JPS607373U - ガス流量制御装置 - Google Patents

ガス流量制御装置

Info

Publication number
JPS607373U
JPS607373U JP9760883U JP9760883U JPS607373U JP S607373 U JPS607373 U JP S607373U JP 9760883 U JP9760883 U JP 9760883U JP 9760883 U JP9760883 U JP 9760883U JP S607373 U JPS607373 U JP S607373U
Authority
JP
Japan
Prior art keywords
mounting plate
gas
control device
gas flow
needle shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9760883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240361Y2 (OSRAM
Inventor
康克 津本
政雄 原
達雄 浅上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9760883U priority Critical patent/JPS607373U/ja
Publication of JPS607373U publication Critical patent/JPS607373U/ja
Application granted granted Critical
Publication of JPH0240361Y2 publication Critical patent/JPH0240361Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanically-Actuated Valves (AREA)
JP9760883U 1983-06-23 1983-06-23 ガス流量制御装置 Granted JPS607373U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9760883U JPS607373U (ja) 1983-06-23 1983-06-23 ガス流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9760883U JPS607373U (ja) 1983-06-23 1983-06-23 ガス流量制御装置

Publications (2)

Publication Number Publication Date
JPS607373U true JPS607373U (ja) 1985-01-19
JPH0240361Y2 JPH0240361Y2 (OSRAM) 1990-10-29

Family

ID=30232100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9760883U Granted JPS607373U (ja) 1983-06-23 1983-06-23 ガス流量制御装置

Country Status (1)

Country Link
JP (1) JPS607373U (OSRAM)

Also Published As

Publication number Publication date
JPH0240361Y2 (OSRAM) 1990-10-29

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