JPS60403A - Formation of thin film - Google Patents

Abstract

PURPOSE:To form uniformly a thin film consisting of a high polymer material by transferring the coating liquid developed preliminarily on the surface of a roller to a base plate then rotating the base plate around the shaft roughly perpendicular to said coating surface to smooth and thin the coated film then drying the film. CONSTITUTION:A coating liquid consisting of a high polymer soln. developed preliminarily on the surface of a roller is transferred to a base plate then the base plate is rotated around the shaft roughly perpendicular to the surface coated with the coating liquid to smooth and thin the coated film and is dried, by which a thin film consisting of the high polymer material is formed. Since the roller coating is utilized as a method for supplying the coating liquid for the purpose of spinning coating to form the uniform film, there is no excess supply of the coating liquid and the contamination of the side and rear surfaces of the base plate and further the surrounding equipment, etc., and the labor for washing the same, etc. is not required. The above-mentioned method is used for forming a photosensitive resin film, etc. for consituting a color separating stripe filter for, for example, a single tube type color television camera.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention is directed to the formation of a photosensitive resin film on a substrate, such as when forming a photosensitive resin film constituting a color-separated stripe filter for a single-tube color television camera. The present invention relates to a thin film forming method for forming a smooth thin film made of a molecular substance.

[Background of the invention]

When a thin film is formed into a desired shape by photo processing, as in the above-mentioned color separation stripe filter, the uniformity of the initial application of the photosensitive resin film depends on the dimensional error of the residual resin film after exposure and development with respect to the desired shape. The effect becomes greater as the graphic definition increases. For example, when manufacturing the above-mentioned stripe filter, it may cause errors in the stripe filter line width and unevenness in the processed surface. Unevenness in reproducibility and uneven brightness occur due to unevenness in line width. Moreover, apart from the unevenness of the line width, the thickness itself also becomes uneven, and this causes some inconvenience.

Such color separation filters are usually produced by coating a transparent glass substrate with a photosensitive solution containing mainly natural polymers, drying it, and then developing it using a predetermined original plate. Dye f that has dyeability on natural polymer materials
It is immersed in a dissolved staining solution and dyed to a desired spectral transmittance. If necessary, stripe-like color separation filters of other colors are repeatedly formed by the same process.

Conventionally, as a natural polymer photosensitizer, an aqueous solution of gelatin, casein, egg white, etc. to which dichromate or other photosensitizers are added is used, and this is poured with the coated side facing up. Gently let it flow down approximately to the center of the transparent substrate fixed on the rotary table. Next, the substrate is rotated about the normal line passing through the center of the coated surface, and the centrifugal force is used to spread the coating solution made of the photosensitive agent and shake off the excess solution. Thereafter, a flat thin film is obtained by drying.

This coating method is called a spinning method, but the method and amount of the initial flow of the photosensitive liquid, and the way the original curve is formed on the substrate surface during the flow may affect the film formation. This causes unevenness in the thickness of the completed photoresist film. For this reason, various improvements have been made to the strength and viscosity of the liquid, the falling particles and speed, the temperature and rotation speed of the substrate, and its program, but we have maintained conditions that allow us to completely prevent the occurrence of unevenness. All I had to do was leave.

[Purpose of the invention]

The present invention has been made in view of these circumstances.
The purpose is to provide a method for forming an R film that can thinly and uniformly coat a layer made of a polymeric substance on a substrate.

[Summary of the invention]

In order to achieve such an object, the present invention provides that although the final spreading layer of the coating solution is destroyed by the spinning method, the initial supply of the solution to the substrate surface is not based on flowing down, but is performed using a roller. This is done by coating.

Coating with a polymer solution using a roller is well-known as a method of forming an independent thin film, for example in the production of wiring boards for electronic devices, but its dimensional accuracy is low, and stripes for color TV imaging are known. It is not suitable for precision processes such as Fill H, which is fine and has small tolerances.The present invention utilizes this roller coating as a method of supplying the coating liquid for spinning coating, and has succeeded in forming a uniform thin film. is” [
Embodiments of the Invention In order to supply the polymer solution to the substrate surface of Row 2, spread the coating liquid as evenly as possible on the rubber roller surface in advance,
All you have to do is roll it onto a substrate for this purpose. Specifically, there is a method in which two 4-2- units are rotated opposite each other with a slight gap between them, and a coating liquid is applied to the surface of one roller through the gap, and this is directly transferred to the substrate surface. Depending on the desired film thickness, the desired thickness uniformity, and the method of transferring from the second roller to the substrate surface after transferring to the surface of another third roller, general roller coating A variety of methods can be used for the law and inner sphere.

After the polymer composition is relatively thickly applied over the entire surface of the substrate by such a roller coating method, spinning is subsequently performed to develop the coating solution into a thinner coating film having a uniform thickness. As described above, this is done by fixing the substrate to a rotating table and rotating it around the central axis of rotation Kk, which is approximately perpendicular to the coating surface. Thereafter, the thin film is completed by drying as in the conventional method.

For this, liquid first? Compared to the conventional spinning method that uses flowing water, the film thickness can be controlled more easily and evenly. Not only that, but in the past, when the liquid was flowing down, it would sometimes flow down the outer edge of the substrate and get into the sides and back of the substrate, contaminating the substrate and equipment, and furthermore, the unnecessary coating liquid could be used in subsequent processes. In contrast, with this method, there were cases where the equipment was contaminated or the coating film was broken, impairing the quality of the product and reducing the yield. Since it is not supplied, there is no possibility of it being inserted into the back side.

In order to more thoroughly prevent the back-rolling accident of the coating liquid, a recess or a protrusion is provided on the second roller or third row 2-, and the second roller
) It is effective to prevent the coating liquid transferred onto the substrate from adhering to the outer periphery of the substrate. In this case, it is possible to increase the amount of coating from the mouth to the roller, so
The uniformity of the film thickness after spinning is further improved.

The second roller may be a concave plate type that transfers the declaration liquid in the concave portion of the final transfer row 2-, similar to the name of the printing format, or a letterpress type, but it is not necessary to supply a large amount of liquid. An intaglio roller is preferred. In addition, when applying this method, the condition is that the outer peripheral part of the substrate where the liquid is not subjected to 'IIS;As (even if it is spread to the edges by spinning) is an invalid part or a part that is good in low quality. It goes without saying that it will happen.

At the stage of transfer using a roller, there may be unevenness in the liquid layer as in the case of conventional general roller coating, but this is evened out and eliminated by spreading by spinning. or,
As is done in the conventional spinning method and roller coating method, the pI of the photosensitizer! In order to increase the ANt or eliminate the bottle ball defect, consideration should be given to repeating the coating process several times as necessary. - [Effects of the Invention] As explained above, according to the present invention, a polymeric substance is deposited on a substrate by first applying a coating liquid to the substrate surface with a roller and then performing spinning. It is possible to form a thin and uniform film consisting of Furthermore, since there is no excessive supply of liquid, there is also the advantage that the side surfaces and edges of the substrate, as well as the surface of the substrate, do not contaminate surrounding equipment, and there is no need to clean them.

Claims (1)

[Claims] In a method of forming a thin film made of a polymeric material by smoothly applying a polymeric solution onto a substrate, the substrate is coated with a low
- A thin film characterized in that the coating solution developed on the surface is transferred, and then the substrate is rotated around an axis perpendicular to the surface coated with the coating solution to make the coating film smooth and thin, and then dried. Formation method.