JPS6059648A - Mass spectrometer - Google Patents

Mass spectrometer

Info

Publication number
JPS6059648A
JPS6059648A JP58167271A JP16727183A JPS6059648A JP S6059648 A JPS6059648 A JP S6059648A JP 58167271 A JP58167271 A JP 58167271A JP 16727183 A JP16727183 A JP 16727183A JP S6059648 A JPS6059648 A JP S6059648A
Authority
JP
Japan
Prior art keywords
ions
electromagnet
electrode
mass
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58167271A
Other languages
Japanese (ja)
Inventor
Takehiro Takeda
武弘 竹田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58167271A priority Critical patent/JPS6059648A/en
Publication of JPS6059648A publication Critical patent/JPS6059648A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Abstract

PURPOSE:To enable ions of low mass ranges to be analyzed without using any complicate circuits by placing an electromagnet in the back of a tetrode electrode and separating ions of low mass ranges according to mass by performing field scanning of said electromagnet. CONSTITUTION:In detecting ions of low mass ranges such as hydrogen ion and helium ion, a given electric field permitting all ions to pass is applied to a tetrode electrode 4 by means of a controlling part 8. The voltage applied to the deflection electrode 6 is also controlled by the controlling part 8 in such a manner as to deflect ions toward an electromagnet 10. As a result, ions focused by an ion-focusing electrode 3b after being led out from an ion source 2 by means of an ion-leading-out electrode 3a, pass through the tetrode electrode 4 before being introduced toward the electromagnet 10 by means of the deflecting electrode 6. Ions passing through an incidence slit 12, enter the electromagnet 10. At this point, the current of the electromagnet 10 is controlled by the controlling part 8 to achieve field scanning thereby causing ions of low mass ranges to be separated according to mass. Separated ions, after passing through a collector slit 14, are detected with a low mass range detector.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 本発明はイオンの質量を分析する質量分析計に関する。[Detailed description of the invention] (b) Industrial application fields The present invention relates to a mass spectrometer that analyzes the mass of ions.

(ロ)従来技術 一般に、質量分析計は磁場形のものと四重概形のものが
主流をなすが、特に後者の四重概形の質量分析計は構造
が簡単で小型軽量であること、高速走査性が優れている
ことなどの点から広く採用されている。
(b) Prior art In general, the mainstream mass spectrometers are magnetic field type and quadruple type mass spectrometers, but the latter quadruple type mass spectrometer in particular has a simple structure, is small and lightweight; It is widely adopted due to its excellent high-speed scanning performance.

ところで、水素イオンなどの低質量域のイオンを質量分
析したい場合、従来の四重概形質量分析計では低質量域
から高質量域までの走査可能な安定した回路が要求され
、このために調整部分の多い複雑な回路構成とな′り装
置自体が高価なものになるという不具合がある。
By the way, if you want to perform mass spectrometry on ions in the low mass range such as hydrogen ions, the conventional quadruple rectangular mass spectrometer requires a stable circuit that can scan from the low mass range to the high mass range. There is a problem in that the circuit structure is complicated with many parts, and the device itself becomes expensive.

(ハ) 目的 本発明は上述の問題点に鑑みてなされたものであって、
従来に比べて特に複雑な回路構成を要せず、低質量域の
イオンに対しても質量分析できる四重極電極を備えた質
量分析計を得ることを目的とする。
(C) Purpose The present invention has been made in view of the above-mentioned problems, and
The object of the present invention is to obtain a mass spectrometer equipped with a quadrupole electrode that can perform mass analysis even on ions in a low mass range without requiring a particularly complicated circuit configuration compared to conventional ones.

に)構成 本発明はこの目的を達成するため、四重極電極の後方に
電磁石を配置し、この電磁石の磁場走査により電磁石に
導かれた低質量域のイオンを質量分離するようにしてい
る。
In order to achieve this object, the present invention disposes an electromagnet behind the quadrupole electrode, and uses the magnetic field scanning of this electromagnet to mass-separate the ions in the low mass range guided by the electromagnet.

(ホ)実施例 以下、本発明を図面に示す一実施例に基づいて詳細に説
明する。
(E) Example Hereinafter, the present invention will be explained in detail based on an example shown in the drawings.

図はこの実施例の質量分析語の構成図である。The figure is a diagram showing the structure of the mass spectrometer in this example.

同図において、1は質量分析計、2はイオンを生成する
イオン源部、3aはイオン源部で発生したイオンを引出
すイオン引出電極、3bはイオン収束用の収束電極であ
る。また4は四重極゛電極、6け四重極電極4を通過し
たイオンを偏向させるための偏向電極、8I−1,四重
極電極4の電圧走査、偏向電極6の電圧設定ならびに後
述の電磁石10の磁場走査等を制御する制御部である。
In the figure, 1 is a mass spectrometer, 2 is an ion source section that generates ions, 3a is an ion extraction electrode that extracts ions generated in the ion source section, and 3b is a focusing electrode for ion focusing. 4 is a quadrupole electrode, a deflection electrode for deflecting ions that have passed through the 6-quadrupole electrode 4, 8I-1, voltage scanning of the quadrupole electrode 4, voltage setting of the deflection electrode 6, and the following. This is a control unit that controls magnetic field scanning of the electromagnet 10 and the like.

上記四重極電極4の後方には扇形をした小型の電磁石1
0が配置されている。この電磁石10は、今、その磁場
の強さをHo(ガウス)、磁場中イオン軌道半径をa(
cm)、質量分離すべきイオン質量数をM(a、m、u
)、イオン加速電圧をV(ボルト)としたときHo・a
==143.9・5了Wの関係を満すように構成される
。なお、12は電磁石の前方に設けた入射スリット、1
4はコレクタスリット、16は高質量域側検出器、1B
は低質量域側検出器である。
Behind the quadrupole electrode 4 is a small sector-shaped electromagnet 1.
0 is placed. This electromagnet 10 now has a magnetic field strength of Ho (Gauss) and an ion orbit radius in the magnetic field of a (
cm), and the ion mass number to be mass separated is M(a, m, u
), Ho・a when the ion acceleration voltage is V (volt)
It is configured to satisfy the relationship ==143.9.5 completed W. Note that 12 is an entrance slit provided in front of the electromagnet;
4 is the collector slit, 16 is the high mass region side detector, 1B
is the low mass region side detector.

従って、と記構酸を有する質量分析信41により、イオ
ンを質量分析するには次のように行なわれる。
Therefore, mass spectrometry of ions is carried out as follows using the mass spectrometer 41 having the following structure acid.

マス、水素イオン、ヘリウムイオンなどの低質量域のイ
オンを検出対象とする場合、四重極電極4には制御部8
により、全イオンを通過させるような一定電界をかける
。!!た、偏向電極6も制御部8により、イオンが電磁
石10側に偏向するように印加電圧を制御する。これに
よりイオン源部2からイオン引出電極3aで引出されイ
オン収束電極3bにより収束されたイオンは四重極電極
4を通過し、偏向電極6により電磁石10へ向けて導か
れる。入射スリット12を通ったイオンは電磁石10内
に入る。その際、電磁石10は制御部8により電流が制
御され、これにより、磁場走査が行なわれて低質量域の
イオンが質量分離される。
When detecting ions in a low mass range such as mass, hydrogen ions, helium ions, etc., the quadrupole electrode 4 is equipped with a control unit 8.
This applies a constant electric field that allows all ions to pass through. ! ! Further, the voltage applied to the deflection electrode 6 is controlled by the control unit 8 so that the ions are deflected toward the electromagnet 10 side. As a result, ions extracted from the ion source section 2 by the ion extraction electrode 3a and focused by the ion focusing electrode 3b pass through the quadrupole electrode 4 and are guided toward the electromagnet 10 by the deflection electrode 6. Ions passing through the entrance slit 12 enter the electromagnet 10. At this time, the electric current of the electromagnet 10 is controlled by the control unit 8, whereby magnetic field scanning is performed and ions in a low mass region are mass separated.

質量分離されたイオンはコレクタスリット14を通って
低質量域側検出器で検出される。たとえば質量数10a
コ、Uのイオンに対しては、上述の式よりV=10ボル
ト、a = 2.2 ’75 (z(とすればH8=+
632.5ガウスの磁場で分析される。その際のマスマ
ーカとしては電磁石10に流す電流値を利用し、この値
から質量数を算出する。
The mass-separated ions pass through the collector slit 14 and are detected by the low mass region side detector. For example, mass number 10a
For ions of K and U, from the above equation, V = 10 volts, a = 2.2'75 (z(, then H8 = +
It is analyzed with a magnetic field of 632.5 Gauss. At this time, the value of the current flowing through the electromagnet 10 is used as the mass marker, and the mass number is calculated from this value.

一方、高質量域のイオンを検出対象とするときには四重
極電極4の印加電圧を制御部8で走査してイオン源2か
ら引出されたイオンを四重極電極4自体により質量分離
し、これで質量分離されたイオンを偏向電極6により高
質量域側検出器16に導いて検出する。
On the other hand, when ions in a high mass region are to be detected, the voltage applied to the quadrupole electrode 4 is scanned by the control unit 8, and the ions extracted from the ion source 2 are mass-separated by the quadrupole electrode 4 itself. The mass-separated ions are guided to the high-mass region side detector 16 by the deflection electrode 6 and detected.

(へ)効果 以上のように本発明によれば四重極電極の後方に電磁石
を配置し、この電磁石の磁場走査により低質量域のイオ
ンを質量分離するようにしたので、複雑な回路を構成す
ることなく低質量域のイオンを分析することが可能とな
る。しかも、電磁石も小型のものでよいので、比較的安
価に実現できるという優れた効果がある。
(f) Effect As described above, according to the present invention, an electromagnet is placed behind the quadrupole electrode, and ions in the low mass region are mass-separated by scanning the magnetic field of this electromagnet, so a complex circuit is constructed. It becomes possible to analyze ions in the low mass range without having to Moreover, since the electromagnet can also be small, it has the advantage of being relatively inexpensive.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の一実施例を示す質量分析計の構成図である
。 1・・質量分析計、4・・四重極電極、10・・電磁石
。 出 願 人 株式会社島津製作所 代 理 人 弁理士岡田和秀
The figure is a configuration diagram of a mass spectrometer showing one embodiment of the present invention. 1. Mass spectrometer, 4. Quadrupole electrode, 10. Electromagnet. Applicant: Shimadzu Corporation Agent: Kazuhide Okada, Patent Attorney

Claims (1)

【特許請求の範囲】[Claims] (1) 四重極電極を備え、この四重極電極の後方に電
磁石を配置しこの電磁石の磁場走査により電磁石に導か
れた低質量域のイオンを質量分離することを特徴とする
質量分析計。
(1) A mass spectrometer comprising a quadrupole electrode, an electromagnet placed behind the quadrupole electrode, and mass-separating ions in a low mass range guided by the electromagnet by scanning the electromagnet's magnetic field. .
JP58167271A 1983-09-10 1983-09-10 Mass spectrometer Pending JPS6059648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58167271A JPS6059648A (en) 1983-09-10 1983-09-10 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58167271A JPS6059648A (en) 1983-09-10 1983-09-10 Mass spectrometer

Publications (1)

Publication Number Publication Date
JPS6059648A true JPS6059648A (en) 1985-04-06

Family

ID=15846643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58167271A Pending JPS6059648A (en) 1983-09-10 1983-09-10 Mass spectrometer

Country Status (1)

Country Link
JP (1) JPS6059648A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5391870A (en) * 1993-09-01 1995-02-21 High Voltage Engineering Europa B.V. High-speed precision mass selection system
JP2008209293A (en) * 2007-02-27 2008-09-11 Hitachi High-Tech Science Systems Corp Liquid chromatograph mass analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5391870A (en) * 1993-09-01 1995-02-21 High Voltage Engineering Europa B.V. High-speed precision mass selection system
JP2008209293A (en) * 2007-02-27 2008-09-11 Hitachi High-Tech Science Systems Corp Liquid chromatograph mass analyzer

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