JPS605613A - Oscillator - Google Patents

Oscillator

Info

Publication number
JPS605613A
JPS605613A JP10058183A JP10058183A JPS605613A JP S605613 A JPS605613 A JP S605613A JP 10058183 A JP10058183 A JP 10058183A JP 10058183 A JP10058183 A JP 10058183A JP S605613 A JPS605613 A JP S605613A
Authority
JP
Japan
Prior art keywords
substrate
wiring pattern
oscillating piece
vibrating piece
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10058183A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Hamaya
浜谷 光洋
Hiroyuki Hirabayashi
宏之 平林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP10058183A priority Critical patent/JPS605613A/en
Publication of JPS605613A publication Critical patent/JPS605613A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

PURPOSE:To simplify constitution and facilitate manufacture and assembly by forming a wiring pattern of an oscillating piece and a conductive material on a substrate formed of a piezoelectric material. CONSTITUTION:The tuning fork type oscillating piece 2 is formed on the substrate 1 made of a quartz plate as the piezoelectric material. Further, the wiring pattern 3 is formed on the substrate 1 by vacuum-depositing gold, etc., as the conductive material. Then, a driving electrode 4 is formed on the oscillating piece 2 simultaneously with the wiring pattern 3. An IC chip 6 is fixed to the substrate 1 with a conductive adhesive, etc., and includes an oscillation circuit for driving the oscillating piece 2, a frequency dividing circuit which divides the resonance frequency of the oscillating piece 2, and other circuits. Thus, a quartz oscillator is constituted, and while the oscillating piece 2 is united with the substrate 1, the wiring pattern 3 and driving electrode 4 are formed at the same time, so the constitution is simplified, the manufacture and assembly are facilitated, and the thickness is reduced.

Description

【発明の詳細な説明】 本発明は圧電振動子を用いた発振器に関するものである
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an oscillator using a piezoelectric vibrator.

従来、水晶振動子を用いた発振器は封止容器に封入され
た水晶振動子を配線基板にはんだ付し、配線基板上に工
Cチップを固着しモールド材にて被覆していた。このた
め部品点数が多くなり、製造が煩雑であり、自動組立は
できなかった。
Conventionally, in an oscillator using a crystal resonator, the crystal resonator is sealed in a sealed container and soldered to a wiring board, and a C chip is fixed on the wiring board and covered with a molding material. As a result, the number of parts increased, manufacturing was complicated, and automatic assembly was not possible.

本発明は上記欠点を除去するものであり、構成が簡単で
あり、製造が容易であり、自動組立も可能な発振器を提
供するものである。
The present invention eliminates the above-mentioned drawbacks and provides an oscillator that is simple in construction, easy to manufacture, and capable of automatic assembly.

以下本発明の実施例を詳細に説明する。Examples of the present invention will be described in detail below.

第1〜3図において、1は圧電材料である水晶板により
形成された基板である。基板1にはエノチップなどによ
り形成された切欠部1αにより音叉型の振動片2が形成
されている。また基板1には導電材として金などを真空
蒸着することにより配線パターン6が形成しである。そ
して基板1のJliU動片2には配線パターン6と同時
に駆動電極4か形成されている。駆動電極4は第5図に
示されるように振動片2の端面にまで形成されている。
In FIGS. 1 to 3, reference numeral 1 denotes a substrate made of a quartz plate, which is a piezoelectric material. A tuning fork-shaped vibrating piece 2 is formed in the substrate 1 by a notch 1α formed by an Enochip or the like. Further, a wiring pattern 6 is formed on the substrate 1 by vacuum-depositing gold or the like as a conductive material. A driving electrode 4 is formed on the JliU moving piece 2 of the substrate 1 at the same time as the wiring pattern 6. The drive electrode 4 is formed up to the end face of the vibrating element 2, as shown in FIG.

5.5は振動片2の先端に設けられた負荷質量である。5.5 is a load mass provided at the tip of the vibrating element 2.

6は工Cデツプであり、基板1に導電接着剤などにより
固着されており、振動片2を駆動する発振回路、振動片
2の共振周波数を分周する分周回路、その他の回路を含
んでいる。7,7は発振回路を構成するチップコンデン
サであり、基板1の配線パターン3上に導電接着剤によ
り固着されている。8,9は振動片2を封止する封止部
材であるガラス板であり、基板1の振動片2の振動部分
に非接触の状態で絶縁性の接着層1o、iiにより基板
1に固着されている。これらの接着層はガラスピーズな
どのスペーサ入りの接着剤を用いることにより所定の層
厚に容易に設定することができ、振動片2の振動部分を
基板1に非接触としやすい。12は封止キャップであり
、基板1に絶縁性接着剤により固着され、ICチップ6
、チップコンデンサ7.7を封入している0本実施例の
水晶発振器は上記゛構成であり、振動片2は基板1と一
体であり、配線パターン3および駆動電極4は同時に形
成できるため、構成が簡単となり、製造組立が容易に行
え、薄型化が達成できる。振動片2の共振周波数の調整
は・ガラス板8を通してレーザ光線により負荷質量5,
5を除去して行う。
Reference numeral 6 designates the engineering C-deep, which is fixed to the substrate 1 with a conductive adhesive or the like, and includes an oscillation circuit that drives the vibrating element 2, a frequency dividing circuit that divides the resonant frequency of the vibrating element 2, and other circuits. There is. Reference numerals 7 and 7 designate chip capacitors constituting an oscillation circuit, which are fixed onto the wiring pattern 3 of the substrate 1 with a conductive adhesive. Glass plates 8 and 9 are sealing members for sealing the vibrating element 2, and are fixed to the substrate 1 by insulating adhesive layers 1o and ii without contacting the vibrating part of the vibrating element 2 on the substrate 1. ing. These adhesive layers can be easily set to a predetermined thickness by using an adhesive containing spacers such as glass beads, and the vibrating portion of the vibrating element 2 can be easily kept out of contact with the substrate 1. Reference numeral 12 denotes a sealing cap, which is fixed to the substrate 1 with an insulating adhesive, and is attached to the IC chip 6.
, a chip capacitor 7.7 is enclosed in the crystal oscillator of this embodiment. It is easy to manufacture and assemble, and it is possible to achieve a thinner structure. Adjustment of the resonant frequency of the vibrating piece 2 is performed by applying a laser beam through the glass plate 8 to the load mass 5,
This is done by removing 5.

なおガラス板9はガラス板8と同一形状としてもよい。Note that the glass plate 9 may have the same shape as the glass plate 8.

また封止部材としてはガラス板の他に金属板を用いても
よく、封止キャンプ12のようなキャンプ状でも可能で
ある。そして金属板の封止部材を用いた場合、共振周波
数調整はトリマコンデンサなどにより行う。さらに封止
キャップ12は必ずしも必要でなく、モールド材にてモ
ールドするようにしてもよい。
Further, as the sealing member, a metal plate may be used in addition to the glass plate, and a camp shape such as the sealing camp 12 is also possible. When a metal plate sealing member is used, resonance frequency adjustment is performed using a trimmer capacitor or the like. Further, the sealing cap 12 is not necessarily required, and may be molded with a molding material.

第6図は本発明の他の実施例を示し、基板1の振動片2
を封入する封止部tA8Aは、工Cチップ6も一緒に封
入している。この場合、ICチップ6を封入する空間を
得るためスペーサ13が必要となるとともに配線パター
ンの引出し部を基板1の端面まで形成する必要がある。
FIG. 6 shows another embodiment of the present invention, in which the vibrating element 2 of the substrate 1
The sealing portion tA8A that encloses the C chip 6 as well. In this case, a spacer 13 is required to provide a space for enclosing the IC chip 6, and it is also necessary to form a lead-out portion of the wiring pattern up to the end surface of the substrate 1.

なおスペーサ1ろは封止部材8Aと一体とすることもで
きる0この実施例によればICチップの封止キャップを
省略でき、構成を簡単に、また製造を容易にできる。
Note that the spacer 1 and the sealing member 8A can be integrated. According to this embodiment, the sealing cap for the IC chip can be omitted, and the structure and manufacturing can be simplified.

第7図は本発明のさらに他の実施例を示し、基板1Aに
ICチンプロを陥没させる取イq穴1bを設けたことを
特徴としている。これにより発振器全体を薄型にするこ
とができる。他の符号は」二記二つの実施例と実質的に
同一である。
FIG. 7 shows still another embodiment of the present invention, which is characterized in that a take-out hole 1b for recessing the IC chip is provided in the substrate 1A. This allows the entire oscillator to be made thin. Other symbols are substantially the same as in the two embodiments.

以上詳述したごとく本発明によれば、基板を圧電月利よ
り形成1.、この基板に振動片を形成し、J、5板に゛
配線パターンを振動片に駆動電極を導電相により形成す
るようにしたので、構成を簡単にでき、製造組立を容易
にすることができる。
As detailed above, according to the present invention, the substrate is formed from a piezoelectric material.1. A vibrating piece is formed on this board, and a wiring pattern is formed on the J5 plate, and a driving electrode is formed on the vibrating piece using a conductive phase, so the configuration can be simplified and manufacturing and assembly can be facilitated. .

またJll(動片を封止部材により封入すれば、発振器
を精度良くでき、外界の影響を受けにくくすることがで
きる。
Furthermore, if the movable piece is sealed with a sealing member, the oscillator can be made with high accuracy and is less susceptible to the influence of the outside world.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の平面図、第2図は底面図、
第6図は第1図m−m斜!断面図、第4図は基板の平面
図、第5図は基板の一部破断斜視図、第6〜7図はそれ
ぞれ他の実施例の断面図である。 1.1A・・・・・・基板 2・・・・振動片3・・・
・・・配線パターン 4・・・パ駆動電極6・・・・・
・工Cチップ 8 、8 A−i−9・・・・・・封止部材具 上 出願人 株式会社 精 工 舎 代理人 弁理士 最 上 務 第1図 第2図 2 第3し1 b ] 2 9 第4図 第5図 第6図 ・ヤ ID Z 9
FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a bottom view,
Figure 6 is the figure 1 m-m diagonal! 4 is a plan view of the substrate, FIG. 5 is a partially cutaway perspective view of the substrate, and FIGS. 6 and 7 are sectional views of other embodiments. 1.1A... Board 2... Vibration piece 3...
... Wiring pattern 4 ... Pa drive electrode 6 ...
・C chip 8, 8 A-i-9...Sealing member/equipment Applicant Seikosha Co., Ltd. Agent Patent attorney Mogami Affairs Fig. 1 Fig. 2 Fig. 2 Fig. 3 1 b] 2 9 Figure 4 Figure 5 Figure 6・Y ID Z 9

Claims (1)

【特許請求の範囲】 1 圧電材料により構成された基板と、この基板に形成
された振動片と、上記基板に導電材により形成された配
線パターンと、上記振動片に導電材により形成された駆
動電極と、上記振動片を駆動する発振回路を含み」二記
基板に固着された工Cチップとを設けた発振器・ 2 圧電材料により構成された基板と、この基板に形成
された振動片と、上記基板に導電材により形成された配
線パターンと、上記振動片に導電材により形成された駆
動電極と、上記振動片を駆動する発振回路を含み上記基
板に固着されたICチップと、上記振動片を封入する封
止部材とを設けた発振器。 6 特許請求の範囲第2項において、封止部材は振動片
に非接触の状態で基板の両面に接着されたカバ一体であ
ることを特徴とする発振器。 4 特許請求の範囲第2項または第6項において、封止
部材はICチップも封入することを特徴とする発振器。
[Scope of Claims] 1. A substrate made of a piezoelectric material, a vibrating piece formed on the substrate, a wiring pattern made of a conductive material on the substrate, and a drive made of a conductive material on the vibrating piece. An oscillator including an electrode and an oscillation circuit that drives the vibrating piece and a mechanical chip fixed to the substrate (2) A substrate made of a piezoelectric material, a vibrating piece formed on this substrate, A wiring pattern formed of a conductive material on the substrate, a drive electrode formed of a conductive material on the vibrating piece, an IC chip including an oscillation circuit for driving the vibrating piece and fixed to the substrate, and the vibrating piece. An oscillator provided with a sealing member for enclosing the oscillator. 6. The oscillator according to claim 2, wherein the sealing member is an integrated cover that is bonded to both sides of the substrate without contacting the vibrating element. 4. The oscillator according to claim 2 or 6, wherein the sealing member also encapsulates an IC chip.
JP10058183A 1983-06-06 1983-06-06 Oscillator Pending JPS605613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10058183A JPS605613A (en) 1983-06-06 1983-06-06 Oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10058183A JPS605613A (en) 1983-06-06 1983-06-06 Oscillator

Publications (1)

Publication Number Publication Date
JPS605613A true JPS605613A (en) 1985-01-12

Family

ID=14277852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10058183A Pending JPS605613A (en) 1983-06-06 1983-06-06 Oscillator

Country Status (1)

Country Link
JP (1) JPS605613A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1788702A2 (en) * 2000-12-25 2007-05-23 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539422A (en) * 1976-07-15 1978-01-27 Hitachi Ltd Position transmission mechanism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539422A (en) * 1976-07-15 1978-01-27 Hitachi Ltd Position transmission mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1788702A2 (en) * 2000-12-25 2007-05-23 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
EP1788702A3 (en) * 2000-12-25 2008-01-16 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment

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