JPS606808A - Optical measuring device - Google Patents

Abstract

PURPOSE:To make easily and quickly adjustment by moving dividing and coupling means which are spaced from each other and are placed in parallel freely in the direction intersecting orthogonally to the optical path of parallel scanning beams and selectively in the position in or out of the optical path. CONSTITUTION:A slider 52 is driven along guide rails 56A, 56B to position a dividing means 46 and a coupling means 48 placed on the slider 52 onto the optical path of parallel scanning beams 20 in the case of measuring size of an object 24 to be measured in the scanning direction thereof. The positioning in this case is accomplished by fixing preliminarily a positioning bushing 54B in a fixing means 54 to the prescribed position on the rail 56A and positioning the means 46 and the means 48 onto the optical path of the beams 20 when the slider 52 contacts the bushing 54B.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an optical measurement uW that measures the dimensions of an object to be measured using a parallel scanning light beam.

Conventionally, a rotating scanning light beam (laser beam) is converted into a parallel scanning light beam passing between the collimator lens and a condensing lens by a collimator lens, and an object to be measured is placed between the collimator lens and the condensing lens. There has been an optical measuring device that measures the dimensions of an object to be measured based on the length of time of a dark or bright area that occurs when the parallel scanning light beam is blocked by the object.

For example, as shown in FIG. This scanning beam 17 is converted into a parallel scanning light beam 20 by a collimator lens 18, and this parallel scanning light beam 2
o, the object to be measured 24 placed between the collimator lens 18 and the condensing lens 22 is scanned at high speed.
The dimension of the object to be measured 24 in the scanning direction (Y direction) is measured from the length of time of the dark part or bright part of the image produced by 4. That is, the plane (j scanning light beam 20
The brightness and darkness of the light receiver 26 at the focal position of the condensing lens 22
The signal from the light receiver 2G is input to the preamplifier 28, where it is amplified and then sent to the distinction selection circuit 30. This segment 1 to selection circuit 30 selects whether the output voltage of the light receiver 26 is 1 or
This is the time during which the object to be measured 24 is being scanned (knob).
1 to generate a voltage V for opening the circuit 32 and output it to the gate circuit 32. This gate circuit 3
2, the clock pulse CP is input from the clock pulse oscillator 34, so the gate circuit outputs the time t corresponding to the dimension of the object to be measured 24 in the scanning direction (for example, when sighted at dusk).
A clock pulse P corresponding to the clock pulse P is input to the counting circuit 36. The counting circuit 36 increments this clock pulse [] by 1 and outputs a counting signal to the digital display 38, and the digital display 38 digitally displays the scanning direction 1'1J of the object 24, that is, the outer diameter. It will be displayed. On the other hand, the rotating mirror 16 is driven by a synchronous motor /l/l which is driven synchronously by the output of a synchronous sine wave oscillator 40 and a power amplifier 42, which generates a sine wave in synchronization with the output of the cock pulse oscillator 34. Front 8 self-clutter pulse oscillator 34
The output tally t<Jless C1> is rotated by v1, and the measurement accuracy is adjusted to within 100 degrees.

Such high-speed scanning laser measuring devices are becoming widely used because they can measure the length, thickness, etc. of hyperactive objects and high-temperature objects with high viscosity.

However, in the case of the above-mentioned measuring device, the measurement range is limited to the width of the parallel rays obtained by the collimator lens 181, and the longer the object is, the larger the collimator lens must be. Not only is it quite difficult to manufacture a large collimator lens, but also the cost (cost 1) increases considerably.

J, the minute Fl'i' fit in the above measuring device:
What about Ellchimm/Nokurusu? lji 1llIIIt is determined by the scanning speed per unit length of the constant object (specific scanning speed), and therefore it is inversely proportional to the specific scanning speed.For this reason, the amount of treasure to be affected is large. In this case, if a large collimator lens is used, the specific scanning speed will increase even if the rotational speed of the rotating mirror is kept constant, resulting in a decrease in resolution OL. When a lens is used, there is a disadvantage that the resolution is lower than when a small collimator lens is used when a small object to be measured is 4) 1) fixed.

The above problem is related to the rotation mirror IP7. This can be done by slowing down the wave speed and reducing the specific scanning speed (7 degrees can be improved, but in this case the number of scans will decrease, so nB will decrease in terms of averaging the measured values). .-Force ratio It is possible to try to improve the averaging accuracy by increasing the number of scans while keeping the scanning speed constant, but in this case, tuning with the electric circuit including the optical transmitter is complicated; It is also not bad from the point of view of speeding up the response speed.

On the other hand, as shown in FIG. 2, for example, Japanese Patent Application Laid-open No. 160000/1983 discloses that in an optical measuring device as shown in FIG.
0, and changes the optical path of at least a portion of the light beam 20, and divides the light beam 20 into a plurality of parallel scanning light beams 20, which are parallel to each other and are spaced apart from each other. Scanning light beam 20△, 20B splitting means/1
6, and the plurality of divided parallel scanning light beams 2OA.
, 20 B, and divides the optical path between the divided parallel scanning light beams 20Δ, 20 r3
and the length of time of the bright or dark portion of the parallel scanning light beams 2OA and 20B reaching the light receiver 26 by changing the gap so as to reduce the gap between them. and a peak-resulting means 50 for calculating the dimension in the scanning direction of the bright part or part 1a from the object to be measured 24 by the portions of the divided light beams 20A and 20B.
The edges or boundaries of the are scanned to form a bright part and a dark part respectively, and the length of time of this dark part and the length of the gap in the scanning direction between the divided parallel scanning beams 20△, 201] generated by the division are determined. From Sato No. 10, an optical measuring device for measuring 1 force and 240 dimensions of a measured object has been proposed.

The dividing means 46 may, for example, split the parallel scanning light beam 20
A first reflecting mirror 46Δ that divides the image into two at right angles and on the scanning direction dimension side, and a first anti-Q1 mirror 46A that divides and reflects the two sides of the first reflecting mirror 4G. a pair of second reflecting mirrors 4 that reflect the single ray beam parallel to and in the same direction as the parallel scanning ray beam 20;
6B, and the f7f combining means 48
is the split mold 1 formed by the split pH 1 means 46.
j) A pair of first anti-reflection mirrors 748Δ which are perpendicular to the beams 2OA and 20B and anti-1111η inward in the scanning direction, and the first reflective mirrors 748A of the moon, The light beam reflected by the mirror 48A is split in the same direction and parallel to the parallel scanning light beam 20 by a second reflecting mirror 4 having two reflecting surfaces.
It was created from 8B.

In such an optical measuring device, when the size of the object to be measured 24 changes, the scanning direction between the first reflecting mirror 46A and the second reflecting mirror 46B that is 63<J to the dividing means 7'IO is changed. , and the distance in the scanning direction between the first reflecting mirror 118A and the second counter mirror 48B in the matching means 48 must be synchronously reduced or enlarged.

In this case, in order to maintain the accuracy of the distance R1 between the first reflecting mirror and the second counter mirror as it is to the measurement accuracy of the device, the first and second counter mirrors are moved synchronously. The device used for this measurement must have an accuracy corresponding to this measurement accuracy.

However, optical measurement 4 as shown in FIG.
The measurement accuracy in the % quotient is 1 μm in the lowest case, for example, the dividing means 46 and 151 and the joint 514
If we use a device that mechanically drives 1FII, we try to improve the mechanical accuracy corresponding to the accuracy of measurement.
These dividing means 46, merging means/18, and their synchronous drive devices are large-scale and expensive, and when driven according to the size of the object to be measured 24,
A problem arises in that the adjustment is difficult and time consuming.

This invention was made in view of the above problems, and
The object of the present invention is to provide an optical measuring device which can divide parallel scanning light beams easily, quickly, and with high accuracy using a simple configuration.

The present invention includes a parallel scanning light beam light generation source, and a parallel scanning light beam light source that is arranged on the optical path of a 51' fj scanning light beam incident from the parallel scanning light beam generation source, and that changes the optical path of at least a part of the light beam. dividing means for dividing into a plurality of divided parallel scanning light beams that are parallel to the parallel scanning light beam during human QJ and spaced apart from each other; and at least one optical path of the plurality of divided parallel scanning light beams. The parallel scanning light beams reach the light receiver by changing the optical path of the parallel scanning light beams that reach the light receiver by changing the optical path of the split parallel scanning light beams so that the gap between the split parallel scanning light beams is reduced. From the length of time in the light or dark part to the light part Iζ
has a calculation means for calculating the scanning direction of the dark area, and causes each of the divided light beams to scan the edge or boundary of the object to be measured, and calculates the bright area and the dark area respectively. In the optical measurement PfW that measures the surface area of the object to be measured, from the length of the dark part and the length of the gap in the scanning direction between the split scanning beams caused by the splitting, The distribution dividing means and the +n combining means are placed as a pair in parallel and spaced apart, and are movable in a direction perpendicular to the optical path of the parallel scanning light beam, and the dividing means and the +n combining means are arranged in parallel with each other. The above object is achieved by providing a slider that is selectively moved to a position on or outside the optical path of the scanning light beam, and means for fixing the position of the slider.

It is something that

Further, in the present invention, the slider is provided with a plurality of pairs of dividing means and a merging means, each of which has a different distance between the divided parallel scanning light beams formed by the dividing means and a gap reduced by the merging means. The above object is achieved by selectively positioning a pair of dividing means and merging means in the optical path.

Further, in the present invention, the calculation means is connected to the division means J:
The above-mentioned object is provided with a means for detecting the width of the gap between the divided parallel scanning light beams formed by the parallel scanning beam, and a display device that takes in the output signal of the width detecting means and calculates the dimensions of the object to be measured. The goal is to achieve the following.

This defense further provides that the splitting means includes a first reflecting mirror that reflects at least a portion of the parallel scanning light beam from the parallel scanning light beam generation source in the scanning direction; a second reflecting mirror that reflects the split light beam parallel to and in the same direction as the parallel scanning light beam; and a positioning member that is interposed between the first and second reflecting mirrors and positions them in the scanning direction. In this way, the above object is achieved.

Further, the present invention includes the merging means between first reflecting mirrors that reflect the divided parallel scanning light beams from the dividing means in the scanning direction and in the gap reduction direction. a second reciprocating mirror for redirecting the split light beam in parallel and in the same direction as the parallel scanning light beam; and a positioning member interposed between the first and second reflecting mirrors to position both mirrors in the scanning direction. The above object is achieved by having the following.

Further, in the present invention, the positioning member is at least one end face parallel member that is interposed between the reflective surfaces 17JJ of the first and second anti-9 inch mirrors and has an end face that is parallel to these reflective surfaces. This achieves the above objective.

In addition, the present invention achieves the above object by configuring the end face parallel member as a light transmitting member such as glass.

Further, the present invention achieves the above object by forming the end face parallel member into a frame shape having a through hole through which the divided light beam reflected by the first reflecting mirror passes.

Embodiments of the present invention will be described below with reference to the drawings.

Here, in this embodiment, the same or corresponding parts as those of the conventional optical measuring device shown in FIGS. 1 and 2 will be designated by the same reference numerals, and a description thereof will be omitted.

This embodiment, as shown in FIGS. 3 and 4,
In an optical measuring device similar to that shown in FIG. 17 is movable in a direction perpendicular to the optical path of the scanning light beam 2o, and the dividing means 46 and the merging means 48 are selectively positioned on or outside the optical path of the parallel scanning light beam 20. The slider 52 is provided with a slider 52 that moves symmetrically, and a position stator ff154 for the slider 52.

The slider 52 has a pair of force idle rails 56 disposed in parallel and perpendicular to the parallel scanning light beam 20 and also perpendicular to the scanning direction of the parallel scanning light beam 2o.
The kite rails 56A and 56B are mounted on the kite rails 56A and 56B so as to be slidable thereon.

The dividing means 46 and the merging means 48 are connected to the slider 5.
2 are integrally attached to the upper surface of the parallel scanning light beam 20 so as to stand upright parallel to the scanning direction of the parallel scanning light beam 20 and parallel to each other.

The range in which the slider 52 is moved along the guide rails 56A and 56B is the same as the dividing means 46 and 17.
This is a range in which the IQ 48 can selectively move between the optical path and the outside of the optical path of the parallel scanning optical beam 20.

The fixing means 54 is screwed onto the slider 52 and is fastened to the guide rails 56A and 56B at any position relative to the guide rails 56A and 56B of the slider 52, thereby fixing the slider 52 in the moving direction. The fixed handle 54Δ and the slider 52 move along the guide rails 56Δ, 56B, and the combining means 48A divides the dividing means 46 and 0 into the parallel scanning light beam 2.
A positioning bush 54B is mounted on the guide rail 56B so that the slider 52 comes into contact with the optical path when the slider 52 is positioned on the optical path.

The symbol @58 in the figure indicates a gap width detecting means, and this gap width detecting means 58 is connected to the positioning bush 54 by the slider 52.
A proximity switch that outputs a signal when the dividing means 46 and (7f combining means 48 placed on this slider 52 are positioned on the optical path of the parallel scanning light beam 2o). When this switch 58A is turned on, a preset nll times signal is output to the digital display 38.
: Cleared gap width B! The device 58 constitutes a part of the deception means 50 in J3 in this embodiment.

The dividing means 46 divides the parallel scanning light beam 20 into two at right angles and on both sides in the scanning direction. A first reflecting mirror 46A having a right triangular shape and having two non-conforming surfaces that are opposite to each other.
A pair of triangular second reflecting mirrors 46B that reflect the light beam divided and reflected by the reflecting mirror/16A in parallel and in the same direction as the parallel scanning light beam 20, and these first and second reflecting mirrors 46A. , 4.68, and a positioning part t for positioning both in the scanning direction.
460, the positioning member 60 is interposed between the reflective surfaces of the first and second reflective mirrors 46A and 46B, and is composed of two crows having end surfaces parallel to these reflective surfaces. It is composed of end face parallel members 60A and 60B.

These end face parallel portions +J60A and 60B each have the same thickness and are cut out from a single sheet of glass.

The first and second reflecting mirrors 46A146B and the positioning member 60 are housed in a case 62 that has a rectangular cylindrical cross section and is formed long in parallel to the scanning direction of the parallel scanning light beam 20, and is pressed by a spring 64. By being biased by the positioning end surface 68 via the member 66, the parallel scanning light beam 20 is positioned in the scanning direction.

The reference numeral 71 in the figure is a hair 7 that adjusts the force of the spring 64.
Screws 72 represent openings formed on the inlet and outlet sides of the parallel scanning light beam of the case 62, respectively, through which the parallel scanning light beam can exit.

The merging means 48 is formed symmetrically with the dividing means 46 in FIG.
6, a pair of first anti-fouling mirrors 48Δ which reflect the divided parallel scanning light beams 2OA and 20B from the dividing means 46 in the scanning direction and the gap reduction direction; The split light beam reflected by the first reflecting mirror 48A is converted into the parallel scanning light beam 20.
a second reflecting mirror that aligns the two reflecting surfaces parallel to and in the same direction; and a positioning member that is interposed between the first and second reflecting mirrors 48 and /18B and positions them in the scanning direction. 70.

The first anti-q4 mirror 48Δ in the merging means 4B is the second anti-q4 mirror in the dividing means 46! A second reflective mirror 48 corresponds to the No. 11 mirror 46B and also enters the merging means 48.
B has the same configuration as the first reflecting mirror 46A included in the dividing means 46.

Similarly, the positioning member 70 is also made of a glass end face parallel member 70A similar to the positioning member 60 in the dividing means 46.
, 70B.

Further, the falsification means 50 has a structure in which the gap width detection means 58 is provided in an arithmetic circuit similar to that in the conventional optical measuring device shown in FIG.

Next, the operation of the above embodiment will be explained.

When measuring the dimensions of the object to be measured 24 in the scanning direction, the slider 52 is driven by the guide rails 56A and 56B, and the dividing means 46 and merging means 4B mounted on the slider 52 generate parallel scanning light beams. 20 on the optical path.

For positioning at this time, the positioning bushing 54B of the fixing means 54 is fixed in advance at a predetermined position on the guide rail 56Δ, and when the slider 52 comes into contact with this positioning bushing 54B, the dividing means 46 and the merging means 48 are This is done by placing it on the optical path of the parallel scanning light beam 20.

After moving the slider 52 to a predetermined position, the fixing means 5
4, tighten the fixed handle 54A (, slider 5
2 to the guide rails 56A, 5'6B.

When the laser beam 12 is oscillated from the laser tube 10 in this state, the parallel scanning light beam 20 converted by the collimator lens 18 is transmitted from the lower 2 to the first
The reflection mirror of /16△ is reached.

At this first reflecting mirror 46△, the parallel scanning light beam 2
0 is divided into two at right angles inward in the scanning direction and reflected, and after passing through the end face parallel members 60Δ and 60B, a pair of divided parallel scanning light beams 20Δ are formed by the reflecting mirror 46B of the rear cylinder 2.
, 201B and C is reflected.

At this time, the gap between these divided parallel scanning light beams 20Δ208 is set by the thickness of the end face parallel members 60Δ, 60B, and its ti 15t is also set by the end face parallel member 60.
The viscosity corresponds to the thickness of A and 60B.

The divided parallel scanning light beams 20Δ and 20B scan both ends of the object to be measured 24, respectively (71 and 4).
The light is reflected at right angles inward in the scanning direction by the eight first reflecting mirrors 48Δ.

This reflected light beam ends up in parallel members 70Δ, 70
After passing through B, it is reflected by the second reflecting mirror 48B in parallel and in the same direction as the parallel scanning light beam 20, and is focused by the condenser lens 22 ("to the light receiver 26").

The width d of the shadow portion between the divided parallel scanning light beams 20A and 20B after being reflected by the second reflecting mirror 48B is determined from the dimension of the object 24 in the scanning direction. The gap between the scanning light beams 20Δ, 208 is subtracted.

The light beam received by the receiver 26 is converted into an electrical signal according to its brightness 1n, corresponding to the time t corresponding to the part d of the shape, as in the optical measuring position Pi shown in FIG. A clock pulse t is outputted to the division circuit 36.

This counting circuit 36 calculates the divided parallel scanning light beams 2OA, 20B based on a predetermined value from the gap width setter 58B which is applied to the gap width detection means 58.
A count signal corresponding to the gap between the two is output.

Therefore, the scale circuit 36 outputs the dimension in the scanning direction of the object 24 to be measured by ]-1,000d-D to it'';!ζ and outputs it to the -C digital display 38. ) will be displayed.

If the scanning direction of the object 24 is small and there is no need to split the parallel scanning light beam 20, the slider 52 is driven upward in FIG. 3 along the guide rails 56Δ, 56B; As a result, the dividing means 46 and the combining means 48 are held outside the optical path of the parallel scanning light beam 20, and in this state the slider 52 is fixed by the fixed handle 54A.

Here, in the above embodiment, a pair of dividers rQ46 and 17
f combining means 48 is used, but this dividing means 4
6 and the fjf combining means 48 may be prepared in several sizes with different gap sizes between the divided parallel scanning light beams 2OA 120B, and may be replaced as necessary.

In this case, the setting value of the gap width setter 58B included in the gap width detection means 58 is changed according to the noise of the dividing means 46 and the combining means 48.

Furthermore, in the above embodiment, only the pair of dividing means 46 and merging means 48 are mounted on the slider 52;
This allows multiple pairs of dividing means and merging means to be moved by slider 5.
2 so that they can be selectively positioned in or out of the optical path of the parallel scanning light beam 20.

In this case, there is an advantage that the operation of replacing the dividing means and the IH combining means can be omitted.

In this case, the gap width detection means 58 may be configured to manually change its set value depending on the size of the selected pair of dividing means and merging means, and furthermore, the switch 58A may be configured to switch between the dividing means and the ( The dividing means and (jf
The gap width setting device 58B automatically corresponds to the size of the joining means.
The setting value may be changed.

Note that the positioning members 60 and 70 in the above embodiments are glass blood transfusion parallel members 60A, 6013.70A,
70B, the present invention is not limited to this, and the positioning members 60 and 70 may be any member that can be placed between the first reflecting mirror and the second reflecting mirror. It may also be a frame-shaped member provided with a through hole through which the divided light beams in the means 46 and the merging means 48 pass.

In this case, the frame part is made of light-opaque sawn paddy (even if it is made of 8
:stomach.

However, as in the above embodiment, the positioning member 60
．． When 70 is composed of a glass-made end-face flat member 1-7, this glass-made end-face parallel part (A) can be formed by cutting a plate glass whose plate thickness has been finished with high precision. This has the advantage that the distance PAI between the reflecting mirrors can be precisely determined, and it can be constructed easily and inexpensively.

Since the present invention is configured as described above, the dividing means and the zero
This has an excellent effect in that the gap between the divided parallel scanning light beams in the combining means and the reduction width of this gap can be changed easily and quickly without changing the measurement accuracy.

[Brief explanation of the drawing]

Figure 1 is a block diagram showing a conventional optical measuring device, Figure 2 is a block diagram showing a conventional optical measuring device.
Figure 3 is a block diagram showing another conventional optical measuring device.
The figure is a plan view showing an embodiment of the optical measuring device according to the present invention, and FIG. 4 is a partial block diagram of the same embodiment.
It is a sectional view of a portion corresponding to line -IV. 12... Laser beam, 20... Parallel scanning light beam, 2OA, 20B... Divided parallel scanning light beam, 22.
...Condensing lens, 24...Measurement object, 26...Light receiver, 46...Dividing means, 46A, 48A...First reflecting mirror, 46B, 48
B... Second reflection mirror, 48... Merger means, 50... Fraud means, 52... Slider, 54... Fixing means, 56A, 56B... Guide rail, 58...・Gap width detection means, 60.70...positioning member, 60A, 60B, 70A, 70B-0i
ii iTh 'IT-? 'J Of+ +A. Agent Kei Matsuyama 1 (,'i (and 1 other person)

Claims (1)

Scope of Claims: (1) a parallel scanning light beam generation source; and a parallel scanning light beam source disposed on the optical path of the parallel scanning light beam incident from the parallel scanning light beam generation source; dividing means for changing the incident parallel scanning light beam into a plurality of divided parallel scanning light beams that are parallel to each other and spaced apart from each other; and at least one light beam of the plurality of divided parallel scanning light beams. a merging means arranged on the road for changing the optical path of the divided parallel scanning light beams so that the gap between them is reduced so that they reach a light receiver, and a bright part or and a means for calculating the dimension in the scanning direction of the bright part or the dark part from the length between I''f of the dark part, and the end or boundary of the object to be measured is The part to be measured is scanned to form a bright part and a dark part respectively, and from the sum of the distance between the dark parts and the length of the gap in the scanning direction between the divided parallel scanning beams, it is possible to determine the 1, in which the dividing means and the combining means are placed as a pair in parallel and spaced apart, and are movable in a direction perpendicular to the optical path of the parallel scanning beam 11; An optical measuring device comprising: a slider for selectively moving the dividing means and the merging means to a position on or outside the optical path of the parallel scanning light beam; and means for fixing the position of the slider. (2) A plurality of pairs of dividing means and merging means, each of which has a different gap J3 between the divided parallel scanning light beams formed by the dividing means and a distance of the gap reduced by the merging means, are arranged on the slider. The optical measuring device according to claim 1, wherein a plurality of pairs of dividing means and merging means are selectively positioned in the optical path. (3) The bonding means is formed by the dividing means. Claim 1 comprising a means for detecting the width of the gap between the divided parallel scanning light beams, and a projector that takes in the output signal of the width detecting means and derives a method for the object to be measured. (4) The splitting means includes a tenth splitting mirror that reflects at least a portion of the parallel scanning light beam from the parallel scanning light beam generation source in the scanning direction; a second reflecting mirror that reflects the split light beam reflected by the first reflecting mirror in parallel and in the same direction as the parallel scanning light beam;
4. The optical measuring device according to claim 1, 2 or 3, further comprising: a positioning member interposed between the reflective mirrors and for positioning both in the scanning direction. (5) The merging means includes a first reflecting mirror that reflects the divided parallel scanning light beams from the dividing means in the scanning direction and the gap reduction direction, and a divided light beam reflected by the first reflecting mirror. a second reflecting mirror that reflects the parallel scanning light beam in parallel and in the same direction; and a positioning member that is interposed between the first and second reflecting mirrors and positions them in the scanning direction. one'
Claims 1 to 4 JJ'i (11t) The optical measuring device according to claim 1. (6) The positioning member is located between the reflective surfaces of the first and second reflective mirrors. (7) The end surface is interposed as at least one end surface parallel member having an end surface parallel to these reflecting surfaces. Optical system (8) according to claim 6, wherein the parallel member is made of a light-transmissive member such as glass. 7. The optical measuring device according to claim 6, which has a frame shape with holes.