JPS6085024A - Carriage - Google Patents

Carriage

Info

Publication number
JPS6085024A
JPS6085024A JP58192371A JP19237183A JPS6085024A JP S6085024 A JPS6085024 A JP S6085024A JP 58192371 A JP58192371 A JP 58192371A JP 19237183 A JP19237183 A JP 19237183A JP S6085024 A JPS6085024 A JP S6085024A
Authority
JP
Japan
Prior art keywords
battery
carriage
power
plug
receiving terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58192371A
Other languages
Japanese (ja)
Inventor
Motoaki Komiyama
小宮山 元章
Takehiko Watanabe
武彦 渡辺
Tsunemi Ueno
上野 恒美
Fumitoshi Wakiyama
脇山 史敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58192371A priority Critical patent/JPS6085024A/en
Publication of JPS6085024A publication Critical patent/JPS6085024A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60KARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
    • B60K1/00Arrangement or mounting of electrical propulsion units
    • B60K1/04Arrangement or mounting of electrical propulsion units of the electric storage means for propulsion

Abstract

PURPOSE:To realize control over consumption of a battery and prolongation of traveling time of a carriage without augmenting a capacity of the battery or adopting the wire system by providing a battery-driven carriage with a receiving terminal to supply said carriage with power from outside. CONSTITUTION:A handling robot 5 as a work device is provided in the front part of the upper surface of a body 2 for an unmanned carriage, while a plug 6 is projected from the lower part of the frontal face. The first and the second receiving terminals 7, 8 are provided in the front face of the plug 6, and the terminals 7 and 8 are connected respectively to the robot 5 and a battery 4 so as to be charged. The carriage 1 travels among the plural number of stations 10 according to a command of the central control section and the like. The station 10 is provided with a connection part 11, which is equipped with a socket 12 shaped like a sunken hollow stand so as to be adjustable to the plug 6 of the carriage 1. Further, the first and the second feed terminals 13, 14 are provided on the bottom of the socket.

Description

【発明の詳細な説明】 [技術分’I!F] 本発明は、搬送技術、特に、バッテリを駆動源にする自
走式の搬送車に関し、たとえば、半導体装置の製造工場
等において使用して有効な搬送車に関する。
[Detailed description of the invention] [Technical part'I! F] The present invention relates to transportation technology, and particularly to a self-propelled transportation vehicle using a battery as a driving source, and relates to a transportation vehicle that is effective for use in, for example, a semiconductor device manufacturing factory.

[背景技術] ライン全体をリジットに継いでしまうことは、あまり意
味がないばかりか、フレキシビリティが阻害される。そ
のため、半導体装置の製造工場においては、装置間、作
業工程間につきウェハの搬送を行う場合、複数枚のウェ
ハをカセットに入れて無人搬送車により搬送することが
考えられる。
[Background Art] Connecting the entire line to a rigid line not only makes no sense, but also hinders flexibility. Therefore, in a semiconductor device manufacturing factory, when wafers are to be transported between devices or between work processes, it is conceivable that a plurality of wafers are placed in a cassette and transported by an automatic guided vehicle.

かかる搬送車として、車体にバッテリを搭載し、これを
駆動源にしてステーション間を自走するように構成して
なるものが考えられる。
One conceivable example of such a transport vehicle is one in which a battery is mounted on the vehicle body and the vehicle is configured to self-propel between stations using this as a drive source.

しかし、かかる搬送車にあっては、走行可能時間がバッ
テリの容量によって規制されるので、長時間走行を確保
しつつ作業装置を搭載するためにはバッテリを大容量に
するか、有線によって給電しなければならないという問
題点があることが、本発明者によって明らかにされた。
However, the running time of such transport vehicles is limited by the capacity of the battery, so in order to ensure long running times and carry working equipment, it is necessary to increase the capacity of the battery or to supply power by wire. The inventors have discovered that there is a problem that

[発明の目的1 本発明の目的は、バッテリの大容量化や有線化等を回避
しながら、長時間走行や作業装置の搭載が実現できる搬
送技術を提供することにある。
[Objective of the Invention 1 An object of the present invention is to provide a conveyance technology that can realize long-time running and mounting of working equipment while avoiding the need for increasing the capacity of batteries, using wires, etc.

本発明の前記ならびにその他の目的と新規な特徴は、本
明細書の記述および添イ1図面から明らか−になるであ
ろう。
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

し発明の概要1 本願において開示される発明のうち代表的なものの概要
を簡単に説明すれば、次の通りである。
Outline of the Invention 1 A brief overview of typical inventions disclosed in this application is as follows.

ずなわら、バッテリを備え、そのバッテリにより駆動す
る搬送車に外部からの電力を供給するための受電端子を
設L)ることにより、長時間の動作が可能となり、さら
に作業装置等の機能を付加しCもその機能の稼動による
走行用電源の消費を抑制するようにしたものである。
Of course, by providing a power receiving terminal for supplying power from the outside to a conveyance vehicle that is equipped with a battery and driven by the battery, it is possible to operate for a long time, and the functions of work equipment, etc. can be improved. Addition C is also designed to suppress the consumption of power for running due to the operation of the function.

[実施例] 図は本発明の一実施例である無人搬送車を示す斜視図で
ある。
[Embodiment] The figure is a perspective view showing an automatic guided vehicle that is an embodiment of the present invention.

本実施例において、無人搬送車lは複数の車輪3を有す
る車体2を備えζおり、車体2には車輪3を回転駆動す
るためのモータ(図示せず)、車輪3の向きを操作する
だめの自動操向装置(図示せず)、マイクロコンピュー
タ等からなる走行指令装置(図示せず)、およびこれら
の駆動源になるバッテリ4等が搭載されている。車体2
の上面の前部には、移載作業等を行うための作業装置と
してのハンドリングロボ/1・(以下、ロボノI・とい
う。)5が設備されている。車体2の前面下部にはプラ
グ部6が突設され、プラグ部6は短辺が前を向いた台形
体に形成されている。プラグ部6の前面には第1受電端
子7と第2受電端子8とが設けられている。第1受電端
子7はロボット5に駆動電力を供給し得るように接続さ
れ、第2受電端子8はバッテリ4に充電し得るように接
続されている。
In this embodiment, the automatic guided vehicle 1 is equipped with a vehicle body 2 having a plurality of wheels 3, and the vehicle body 2 includes a motor (not shown) for rotationally driving the wheels 3 and a motor for controlling the direction of the wheels 3. The vehicle is equipped with an automatic steering system (not shown), a travel command system (not shown) consisting of a microcomputer, etc., and a battery 4 that serves as a driving source for these devices. Car body 2
A handling robot/1. (hereinafter referred to as "Robono I.") 5 is installed at the front of the upper surface of the robot as a working device for carrying out transfer work and the like. A plug portion 6 is provided protruding from the lower front surface of the vehicle body 2, and the plug portion 6 is formed into a trapezoidal body with its short side facing forward. A first power receiving terminal 7 and a second power receiving terminal 8 are provided on the front surface of the plug portion 6. The first power receiving terminal 7 is connected to be able to supply driving power to the robot 5, and the second power receiving terminal 8 is connected to be able to charge the battery 4.

この搬送車1は工場に適当に配されている複数のステー
ション10間を工場の中央管理部等の指令に応じて走行
するように設定されており、各ステーション10には連
結部11が搬送車lを所定の姿勢で停車させ得るように
設けられている。連結部11にはソケット部12が搬送
車1のプラグ部6と整合し得るように中空台形体形状に
没設されており、ソケット部12の底面には第1給電端
子13と第2給電端子14とが設けられている。
This conveyance vehicle 1 is set to travel between a plurality of stations 10 appropriately arranged in a factory in accordance with instructions from a central management department of the factory, etc., and a connecting portion 11 is connected to the conveyance vehicle at each station 10. It is provided so that the vehicle can be stopped in a predetermined position. A socket part 12 is recessed in the connecting part 11 in a hollow trapezoidal shape so as to be aligned with the plug part 6 of the carrier 1, and a first power supply terminal 13 and a second power supply terminal are provided on the bottom surface of the socket part 12. 14 are provided.

第1給電端子13ば通常の]工場電源(図示せず)に接
続され、第2給電端子14は工場電瀞からの交流を直流
に変換し充電を可能にするためのAC−1) C変換器
15に接続されている。
The first power supply terminal 13 is connected to a normal factory power supply (not shown), and the second power supply terminal 14 is connected to an AC-1)C conversion for converting alternating current from the factory power supply into direct current to enable charging. 15.

次に作用を説明する。Next, the effect will be explained.

1M送型車1ステーション10に連結部11を介して適
正に停車されると、プラグ部6がソケット部7に整合し
、これを案内として第1、第2受電端子7.8が第1、
第2給電端子13.14にそれぞれ接触して電気的に接
続することになる。
When the 1M die transport vehicle is properly stopped at the station 10 via the connection part 11, the plug part 6 is aligned with the socket part 7, and using this as a guide, the first and second power receiving terminals 7.8 are connected to the first,
The second power supply terminals 13 and 14 are contacted and electrically connected, respectively.

たとえば、ウェハが収容されているカセット9をステー
ジ10上から搬送車l上に移載する作業を行うとき、ロ
ボソ1−5には電力が第1給電端子12および第1受電
端子7を通して供給される。
For example, when a cassette 9 containing wafers is transferred from the stage 10 to the transport vehicle L, power is supplied to the ROBOSO 1-5 through the first power supply terminal 12 and the first power receiving terminal 7. Ru.

なお、ロボット5にはDCサーボモータが使用されてい
るが、通常ロボットはAC−DC変換器を備えているた
め、]二場電源の使用に支障はない。
Note that although a DC servo motor is used in the robot 5, since robots are usually equipped with an AC-DC converter, there is no problem in using a two-field power source.

一方、バッテリ4にはAC−DC変換器15を経た充電
電力が第2給電端子14および第2受電端子8を通じて
供給され、これにより、ハシテリ4は充電されることに
なる。
On the other hand, the charging power that has passed through the AC-DC converter 15 is supplied to the battery 4 through the second power supply terminal 14 and the second power reception terminal 8, so that the battery 4 is charged.

[効果] (1)、ハシテリを備え、前記ハシテリにより駆動させ
る搬送車に、受電端子を設りることにより、外部からの
電力を取り入れることができるので、搭載しているバッ
テリの消費を抑制することができ、バッテリの大容量化
や有線化をせずにtill送車走行時間を延長すること
ができる。
[Effects] (1) By providing a power receiving terminal on a conveyance vehicle that is equipped with a hashite and is driven by the hashite, it is possible to take in power from the outside, thereby suppressing the consumption of the installed battery. This makes it possible to extend the till vehicle travel time without increasing the capacity of the battery or installing wires.

(2)、バッテリを備え、前記バッテリにより駆動させ
る1般送車に、任意の作業が行える作業装置等の(′:
t JJIJ機能を設けても、受電端子を通して供給さ
れる電力を用いて付加機能を駆動するようにすれば良い
ので、搭載したハシテリを用いずに済み、走行時間の短
縮を防止することができる。
(2) A general transportation vehicle equipped with a battery and driven by the battery is equipped with a working device, etc. (':
Even if the JJIJ function is provided, the additional function can be driven using the electric power supplied through the power receiving terminal, so there is no need to use the on-board hashiteri, and it is possible to prevent shortening of the running time.

(3)、バッテリを備え、前記バッテリにより駆動させ
る11!送車に、受電端子を設け、前記端子を通じて供
給される外部からの電力を、搭載したバッテリの充電に
用いることができるので、バッテリを常に満充電の状態
にさせておくことができ、1ull送車の仕事効率を向
上さ一毬ることができる。
(3) 11, which is equipped with a battery and is driven by the battery! The vehicle is equipped with a power receiving terminal, and the external power supplied through the terminal can be used to charge the onboard battery, so the battery can be kept fully charged at all times, and 1ull transmission is possible. You can improve the work efficiency of your car at once.

+41. llt送車に作業装置を装備することにより
、各ステーションごとに作業装置を配備する必要がなく
なるため、設備費、維持費等が軽減化できる。
+41. By equipping the LLT transport vehicle with a working device, there is no need to provide a working device at each station, so equipment costs, maintenance costs, etc. can be reduced.

(5)、互いに整合するプラグ部とソケソ1一部とを設
りることにより、受電端子と給電端子との接触を確実に
行わずことができるため、電気的接続を安定的に確保で
きる。
(5) By providing the plug portion and a portion of the socket 1 that match each other, it is possible to ensure that the power receiving terminal and the power feeding terminal do not come into contact with each other, so that a stable electrical connection can be ensured.

以上本発明者によってなされた発明を実施例に基づき具
体的に説明したが、本発明は前記実施例に限定されるも
のではなく、その要旨を逸脱しない範囲で種々変更可能
であることはいうまでもない。
Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

たとえば、受電端子ば2111i1設けるに限らず、1
個にしてバッテリを充電し、このバッテリにより作動装
置を駆動するようにしてもよいし、また2個以」二段り
てもよい。
For example, it is not limited to providing the power receiving terminal 2111i1;
The battery may be charged separately and the actuating device may be driven by the battery, or two or more may be stacked in two stages.

各ステーションごとに給電端子を同一に設ける場合に限
らず、ボームステージジンにはバッテリ充電のための給
電端子を設け、他の作業ステーションには作業装置駆動
のための給電i’li:J子を設けるようにしてもよい
It is not limited to the case where the same power supply terminal is provided for each station, but the Baum stage generator is equipped with a power supply terminal for battery charging, and the other work stations are equipped with a power supply terminal for driving the work equipment. It may also be provided.

作業装置は移載用のロボットに限ら14゛、1ull送
途中においてバッテリを駆動源として簡単な組立作業を
行える組立ロボット等をも装備することができる。
The working device is limited to a 14-inch robot for transfer, but it can also be equipped with an assembly robot that can perform simple assembly work using a battery as a drive source during 1ull transfer.

[利用分野] 以上の説明では主として本発明者によってなされた発明
をその背景となった利用分野である半導体装置の製造工
場において使用される搬送車に適用した場合について説
明したが、それに限定されるものではなく、たとえば、
へ庫において保管物品の出し入れを行う搬送車等にも適
用できる。
[Field of Application] In the above explanation, the invention made by the present inventor was mainly applied to a conveyance vehicle used in a semiconductor device manufacturing factory, which is the field of application that formed the background of the invention, but the invention is limited thereto. For example,
It can also be applied to transport vehicles that take stored items in and out of warehouses.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の一実施例を示す斜視図である。 1・・・搬送車、2・・・車体、3・・・車輪、4・・
・バッテリ、5・・・ロボット(作業装置)、6・・・
プラグ部、7.8・・・受電端子、9・・・カセット(
物品)、10・・・ステーション、11・・・連結部、
12・・・ソケット部、13.14・・・給電端子、1
5・・・AC−DC変換器。
The figure is a perspective view showing one embodiment of the present invention. 1... Transport vehicle, 2... Vehicle body, 3... Wheels, 4...
・Battery, 5...Robot (work device), 6...
Plug part, 7.8...Power receiving terminal, 9...Cassette (
article), 10...station, 11...connection part,
12...Socket part, 13.14...Power supply terminal, 1
5...AC-DC converter.

Claims (1)

【特許請求の範囲】 1、バッテリを備え、前記バッテリにより駆動する搬送
車において、外部からの電力を供給する−ための受電端
子が設りられていることを特徴とする+U送車。 2、任意の作業を行う作業装置を備え、前記作業装置は
、受電端子を介して外部からの電力により駆動されるこ
とを特徴とする特許請求の範囲第1項記載の搬送車。 3、受電端子を介してバッテリに外部からの電力が供給
されていることを特徴とする特許請求の範囲第1項記載
の搬送車。
[Scope of Claims] 1. A +U transportation vehicle, which is equipped with a battery and is driven by the battery, and is provided with a power receiving terminal for supplying power from the outside. 2. The transport vehicle according to claim 1, further comprising a working device for performing any work, and the working device is driven by external power via a power receiving terminal. 3. The conveyance vehicle according to claim 1, wherein power is supplied from the outside to the battery via the power receiving terminal.
JP58192371A 1983-10-17 1983-10-17 Carriage Pending JPS6085024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58192371A JPS6085024A (en) 1983-10-17 1983-10-17 Carriage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58192371A JPS6085024A (en) 1983-10-17 1983-10-17 Carriage

Publications (1)

Publication Number Publication Date
JPS6085024A true JPS6085024A (en) 1985-05-14

Family

ID=16290169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58192371A Pending JPS6085024A (en) 1983-10-17 1983-10-17 Carriage

Country Status (1)

Country Link
JP (1) JPS6085024A (en)

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