JPS6067935U - Thin film thermosensitive recording head - Google Patents

Thin film thermosensitive recording head

Info

Publication number
JPS6067935U
JPS6067935U JP16062883U JP16062883U JPS6067935U JP S6067935 U JPS6067935 U JP S6067935U JP 16062883 U JP16062883 U JP 16062883U JP 16062883 U JP16062883 U JP 16062883U JP S6067935 U JPS6067935 U JP S6067935U
Authority
JP
Japan
Prior art keywords
thin film
recording head
thermosensitive recording
film thermosensitive
wear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16062883U
Other languages
Japanese (ja)
Inventor
守 森田
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP16062883U priority Critical patent/JPS6067935U/en
Publication of JPS6067935U publication Critical patent/JPS6067935U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、従来技術の保護膜及び耐摩耗膜部分の断面図
、第２図は本考案の一実施例の断面図である。 １・・・・・・基板、２・・・・・・発熱抵抗体、３・
・・・・・配線導体、４・・・・・・保護膜、５・・・
・・・耐摩耗膜、６・・・・・・保護膜、７・・・・・
・耐摩耗膜。FIG. 1 is a sectional view of a protective film and wear-resistant film portion of the prior art, and FIG. 2 is a sectional view of an embodiment of the present invention. 1...Substrate, 2...Heating resistor, 3.
...Wiring conductor, 4...Protective film, 5...
...Abrasion resistant film, 6...Protective film, 7...
・Abrasion resistant film.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 発熱抵抗体と配線導体の耐摩耗膜としてプラズマ窒化珪
素を用いたことを特徴とする薄膜感熱記録ヘッド。A thin film thermal recording head characterized in that plasma silicon nitride is used as a wear-resistant film for a heating resistor and a wiring conductor.
JP16062883U 1983-10-19 1983-10-19 Thin film thermosensitive recording head Pending JPS6067935U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16062883U JPS6067935U (en) 1983-10-19 1983-10-19 Thin film thermosensitive recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16062883U JPS6067935U (en) 1983-10-19 1983-10-19 Thin film thermosensitive recording head

Publications (1)

Publication Number Publication Date
JPS6067935U true JPS6067935U (en) 1985-05-14

Family

ID=30353247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16062883U Pending JPS6067935U (en) 1983-10-19 1983-10-19 Thin film thermosensitive recording head

Country Status (1)

Country Link
JP (1) JPS6067935U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942240A (en) * 1972-03-06 1974-04-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942240A (en) * 1972-03-06 1974-04-20

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