JPS6092794U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6092794U
JPS6092794U JP18595283U JP18595283U JPS6092794U JP S6092794 U JPS6092794 U JP S6092794U JP 18595283 U JP18595283 U JP 18595283U JP 18595283 U JP18595283 U JP 18595283U JP S6092794 U JPS6092794 U JP S6092794U
Authority
JP
Japan
Prior art keywords
drive shaft
turbo molecular
pump
molecular pump
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18595283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346718Y2 (enrdf_load_stackoverflow
Inventor
岡村　治郎
潔 成田
川口　重一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP18595283U priority Critical patent/JPS6092794U/ja
Publication of JPS6092794U publication Critical patent/JPS6092794U/ja
Application granted granted Critical
Publication of JPS6346718Y2 publication Critical patent/JPS6346718Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18595283U 1983-11-30 1983-11-30 タ−ボ分子ポンプ Granted JPS6092794U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18595283U JPS6092794U (ja) 1983-11-30 1983-11-30 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18595283U JPS6092794U (ja) 1983-11-30 1983-11-30 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6092794U true JPS6092794U (ja) 1985-06-25
JPS6346718Y2 JPS6346718Y2 (enrdf_load_stackoverflow) 1988-12-02

Family

ID=30401784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18595283U Granted JPS6092794U (ja) 1983-11-30 1983-11-30 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6092794U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6346718Y2 (enrdf_load_stackoverflow) 1988-12-02

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