vapor deposition film, 4... Fixing ring.

Claims (3)

【特許請求の範囲】[Claims] (1)誘電体薄膜のすくなくとも片側面に導電性薄膜層
を設けてなる薄膜材料を振動電極材料として用いた静電
型電気音響変換器において、前記振動電極材料の両生面
を撥水性材料で被覆したことを特徴とする静電型電気音
響変換器。
(1) In an electrostatic electroacoustic transducer using a thin film material formed by providing a conductive thin film layer on at least one side of a dielectric thin film as a vibrating electrode material, both surfaces of the vibrating electrode material are coated with a water-repellent material. An electrostatic electroacoustic transducer characterized by:
(2)誘電体薄膜としてポリエチレンテレフタ−レート
・フィルムを用い、撥水性材料として、シリコーン・オ
イルもしくは弗素系界面活性剤を用いたことを特徴とす
る特許請求の範囲第1項記載の静電型電気音響変換器。
(2) The electrostatic charge according to claim 1, characterized in that a polyethylene terephthalate film is used as the dielectric thin film, and silicone oil or a fluorine-based surfactant is used as the water-repellent material. type electroacoustic transducer.
(3)導電性材料からなる振動膜架張枠体を振動電極材
料の導電性付与面に電気的接続を保った状態で固着して
後、振動電極材料の両生面に撥水性材料層を設けること
を特徴とする静電型電気音響変換器の製造方法
(3) After fixing the vibrating membrane stretching frame made of a conductive material to the conductive surface of the vibrating electrode material while maintaining electrical connection, a water-repellent material layer is provided on both sides of the vibrating electrode material. A method for manufacturing an electrostatic electroacoustic transducer characterized by
JP11595883A 1983-06-29 1983-06-29 Electrostatic type electroacoustic transducer and its manufacture Pending JPS609300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11595883A JPS609300A (en) 1983-06-29 1983-06-29 Electrostatic type electroacoustic transducer and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11595883A JPS609300A (en) 1983-06-29 1983-06-29 Electrostatic type electroacoustic transducer and its manufacture

Publications (1)

Publication Number Publication Date
JPS609300A true JPS609300A (en) 1985-01-18

Family

ID=14675347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11595883A Pending JPS609300A (en) 1983-06-29 1983-06-29 Electrostatic type electroacoustic transducer and its manufacture

Country Status (1)

Country Link
JP (1) JPS609300A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117576A (en) * 1997-02-26 2000-09-12 Rohm Co., Ltd. Battery device
JP2006148612A (en) * 2004-11-22 2006-06-08 Yamaha Corp Acoustic device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117576A (en) * 1997-02-26 2000-09-12 Rohm Co., Ltd. Battery device
JP2006148612A (en) * 2004-11-22 2006-06-08 Yamaha Corp Acoustic device

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