JPS604965B2 - Bonding point indicating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device that uses a spotlight to direct the descending point of a thin wire connection capillary in order to improve the efficiency of thin wire connection work for semiconductor devices.

Generally, the first bonding point and the second bonding point are not on the same level, but have a level difference of several millimeters at most.

Furthermore, it is impossible for a spotlight to irradiate an object to be irradiated from a perpendicular direction due to the presence of a capillary or the like, and therefore the object must be irradiated at a certain oblique angle. At this time, if there is a level difference between the bonding points, and if the spot is aligned with the capillary descent position of one bonding point, then at the other bonding point, as shown in Figure 1, the illumination angle of spotlight 1 is set to 8, and the step is h. Then, the point indicated by the spotlight 1 and the second bonding point where the capillary 2 actually descends are shifted in the horizontal direction by 6=n8×h. Conventionally, in order to alleviate this drawback, a method has been used that uses two spotlights to illuminate the first bonding point and the second bonding point, respectively, but this method is wasteful in terms of cost and requires the same amount of time as two spotlights. In addition to the need for installation space, the presence of two spots impairs work efficiency.

The feature of the present invention is that a glass plate is placed on the optical axis of the spotlight, and the glass plate is directed toward the optical axis, so that when the light rays emitted from the spotlight pass through the inclined glass plate, the light is Focusing on the small amount of displacement due to refraction, when specifying the first and second bonding points, the dominant angle of the glass plate is determined separately, and bonding is performed by repeatedly switching to each during the fine wire connection work. It is possible to prevent a decrease in work efficiency due to level differences between points and solve the drawbacks of conventional methods.
The present invention will be specifically explained with reference to an embodiment shown in FIG. 2. Reference numeral 1 indicates a spotlight, 2 a capillary for connecting a string shown schematically, and a semiconductor, which is an object 6 to be irradiated, is held vertically below the capillary. It will be done.

The spotlight includes a pattern 3 and a lens 4 at the tip of a lamp 1' to generate a linear beam of light. This optical axis coincides with the tip of the capillary 2 on the object 6 to be irradiated. A glass plate 6 having a rotating mechanism 7, which will be explained in detail later, is placed in the middle of this optical axis. Glass plate 5 is spotlight 1
Although not shown in the figure, the bottle 1 is fixed to the microscope device.
The base 12 is fixed to one end of the base 12, which is pivotally mounted to the base 12, and the rear beveled adjustment screws 8 and 8' are fixed to the microscope device at the other end and are screwed into internal screws 13 and 13'. 12 are held at intervals. One end of a spring 14 is engaged with the base 12, and the other end of the spring 14 is locked to a fixed point to constantly apply a tensile force to the base 12. A long hole is formed in the center of the base 12, and a pin 17 is inserted therein to be fixed to one end of the movable piece 16 of the fixed solenoid 15. When the solenoid 15 is energized, the movable piece 16 is drawn into the solenoid 15, and the pin 17 causes the base 12 to rotate around the pin 11 against the spring 14.
The end of the base 12 abuts the end of the adjusting screw 8', and accordingly the glass plate 5 is in the position shown in FIG. When the solenoid 15 is deenergized, the tension of the spring 14 causes the base 12 to
rotates around the pin 11, and its end touches the adjusting screw 8, so that the glass plate 5 is inclined. The oblique angle of the glass plate 5 is obtained by turning the adjusting screws 8, 8'. spotlight 1
The light rays emitted from the pattern 3 pass through the lens 4 glass plate 5 and are irradiated onto the object 6 to be irradiated.

At this time, when irradiating and instructing the higher level of the first bonding point and the second bonding point, the glass plate is set so that the beam of the spotlight 1 is perpendicularly incident on the glass plate 5, and then When irradiating and instructing the lower level, a certain mirror oblique angle is given by the rotation mechanism 7 of the glass plate 5 so that the beam of the spotlight is incident on the glass plate 5 at an angle i. At this time, the angle of inclination is equal to the angle of incidence i. Further, the inclination angle can be adjusted by the inclination angle adjustment screw 8'. As described above, it has been found that the positional deviation of the spot due to the level difference between the first bonding point and the second bonding point can be corrected.

In the embodiment shown in FIG. 3, a saddle eye lens 18 of a microscope is placed in place of the spotlight 1 in the previous embodiment, and a half mirror 9 is provided obliquely on the optical axis KI in FIG. A normal line is set on the surface of the mirror 9, and an angle equal to the angle between the normal line and the optical axis KI is drawn between the normal line and the optical axis K2, which is symmetrical with respect to the normal line. A glass plate 5 having the rotation mechanism 7 is provided, and a pattern 3' having a lamp 10 is further provided on an extension of the light ball K2, and the spotlight is not directly irradiated onto the object but is irradiated through the half mirror 9. This is a method of viewing the pattern 3' superimposed on the object to be irradiated.

To explain the above optically, as shown in Figures 4-1 and 4-2, ``When the light emitted from pattern A enters the glass plate G perpendicularly, it hits point B on the irradiated object. Ital.

However, after the light that enters the glass plate G at the incident angle i is refracted at the refraction angle r, it is parallel to the incident ray and has a displacement of △y at the point B.
'. To find the relationship between the angle of incidence i, the angle of refraction r, and the displacement △y, if the refractive index of the glass plate is n, then Sin l n. Also, if the thickness of the glass plate is t, t △y = Intersect? in(ir-r)……■ Here, △y is for correcting h・tano shown in Fig. 16, so △y=h・n, or t and n are appropriate glass plates. Determined by choosing.

Therefore, by calculating the equation '1}■, the incident angle i, that is, the oblique angle can be found. In this way, by selecting appropriate t and n of the glass plate and adjusting the irradiation angle for the required displacement Δy, versatility can be achieved.

In addition, in the present invention, when a light beam illuminates two points, one of the points is assumed to be incident perpendicularly to the glass surface, but this does not have to be perpendicular, and the difference in the angle of incidence of the light beam with respect to the two points can be changed. Just put it on.

Further, although the soot material that refracts light is a glass plate, other transparent media may be used.

[Brief explanation of drawings]

FIG. 1 is a diagram of a conventional device, FIGS. 2 and 3 are diagrams of an embodiment according to the present invention, and FIGS. 4-1 and 4-2 are explanatory diagrams of the optical action of the present invention. . 1...Spotlight, 1'...Lamp, 3,3'...
Pattern, 4...Lens, 5...Glass plate, 7...
...Rotation mechanism, 8, 8'...Adjustment screw, 9...Half mirror, 10...Lamp, 11...Pin, 12...Base, 14...Spring, 15...Solenoid, 16...・
...Movable piece, 17...Pin, 18...Eyepiece. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] 1. A base 12 is pivotally supported on a fixed pin 11, and the base 12 is
A pin 17 is fixed to the end of the movable piece 16 of the solenoid 15, which is controlled according to the bonding point in a long hole provided in the center of the solenoid 15.
A rotating mechanism 7 for the glass plate 5 is provided in which the glass plate 5 is fixed to one end of the base 12 and the other end of the base 12 is biased in one direction by a spring 14. Glass plate 5 to correct positional deviation.
A bonding point indicating device characterized in that the bonding point indicating device is arranged on the optical axis of a spotlight that irradiates the surface of an object to be irradiated from an oblique direction. 2 Pivot the base 12 to the fixed pin 11, and
A pin 17 is fixed to the end of the movable piece 16 of the solenoid 15, which is controlled according to the bonding point in a long hole provided in the center of the solenoid 15.
A rotating mechanism 7 for the glass plate 5 is provided in which the glass plate 5 is fixed to one end of the base 12 and the other end of the base 12 is biased in one direction by a spring 14. Glass plate 5 to correct positional deviation.
is arranged on the optical axis between the lamp 10 and the half mirror 9 of the lamp 10 which irradiates the surface of the object to be irradiated obliquely through the half mirror 9, and the half mirror 9
A bonding point indicating device characterized in that an eyepiece lens 18 is disposed on an extension of the optical axis between the object and the object to be irradiated.