JPS6067364U - Reaction tube cleaning adapter - Google Patents

Reaction tube cleaning adapter

Info

Publication number
JPS6067364U
JPS6067364U JP15822183U JP15822183U JPS6067364U JP S6067364 U JPS6067364 U JP S6067364U JP 15822183 U JP15822183 U JP 15822183U JP 15822183 U JP15822183 U JP 15822183U JP S6067364 U JPS6067364 U JP S6067364U
Authority
JP
Japan
Prior art keywords
reaction tube
adapter
tube cleaning
cleaning adapter
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15822183U
Other languages
Japanese (ja)
Other versions
JPS6233013Y2 (en
Inventor
恭一 大野
井窪　裕之
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP15822183U priority Critical patent/JPS6067364U/en
Publication of JPS6067364U publication Critical patent/JPS6067364U/en
Application granted granted Critical
Publication of JPS6233013Y2 publication Critical patent/JPS6233013Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は反応管に装着したアダ′ブタの側断面構成図、
また第２図はｘ−ｘ’線における断面図である。 図において、１はキャップ部、２は撒布部、３は反応管
、４は導入管、７は分岐孔。Figure 1 is a side cross-sectional diagram of the adapter attached to the reaction tube.
Moreover, FIG. 2 is a sectional view taken along the line xx'. In the figure, 1 is a cap part, 2 is a spraying part, 3 is a reaction tube, 4 is an introduction tube, and 7 is a branch hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 垂直に保持した円筒状反応管の頂部に設けられ該反応管
の内壁に洗浄液を供給するのに使用するアダプタが上部
に洗浄液の導入管を備えたキャップ部と該キャップ部に
挿入されネジにより継合する撒布部とから構成されてお
り、前記導入管より供給された洗浄液が継合部に設けら
れた複数個の分岐孔により分岐すると共に撒布部の表面
を通って反応管の内壁部に導かれることを特徴とする反
応管洗浄用アダプタ。An adapter, which is installed at the top of a cylindrical reaction tube held vertically and is used to supply cleaning liquid to the inner wall of the reaction tube, is connected to a cap part provided with a cleaning liquid introduction tube at the top, and which is inserted into the cap part and connected with a screw. The washing liquid supplied from the introduction pipe is branched through a plurality of branch holes provided in the joint part, and is introduced to the inner wall of the reaction tube through the surface of the spraying part. An adapter for cleaning reaction tubes.
JP15822183U 1983-10-13 1983-10-13 Reaction tube cleaning adapter Granted JPS6067364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15822183U JPS6067364U (en) 1983-10-13 1983-10-13 Reaction tube cleaning adapter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15822183U JPS6067364U (en) 1983-10-13 1983-10-13 Reaction tube cleaning adapter

Publications (2)

Publication Number Publication Date
JPS6067364U true JPS6067364U (en) 1985-05-13
JPS6233013Y2 JPS6233013Y2 (en) 1987-08-24

Family

ID=30348615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15822183U Granted JPS6067364U (en) 1983-10-13 1983-10-13 Reaction tube cleaning adapter

Country Status (1)

Country Link
JP (1) JPS6067364U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254081A (en) * 1985-09-02 1987-03-09 Toshiba Mach Co Ltd Vapor growth device
JP2010045094A (en) * 2008-08-11 2010-02-25 Sumco Corp Method for cleaning quartz member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254081A (en) * 1985-09-02 1987-03-09 Toshiba Mach Co Ltd Vapor growth device
JP2010045094A (en) * 2008-08-11 2010-02-25 Sumco Corp Method for cleaning quartz member

Also Published As

Publication number Publication date
JPS6233013Y2 (en) 1987-08-24

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