JPS606890U - クライオポンプの防振装置 - Google Patents

クライオポンプの防振装置

Info

Publication number
JPS606890U
JPS606890U JP9738783U JP9738783U JPS606890U JP S606890 U JPS606890 U JP S606890U JP 9738783 U JP9738783 U JP 9738783U JP 9738783 U JP9738783 U JP 9738783U JP S606890 U JPS606890 U JP S606890U
Authority
JP
Japan
Prior art keywords
cryopump
bellows
vibration isolator
pump case
refrigerator unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9738783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041348Y2 (enrdf_load_stackoverflow
Inventor
押井　清志
秀敏 森本
守住　克己
Original Assignee
アルバツク・クライオ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルバツク・クライオ株式会社 filed Critical アルバツク・クライオ株式会社
Priority to JP9738783U priority Critical patent/JPS606890U/ja
Publication of JPS606890U publication Critical patent/JPS606890U/ja
Application granted granted Critical
Publication of JPH041348Y2 publication Critical patent/JPH041348Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP9738783U 1983-06-25 1983-06-25 クライオポンプの防振装置 Granted JPS606890U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9738783U JPS606890U (ja) 1983-06-25 1983-06-25 クライオポンプの防振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9738783U JPS606890U (ja) 1983-06-25 1983-06-25 クライオポンプの防振装置

Publications (2)

Publication Number Publication Date
JPS606890U true JPS606890U (ja) 1985-01-18
JPH041348Y2 JPH041348Y2 (enrdf_load_stackoverflow) 1992-01-17

Family

ID=30231675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9738783U Granted JPS606890U (ja) 1983-06-25 1983-06-25 クライオポンプの防振装置

Country Status (1)

Country Link
JP (1) JPS606890U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Also Published As

Publication number Publication date
JPH041348Y2 (enrdf_load_stackoverflow) 1992-01-17

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