JPS6075320A - ガス選択透過性複合膜およびその製造方法 - Google Patents
ガス選択透過性複合膜およびその製造方法Info
- Publication number
- JPS6075320A JPS6075320A JP18320083A JP18320083A JPS6075320A JP S6075320 A JPS6075320 A JP S6075320A JP 18320083 A JP18320083 A JP 18320083A JP 18320083 A JP18320083 A JP 18320083A JP S6075320 A JPS6075320 A JP S6075320A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas
- thin film
- siloxane compound
- composite membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/125—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
- B01D69/127—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18320083A JPS6075320A (ja) | 1983-10-03 | 1983-10-03 | ガス選択透過性複合膜およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18320083A JPS6075320A (ja) | 1983-10-03 | 1983-10-03 | ガス選択透過性複合膜およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6075320A true JPS6075320A (ja) | 1985-04-27 |
JPH038808B2 JPH038808B2 (es) | 1991-02-07 |
Family
ID=16131516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18320083A Granted JPS6075320A (ja) | 1983-10-03 | 1983-10-03 | ガス選択透過性複合膜およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6075320A (es) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61111121A (ja) * | 1984-11-02 | 1986-05-29 | Toray Ind Inc | 気体分離用複合膜 |
US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
WO2023186616A1 (en) * | 2022-03-29 | 2023-10-05 | Fujifilm Manufacturing Europe Bv | Gas separation membranes |
WO2023186615A1 (en) * | 2022-03-29 | 2023-10-05 | Fujifilm Manufacturing Europe Bv | Gas separation membranes |
EP4357008A1 (en) | 2022-10-20 | 2024-04-24 | Seiko Epson Corporation | Gas separation membrane |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730528A (en) * | 1980-07-30 | 1982-02-18 | Toyota Central Res & Dev Lab Inc | Vapor-separating member |
JPS5781805A (en) * | 1980-11-11 | 1982-05-22 | Sumitomo Electric Ind Ltd | Gas selective permeable composite membrane and its production |
JPS586207A (ja) * | 1981-07-06 | 1983-01-13 | Sumitomo Electric Ind Ltd | ガス選択透過性複合膜の製造方法 |
-
1983
- 1983-10-03 JP JP18320083A patent/JPS6075320A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730528A (en) * | 1980-07-30 | 1982-02-18 | Toyota Central Res & Dev Lab Inc | Vapor-separating member |
JPS5781805A (en) * | 1980-11-11 | 1982-05-22 | Sumitomo Electric Ind Ltd | Gas selective permeable composite membrane and its production |
JPS586207A (ja) * | 1981-07-06 | 1983-01-13 | Sumitomo Electric Ind Ltd | ガス選択透過性複合膜の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61111121A (ja) * | 1984-11-02 | 1986-05-29 | Toray Ind Inc | 気体分離用複合膜 |
US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
WO2023186616A1 (en) * | 2022-03-29 | 2023-10-05 | Fujifilm Manufacturing Europe Bv | Gas separation membranes |
WO2023186615A1 (en) * | 2022-03-29 | 2023-10-05 | Fujifilm Manufacturing Europe Bv | Gas separation membranes |
EP4357008A1 (en) | 2022-10-20 | 2024-04-24 | Seiko Epson Corporation | Gas separation membrane |
Also Published As
Publication number | Publication date |
---|---|
JPH038808B2 (es) | 1991-02-07 |
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