JPS604959U - automatic measuring device - Google Patents
automatic measuring deviceInfo
- Publication number
- JPS604959U JPS604959U JP9620883U JP9620883U JPS604959U JP S604959 U JPS604959 U JP S604959U JP 9620883 U JP9620883 U JP 9620883U JP 9620883 U JP9620883 U JP 9620883U JP S604959 U JPS604959 U JP S604959U
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- automatic measuring
- circuit
- response characteristics
- waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例である自動測定装置用故障検
出回路のブロック図、第２図ａ−ｄは本考案の動作原理
を説明するための各部波形図である。
１・・・・・・測定用パルス電源群、２・・・・・・計
測器群、３・・・・・・リレーマトリクス、４・・・・
・・’ＮＵＲＩ用コンピュータ、５・・・・・・記憶回
路、６・・・・・・パルス発生回路、７・・・・・・電
源波形検出回路、８・・・・・・比較回路、９・・・・
・・試料。FIG. 1 is a block diagram of a failure detection circuit for an automatic measuring device which is an embodiment of the present invention, and FIGS. 2A to 2D are waveform diagrams of various parts for explaining the operating principle of the present invention. 1...Measurement pulse power supply group, 2...Measuring instrument group, 3...Relay matrix, 4...
...'NURI computer, 5...memory circuit, 6...pulse generation circuit, 7...power waveform detection circuit, 8...comparison circuit, 9...
··sample.
Claims (1)
て、自動測定装置の測定用パルス電源の応答特性を記憶
する回路と前記記憶値に基づき応答特性を再現するパル
ス発生回路と前記測定用パルス電源の波形を検出する回
路と前記パルス発生回路の出力波形と測定用パルス電源
の波形を比較する比較回路から構成され前記比較値に基
づいて自動測定装置の故障を検出する故障検出回路を備
えたことを特徴とする自動測定装置。An automatic measuring device that automatically measures the characteristics of semiconductor devices, etc. includes a circuit that stores the response characteristics of a pulsed power source for measurement of the automatic measuring device, a pulse generating circuit that reproduces the response characteristics based on the stored value, and a pulse generating circuit that reproduces the response characteristics of the pulsed power source for measuring the automatic measuring device. The present invention is comprised of a waveform detection circuit and a comparison circuit that compares the output waveform of the pulse generation circuit and the measurement pulse power supply waveform, and includes a failure detection circuit that detects a failure of the automatic measuring device based on the comparison value. Characteristic automatic measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620883U JPS604959U (en) | 1983-06-22 | 1983-06-22 | automatic measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620883U JPS604959U (en) | 1983-06-22 | 1983-06-22 | automatic measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS604959U true JPS604959U (en) | 1985-01-14 |
Family
ID=30229385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9620883U Pending JPS604959U (en) | 1983-06-22 | 1983-06-22 | automatic measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS604959U (en) |
-
1983
- 1983-06-22 JP JP9620883U patent/JPS604959U/en active Pending
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