JPS6054150A - Ion source - Google Patents

Abstract

PURPOSE:To enable a sample to be safely and easily handled by providing both a case in which the sample is airtightly sealed and which is installed in a heating furnace in such a manner as to allow it to be attached or detached from the heating furnace, and a means used to break the sealed state of the case by an operation performed from outside the heating furnace after it is subjected to vacuum exhaustion. CONSTITUTION:A metallic case 2 in which a sample 1 is airtightly sealed by means of a rare gas such as argon is installed in a given position in a heating furnace 6. After lids 5 and 11 are attached to the metallic case 2 and a device 10 respectively and the internal pressure of the device 10 is reduced to below a given pressure by vacuum exhaustion, a handle 12 attached to the lid 11 is rotated to move down the needle 3 of the lid 5 in order to form a penetrating hole in the upper hill of the metallic case 2. After the formation of the penetrating hole, the handle 12 is rotated in reverse direction so as to make the needle 3 apart from the upper surface of the case 2 by means of a spring 4 and to make the case 2 continuous with the heating furnace 6. When the heating furnace 6 is heated by feeding current in a heater 7, a sample 1 is evaporated to produce sample vapor which is then supplied to an ionization chamber 9 through a conduit 8.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention involves heating a sample, which is solid at room temperature, in a vacuum heating furnace.
It relates to an ion source that vaporizes and introduces it into an ionization chamber to produce an ion beam, and in particular relates to an ion source that makes handling of a sample safer and easier.1 For example, it is applied to ion implantation equipment in semiconductor device manufacturing. be able to.

[Background of the invention]

Arsenic in semiconductor ion implantation equipment.

Phosphorus, antimony, etc. are used as samples, and these samples are converted into high-speed ion beams, which are implanted into semiconductors as impurities. In this case, these samples were kept at room temperature (15
°C), it is in a solid state, so it was inserted into a thermal furnace including a vacuum heating furnace that heats it in a vacuum and vaporizes it.
There was a risk of scattering the sample powder around when inserting the sample and when discharging the sample remaining in the furnace after the work was completed, which caused problems in terms of handling and safety. In particular, arsenic is a toxic element, so the use of solid samples is strongly desired, and safer equipment is required for transferring samples to the heating furnace.

In mass spectrometers, the sample is sealed in a glass container (ampule) and the ampoule is destroyed in a vacuum.If this is applied to the ion source, the problem when inserting the sample will be eliminated; The problem of glass fragments being scattered around still remains, and there is now the added problem of ejecting glass fragments.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the above-mentioned conventional techniques in ion source devices and to provide an ion source that can safely and easily handle a sample.

[Summary of the invention]

The present invention is characterized by a container that is made of a material that can withstand the vaporization temperature of the sample and that is removably inserted into the heating furnace with the sample sealed inside. and a means for breaking the sealed state of the container by operation.

In this case, if the sample is arsenic, phosphorus, antimony, etc., the container should be a sealed metal container that can withstand the vaporization temperature of each substance, or a glass container containing the sample in a hermetically sealed container with the outside partially opened. Alternatively, a container consisting of a completely hermetically sealed metal container can be adopted, and
The sample is GaO. .

Metals such as Al0IB, GaIB, A-JI,
In the case of a halokene compound, since the vaporization temperature of these compounds is relatively low, a container made of synthetic resin whose melting point is higher than the respective vaporization temperature can also be used as the container.

[Embodiments of the invention]

The present invention will be explained in detail below with reference to one drawing.

FIG. 1 is a sectional view of an embodiment of the present invention. In Fig. 1, 1 is a sample, 2 is a metal container, and 3 is a spring 4.
The needle is located at the upper position due to the spring force of the needle, but when pressed from above, it descends and serves to make a through hole in the upper surface of the container 2. 5 is the lid of the heating furnace 6, and 7 is a heater that heats the heating furnace 6. , 8 transfers the sample vapor generated in the heating furnace 6 to an ionization chamber 9
10 is the outer wall of the device, 11 is the lid of the device, and 12 is a knob used when lowering a13.

The sample 1 is sealed in a metal container 2 under vacuum or with a rare gas such as argon. With the inside of the device 10 at atmospheric pressure, remove the lid 11 and the lid 5 of the heating furnace 6.

The container 2 in which the sample 1 is sealed is inserted into a predetermined position in the heating furnace 6. Install lids 5 and 11.

After evacuating the inside of the device 10 and reaching a predetermined pressure or less,
Turn the knob 12 attached to the lid 1.

The &t 3 placed on the lid 5 is lowered, thereby making a through hole in the upper surface of the metal container 2.

After this through hole is formed, by rotating the knob 12 in the opposite direction, the needle 3 is separated from the top surface of the container 2 by the spring 4.
The container 2 and the inside of the heating furnace 6 communicate with each other. When the heater 7 is energized to heat and raise the temperature of the heating furnace 6, the sample 1 is vaporized, and the resulting sample vapor is supplied to the ionization chamber 9 through the conduit 8. In the case of discharge, the heating furnace is cooled and the inside of the apparatus 10 is brought to atmospheric pressure, the lids 1 and 5 are removed, the container 2 is pulled out, and the container 2 is disposed of as is.

In the case of a sample that may change in quality if it comes into contact with the metal in container 2 for a long time, first seal sample j in glass container 3, as shown in an example in Figure 2. The outer periphery of the container 13 is further wrapped around the metal container 2. When using a container with this configuration, the glass container 13 is destroyed at the same time as a hole is made in the metal container 2. In the case of the above configuration, since the sample 1 is sealed in the glass container 13, the metal container 2 does not necessarily need to be sealed, but if there is a risk of the glass container 13 being accidentally broken, For safety reasons such as toxicity and flammability, it is preferable that the metal container 2 is also sealed.

Note that the reference numeral 14 in FIG. 2 indicates a sealing portion for sealing the glass container 13.

If a small piece 15 is provided on the top surface of the metal container 2, as shown in the perspective view of FIG. 3, the container 2 can be easily discharged from the heating furnace 6. That is, the small piece 1 in FIG. 3(a)
5 with tweezers or the like to bring it into the state shown in FIG. 3(b), then pinch this 15' and pull it out.

Further, by providing a partially thinned area as shown in FIG. 4 in the center of the upper surface of the metal container 2, the drilling operation using 9 m13 can be facilitated.

Note that in one or more of the embodiments, the temperature is assumed to be arsenic, phosphorus, antimony, etc. as a sample.

The explanation was made assuming that the container is a metal container or a double container consisting of a glass container and a metal container, but if the sample is (3taCIB, AlCIB, Ga13,
In the case of AIIB, etc., since the vaporization temperature of these samples is relatively low as described above, it is not necessarily necessary to use a metal or glass container as the container.

It is possible to use a synthetic resin container that is easy to manufacture, and it is possible to produce similar effects.

〔Effect of the invention〕

As described above, according to the present invention, samples, especially dangerous samples such as toxic or flammable samples, can be handled safely and easily with a very simple configuration.

In addition, since the sample is stored in a sealed state, there is no chance of contamination with impurities or deterioration of the quality. It can be applied to great effect.

[Brief explanation of drawings]

FIG. 1 is a sectional view of one embodiment of the present invention, and FIG. 2 is a diagram showing another embodiment of the sample container of the present invention. Figure 3 is a perspective view of the same metal container, (a,) shows the state before raising the drawer piece, (b) shows the state after raising it, and Figure 4 shows the thin part provided on the top surface of the metal container. FIG. 2 is a plan view and a sectional view showing an example of the invention. Explanation of symbols 10. 2...Metal container 3...Needle 4...Spring 5゛°Heating furnace lid 6...Heating furnace 7...Heater 8...Conduit 9...Ionization chamber 1o...Device Outer wall of the device... Lid of the device 12... Knob 13°' Glass container 14... Sealing part of the glass container J,
5, 15'... Patent attorney representing the small pieces for extraction Junnosuke Nakamura;

Claims (7)

[Claims] (1) A sample that is solid at room temperature is heated in a vacuum heating furnace. In an ion source that vaporizes the sample and introduces it into the ionization chamber, a container is made of a material that can withstand the vaporization temperature of the sample and is removably inserted into the heating furnace with the sample sealed inside;
An ion source comprising means for breaking the sealed state of the container by an operation from outside the heating furnace after the heating furnace is evacuated. (2) The ion source according to claim 1, wherein the container is a metal container. (3) In the ion source according to claim 1,
a glass container in which the container stores a sample in a sealed state;
An ion source characterized in that the container is comprised of a partially open or completely sealed metal container surrounding the glass container at its outer periphery. (4) In the ion source according to any one of claims 1 to 3, the heating furnace is provided with a conduit connected to the ionization chamber at its lower part, and a removable lid at its upper part. is attached, and furthermore. An ion source characterized by being a heating furnace in which a needle is attached to the lid, which is normally in an upward position due to a spring force, but is moved downward by an external suppression operation. (5) In the ion source according to any one of claims 1 to 4, the sample is one of arsenic, phosphorus, and antimony, and the vapor of the sample is used as an ion beam and is used as an impurity. An ion source characterized by being used for ion implantation into semiconductors. (6) In the ion source according to claim 1,
The samples are Ga01B, AlCl5, Gal61
An ion source which is a metal halide compound such as A115, and wherein the container is a container made of 9 synthetic resin. (7) In the ion source according to claim 2, the metal container is a metal container in which a small piece for taking out the container is attached to a part of the container for use in taking out the container from the heating furnace. An ion source characterized by: