JPS6092859U - セラミツク基板の製造装置 - Google Patents

セラミツク基板の製造装置

Info

Publication number
JPS6092859U
JPS6092859U JP18542283U JP18542283U JPS6092859U JP S6092859 U JPS6092859 U JP S6092859U JP 18542283 U JP18542283 U JP 18542283U JP 18542283 U JP18542283 U JP 18542283U JP S6092859 U JPS6092859 U JP S6092859U
Authority
JP
Japan
Prior art keywords
ceramic substrate
doctor blade
substrate manufacturing
manufacturing equipment
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18542283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110167Y2 (cs
Inventor
佐藤　輝夫
明子 久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP18542283U priority Critical patent/JPS6092859U/ja
Publication of JPS6092859U publication Critical patent/JPS6092859U/ja
Application granted granted Critical
Publication of JPH0110167Y2 publication Critical patent/JPH0110167Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Producing Shaped Articles From Materials (AREA)
JP18542283U 1983-11-30 1983-11-30 セラミツク基板の製造装置 Granted JPS6092859U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18542283U JPS6092859U (ja) 1983-11-30 1983-11-30 セラミツク基板の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18542283U JPS6092859U (ja) 1983-11-30 1983-11-30 セラミツク基板の製造装置

Publications (2)

Publication Number Publication Date
JPS6092859U true JPS6092859U (ja) 1985-06-25
JPH0110167Y2 JPH0110167Y2 (cs) 1989-03-23

Family

ID=30400774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18542283U Granted JPS6092859U (ja) 1983-11-30 1983-11-30 セラミツク基板の製造装置

Country Status (1)

Country Link
JP (1) JPS6092859U (cs)

Also Published As

Publication number Publication date
JPH0110167Y2 (cs) 1989-03-23

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