JPS6082827A - Manufacture of diaphragm of micromanometer - Google Patents

Manufacture of diaphragm of micromanometer

Info

Publication number
JPS6082827A
JPS6082827A JP19201483A JP19201483A JPS6082827A JP S6082827 A JPS6082827 A JP S6082827A JP 19201483 A JP19201483 A JP 19201483A JP 19201483 A JP19201483 A JP 19201483A JP S6082827 A JPS6082827 A JP S6082827A
Authority
JP
Japan
Prior art keywords
diaphragm
flange
recess part
concentric
welding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19201483A
Other languages
Japanese (ja)
Inventor
Katsumi Yoshikawa
吉川 勝美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISSHIN KEIKI KK
Original Assignee
NISSHIN KEIKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISSHIN KEIKI KK filed Critical NISSHIN KEIKI KK
Priority to JP19201483A priority Critical patent/JPS6082827A/en
Publication of JPS6082827A publication Critical patent/JPS6082827A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Abstract

PURPOSE:To prevent the strain after forming and the strain with the elapse of time, by keeping the periphery of a thin disk by the composite force of compression and welding, and forming a diaphragm by pressure. CONSTITUTION:A disk, whose diameter is equal to the inner diameter of a circular recess part 3 in a flange 2, is blanked from a diaphragm material 1. The material 1 is coupled with the recess part 3, and compressed and temporarily set to the recess part 3 by a ring 4 having the same diameter. Concentric circular waveforms 5, 5... are formed on the surface of the bottom of the recess part 3. A pressure transmitting hole 6 is formed at the central part of the recess part 3. Under the state the diaphragm material 1 held by the flange 2, the ring 4 is tightened by a compressing and tightening tool and welded to concentric welding lines 7 and 8. Sealing is performed by a compressing lid 9 of the flange 2 through a packing 10, and hydraulic pressure is applied to make waveforms on the diaphragm.

Description

【発明の詳細な説明】 微圧を検出するには、ダイヤフラムを使用せさるを得な
いか、従来はビーム溶接等により、タイヤフラムの周縁
を直接フランジ部に溶着するのか通例であるが、この方
法では溶接点の熱影響が、タイヤフラムに歪を生じる等
不安定で、300%4z。
[Detailed Description of the Invention] To detect minute pressures, it is either necessary to use a diaphragm, or conventionally, the peripheral edge of the tire flam is welded directly to the flange using beam welding or the like. In this method, the heat effect at the welding point is unstable, causing distortion in the tire flam, and is 300% 4z.

以下では用いられない。本発明は圧着と溶接の複合力で
、薄円板周縁を保持して、ダイヤフラムを圧力成形する
もので、成形ダイヤフラムを溶接する方法を避けようと
するもので、これを図面により詳述すると、隔膜材1を
フランジ2の内部の円形凹部3の内径に等しく、円形に
打ち抜き、これを凹部31こ嵌挿した上、同径のリンク
4により凹部3に圧着仮設定する。フランジ2の円形凹
部3の底部表面には、同心円状の波形5・5 ・・を刻
み、その中央部には、圧力通過孔6を穿孔している。今
リング4をフランジ2に隔膜材1を挾みこんだ形でしっ
かりと圧着木綿め具で締めつけた」1同心円状の溶接線
7・8に溶接し、フランジの加圧蓋9にてパツキン10
を介して密封の上、油圧力をかけると隔膜材1は、背面
の波形55・にそって成形される。
Not used below. The present invention uses a combined force of crimping and welding to hold the peripheral edge of a thin disk and pressure-form the diaphragm, thereby avoiding the method of welding a formed diaphragm. The diaphragm material 1 is punched out into a circular shape having the same inner diameter as the circular recess 3 inside the flange 2, and this is inserted into the recess 31 and then temporarily set in the recess 3 by pressure bonding with a link 4 having the same diameter. Concentric corrugations 5, 5, . Now, the ring 4 is inserted between the flange 2 and the diaphragm material 1, and is firmly tightened with a crimp cotton fitting.
After sealing through the diaphragm 1 and applying hydraulic pressure, the diaphragm 1 is formed along the corrugations 55 on the back surface.

なお、リンク4の同心円状の溶接線7・8の間に溝11
 を設けて、周囲の振動等の影響を1防止するようにし
ている。
Note that there is a groove 11 between the concentric weld lines 7 and 8 of the link 4.
is installed to prevent the effects of surrounding vibrations, etc.

このように本発明はリンクによる圧着力と、ヒ。In this way, the present invention utilizes the pressure bonding force due to the link and the compression force caused by the link.

−ム溶接力とを複合して成型圧に酬え、リンク而フラン
ジ面が熱容量の冷し金となってタイヤクラム材への溶接
歪を防き、ダイヤグラムを背面の同心波型を写しとる後
成型方法のため、成形後の歪および経年歪をな(し、背
面の波型が常に支えとなって密着しうる点他の一発ダイ
ヤプラム溶接方法とは格段の違のものである。
- The flange surface of the link acts as a heat capacity chiller to prevent welding distortion to the tire crumb material, and the diagram is made by copying the concentric wave pattern on the back side. Because of the molding method, there is no distortion after molding or distortion over time (and the corrugations on the back always provide support for close contact, making this method significantly different from other one-shot diaphragm welding methods).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は隔膜材、リンクをフランジ凹部に圧着仮止めし
た状態を示す側断面図。第2図は成形後の使用状態にあ
るものの側断面図。第3図はフランジの平面図。第4図
は加圧蓋の側面図I 隔膜材 2. フランジ 3 円
形凹部4 リング 5 波 形 6.圧力通過孔7・8
 溶接線 9 加圧蓋 IOパツキン11、溝 出願人 り、李1〒ハルネ 部 p タ?オオ与許願ギ/りλQ/各55、↑ル°3
1鴇 tし
FIG. 1 is a side sectional view showing a state in which the diaphragm material and the link are temporarily crimped and fixed to the flange recess. FIG. 2 is a side sectional view of the product in use after molding. Figure 3 is a plan view of the flange. Figure 4 is a side view of the pressurizing lid I. Diaphragm material 2. Flange 3 Circular recess 4 Ring 5 Waveform 6. Pressure passage holes 7 and 8
Welding line 9 Pressure lid IO packing 11, groove applicant ri, Lee 1〒Harune section p ta? 55 each, ↑°3
1 piece

Claims (1)

【特許請求の範囲】[Claims] タイヤプラムを圧力センサーとして、フランジに溶接す
るに際して、フランジの底面に、同心円状の波形を刻み
、フランジ凹部の内径に打抜いた隔膜材を嵌挿し、仮付
し、同径のリングをその周縁平坦部において、本圧着保
持した上聞心円状にビーム溶接した上、加圧蓋をかぶせ
て、締めつけ41]圧によって波形に沿うよう成形した
上、同心円線」二にビーム溶接した微圧計の隔膜製造方
法。
When welding a tire plum to a flange as a pressure sensor, we cut concentric waveforms on the bottom of the flange, insert a punched diaphragm material into the inner diameter of the flange recess, temporarily attach it, and attach a ring of the same diameter to its periphery. At the flat part, we beam-welded the upper and lower concentric circles with the main crimping, then covered them with a pressure lid, tightened them, shaped them to follow the waveform, and then beam-welded them on the concentric lines. Diaphragm manufacturing method.
JP19201483A 1983-10-13 1983-10-13 Manufacture of diaphragm of micromanometer Pending JPS6082827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19201483A JPS6082827A (en) 1983-10-13 1983-10-13 Manufacture of diaphragm of micromanometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19201483A JPS6082827A (en) 1983-10-13 1983-10-13 Manufacture of diaphragm of micromanometer

Publications (1)

Publication Number Publication Date
JPS6082827A true JPS6082827A (en) 1985-05-11

Family

ID=16284166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19201483A Pending JPS6082827A (en) 1983-10-13 1983-10-13 Manufacture of diaphragm of micromanometer

Country Status (1)

Country Link
JP (1) JPS6082827A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4852466A (en) * 1987-05-15 1989-08-01 The Foxboro Company Floating diaphragm apparatus
US4885983A (en) * 1988-05-24 1989-12-12 Zavoda Manufacturing Co., Inc. Self-retaining diaphragm seal
EP0655615A1 (en) * 1993-11-25 1995-05-31 WIKA ALEXANDER WIEGAND GmbH & CO. Procedure for fabricating a pressure transmitting diaphragm and diaphragm thus obtained
EP0849577A1 (en) * 1996-12-18 1998-06-24 WIKA ALEXANDER WIEGAND GmbH & CO. Membrane for determining the pressure
EP0965829A1 (en) * 1998-06-17 1999-12-22 Rosemount Inc. Isolation diaphragm mounting
WO2020010606A1 (en) * 2018-07-13 2020-01-16 Rosemount Inc. Process diaphragm seal

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4852466A (en) * 1987-05-15 1989-08-01 The Foxboro Company Floating diaphragm apparatus
US4885983A (en) * 1988-05-24 1989-12-12 Zavoda Manufacturing Co., Inc. Self-retaining diaphragm seal
EP0655615A1 (en) * 1993-11-25 1995-05-31 WIKA ALEXANDER WIEGAND GmbH & CO. Procedure for fabricating a pressure transmitting diaphragm and diaphragm thus obtained
EP0849577A1 (en) * 1996-12-18 1998-06-24 WIKA ALEXANDER WIEGAND GmbH & CO. Membrane for determining the pressure
US6209397B1 (en) 1996-12-18 2001-04-03 Wika Alexander Wiegand Gmbh & Co. Pressure sensor membrane having stepped annular peripheral surfaces and pressure sensor employing same
EP0965829A1 (en) * 1998-06-17 1999-12-22 Rosemount Inc. Isolation diaphragm mounting
US6120033A (en) * 1998-06-17 2000-09-19 Rosemount Inc. Process diaphragm seal
WO2020010606A1 (en) * 2018-07-13 2020-01-16 Rosemount Inc. Process diaphragm seal
US11118989B2 (en) 2018-07-13 2021-09-14 Rosemount Inc. Process diaphragm seal

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