JPS6089281U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS6089281U
JPS6089281U JP18228983U JP18228983U JPS6089281U JP S6089281 U JPS6089281 U JP S6089281U JP 18228983 U JP18228983 U JP 18228983U JP 18228983 U JP18228983 U JP 18228983U JP S6089281 U JPS6089281 U JP S6089281U
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
metal holder
phase epitaxial
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18228983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027884Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
山下　広史
松崎　温
村里　茂隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP18228983U priority Critical patent/JPS6089281U/ja
Publication of JPS6089281U publication Critical patent/JPS6089281U/ja
Application granted granted Critical
Publication of JPH027884Y2 publication Critical patent/JPH027884Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP18228983U 1983-11-26 1983-11-26 液相エピタキシヤル成長装置 Granted JPS6089281U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18228983U JPS6089281U (ja) 1983-11-26 1983-11-26 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18228983U JPS6089281U (ja) 1983-11-26 1983-11-26 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS6089281U true JPS6089281U (ja) 1985-06-19
JPH027884Y2 JPH027884Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-26

Family

ID=30394807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18228983U Granted JPS6089281U (ja) 1983-11-26 1983-11-26 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS6089281U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH027884Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-26

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