JPS6081746A - Electron beam generator - Google Patents
Electron beam generatorInfo
- Publication number
- JPS6081746A JPS6081746A JP19150383A JP19150383A JPS6081746A JP S6081746 A JPS6081746 A JP S6081746A JP 19150383 A JP19150383 A JP 19150383A JP 19150383 A JP19150383 A JP 19150383A JP S6081746 A JPS6081746 A JP S6081746A
- Authority
- JP
- Japan
- Prior art keywords
- grid
- electron
- cathode
- electric potential
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
Abstract
Description
【発明の詳細な説明】
本発明は断面が長方形状の細長い電子ビームを発生して
誘電体、半導体、金属体等の物質に照射し溶融、熱処理
、物性変化などを行なわせる電子ビーム発生装置に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron beam generator that generates an elongated electron beam with a rectangular cross section and irradiates it onto materials such as dielectrics, semiconductors, and metals to melt, heat treat, change physical properties, etc. It is something.
長方形状の断面を有する電子ビームで、例えば半導体ウ
ェーハの熱処理(アニーリング)を行うと電子ビームと
ウヱーハを電子ビームの短辺方向に相対移動させること
によシ一度に比較的広い面積を処理できる。For example, when heat-treating (annealing) a semiconductor wafer with an electron beam having a rectangular cross section, a relatively wide area can be treated at once by moving the electron beam and the wafer relative to each other in the short side direction of the electron beam.
しかしながら、このような利点は、電子ビームの長辺方
向での電流密度分布がたとえば均一であると共に短時間
で処理するためには全ビーム電流の値もなるべく大きく
て安定性や再現性が充分良いか、又は、何らかの補正が
できるという条件を満たして始めて実現できるものであ
る。この種の装置を構成するには、カソードとグリッド
とアノードからなる三極式電子銃を用いることが考えら
れる。この場合、ビーム電流を調整する方法としては、
グリッドの電位を変化させて、調整することが考えられ
る。このグリッ、ドの電位を調整する方法では、ビーム
電流に応じて、グリッドのバイアスを変化させるため、
電界分布が変化し、電子ビームの断面の電流密度分布が
変化17てしまう問題がある。さらにまた、この種の装
置では、通常カソードを交換できるいわゆるデマウンタ
ブル式の電子銃を用いているが、カソードの交換のたび
に、電流密度分布が変化してしまい、何らかの補正手段
が必要である。However, such an advantage is that the current density distribution in the long side direction of the electron beam is, for example, uniform, and in order to process the electron beam in a short time, the value of the total beam current is as large as possible, and stability and reproducibility are sufficient. Or, it can only be realized if the condition that some kind of correction can be made is satisfied. To construct this type of device, it is conceivable to use a triode electron gun consisting of a cathode, a grid, and an anode. In this case, the method to adjust the beam current is as follows:
Adjustment can be considered by changing the potential of the grid. In this method of adjusting the grid potential, the bias of the grid is changed according to the beam current, so
There is a problem in that the electric field distribution changes and the current density distribution in the cross section of the electron beam changes17. Furthermore, this type of device usually uses a so-called demountable electron gun in which the cathode can be replaced, but the current density distribution changes each time the cathode is replaced, and some kind of correction means is required.
本発明は、これらの欠点を除去するため、カソードと同
電位の第1グリ、ドおよび上記電位とは独立した電位を
有する第2グリツドを設け、電子ビーム断面形状(ビー
ム電流密度分布)とビーム電流値の両方を効果的に調整
(補正)できるようにしたもので、以下、図面を用いて
詳細に説明する。In order to eliminate these drawbacks, the present invention provides a first grid having the same potential as the cathode, and a second grid having a potential independent of the above potential, thereby adjusting the cross-sectional shape of the electron beam (beam current density distribution) and the beam. This allows both current values to be effectively adjusted (corrected), and will be described in detail below with reference to the drawings.
第1図は本発明装置の一実施例の電子銃部分の側断面略
図、第2図は第1図のA−A’線から上方を見た平面略
図を示す。これらの図においてカソード1の細長い電子
放出面2から放出される電子群3は高電位のアノード4
で引き出され加速されてアノード4の中心孔(本例では
円形状孔)5を通過して行く。カソードlに最も近接し
ている第1グリツド6が電子放出面2から引き出し得る
電子群3の電流値(ビーム電流)の大きさや放出電流密
度分布を決める上で主要な役割を果たす。他他方、第1
グリッド6の周囲部、あるいは第1グリツド6とアノー
ド4との中間領域部に位置する第2グリツド7は、電子
放出面2の放出電流密度分布を補助的に調整し得る機能
を有すると共に電子群3の輪郭形状(を子ビーム形状、
ビーム角、発散角)の決定や補正に際して主要な役目を
担う。FIG. 1 is a schematic side cross-sectional view of an electron gun portion of an embodiment of the apparatus of the present invention, and FIG. 2 is a schematic plan view viewed upward from line AA' in FIG. In these figures, a group of electrons 3 emitted from an elongated electron emitting surface 2 of a cathode 1 is connected to a high potential anode 4.
It is pulled out and accelerated and passes through the center hole (circular hole in this example) 5 of the anode 4. The first grid 6 closest to the cathode 1 plays a major role in determining the magnitude of the current value (beam current) of the electron group 3 that can be extracted from the electron emission surface 2 and the emission current density distribution. On the other hand, the first
The second grid 7 located around the grid 6 or in the intermediate region between the first grid 6 and the anode 4 has the function of auxiliary adjustment of the emission current density distribution of the electron emission surface 2 and also controls the electron group. 3 outline shape (child beam shape,
It plays a major role in determining and correcting the beam angle and divergence angle.
本実施例の電子銃は第2図にアノード側から見た平面的
な位置関係を示すように第1グリツド6の中心孔8を電
子放出面2と相似的な長方形状とし、第2グリツ゛ドア
の中心孔9を円形状としているが他の任意の形状を選ん
でもよい。又、第1図においてカソード加熱用直流電源
10は、電子放出面2の温度を調整し、(いわゆる温度
制限領域では)電子群3の電流値を制御する。抵抗11
と12の中点は第1グリツド6を電気的に短絡しである
ので電子放出面2と第1グリツド6はほぼ同電位である
。第2グリツド7は可変直流バイアス電源13によシ、
前記電子放出面2等に対し図示のように負あるいは正の
バイアス電圧が印加される。アノード4は直流高圧電源
14によシミ子放出面2に対し、正の高電位とされる。In the electron gun of this embodiment, the center hole 8 of the first grid 6 has a rectangular shape similar to the electron emission surface 2, as shown in the planar positional relationship seen from the anode side in FIG. Although the center hole 9 is circular, any other shape may be selected. Further, in FIG. 1, a cathode heating DC power supply 10 adjusts the temperature of the electron emission surface 2 and controls the current value of the electron group 3 (in the so-called temperature limited region). resistance 11
Since the midpoint between and 12 electrically shorts the first grid 6, the electron emitting surface 2 and the first grid 6 are at approximately the same potential. The second grid 7 is connected to a variable DC bias power supply 13,
A negative or positive bias voltage is applied to the electron emitting surface 2 and the like as shown in the figure. The anode 4 is brought to a positive high potential with respect to the smitter emitting surface 2 by a DC high voltage power supply 14 .
かくして、カソード加熱電源10により真空中の電子放
出面2の温度を上げて行ったとき、取り出し得るビーム
電流の大きさの上限は主に第1グリツド6の電極形状や
配置で決まシ、(放出)ビーム電流密度分布の補正や適
性化はビーム電流が大きく下がるなどの不具合を生ずる
ことなく第2グリツド7のバイアス電圧、電極形状ある
いは相対位置の調整で行える。従ってビーム電流のレベ
ルを変えて物質を処理する必要があるときや、別種のカ
ソードを使用するときや、あるいはカソードの形状など
の経時変化があり、それによる電子放出状況の変化を補
正したいときなどに1本実施例のような構造の電子銃を
用いるとビーム電流の大きさとその断面の電流密度分布
やビーム形状とを容易に適正化できる。Thus, when the temperature of the electron emitting surface 2 in vacuum is raised by the cathode heating power supply 10, the upper limit of the beam current that can be extracted is mainly determined by the shape and arrangement of the electrodes of the first grid 6. ) The beam current density distribution can be corrected or optimized by adjusting the bias voltage of the second grid 7, electrode shape, or relative position without causing problems such as a large drop in beam current. Therefore, when it is necessary to process a substance by changing the beam current level, when using a different type of cathode, or when there is a change in the shape of the cathode over time and you want to compensate for changes in the electron emission situation due to this, etc. First, by using an electron gun having the structure of this embodiment, the magnitude of the beam current, the current density distribution in its cross section, and the beam shape can be easily optimized.
第3図、第4図、第5図はそれぞれ本発明装置用電子銃
の他の実施例であシ、第1図や第2図に示されている各
要素と対応する要素は同番号で示している。この第3図
は第2グリツド7の中心孔9を図示のような特殊な形状
とし、これに負のバイアス電圧を印加したとき電子放出
面2の中央部からの電子放出を抑制気味とし両端付近の
電子放出を比較的助長するというように電子ビーム断面
の電流密度分布を調整できるものである。一方。3, 4, and 5 are other embodiments of the electron gun for the device of the present invention, and elements corresponding to those shown in FIGS. 1 and 2 have the same numbers. It shows. In FIG. 3, the center hole 9 of the second grid 7 has a special shape as shown in the figure, and when a negative bias voltage is applied to it, electron emission from the center of the electron emitting surface 2 is slightly suppressed, and the center hole 9 near both ends is slightly suppressed. The current density distribution in the cross section of the electron beam can be adjusted so as to relatively encourage electron emission. on the other hand.
第4図に示す電子銃は第2グリツドとして円形断面のリ
ング状N”lを用いその電位(バイアス電圧)を調整す
ることによシミ子群2の輪郭形状を制御する。第5図の
平面略図(カソード−第1グリッド−第2グリッド部分
の下面図)で示す構造の電子銃は第2グリツド7として
軸方向が電子の進行方向と一致する6個の円柱状の1.
を極を対称に配置し、これらの各電極に、それぞれ電位
(同電位あるいは、相異なる電位)を加えて、電子ビー
ム断面の形状あるいは、断面の電流密度分布を補正する
。The electron gun shown in FIG. 4 uses a ring-shaped N''l with a circular cross section as the second grid, and controls the contour shape of the shim group 2 by adjusting its potential (bias voltage). The electron gun having the structure shown in the schematic diagram (bottom view of the cathode-first grid-second grid portion) has six cylindrical columns 1.2 as the second grid 7 whose axial direction coincides with the traveling direction of electrons.
The poles are arranged symmetrically, and potentials (same potential or different potentials) are applied to each of these electrodes to correct the shape of the electron beam cross section or the current density distribution in the cross section.
以上、本発明装置の電子銃や、その一部の実施例を示し
たが、本方法以外に、発生した電子ビームを静電式電子
レンズ、磁気レンズ、非点収差補正系、ビーム軌道修正
系などを用いて、電子ビームの形状を制御しても、物質
の処理は十分可能である。The electron gun of the device of the present invention and some embodiments thereof have been described above, but in addition to this method, the generated electron beam can be controlled by an electrostatic electron lens, a magnetic lens, an astigmatism correction system, a beam trajectory correction system, etc. Even if the shape of the electron beam is controlled using, for example, the material can be sufficiently processed.
第1図と第2図はそれぞれ本発明装置の一実施例の部分
概略図と部分平面略図、第3図と第5図は他の2つの実
施例の部分平面略図、第4図はその他の実施例の部分側
断面略図である。
1・・・カソード、2・・・電子放出面、3・・・電子
群、4・・・アノード、5・・・アノードの中心孔。
6・・・第1グリツド、 7・・・第2グリツド、8・
・・第1グリツドの中心孔、9・・・第2グリツドの中
心孔、10・・・カソード加熱用直流電源。
11.12・・・抵抗、13・・・可変直流バイアス電
源、14・・・直流高圧電源。1 and 2 are a partial schematic diagram and a partial plan schematic diagram, respectively, of one embodiment of the device of the present invention, FIGS. 3 and 5 are partial diagrammatic diagrams of two other embodiments, and FIG. 1 is a schematic partial side cross-sectional view of an embodiment; FIG. DESCRIPTION OF SYMBOLS 1... Cathode, 2... Electron emission surface, 3... Electron group, 4... Anode, 5... Center hole of anode. 6... 1st grid, 7... 2nd grid, 8...
... center hole of the first grid, 9 ... center hole of the second grid, 10 ... DC power supply for cathode heating. 11.12...Resistor, 13...Variable DC bias power supply, 14...DC high voltage power supply.
Claims (1)
近接し、前記カソードと同電位になっている第一グリッ
ドと、前記カソードに対して第1グリ4ドよシ離−れた
位置に設けられ、かつ第1グリツドとは独立に電位を与
えられた第2グリツドと、前記カソードから電子を引き
出し加速するアノードを備えていることを特徴とする電
子ビーム発生装置。a cathode having an elongated electron emitting surface; a first grid adjacent to the cathode and having the same potential as the cathode; and a first grid located at a distance from the cathode by a distance of 4, An electron beam generator comprising: a second grid to which a potential is applied independently from the first grid; and an anode for extracting and accelerating electrons from the cathode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19150383A JPS6081746A (en) | 1983-10-13 | 1983-10-13 | Electron beam generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19150383A JPS6081746A (en) | 1983-10-13 | 1983-10-13 | Electron beam generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6081746A true JPS6081746A (en) | 1985-05-09 |
JPH0531257B2 JPH0531257B2 (en) | 1993-05-12 |
Family
ID=16275731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19150383A Granted JPS6081746A (en) | 1983-10-13 | 1983-10-13 | Electron beam generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6081746A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015167125A (en) * | 2014-02-14 | 2015-09-24 | 日本電子株式会社 | Electron gun, three-dimensional lamination molding device and electron gun control method |
CN106932809A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | A kind of hot target structure of active water cold of many plate angle combining structures of W fonts |
-
1983
- 1983-10-13 JP JP19150383A patent/JPS6081746A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015167125A (en) * | 2014-02-14 | 2015-09-24 | 日本電子株式会社 | Electron gun, three-dimensional lamination molding device and electron gun control method |
CN106932809A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | A kind of hot target structure of active water cold of many plate angle combining structures of W fonts |
CN106932809B (en) * | 2015-12-30 | 2023-07-14 | 核工业西南物理研究院 | Active water-cooling calorimeter target structure of W-shaped multi-plate angle-changing combined structure |
Also Published As
Publication number | Publication date |
---|---|
JPH0531257B2 (en) | 1993-05-12 |
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