JPS6067364U - 反応管洗浄用アダプタ - Google Patents

反応管洗浄用アダプタ

Info

Publication number
JPS6067364U
JPS6067364U JP15822183U JP15822183U JPS6067364U JP S6067364 U JPS6067364 U JP S6067364U JP 15822183 U JP15822183 U JP 15822183U JP 15822183 U JP15822183 U JP 15822183U JP S6067364 U JPS6067364 U JP S6067364U
Authority
JP
Japan
Prior art keywords
reaction tube
adapter
tube cleaning
cleaning adapter
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15822183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233013Y2 (enrdf_load_stackoverflow
Inventor
恭一 大野
井窪　裕之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15822183U priority Critical patent/JPS6067364U/ja
Publication of JPS6067364U publication Critical patent/JPS6067364U/ja
Application granted granted Critical
Publication of JPS6233013Y2 publication Critical patent/JPS6233013Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP15822183U 1983-10-13 1983-10-13 反応管洗浄用アダプタ Granted JPS6067364U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15822183U JPS6067364U (ja) 1983-10-13 1983-10-13 反応管洗浄用アダプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15822183U JPS6067364U (ja) 1983-10-13 1983-10-13 反応管洗浄用アダプタ

Publications (2)

Publication Number Publication Date
JPS6067364U true JPS6067364U (ja) 1985-05-13
JPS6233013Y2 JPS6233013Y2 (enrdf_load_stackoverflow) 1987-08-24

Family

ID=30348615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15822183U Granted JPS6067364U (ja) 1983-10-13 1983-10-13 反応管洗浄用アダプタ

Country Status (1)

Country Link
JP (1) JPS6067364U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254081A (ja) * 1985-09-02 1987-03-09 Toshiba Mach Co Ltd 気相成長装置
JP2010045094A (ja) * 2008-08-11 2010-02-25 Sumco Corp 石英部材の洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254081A (ja) * 1985-09-02 1987-03-09 Toshiba Mach Co Ltd 気相成長装置
JP2010045094A (ja) * 2008-08-11 2010-02-25 Sumco Corp 石英部材の洗浄方法

Also Published As

Publication number Publication date
JPS6233013Y2 (enrdf_load_stackoverflow) 1987-08-24

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