JPS6063963U - Laser device - Google Patents
Laser deviceInfo
- Publication number
- JPS6063963U JPS6063963U JP15488083U JP15488083U JPS6063963U JP S6063963 U JPS6063963 U JP S6063963U JP 15488083 U JP15488083 U JP 15488083U JP 15488083 U JP15488083 U JP 15488083U JP S6063963 U JPS6063963 U JP S6063963U
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- coolant
- laser
- laser oscillator
- circulation pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Alarm Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のレーザ装置の断面図、第２図はこの考案
の一実施例を示す断面図である。
図において１は外箱、２はレーザ発振器、３はレーザ媒
体、４は全反射鏡、５は部分反射鏡、６は冷却液流路、
７は冷却液循環ポンプ、８はレーザ光取り出し窓、９は
レーザ電源、１０は湿度センサ、１１は湿度検知装置、
１２は警報器、１３は制御器である。なお図中、同一あ
るいは相当部分には同一符号を付して示しである。FIG. 1 is a sectional view of a conventional laser device, and FIG. 2 is a sectional view showing an embodiment of this invention. In the figure, 1 is an outer box, 2 is a laser oscillator, 3 is a laser medium, 4 is a total reflection mirror, 5 is a partial reflection mirror, 6 is a coolant flow path,
7 is a coolant circulation pump, 8 is a laser light extraction window, 9 is a laser power source, 10 is a humidity sensor, 11 is a humidity detection device,
12 is an alarm, and 13 is a controller. In the drawings, the same or corresponding parts are designated by the same reference numerals.
Claims (1)
器を駆動するレーザ電源と、上記レーザ発振器を密封し
外気と隔離する外箱と、冷却液を上記レーザ発振器に導
びく冷却液流路と、冷却液を循環させる冷却液循環ポン
プと、上記外箱の内側に置かれ内部の気体の相対湿度を
検出する湿度センサと、この湿度センサの出力から湿度
の異常を検出し警報信号を出す湿度検知手段と、この湿
度検知手段の出力信号により上記冷却液循環ポンプと上
記レーザ電源を制御する制御器とを備えたことを特徴と
するレーザ装置。A laser oscillator that is cooled by a liquid, a laser power source that drives the laser oscillator, an outer box that seals the laser oscillator and isolates it from the outside air, a coolant flow path that leads the coolant to the laser oscillator, and a coolant. a cooling liquid circulation pump that circulates the water; a humidity sensor that is placed inside the outer box to detect the relative humidity of the gas inside; and a humidity detection means that detects an abnormality in humidity from the output of the humidity sensor and issues an alarm signal. A laser device comprising: a controller that controls the coolant circulation pump and the laser power supply according to the output signal of the humidity detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15488083U JPS6063963U (en) | 1983-10-05 | 1983-10-05 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15488083U JPS6063963U (en) | 1983-10-05 | 1983-10-05 | Laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6063963U true JPS6063963U (en) | 1985-05-07 |
Family
ID=30342228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15488083U Pending JPS6063963U (en) | 1983-10-05 | 1983-10-05 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6063963U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0324533A (en) * | 1989-06-21 | 1991-02-01 | Orc Mfg Co Ltd | Liquid coolant circulating system for electric discharge lamp |
| JP2019047017A (en) * | 2017-09-05 | 2019-03-22 | ファナック株式会社 | Laser apparatus water leak detection system |
| JP2020136290A (en) * | 2019-02-12 | 2020-08-31 | ファナック株式会社 | Laser oscillator with improved dehumidification function |
-
1983
- 1983-10-05 JP JP15488083U patent/JPS6063963U/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0324533A (en) * | 1989-06-21 | 1991-02-01 | Orc Mfg Co Ltd | Liquid coolant circulating system for electric discharge lamp |
| JP2019047017A (en) * | 2017-09-05 | 2019-03-22 | ファナック株式会社 | Laser apparatus water leak detection system |
| US10670487B2 (en) | 2017-09-05 | 2020-06-02 | Fanuc Corporation | Water leakage detection system for laser device |
| DE102018005907B4 (en) | 2017-09-05 | 2023-08-03 | Fanuc Corporation | Water leak detection system for a laser device |
| JP2020136290A (en) * | 2019-02-12 | 2020-08-31 | ファナック株式会社 | Laser oscillator with improved dehumidification function |
| US11258225B2 (en) | 2019-02-12 | 2022-02-22 | Fanuc Corporation | Laser oscillator with enhanced dehumidification function |
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