JPS6050392A - Heating-cooling device - Google Patents

Abstract

PURPOSE:To enable to heat or cool uniformly the material to be treated in a shell by a method wherein a shell is formed in a shape in which a material to be treated can be arranged separately with certain space so that a heat convection does not generate between the shell and the surface of the arranged material to be treated. CONSTITUTION:A material to be treated (for instance, a blank mask 25) is inserted into a shell 19 after opening a cover 21, and supported with a supporting body 20, subsequently, a high temperature nitrogen gas is fed from a high temperature gas supply part 15, then discharged from a discharging port 17. Thereby, the inside of a vessel 11 is filled with nitrogen gas, accordingly, the shell 19 is heated. In this case, the space between the inner wall surface of the shell 19 and the blank mask 25 is neared by interposing the supporting body 20 having a length of less than 10mm.. Also the shell 19 is formed with a material having a high heat conductivity, accordingly the blank mask 25 is uniformly heated without influence of heat convection.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a heating/cooling device, and particularly to a heating/cooling device suitable for use in baking and cooling steps in resist pattern formation.

[Technical background of the invention and its problems] As a conventional heating/cooling device, one having the structure shown in FIG. 1 has been known. In other words, 1 in Figure 1 is the heat insulating wall 2
This is a constant temperature bath. A gas introduction chamber 3 is provided at the bottom of the thermostatic chamber J, and a supply pipe 4 for conducting gas is attached to the side wall of this introduction chamber 3. Also.

The constant temperature chamber 1 and the gas introduction chamber 3 and 4 are communicated through an intake hole 5 opened in the bottom wall 2 of the chamber 1. A heater 6 is arranged near the intake hole 5 in the thermostatic chamber 1 . A frame 7 supported by earthen walls 2 is provided at each corner of the thermostatic chamber 1. These frames 7 are provided with hot air baffle plates 8 from below. First to third shelf boards 9a to 9c are sequentially placed horizontally. Furthermore, an exhaust damper 10 connected to a vacuum system a (not shown) is opened in the center of the earthen wall portion 2. In order to heat an object to be processed using the heating/cooling device having such a structure, the object to be processed (not shown) is first placed on the shelf boards 98 to 9c. Subsequently, the heater 6 is heated to a predetermined temperature, and a vacuum device (not shown) is activated to exhaust the gas in the thermostatic chamber J via the exhaust damper 1o. Due to this exhaust gas, the gas in the gas introduction chamber 3 is introduced into the thermostatic chamber 1 through the intake hole 5, heated by the heater 6, and dispersed by the rectifier plate 8, so that it covers the soil of the shelf plates 9tR to 9o. A vacuum device (not shown) is operated with the object being treated. By doing this, the cooling gas flows into the thermostatic chamber 1 through the gas introduction chamber 3, the intake hole 6, and the rectifier plate 8, and the shelf plates 91I to 91I.
The object to be processed on 9c is cooled.

However, in the first heating/cooling device VCh shown in the figure, uniform cooling was difficult because the object to be processed was cooled by thermal convection.

It takes time for the temperature inside the thermostat to rise and fall, and precise temperature control is difficult. Furthermore, there is a drawback that the device becomes large.

[Purpose of the invention]

The present invention aims to provide a compact heating/cooling device that is capable of uniform heating and cooling.

[Summary of the invention]

The present invention provides a container, a shell made of a wall with high thermal conductivity that is loaded into the container and stores an object to be processed, a heating means for heating a gap between the container and the shell, and a heating means for heating the gap between the container and the shell. and cooling means for cooling the nitrogen gas between the shell and the shell.

It is characterized by a shape in which the inner surface of the wall and the surface of the workpiece to be stored are arranged at an interval that does not cause thermal convection. By having this configuration,
Since the material to be treated is heated or cooled without causing mineral heat convection within the shell, uniform heating and cooling can be achieved as described above, and a compact heating/cooling device can be obtained.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

11 in the figure is a container, and three sides of this container 11 are open. A gas introduction body 13 having two gas introduction ports 12B and 12b is connected to the right side surface of this container 11. A high temperature gas supply section J5 is connected to one gas inlet J2a via a pulp 14m. The other gas inlet 12b is connected to the low temperature gas supply section 1 via the pulp 14b.
6 are connected. Furthermore, a gas exhaust body 18 is connected to the left side surface of the container 11, which includes an exhaust port 17. The exhaust port 17 is provided with pulp 14c. Further, a shell J9 is inserted into the container 11 from the front side of the container 11. This shell 19 is formed from a wall of a material having a high thermal conductivity, such as copper.

Supports 2o for supporting the object to be processed are attached to the upper and lower walls of the inner surface of the chamber 19, respectively. Note that these supports 20... have a length of, for example, 10 mm or less. Further, the oil side surface of the 7-well 19 is opened, and the opening portion is shaped like a step and closely contacts the opening on the front side surface of the container IJ.

A lid 2 is detachably attached to the opening of the shell 19. This lid 21 is provided with a handle 22. Furthermore, a sensor 2 is provided on the upper surface of the shell 19.
3 is attached to p.

And the sensor 23 is connected to the controller 24. This controller 24 is connected to the front GC high temperature supply section 5 and low temperature supply section J6, and these supply sections 15
．． 16 temperature controls.

According to such a configuration, the lid 21 is now opened, the object to be processed (for example, the blank mask 25) is inserted into the shell 19, and supported by the supports 20. Next, after opening the pulp 1411 and J4c, the high temperature gas supply section 16
Hotter gas.

For example, crabmeat gas is supplied into the container 11 through the pulp 74M, the gas inlet 1211, and the gas inlet J3, and is exhausted from the exhaust port 17 to keep the pressure between the container 11 and the 7L J9 constant.

By doing this, the inside of the container IJ is filled with nitrogen gas and the /L 19 is heated, but the length between the inner wall surface of the shell J9 and the blank mask 250 is less than 10 mm.
... are interposed and close to each other, and the 7L 19 is made of a material with high thermal conductivity, so the blank mask 26
is heated uniformly without undergoing heat convection. In addition.

During such heating, the shell temperature is detected by the shell J91i sensor 23, and the detection signal is output to the controller 24 to control the temperature of the high temperature gas supply section 15. on the other hand,
Pulp 14I! Close it.

When a cooling gas such as silicon gas is supplied into the container 11 from the low temperature gas supply section 16 through the pulp 14b, 7L J9
is cooled, and the blank mask 25 therein is uniformly cooled in the same manner as described above. Note that the temperature of the shell 19 is monitored by a sensor 23, and the introduction rate of the low temperature gas is determined by this. Further, the temperature of the low-temperature gas is determined by the cooling rate required for the object to be processed.

Therefore, according to the present invention, it is possible to obtain a small-sized heating/cooling device that can extremely quickly and uniformly heat and cool the object to be processed within the shell.

Note that the heating/cooling device of the present invention is not limited to the above embodiment. For example, as shown in FIG.
A heater 2 and a pipe 27 through which a cooling liquid flows may be arranged in a meandering manner between the heater 2 and the 7 erno 9 to constitute a heating/cooling device.

Further, in the above embodiment, the inside of the shell may be maintained in a reduced pressure state. According to such a configuration, since the object to be processed is heated or cooled only by radiation or infrared radiation, more uniform heating and cooling can be achieved.

〔Effect of the invention〕

As described in detail above, the heating/cooling device of the present invention has the following effects.

fl) Since the temperature of the shell is controlled without direct contact of the coolant with the object to be processed, there are few control conditions, and it can be effectively applied to baking and cooling of resist coated with a blank mask or the like.

(b) The object to be processed can be heated and cooled uniformly.

f9 The temperature history of heating and cooling of the object to be processed can be controlled at will, and when the properties of the object to be processed are influenced by the temperature history during heating, the properties can be controlled to a high degree.

2) Structurally, the size can be kept to a minimum.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing a conventional heating/cooling device, Fig. 2 is a plan view of a heating/cooling device showing an embodiment of the present invention, and Fig. 3 is a cross-sectional view showing a conventional heating/cooling device. 4 is a cross-sectional view of a heating/cooling device showing another embodiment of the present invention. 1. Container, 15. High temperature gas supply section, 16.
・Low temperature gas supply section, Noah...Exhaust port, 19...Shell. 20... Support body, 21... Lid, 23... Sensor S
24... Controller, 25... Processed object, 26.
...Heater, 27...Piping.

Claims (1)

[Scope of Claims] α) A container, a 7-well made of a wall with high thermal conductivity that is loaded into the container and stores the object to be processed, and a heating means for heating the space between the container and the shell. , comprising a cooling means for cooling the container and the seedling quantity of 7 L, and the shell. A heating/cooling device characterized in that the inner surface of the wall and the surface of the processed object to be stored are arranged at an interval that does not cause thermal convection. (2) Claims characterized in that the inside of the 7L is maintained at a -pressure state &',! Heating and cooling equipment as described in section. Heating/cooling device according to scope 1. (Heating and cooling according to claim 1, characterized in that the four shells are arranged in such a shape that the distance between the inner surface of the wall and the surface of the processed object to be stored is lomi+ or less) Device.