JPS60501327A - humidity sensor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Humidity/The One The present invention provides a humidity sensor for an electrical humidity measuring device according to the subject matter of claim 1. To be knowledgeable.

Such a humidity sensor is known, for example, from Yoronono ξ Patent Publication No. 0044806. It is publicly known. There, there is an electrolyte support plate and an electrolyte layer that interlocks with each other in a comb-like pattern. A temperature sensor having two electrodes conductively coupled to each other is described by ing. This electrolyte layer.

Mix zeolite powder with Shichime/1.5~20%, add water to make a slurry, and then An electrolyte support plate is formed by coating an electrolyte support plate with a large number of water-absorbing passages. It has a porous structure.

Humidity tr/coni capillary condensation occurs and results are adversely affected. Has a point. Additionally, the electrolyte layer used is such that it does not adhere to the electrolyte support plate. However, it has the disadvantage of peeling off over time. Additionally, with a detailed explanation The hysteresis in the humidity resistance characteristic curve of the temperature sensor described in However, in this case it was aimed at a fixed temperature.

It is therefore an object of the present invention to improve the known temperature sensor by providing an electrolyte layer with excellent adhesion throughout the entire area. The hysteresis/susceptibility in the humidity resistance characteristic curve is below 1% relative humidity and This task is carried out in a manner similar to that described above, in order to produce reliable results at the point at which the air becomes saturated. In a temperature sensor, the problem is solved by the features described in the characterizing part of claim 1. It will be done.

The present invention provides, among other things, that diffusion in water vapor permeable plastics is It has the great advantage of being constant. From now on, the time characteristic is purely exponential. This is achieved by processing the matching function in the microprocessor. A quick calculation of the closing price will determine when the conclusion arises. In addition, water vapor permeable plastic The hysterinous characteristics of the temperature sensor are improved by using A measurement difference of less than a factor of 1 relative humidity is obtained.

Another important advantage of the invention is that for example acid gases, ammonia or polyalcohols The effects of chemical contaminants such as It happened when. The humidity sensor according to the invention is a humidity sensor with a wear-resistant hard surface. High hardness articles with layers, e.g. water activity of deposits from drying process Measuring is no longer a problem. Therefore, moisture blocking-order filters can be omitted completely. This is an engineering/engineering solution that has a very small response time of the humidity sensor. /enables direct measurement in the engineering process. Some of the advantages of the present invention are as follows: It is clear from the description.

The invention will be explained in more detail with reference to the embodiments shown in the drawings. However, Figure 1 shows one humidity sensor. FIG. 2 shows a cross-sectional view of FIG. Figure 3 shows the direction of the arrow ■ in Figure 1, Figure 4 shows a moisture-sensitive layer made of zeolite or P/E/L microcrystals and plastic. shows a measurement diagram of a humidity sensor having Figure 5 shows a moisture sensitive layer consisting of zeolite microcrystals, graphite and plastic. Shows the measurement diagram of the degree sensor.

FIG. 6 shows the cylindrical body holding the temperature sensor.

FIG. 1 shows a moisture sensor/sensor 1 comprising an insulating substrate 2. As shown in FIG. Upper side of board 2 is provided with an electrode 3 coated with a moisture sensitive layer 5 of crystalline electrolytic solid. substrate A lower KVi of 2 and a temperature sensor 6 are provided.

Similarly, electrical contact pins 4, 7 and 8 are provided.

FIG. 2 shows a top view of the humidity sensor 1 of FIG.

The same symbols were used for the same elements. As seen from this drawing, electric The three poles are each connected to each other by a web and have uniform spacing from each other. Consists of concentric partial circles. For electrodes 3 (in this case two), the partial circles of both electrodes 3 are arranged so that they fit together and do not form a direct electrical contact between the electrodes 3. There is. Around the electrode 3 at the edge of the substrate 2 there is also a concentric ring K for electrical shielding. An electrician 9 is provided.

Contact pin/4 for electrode 3, contact pin 7 for annular electrode 9 and contact pin for temperature sensor 6. The contact pins/8 are each soldered.

FIG. 3 shows the back side of the humidity sensor 1. The same elements as in Fig. The same code was used.

On this side of the substrate 2 there is an annular lightning, an auxiliary /- in full contact with the pole 9 (FIG. 2). A field electrode 9' is provided.

Since the temperature sensor 6 is soldered or glued to the shield electrode 9', Excellent thermal contact with 2 is provided. However, the temperature sensor/sensor is located at the front, and the humidity There may also be two built-in blocks with the sensor, and a cable is installed on the back side of the board 2. A primary amplifier may also be provided in order to substantially eliminate connections.

The substrate 2 is made of, for example, silicon, glass, glass epoxy or aluminum. Alternatively, the electrode 3 may be made of a known electrically insulating material such as glass ceramic. Consists of a copper strip coated with plating. The moisture sensitive layer 5 of the electrolytic solid material is 5. Ze aluminosilicates and cellulose derivatives, such as olite or penotal; Water vapor permeable and permeable plastics such as cellulose acetate or cellulose acetate butyrate. Rinaru. In particular, zeolites with a pho/xite structure are used as electrolytic solids. is 5 used. In each case, a crystalline electrolytic solid with K, IJ tium ions Things are advantageous. The plastic fills the voids and grooves of the microcrystalline anion lattice. capillary condensation is prevented. This changes the impedance of the moisture sensitive layer 5. For example, even in high environmental humidity above relative humidity 5th factor, the humidity to be measured always increases. The total moisture content of graphite must be mixed in to form a scale for the degree of For example, a linear characteristic curve is obtained.

The proportion of graphite increases electrolytic solids and black particles by preventing water condensation on the hydrophilic graphite surface. It is chosen so high that capillary condensation in the entire system of lead is omitted. The mixture of graphite is mainly to reduce hysteresis in the humidity-impedance characteristic curve. Described The moisture sensitive layer 5 is made very thin using electrolytic solid particles of uniform size below 1 μm. It can be manufactured easily. Layer 5 is highly flexible and capable of withstanding strong external mechanical forces. and, depending on the choice of plastic, up to 150°C or even 200°C. It can be used for measurements. Furthermore, the layer is wear-resistant and is compatible with the substrate 2. It adheres very well. Layer 5 is rendered inactive by ions or polar molecules. If present, the microcrystals can be easily regenerated by simply heating them. -Furthermore, no reversible changes were observed after vacuum exposure.

A measured diagram is shown. In this case, the abscissa is the relative humidity of the environment ψ (%rF) , and the ordinate represents the innovation value l of the humidity sensor on a logarithmic scale. Special The characteristic curve corresponds to the output signal of the logarithmic amplifier, resulting in a linear characteristic curve. Characteristic curve N uses a humidity sensor having a moisture sensitive layer 5 made of zeolite and plastic. Characteristic curve B is the one measured on a layer made of plastic. It is.

FIG. 5 shows a moisture-sensitive layer 5 made of zeolitic microcrystals, graphite, and plastic. shows the measurement diagram of a humidity sensor, in which the impedance is plotted on an equal scale. Lots are available.

FIG. 6 shows a cross-sectional view of the cylindrical body 10 used for manufacturing the humidity sensor 1. ing. For this purpose, the contact pins 4, 7 and 8 are fitted into the plastic disc 12. The bushing 11 is inserted into the bush 11. B/U 11 is a measurement electronics [ronics] It is connected to a cable 13 leading to. Measurement electronics are fully illustrated logarithmic amplification, primarily to eliminate the effect of temperature on the output signal. The equipment and compensation circuit are included. This means that the temperature drift I of the humidity sensor mentioned above is Unlike many conventional humidity sensors, it only depends on the temperature and the ambient temperature 1i This is possible by not depending on K. The cylinder 10' has walls or other Figure 4 on the suspension body of 1・ Rabbit 6 international search report

Claims (1)

[Claims] 1 At least two electrodes (3) are provided on the electrical feed line board +21, and the electrodes are connected For electrical humidity measuring devices that are conductively coupled to each other by crystalline porous electrolytic solids. In humidity sensors, water vapor permeable plastic is used as an electrolytic solid, and the solid is exposed to air. Humidity sensor characterized in that it has a non-porous structure without bubbles. Sir. 2 Substrate (2) is silicon, glass, glass epoxy color or insulating aluminum The electrode (3) is made of glass-ceramic and the electrode (3) is made of gold-plated copper layer. , a humidity sensor according to claim 1. 3 The electrode (3) is provided on the same side of the substrate (2), and some concentric partial circles Claim 2, wherein the partial circles surround each other and do not touch each other. Humidity sensor as described in section. 4 Claims 1 to 3, wherein the electrolytic solid (5) is made of aluminosilicate. The humidity sensor described in any one of the preceding paragraphs. 5. The moisturizer according to claim 4, wherein the electrolytic solid (5) is made of crystalline zeolite. degree sensor. 6. The moisturizer according to claim 4, wherein the electrolytic solid (5) consists of crystalline pentasil. degree sensor. 7. Humidity according to claim 4, wherein the electrolytic solid (5) is characterized by lithium ion. sensor. 8. The humidity sensor according to claim 4, wherein graphite is mixed in the electrolytic solid (5). Sir. 9. Claim 4, wherein the water vapor permeable plastic is made of a cellulose derivative. U-based humidity sensor. 10 Continuous and/or semi-continuous control of relative humidity in engineering proscenes Humidity sensor according to claims 1 to 9 for continuous measurement - (1) Use of.