JPS6067360U - 電子ビ−ム蒸発装置 - Google Patents

電子ビ−ム蒸発装置

Info

Publication number
JPS6067360U
JPS6067360U JP12736084U JP12736084U JPS6067360U JP S6067360 U JPS6067360 U JP S6067360U JP 12736084 U JP12736084 U JP 12736084U JP 12736084 U JP12736084 U JP 12736084U JP S6067360 U JPS6067360 U JP S6067360U
Authority
JP
Japan
Prior art keywords
electron beam
hearth
hopper
beam evaporation
evaporation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12736084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139713Y2 (enrdf_load_stackoverflow
Inventor
征彦 中島
御子神　昭夫
正志 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP12736084U priority Critical patent/JPS6067360U/ja
Publication of JPS6067360U publication Critical patent/JPS6067360U/ja
Application granted granted Critical
Publication of JPH0139713Y2 publication Critical patent/JPH0139713Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12736084U 1984-08-22 1984-08-22 電子ビ−ム蒸発装置 Granted JPS6067360U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12736084U JPS6067360U (ja) 1984-08-22 1984-08-22 電子ビ−ム蒸発装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12736084U JPS6067360U (ja) 1984-08-22 1984-08-22 電子ビ−ム蒸発装置

Publications (2)

Publication Number Publication Date
JPS6067360U true JPS6067360U (ja) 1985-05-13
JPH0139713Y2 JPH0139713Y2 (enrdf_load_stackoverflow) 1989-11-29

Family

ID=30289287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12736084U Granted JPS6067360U (ja) 1984-08-22 1984-08-22 電子ビ−ム蒸発装置

Country Status (1)

Country Link
JP (1) JPS6067360U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0139713Y2 (enrdf_load_stackoverflow) 1989-11-29

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