JPS605868B2 - Solenoid valve type automatic boosting low temperature refrigerant container - Google Patents

Solenoid valve type automatic boosting low temperature refrigerant container

Info

Publication number
JPS605868B2
JPS605868B2 JP9658081A JP9658081A JPS605868B2 JP S605868 B2 JPS605868 B2 JP S605868B2 JP 9658081 A JP9658081 A JP 9658081A JP 9658081 A JP9658081 A JP 9658081A JP S605868 B2 JPS605868 B2 JP S605868B2
Authority
JP
Japan
Prior art keywords
solenoid valve
space
pipe
temperature refrigerant
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9658081A
Other languages
Japanese (ja)
Other versions
JPS5874A (en
Inventor
洋幸 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP9658081A priority Critical patent/JPS605868B2/en
Publication of JPS5874A publication Critical patent/JPS5874A/en
Publication of JPS605868B2 publication Critical patent/JPS605868B2/en
Expired legal-status Critical Current

Links

Description

【発明の詳細な説明】 本発明は、例えば高真空室と排気ポンプとの間に介在さ
れる冷却トラップ、ソープションポンプ等に低温冷煤を
補給するための電磁弁式目動昇圧低温冷媒容器に関する
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a solenoid valve-type variable pressure boosting low-temperature refrigerant container for supplying low-temperature cold soot to a cooling trap, sorption pump, etc. interposed between a high vacuum chamber and an exhaust pump, for example. Regarding.

従釆この種の容器として、第1図示のように、容器本体
a内の空間部と液体窒素充填部とに各端部が閉口するパ
イプbを設け、該パイプb中に手動の昇圧弁c及び熱交
換器dを介入したものが提案されているが、このもので
液体窒素を取り出すには、昇圧弁c及び液取出し弁eを
手で開いて容器本体a内の空間部のガス圧を上昇させる
必要があるので、液体窒素の取出しを、補給される液体
窒素容器の液面に応じて自動的にコントロールする場合
には通さない。
As shown in Figure 1, this type of container is equipped with a pipe b that is closed at each end between the space inside the container body a and the liquid nitrogen filling part, and a manual booster valve c is installed in the pipe b. and a heat exchanger d have been proposed, but in order to take out the liquid nitrogen with this device, the pressure increase valve c and the liquid take-out valve e are opened manually to reduce the gas pressure in the space inside the container body a. Since it is necessary to raise the liquid nitrogen, it is not allowed to pass when the removal of liquid nitrogen is automatically controlled according to the liquid level of the liquid nitrogen container to be replenished.

尚図において、fはガス放出弁(手動)、gは安全弁、
h‘ま真空断熱容器である。また、容器本体に電磁弁を
介して圧縮空気源を接続し、該電磁弁を制御することに
より液体窒素の取出しを自動的にコントロールするもの
が提案されているが、別個の設備を要する欠点がある。
In the figure, f is the gas release valve (manual), g is the safety valve,
It is a vacuum insulated container. In addition, a method has been proposed in which a compressed air source is connected to the container body via a solenoid valve and the extraction of liquid nitrogen is automatically controlled by controlling the solenoid valve, but this method has the disadvantage of requiring separate equipment. be.

更に容器本体内の空間部を加圧状態にしておき、液取出
し用電磁弁を自動的にコントロールするものも提案され
ているが、液体窒素を取出す際、噴出する場合があり、
損失が多い欠点がある。本発明は、従来のもののこのよ
うな欠点を無くし、構成簡単で低温冷媒の容器からの取
出しを自動的にコントロールするのに適し、また低温冷
煤の損失がない低温冷媒容器を提供することをその目的
とするもので、容器本体内の低温冷煤充填部及び空間部
にそれぞれ一端及び他端が関口するパイプを設け、該パ
イプ中に熱交換器及び三方電磁弁を介入し、該三方電磁
弁は電気信号で制御されて前記空間部を外部空間に開通
し前記パイプを閉塞するか又は、前記空間部を外部空間
に対して閉塞し、前記パイプを開通するものであること
を特徴とする。以下本発明の実施例を図面につき説明す
る。
Furthermore, a method has been proposed in which the space inside the container body is pressurized and the solenoid valve for liquid removal is automatically controlled, but when liquid nitrogen is removed, it may spout out.
The disadvantage is that there are many losses. The present invention eliminates these drawbacks of the conventional ones, and provides a low-temperature refrigerant container that has a simple structure, is suitable for automatically controlling the removal of low-temperature refrigerant from the container, and does not cause loss of low-temperature cold soot. For this purpose, a pipe is installed at one end and the other end of which are connected to the low-temperature cold soot filling part and space in the container body, and a heat exchanger and a three-way solenoid valve are inserted in the pipe, and a heat exchanger and a three-way solenoid valve are inserted into the pipe. The valve is controlled by an electric signal to open the space to the outside space and close the pipe, or close the space to the outside space and open the pipe. . Embodiments of the present invention will be described below with reference to the drawings.

第2図において、1は三方電磁弁で、これは一端が容器
本体2内の空間部3に、池端が液体窒素充填部4にそれ
ぞれ閉口するパイプ5に熱交換器6とともに介入され、
例えば常時、パイプ5を閉塞し、空間部3をガス放出弁
8を介して外部空間に開通させ、ソレノイド7を励磁す
ると、パイプ5を開通し、空間部3と外部空間の間の通
路を閉塞する。9は手動の液取出し弁、1川ま安全弁、
11は液体窒素、12は真空断熱容器である。
In FIG. 2, reference numeral 1 denotes a three-way solenoid valve, which is inserted together with a heat exchanger 6 into a pipe 5 whose one end is closed to a space 3 inside the container body 2 and whose pond end is closed to a liquid nitrogen filling section 4.
For example, if the pipe 5 is always closed, the space 3 is opened to the outside space via the gas release valve 8, and the solenoid 7 is energized, the pipe 5 is opened and the passage between the space 3 and the outside space is closed. do. 9 is a manual liquid take-out valve, 1 is a safety valve,
11 is liquid nitrogen, and 12 is a vacuum insulation container.

次にその作動について説明すると、液体窒素を取出す場
合には、液取出し弁9及びガス放出弁8を開き、三方電
磁弁1のソレノィド7を励磁すると、パイプ5は開通し
、空間部3の外部空間への開通は閉塞されるから、液体
窒素11が熱交換器6を経ることにより生ずる窒素ガス
は空間部3に放出され、そこの圧力が上昇し、その圧力
によって液体窒素11は液取出し弁9から流出する。か
くして前記ソレノィド7を、図示しない例えばトラップ
用液体窒素容器の液面センサの液面低下検出信号で励磁
すると、その液面に応じて容器本体2からの液体窒の取
出しを自動的にコントロールすることができる。このよ
うに本発明によるときは、容器本体内の低温冷媒充填部
と空間部内に一端及び他端がそれぞれ開口するパイプ中
に熱交換器及び三方電磁弁を介入し、該三方電磁弁は電
気信号で制御されて前記空間部を外部空間に開通し前記
パイプを閉塞するか、又は前記空間部を外部空間に対し
て閉塞し、前記パイプを開通するものであるから、従来
のものと比較して構成が簡単であるとともに低温冷嬢の
容器本体からの取出しを、補給される低温冷煤容器の液
面に応じて自動的にコントロールすることができる等の
効果を有する。
Next, to explain its operation, when taking out liquid nitrogen, the liquid take-out valve 9 and the gas release valve 8 are opened, and the solenoid 7 of the three-way solenoid valve 1 is energized, the pipe 5 is opened and the outside of the space 3 is opened. Since the opening to the space is closed, the nitrogen gas generated when the liquid nitrogen 11 passes through the heat exchanger 6 is released into the space 3, the pressure there increases, and the pressure causes the liquid nitrogen 11 to close the liquid take-out valve. It flows out from 9. Thus, when the solenoid 7 is excited by a liquid level drop detection signal from a liquid level sensor (not shown) of a liquid nitrogen container for a trap, for example, the removal of liquid nitrogen from the container body 2 can be automatically controlled in accordance with the liquid level. I can do it. As described above, according to the present invention, a heat exchanger and a three-way solenoid valve are interposed in a pipe whose one end and the other end are opened into the low-temperature refrigerant filling part and the space in the container body, and the three-way solenoid valve receives an electric signal. The method opens the space to the outside space and closes the pipe under control, or closes the space to the outside space and opens the pipe. The structure is simple, and the removal of the low-temperature cold soot container from the container body can be automatically controlled in accordance with the liquid level of the low-temperature cold soot container to be replenished.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来提案された低温冷煤容器の一例の概略説明
図、第2図は本発明の一実施例の概略説明図を示す。 1…・・・三方電磁弁、2・・・・・・容器本体、3…
・・・空間部、4・・・・・・低温冷媒充填部、5…・
・・パイプ、6・・・・・・熱交換器、7・・・・・・
ソレノィド、8……ガス放出弁、9・・・・・・液取出
し弁、10…・・・安全弁、12…・・・真空断熱容器
。 簾1図 第2図
FIG. 1 is a schematic explanatory diagram of an example of a conventionally proposed low-temperature cold soot container, and FIG. 2 is a schematic explanatory diagram of an embodiment of the present invention. 1... Three-way solenoid valve, 2... Container body, 3...
...Space part, 4...Low temperature refrigerant filling part, 5...
...Pipe, 6...Heat exchanger, 7...
Solenoid, 8...Gas release valve, 9...Liquid take-out valve, 10...Safety valve, 12...Vacuum insulation container. Screen 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1 容器本体内の低温冷媒充填部及び空間部にそれぞれ
一端及び他端が開口するパイプを設け、該パイプ中に熱
交換器及び三方電磁弁を介入し、該三方電磁弁は電気信
号で制御されて前記空間部を外部空間に開通し前記パイ
プを閉塞するか又は、前記空間部を外部空間に対して閉
塞し、前記パイプを開通するものであることを特徴とす
る電磁弁式自動昇圧低温冷媒容器。
1 A pipe with one end and the other open, respectively, is provided in the low-temperature refrigerant filling part and the space in the container body, and a heat exchanger and a three-way solenoid valve are interposed in the pipe, and the three-way solenoid valve is controlled by an electric signal. The solenoid valve-type automatically pressurized low-temperature refrigerant is characterized in that the space is opened to the outside space and the pipe is closed, or the space is closed to the outside space and the pipe is opened. container.
JP9658081A 1981-06-24 1981-06-24 Solenoid valve type automatic boosting low temperature refrigerant container Expired JPS605868B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9658081A JPS605868B2 (en) 1981-06-24 1981-06-24 Solenoid valve type automatic boosting low temperature refrigerant container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9658081A JPS605868B2 (en) 1981-06-24 1981-06-24 Solenoid valve type automatic boosting low temperature refrigerant container

Publications (2)

Publication Number Publication Date
JPS5874A JPS5874A (en) 1983-01-05
JPS605868B2 true JPS605868B2 (en) 1985-02-14

Family

ID=14168892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9658081A Expired JPS605868B2 (en) 1981-06-24 1981-06-24 Solenoid valve type automatic boosting low temperature refrigerant container

Country Status (1)

Country Link
JP (1) JPS605868B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4728601B2 (en) * 2004-06-28 2011-07-20 古河電気工業株式会社 Cooling system for superconducting power equipment

Also Published As

Publication number Publication date
JPS5874A (en) 1983-01-05

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