JPS6066347A - Electron beam recorder for disc - Google Patents

Abstract

PURPOSE:To prevent vacuum in an electron optical lens barrel surely from being turned to atmospheric pressure by malfunction by forming a small hole on a smoothing plate between the electron optical lens barrel and a sample room and turning the sample room to atmospheric pressure through the small hole. CONSTITUTION:The smoothing body 3 having the small hole 11 is formed between the electron optical lens barrel 1 held in vacuum by a pump 4 and the sample room 2. The smoothing plate 3 is held by a differential exhaust system consisting of the high pressure air of a pipe A, the low cavuum exhaust of a pipe P1 and the high vacuum exhaust of a pipe P2 and seeled so as to be vacuum. If the whole sample room is moved to the right, the sample room 2 is turned to atmospheric pressure state through the small hole 11 under the condition that the vacuum state of the optical lens parrel 1 is held as it is. Under said condition, a substrate 8 is replaced, the whole sample room is returned to the original position, a vacuum pump 7 is started, and a prescribed pattern is drawn on a substrate 8 by electron beams 6. Consequently, the vaccum state of the lens barrel 1 can be surely prevented from being damaged by malfunction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a circular 4 1] Concerning recording.

[Prior art and its problems]

Conventionally, an IC mask and a wafer substrate placed in a vacuum were exposed to light using an electron beam.
1. Drawing the desired pattern information. There is a child beam lithography device.-One rotation of the sword
There is a device ■ that performs drawing by placing a coating on the substrate and rotating it completely while rotating the substrate. Then, at the same time (・τ, it is necessary to continuously move linearly in one direction. Such a method of introducing power is generally -T
[However, there is a tendency for double damage to occur.Furthermore, the sample chamber that passes over the substrate is under vacuum during drawing
The substrate is replaced, and times A1 and A1 are repeated alternately with the atmosphere. At this time, it is desirable that the electron optical column for controlling the 1-heson beam be kept in a vacuum state continuously without being exposed to the atmosphere.

Once in the atmosphere, I vacuumed it up and heated the electron gun.

E, which extracts and stabilizes electrons, costs 1 yen when it is 75.
1, and has the disadvantage of good productivity. It's a trench.

Accidents may occur if air valves are operated incorrectly to make Shigeko Yinji-F city atmospheric.

[Purpose of the invention]

In this invention, the entire (Ji structure is 1j()) and is in a vacuum state due to erroneous operation at the time of replacing the board.
5'1' for discs where the optical lens barrel does not become the atmosphere
iV, the objective is to provide a self-recording device for a child beam.

[Key to the invention]

The gist of the present invention is to provide a smooth plate with a small hole through which the secondary beam can pass in a 1:3 ratio between the secondary optical column and the sample chamber containing the substrate; An air film is formed (-) between the glass mirror and the smooth plate, and between the sample chamber and the smooth plate, and the vacuum is sealed by differential pumping.By doing this, the substrate is During drawing, an electron beam is irradiated through a small hole in the smooth plate, and when the atmosphere is created in the testing chamber, the small hole is moved to the surface (J
: Difference 1j+, IJ'! , the atmosphere can be removed by bringing it to the outside of the atmosphere, and the atmosphere is introduced through the small hole. "For exhaust": 7j7. ”: 11 +
, 17. I+, one direction] by placing a three-movement device in the atmosphere (
(q can be formed.

〔Effect of the invention〕

According to the present invention, it is supported by a differential pump provided between the optical lens barrel stopper (H') and the 61F
The sample chamber is made into an atmosphere by moving the small hole of j-17
,v) ,The electron optical lens barrel may be damaged due to incorrect operation! stomach. It has many advantages, such as its simple structure, easy operation, and the ability to improve productivity.

[Embodiment 1 of the invention] Fig. 1 shows the circular gong, the roll, and
A schematic diagram of the child beam recording equipment is shown.

The main configuration of the device (2) is an electron optical lens barrel (1). It consists of a sample chamber 2° and a smooth plate 3. The electron optical lens barrel 1 is normally kept in a vacuum by a pump 4, and an electron beam 6 is emitted from a τL sub-gun 5, which is irradiated onto the substrate. The 0N10FF control 1 (not shown in 4) of this electron beam drives the eel into the substrate. Similarly, in the sample chamber, 'L1
Inside the rotating disk 97, which is kept empty and on which the entire substrate 8 is mounted; The rotating disk is rotated by the smart motor 10.
+irΔ1, and the space between them is vacuum-sealed by a suitable method such as a magnetic fluid seal or a follow-up exhaust system. Is there a place between the child optical mirror 1 and the sample 2? There is t<b3, and the μ-n beam can pass through an appropriate amount of 11, and the entire atmosphere is 2! Complainant's hole 11
is provided. The smooth plate 3 is = I+'4. Child optical lens tube 1. Sample chamber 2 and truth? Can seal and flat surface +1qlI
It is maintained by an iE:ia+l exhaust system which also acts as a drain. In other words, the piping shown in the figure],
For example, in the sample chamber 2, an appropriate flow of high-pressure air is supplied to the bearing 12 shown in FIG. 2, forming a planar static pressure air bearing, 3 is supported in a non-contact manner from the sample chamber and the hexagonal optical lens barrel.

Air flowing into the vacuum side is roughly vacuumed through the piping indicated by fPx, and high vacuum evacuation is performed through the piping indicated by P2.

In particular, the pump for evacuation is shown in the figure (2 and 1r (β is, for example, a diffusion pump, a cryopump, etc.). However, vacuum sealing can also be performed.

Jet iJ' configured in this way, the following J:7r
1st work hand 11': Used in A. Rotating disk, l.
1. Turn the substrate metal 1 (11), irradiate the substrate with an electron beam, and continuously irradiate the entire sample area in the direction of the missing mark in Figure 1 with respect to the optical tube. move it.

The sample is moved directly to the state (3-, A. The method is not particularly shown, but it is a conventional branch-based example. etc.This amount of movement is sufficient for half the original board.When the drawing sound light is applied to the entire surface of the board by 5U, the pump 7 is stopped and the normally closed bar is fully opened. Move the smooth plate 31 to expose the 11 small holes to the outside of the differential pumping system of the electro-optic tube.By doing this, the sample chamber can be connected to the atmosphere and the substrate 8 can be separated from the substrate 8. Each differential 1-air, 1-air system will not stop even under normal conditions. Next, the smooth plate 3 is slowly returned to its original position (specifically, after taking some time to evacuate the sample mold), and at the same time, the vacuum pump 7 is activated. When the degree of truth set in advance is reached, the pulp 132 is closed. When the small hole 11 returns to the position where the skeleton beam can pass through the normal image, M rfr and the rotational disk are pressed, and the zunae west +; (starts.

By setting T, Cil:', 111!4 in this manner, even if an incorrect 'j☆ operation is performed after drawing the board, the cylinder will not be exposed to the atmosphere. The left-handed exhaust system mentioned above.

-q-Φ plane static pressure m is 111, so flat γ11
The A6 motion of the plate and sample chamber has many advantages, such as non-electricity, clean movement, and high movement accuracy.

[Other examples of actual rights to inventions]

Note that the present invention is not limited to the embodiments described above. ´・First, a differential pumping system was installed, and a smooth plate was installed between the electron optics (three cylinders and the sample chamber), and a planar nitrogen bearing was installed.
The sample chamber can be made into the atmosphere by changing the relative position between the small hole provided in the smooth plate and the electron optical column, and various modifications can be made without departing from the scope of this article. can do.

For example, in the above-mentioned embodiment, 1iji'! 47 lines 7
The FA chamber was moved relative to the electron optical column in order to
Tokubo fixes the sample chamber and smooth plate completely and moves them as one unit. (It is also possible to move them together.) Various shapes and groove structures can be considered for the delicate differential exhaust system.The rotating disk drive system is also similar to an air turbine. It can be rotated by blowing out nitrogen gas, or by providing a groove-shaped spiral probe on the shaft and making it a single molecule pump, it is possible to increase the speed of rotation and at the same time have the ability to exhaust nitrogen. It's okay.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing one example of the implementation of the present invention. FIG. 2 is a top view of the 11th section A-4 section with the lower blade fully pressed. l...electron optical lens barrel, 2...sample chamber, 3...
'It sliding board, 4...Pump, 5...Sasako line, 6.Raiko Bino, 7...Pump, 8...Board, 9.
...Rotating circle counter. 10...Rotation drive unit, 11...Small hole, 12...
...Groove 13...Valve.

Claims (3)

[Claims] (1) In disk electron beam recording equipment that irradiates a substrate with an electron beam during full rotation to draw a desired pattern,
A sample chamber with a built-in rotating daple that rotates in the direction of the entire base plate, and an electron optical system f, which generates and focuses an electron beam, 1! f
IrT and 1) A circle arranged between the sample chamber and the f:L optical column, floated and vacuum-sealed using differential pumping, and has a small hole through which the electron beam can pass. Equipped with a sliding board and a here! ? Electron beam for discs with characteristics
child sale foot ff10 (2) By moving the smooth plate by 4 degrees and forcing the small hole in the same outside film to move the sample into the atmosphere. (fii1 of the closed patent claim! Box 2>y, 1
Electron beam recording device for disks described in Section 1. (3) When moving the rotary table in one direction at the same time as the rotary table rotates, the special order is to move the entire sample chamber relative to the t'α beam (Jl'(n'l:
l, 1' for discs according to claim 1:! Child Bino・Kira Takumi f″i,