JPS6071703U - 光アクチユエ−タ - Google Patents

光アクチユエ−タ

Info

Publication number
JPS6071703U
JPS6071703U JP16370783U JP16370783U JPS6071703U JP S6071703 U JPS6071703 U JP S6071703U JP 16370783 U JP16370783 U JP 16370783U JP 16370783 U JP16370783 U JP 16370783U JP S6071703 U JPS6071703 U JP S6071703U
Authority
JP
Japan
Prior art keywords
photoresponsive
gas
optical actuator
optical
carbon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16370783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029130Y2 (enExample
Inventor
前田　昌作
洋 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16370783U priority Critical patent/JPS6071703U/ja
Publication of JPS6071703U publication Critical patent/JPS6071703U/ja
Application granted granted Critical
Publication of JPH029130Y2 publication Critical patent/JPH029130Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
  • Actuator (AREA)
JP16370783U 1983-10-22 1983-10-22 光アクチユエ−タ Granted JPS6071703U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16370783U JPS6071703U (ja) 1983-10-22 1983-10-22 光アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16370783U JPS6071703U (ja) 1983-10-22 1983-10-22 光アクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS6071703U true JPS6071703U (ja) 1985-05-21
JPH029130Y2 JPH029130Y2 (enExample) 1990-03-06

Family

ID=30359123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16370783U Granted JPS6071703U (ja) 1983-10-22 1983-10-22 光アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS6071703U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56113806A (en) * 1980-02-08 1981-09-08 Toshiba Corp Photoactuator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56113806A (en) * 1980-02-08 1981-09-08 Toshiba Corp Photoactuator

Also Published As

Publication number Publication date
JPH029130Y2 (enExample) 1990-03-06

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