JPS6077167A - Moisture sensitive material and moisture sensitive element - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture-sensitive material and a moisture-sensitive element using the same.

In recent years, moisture sensing elements have been used in household applications such as food cooking control elements in microwave ovens, dryness detection systems in clothes dryers, etc.
For detecting condensation on VTR cylinders and for industrial use,
It is widely used for humidity control in the manufacture of electronic parts, for agricultural use in house air conditioning, and in automobiles for preventing dew condensation on rear windows, windows, and foggers.

However, what is desired is a material that is more sensitive to changes in humidity, has a lower electrical resistance value, and has a better linearity of the hysteresis curve.

The present inventors have discovered a moisture-sensitive material that has a low electrical resistance value and a hysteresis curve that is close to a straight line by adding certain additives to zirconium oxide. We have also found a preferred moisture-sensitive element using the above-mentioned moisture-sensitive material.

That is, the present invention relates to a moisture-sensitive material containing zirconium oxide and one or more of titanium oxide, tantalum oxide, niobium oxide, and vanadium oxide.

In one embodiment, it contains zirconium nitride, which can be sintered at low temperatures by mixing lead-free borosilicate glass as an inder, and contains oxidized titanium oxide, hitantalum oxide, niobium oxide, sodium chloride, and hyttrium oxide. A moisture-sensitive element is also provided in which a mixture of one or more types of #ffl materials and an inder is spread on an electrode material, dried, and sintered.

Further, as an embodiment thereof, the electrode of the invention described above; and a comb-shaped humidity sensing element are also provided.

The present invention will be explained in detail below.

T! used in the present invention! If: Zirconium chloride and acid chloride, for example, preferably 0.5 μm or less. Zirconium oxide, resistance is 1
However, one of its properties as a moisture-sensitive material is that it has poor batting performance.

Obtain favorable linearity. The above addition is preferably added in an amount of 10 to 60% based on the zirconium silicate.

Furthermore, in order to sinter at a low temperature, it is preferable to use a binder. As the binder, lead-free borosilicate glass is used. When the amount of the binder added is preferably 5 to the total amount of the zirconium oxide and the additive titanium oxide, etc., it is carried out as follows.

Ru. These electrodes are preferably formed into D<L-shaped electrodes by photo-etching as shown in FIG. Other methods include printing or electroless coating.

Thereafter, after preliminary drying for 0.5 to 2 hours in an atmosphere of 130 to 190°C, the edges 9 are covered with an aqueous solution of polyvinyl alcohol, and the gauze is placed in a mold and heated under a predetermined pressure (for example, 100Kt). /6n” to 700 powder/♂) and pressurized at room temperature for 3 to 5 minutes to create a certain shape, and then
Heat at a constant m degree (for example, 950-1300°C) for several hours.

The molded product is sliced to a predetermined thickness (approximately 100 to 500 μm) using a diamond cutter to obtain a certain square piece. Ruthenium etc. Example 1α paste is printed on the surface of this porous 'lil body to form a pair of electrodes,
A coarse electrode layer is bonded to this to obtain a moisture-sensitive element.

1-+I+lj+++-y--t? +-=1-&s,l
Since lA+ also does not use jk-+-1mAl5k♂ tsusilicate glass, a more preferable product can be obtained.

By using the moisture-sensitive material of the present invention, the following effects can be obtained.

(1) Compared to a moisture-sensitive material made only of zirconium oxide, the linearity and hysteresis curves of resistance changes with respect to changes in humidity are approximately the same by %#1 at the same humidity.

(2) Furthermore, the humidity sensing element using comb-shaped electrodes has a simple processing process. Also, by using lead-free borosilicate glass, it is possible to sinter at lower temperatures.

(3) When slicing the sintered body obtained by hot pressing to make a moisture-sensitive material, it is not necessary to use lead-free borosilicate glass containing impurities, so a moisture-sensitive element with very favorable properties can be obtained.

Example 1 After nickel was deposited on a M2O3 substrate, gold was deposited, and five comb-shaped poles as shown in FIG. 1 were formed by photoetching. In Fig. 1, 1 is 1811111.2 is 9 mm, 3 is 6 mm, 4 is 0.13 u, and 5 is 12 silk.

The following moisture-sensitive material was applied onto the comb-shaped electrode. The moisture-sensitive material is made by adding 35% each of titanium oxide, tantalum oxide, niobium oxide, and vanadium oxide to zirconium oxide, and mixing 10% of lead-free borosilicate with the total amount.
The material was crushed and kneaded in an automatic mortar made of alumina.

After pulverization and mixing, the viscosity was adjusted with butyl calpitol and an epoxy resin paint, and screen printing was applied so that the thickness of the moisture-sensitive film was approximately 20 μm.

After that, it was pre-dried for 1 hour in an atmosphere of 170℃, and
Sintering was carried out for 30 minutes in an atmosphere of ±10°C to obtain a moisture-sensitive element.

The change in resistance value of this humidity sensitive element with respect to humidity was measured at a measurement frequency of 1000 Hz and a measurement voltage of 1 V, and as a result, the following preferable values were obtained.

Position Ω At a humidity of 60 degrees, there is a large difference from the ideal value and the correctness is favorable! It has not been deleted.

In addition, the linearity of the book with K for only TiO2 is that of Zr.
Although it is better than O□, the overall resistance value is high, which is not preferable.

[Brief explanation of the drawing]

FIG. 1 shows a moisture sensing element having comb-shaped electrodes. Patent applicant: Japan Mining Co., Ltd. Agent: Patent attorney (7569) Keishi Namikawa Law 1

Claims (1)

[Scope of Claims] (1) A moisture-sensitive material containing zirconium oxide and one or more of titanium oxide, tantalum oxide, niobium oxide, and vanadium oxide. (2) A moisture-sensitive material containing lead-free borosilicate glass as a binder, which is capable of being sintered at low temperatures, and which is made of one or more of titanium oxide, tantalum oxide, niobium oxide, vanadium oxide, and yttrium oxide. is mixed with a binder and applied onto the electrode material,
A moisture sensing element characterized by being sintered after drying. (4) The electrode according to claim 3 is comb-shaped.