JPS6076604A - 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置 - Google Patents

位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Info

Publication number
JPS6076604A
JPS6076604A JP18493283A JP18493283A JPS6076604A JP S6076604 A JPS6076604 A JP S6076604A JP 18493283 A JP18493283 A JP 18493283A JP 18493283 A JP18493283 A JP 18493283A JP S6076604 A JPS6076604 A JP S6076604A
Authority
JP
Japan
Prior art keywords
deformation
phase
laser beam
measured
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18493283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052924B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Suezo Nakatate
中楯　末三
Katsuhisa Tsutsumi
勝久 堤
Toyohiko Yatagai
豊彦 谷田貝
Hiroyoshi Saito
斎藤　弘義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP18493283A priority Critical patent/JPS6076604A/ja
Publication of JPS6076604A publication Critical patent/JPS6076604A/ja
Publication of JPH052924B2 publication Critical patent/JPH052924B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18493283A 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置 Granted JPS6076604A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18493283A JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18493283A JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Publications (2)

Publication Number Publication Date
JPS6076604A true JPS6076604A (ja) 1985-05-01
JPH052924B2 JPH052924B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-13

Family

ID=16161864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18493283A Granted JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Country Status (1)

Country Link
JP (1) JPS6076604A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03502008A (ja) * 1988-09-02 1991-05-09 ブリティッシュ・テクノロジー・グループ・リミテッド インターフェロメトリー
EP0915317A1 (en) * 1997-11-04 1999-05-12 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
JP2008045922A (ja) * 2006-08-11 2008-02-28 Toyama Univ レーザスペックルによるナノメートル変位測定方法と装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03502008A (ja) * 1988-09-02 1991-05-09 ブリティッシュ・テクノロジー・グループ・リミテッド インターフェロメトリー
EP0915317A1 (en) * 1997-11-04 1999-05-12 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
WO1999023446A1 (en) * 1997-11-04 1999-05-14 European Community Method of improving the contrast of images obtained using the pulsed image-addition espi technique
US6362873B1 (en) 1997-11-04 2002-03-26 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
JP2008045922A (ja) * 2006-08-11 2008-02-28 Toyama Univ レーザスペックルによるナノメートル変位測定方法と装置

Also Published As

Publication number Publication date
JPH052924B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-13

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