JPS6047254A - Method for manufacturing optical disk - Google Patents

Abstract

PURPOSE:To form a stamper with good signal transfer performance to be used as the stamper at disk transfer by adhering a metallic film to the information on a master disk in the vertical direction when adhering a metallic film to the master disk on which the information is recorded optically to a photo resist member on a prescribed substrate. CONSTITUTION:The photo resist 2 is coated on a thick glass substrate 1, a desired signal is recorded by laser light so as to form the master disk 1-1. The metallic film 5 such as Al or Ni is adhered to the master disk. Plural evaporation sources are arranged so that the metallic film 5 is vapordeposited vertically to a signal part 2-1. Further, the length of the evaporation sources is >=50% of the width of the signal part on the master disk to be vapor-deposited. As a result of the metallic film adhered vertically onto the signal face in this way, the metallic film 5 is formed and a stamper having the signal pit having good transfer performance is formed. A material 11 such as cellulose acetate or the like is coated to the stamper to form an exfoliated boundary layer. After a UV resin 7-2 is coated on the layer, the preceding substrate and the stamper are pressed together to cure the UV resin 7-2. Then, the resin is exfoliated from the stamper so as to form a replica.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a method for manufacturing an optical disc, and particularly to a method for manufacturing a press mold thereof that can provide a high-performance method.

Here, an optical disk is one in which desired signals are recorded on a 8pje film on a disk-shaped substrate such as glass using a laser beam. Possible applications include video discs, PCM discs, document file digital discs, and holographic discs.

[Background of the invention]

Conventionally, when making a stamper used for making a disk, a metal film was attached to the master as shown in FIG. 1. In other words, the signal portion 2-1 recorded on the master disc 1
The raw material 4 set in the evaporation source 3 to which the K metal exchanger is attached is heated and evaporated, flying radially toward the signal surface and causing an explosion. Figure 2 shows an enlarged view of this situation. When the metal film 5 is attached in this way, 1 is replaced by number 2-2.
Since the metal film 5 cannot be attached to the wall surface of the portion, as a result, the transferability of this portion is poor, and this effect is also seen on the duplicated disk.

[Purpose of the invention]

In order to eliminate such drawbacks, the present invention provides a method for making a stamper with good transferability as a stamper for duplicating disks, and also relates to a method for making a replica using this stamper.

[Summary of the invention]

The present invention is characterized in that a resin stamper is made using an ultraviolet curing resin, and a replica with a base film is produced using this stamper.

[Embodiments of the invention]

A method for manufacturing a stamper according to the present invention is shown in FIG. First, a photoresist 2 is coated on a thick glass substrate 1, a desired signal is recorded on it using a laser beam, and a glass master 1-1 having an uneven surface is prepared by plating. Attachment was applied to this glass master disk to prevent swelling and deterioration of the surface and to ensure peeling.

A metal film 5 made of Ni or the like is attached, and if necessary, peeling (
For example silicone oil, chalcogenide, i.e.
A mixture or compound containing at least one of the following elements: IeSe, S, etc.) is coated by a method such as vapor deposition. A plurality of evaporation sources 3 are arranged so that the metal film 5 can be deposited perpendicularly to the signal portion 2-1. Note that it is also a good method to rotate the master 1 in order to ensure uniformity. Note that at this time, only one evaporation source may be used, but if it is necessary to obtain a thick layer, a plurality of evaporation sources may be used. Note that the length of evaporation should be at least 50% of the width of the signal portion on the master disk to be evaporated. Although vapor deposition has been described here, sputtering can also be used. Further, as the metal film, for example, At, Ni, C1, 1u, etc. can be used. As a result of attaching the metal film perpendicularly to the 1u surface in this way, the metal B! ; i, 5 are formed, and a stamper (iz) having signal pits with good transferability can be manufactured. The process of making the stamper will be explained below with reference to FIG. 5. Master 1 with metal film 5 attached. - 1 is coated with ultraviolet curing resin (hereinafter referred to as UV resin) 7-1, and a substrate 8 such as a transparent acrylic plate or glass plate is pressed/after that, UV rays are irradiated to cure the UV resin 7-1. .

Finally, remove the PI from the boundary between the metal layer 5 and UV#I fat 7-1.
IK allows the pattern of the master to be copied onto the board. However, since the unevenness is reversed, it can be used as a stamper 9, which is called a master in the recording process. If the A agent or metal such as A4 is also removed when peeling off, reapply it to the entire surface of the glass master 1-1 and then repeat the same process to make a master or stamper again. It is possible to do so, and since the concave-convex pattern of the glass master 1-1 may be damaged, it is best to use it many times to create the above-mentioned stamina. It is necessary to remove the photoresist from the stamper using an alkali. It is necessary to remove everything except the UV resin 7-1 and the substrate 8.

Next, FIG. 7 shows a process of manufacturing the replica 10 shown in FIG. 6 using the stamper made with the above-mentioned 0R.

First, 111:'11, such as cellulose acetate or nitrocellulose, is applied to the stamper to form a boundary layer. Next, on top of that or on top of the glass or acrylic 7 of the transparent substrate 12 that will serve as the replica substrate, apply ultraviolet curing resin 7-2 (JV Resin).
After applying, press the previous board and stamper = J,
The UV resin 7-2 is cured.

This trowel is peeled off from the stamper and a replica is created. Then, depending on the purpose, attach a recording film or a reflective film on top of it and use it.

〔Effect of the invention〕

As explained above, according to the present invention, a stamper with good flatness can be made very quickly without including a plating process, and furthermore, a replica made using the same can have good flatness. .

Furthermore, it is effective in producing an optical disc with improved transferability of signal information.

[Brief explanation of the drawing]

Figure 1 is a diagram explaining the conventional method of attaching a metal film to a master disc.
Figure 2 is an enlarged view of the part where a metal film is attached to a conventional master disc, Figure 3 is a diagram explaining the method of attaching a metal film to the master disc, and Figure 4
The figure is an enlarged view of the part where the gold-11 film is applied to the W disk according to the present invention, FIG. FIG. 7 is a diagram showing the configuration of the fi9 configuration, and FIG. 7 is a diagram showing the configuration for making a replica from the stamper. 1... Master board, 2... Photoresistor, 5...
・Metal layer, 7-1.7-2... Ultraviolet curing resin, 8.
... Stamper member, 12 ... Replica substrate, 11
...Haku No. 1 Fig. 2 No Fig. 3 Fig. 1 No Otsu--111N Do Otsu 8 minutes Ff 1 = (N・ Close 4 Whistle 5 Mouth s l Mouth Fig. 7

Claims (1)

[Claims] 1. A process of attaching Kinmen J-Kan to a master disc on which information is optically recorded on a photoresist material on a predetermined substrate, a process of applying an ultraviolet curing resin, and a process of attaching a translucent member to the above-described process. The process of pressing the resin onto the resin, the process of irradiating the resin with ultraviolet rays, and the process of pressing the resin from the master disc <Ii7! The above member is used as a stamper, a step of applying a release agent on it, a step of applying an ultraviolet curing resin, a step of pressing a translucent substrate onto the resin, and a step of applying an ultraviolet ray to the stamper. In the method for manufacturing an optical disc, the method includes the steps of: curing the resin by irradiating the resin; and peeling the cured resin and the substrate together from the stamper. A method for producing an optical disc, characterized in that the optical disc is attached from a vertical direction. 2. A method for producing an optical disc according to claim 1, characterized in that the metal film is applied by vapor deposition. 3. A method for producing an optical disc according to claim 1, characterized in that a double layer film is used as the metal film. 4. A method for manufacturing an optical disk according to claim 1, characterized in that the metal film is applied by sputtering. 5. In the method for manufacturing an optical disk according to claim 2, the metal film may include At, i, iNi, or Au.
A method for producing an optical disc, which is characterized by the use of. 6. The method for producing an optical disc according to claim 3, wherein the multilayer metal is one or more of At, Ni, Au, and Cr. 7. The optical disc manufacturing method according to claim 2, wherein the length of the deposition boat or filament is 50% or more of the length of the signal range of the master disk to be deposited. . 8. 8. The optical disc manufacturing method according to claim 7, wherein the deposition boats are arranged in a mantissa in the circumferential direction with the center of the deposition target master as an axis. 9. The method of manufacturing an optical disc according to claim 7, wherein the master disk to be deposited is rotated during the deposition.