JPS6091282U - スピナ−装置 - Google Patents

スピナ−装置

Info

Publication number
JPS6091282U
JPS6091282U JP18083083U JP18083083U JPS6091282U JP S6091282 U JPS6091282 U JP S6091282U JP 18083083 U JP18083083 U JP 18083083U JP 18083083 U JP18083083 U JP 18083083U JP S6091282 U JPS6091282 U JP S6091282U
Authority
JP
Japan
Prior art keywords
processed
spinner
rotary chuck
spinner device
inner cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18083083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6333660Y2 (enrdf_load_stackoverflow
Inventor
矢口　逸夫
佐々木　新吾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP18083083U priority Critical patent/JPS6091282U/ja
Publication of JPS6091282U publication Critical patent/JPS6091282U/ja
Application granted granted Critical
Publication of JPS6333660Y2 publication Critical patent/JPS6333660Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP18083083U 1983-11-22 1983-11-22 スピナ−装置 Granted JPS6091282U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083083U JPS6091282U (ja) 1983-11-22 1983-11-22 スピナ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083083U JPS6091282U (ja) 1983-11-22 1983-11-22 スピナ−装置

Publications (2)

Publication Number Publication Date
JPS6091282U true JPS6091282U (ja) 1985-06-22
JPS6333660Y2 JPS6333660Y2 (enrdf_load_stackoverflow) 1988-09-07

Family

ID=30391989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083083U Granted JPS6091282U (ja) 1983-11-22 1983-11-22 スピナ−装置

Country Status (1)

Country Link
JP (1) JPS6091282U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211226A (ja) * 1983-05-17 1984-11-30 Nec Kyushu Ltd 半導体基板のレジスト塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211226A (ja) * 1983-05-17 1984-11-30 Nec Kyushu Ltd 半導体基板のレジスト塗布装置

Also Published As

Publication number Publication date
JPS6333660Y2 (enrdf_load_stackoverflow) 1988-09-07

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