JPS60403A - Formation of thin film - Google Patents
Formation of thin filmInfo
- Publication number
- JPS60403A JPS60403A JP58107663A JP10766383A JPS60403A JP S60403 A JPS60403 A JP S60403A JP 58107663 A JP58107663 A JP 58107663A JP 10766383 A JP10766383 A JP 10766383A JP S60403 A JPS60403 A JP S60403A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- film
- roller
- base plate
- coating liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Filters (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、例えば単管式カラーテレビカメラ用の色分済
ストライプフィルタを構成する感光性樹脂膜を形成する
場合のように、基板上に高分子物質からなる薄膜を平滑
に形成する薄膜形成方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention is directed to the formation of a photosensitive resin film on a substrate, such as when forming a photosensitive resin film constituting a color-separated stripe filter for a single-tube color television camera. The present invention relates to a thin film forming method for forming a smooth thin film made of a molecular substance.
上述した色分解ストライプフィルタのように、フォト加
工によって薄膜を所望の図形に形成する場合、はじめの
感光性樹脂膜塗布状況の均一性は、露光・現像後の残留
樹脂膜の所望図形に対する寸法誤差の原因となシ、図形
精細度が上がるにしたがってその影響が大きくなる。例
えば上記スト2イブフィルタ製作に際しては、ストライ
プフィルタ線幅の誤差および加工面内のむらの原因とな
シ、このようなフィルタを使用してカラーテレビ撮像を
行なった場合、撮像再生画面に、ストライプフィルタ線
幅のむらに基く再現性のむらや輝度むらが発生してしま
う。また、線幅のむらとは別に、厚さ自体のむらも生じ
、これが原因の不都合も生じる。When a thin film is formed into a desired shape by photo processing, as in the above-mentioned color separation stripe filter, the uniformity of the initial application of the photosensitive resin film depends on the dimensional error of the residual resin film after exposure and development with respect to the desired shape. The effect becomes greater as the graphic definition increases. For example, when manufacturing the above-mentioned stripe filter, it may cause errors in the stripe filter line width and unevenness in the processed surface. Unevenness in reproducibility and uneven brightness occur due to unevenness in line width. Moreover, apart from the unevenness of the line width, the thickness itself also becomes uneven, and this causes some inconvenience.
このような色分解フィルタは、通常透明なガラス基板に
天然高分子を主体とした感光性の溶液を平坦に塗布・乾
燥後、所定の原版を用いて絽光−現像を行ない、次いで
、当該□天然高分子材料に対して染着性を有する染料f
t溶解した染色液に浸演し、所望の分光透過率となるよ
うに染色して形成する。必要があれば、さらに他の色の
ストライプ状色分解フィルタを同様の工程によシ繰り返
し形成する。Such color separation filters are usually produced by coating a transparent glass substrate with a photosensitive solution containing mainly natural polymers, drying it, and then developing it using a predetermined original plate. Dye f that has dyeability on natural polymer materials
It is immersed in a dissolved staining solution and dyed to a desired spectral transmittance. If necessary, stripe-like color separation filters of other colors are repeatedly formed by the same process.
ここで、従来天然高分子感光剤としては、例えばゼラチ
ン、カゼイン、卵白等に、重クロム酸塩やその他の感光
性伺与剤を添加した水溶液を用い、これを、塗布面側を
上にして回転台に固定した透明基板のほぼ中央に静かに
流下させる。次いで、当該基板を塗布面の中央を通る法
線を軸として回転させ、その遠心力をもって、上記感光
剤からなる産布液を延展宮せるとともに、余剰の液を振
シ切る。その後、乾燥させることにより、平坦な薄膜を
得る。Conventionally, as a natural polymer photosensitizer, an aqueous solution of gelatin, casein, egg white, etc. to which dichromate or other photosensitizers are added is used, and this is poured with the coated side facing up. Gently let it flow down approximately to the center of the transparent substrate fixed on the rotary table. Next, the substrate is rotated about the normal line passing through the center of the coated surface, and the centrifugal force is used to spread the coating solution made of the photosensitive agent and shake off the excess solution. Thereafter, a flat thin film is obtained by drying.
このような塗布法は、スピニング法と称されるが、はじ
めの感光液の流下の方法、量および流下時の基板面にお
ける原曲の仕方等が、膜の形成に′#妙な影−1を及は
し、完成した感光膜の厚さむらの原因となる。このため
、液の鏝度および粘度、流下片および速度、基板の温度
ならびに回転数とそのプログラムなどに種々工夫をこら
してはいるが、むらの発生を完全に防止することが可能
な条件を維持することは一離であった。This coating method is called a spinning method, but the method and amount of the initial flow of the photosensitive liquid, and the way the original curve is formed on the substrate surface during the flow may affect the film formation. This causes unevenness in the thickness of the completed photoresist film. For this reason, various improvements have been made to the strength and viscosity of the liquid, the falling particles and speed, the temperature and rotation speed of the substrate, and its program, but we have maintained conditions that allow us to completely prevent the occurrence of unevenness. All I had to do was leave.
本発明はこのような事情に鑑みてなされたものであシ、
その目的は、基板上に高分子物質からなる欣を薄く均一
に塗布形成することが可能なR膜形成方法を提供するこ
とにある。The present invention has been made in view of these circumstances.
The purpose is to provide a method for forming an R film that can thinly and uniformly coat a layer made of a polymeric substance on a substrate.
このような目的を達成するために、本発明は、塗布液の
最終的な延展参振Laシはスピニング法によって朽なう
が、基板面への最初の液の供給は流下によらず、ローラ
ー塗布によって行なうものである。In order to achieve such an object, the present invention provides that although the final spreading layer of the coating solution is destroyed by the spinning method, the initial supply of the solution to the substrate surface is not based on flowing down, but is performed using a roller. This is done by coating.
高分子溶液のローラーによる塗膜は、それ自体独立の薄
」ら形成方法として、例えは電子(幾器の配線基板製作
などで周知であるが、その寸法精度は低く、カラーテレ
ビ噂撮像用ストライプフィルHのように精細で許容誤差
の少ない精密工程には適さない。本発明はこのローラー
塗布を、スピニング塗布のための塗布液の供給法として
利用し、均一な薄い膜の形成に成功したものである」〔
発明の実施例〕
高分子溶液をロー2−によシ基板面に供給するには、予
めゴムローラー表面になるべく均等に塗布液を展開し、
これを目的とする基板上にころがせばよい。具体的には
、2台の四−2−をわずかな隙間をおいて対向回転させ
、その隙間を通して塗布液を一方のローラー表面に塗シ
付け、これをそのまま基板面に転写する方法や、さらに
別の第3のローラー表面に転写した後、第2のローラー
から基板面に転写する方法など、所望の膜厚や賛求され
る厚さの均一度、i賀に応じて、一般のローラー塗布法
と内球に多様な方法を用いることができる。Coating with a polymer solution using a roller is well-known as a method of forming an independent thin film, for example in the production of wiring boards for electronic devices, but its dimensional accuracy is low, and stripes for color TV imaging are known. It is not suitable for precision processes such as Fill H, which is fine and has small tolerances.The present invention utilizes this roller coating as a method of supplying the coating liquid for spinning coating, and has succeeded in forming a uniform thin film. is” [
Embodiments of the Invention In order to supply the polymer solution to the substrate surface of Row 2, spread the coating liquid as evenly as possible on the rubber roller surface in advance,
All you have to do is roll it onto a substrate for this purpose. Specifically, there is a method in which two 4-2- units are rotated opposite each other with a slight gap between them, and a coating liquid is applied to the surface of one roller through the gap, and this is directly transferred to the substrate surface. Depending on the desired film thickness, the desired thickness uniformity, and the method of transferring from the second roller to the substrate surface after transferring to the surface of another third roller, general roller coating A variety of methods can be used for the law and inner sphere.
このようなローラー塗布法で基板の全面に比較的厚く高
分子群成を重布した後、引き続きスピニングを行なって
、塗布液企さらに薄く均等な膜厚金有する塗膜に展開す
る。これは前述したと同様に、、基板を回転台に固定し
、塗布面にほぼ垂直な中心Kk回転軸として回転させる
ことにょシ行なう。その後、従来と同様に乾燥して薄膜
を完成する。After the polymer composition is relatively thickly applied over the entire surface of the substrate by such a roller coating method, spinning is subsequently performed to develop the coating solution into a thinner coating film having a uniform thickness. As described above, this is done by fixing the substrate to a rotating table and rotating it around the central axis of rotation Kk, which is approximately perpendicular to the coating surface. Thereafter, the thin film is completed by drying as in the conventional method.
これによシ、はじめに液?流下にょシ供給する従来のス
ピニング法に比較し、膜厚をよシ芥易に均−洗制御でき
る。のみならず、従来は液流下の際に、ともすれば基板
の外淵よシ流れ落ち、基板の側面や裏面Kまわシ込んで
基板や装置を汚し、さらにはその不要な塗布液が後続の
プロセスにおいて装置を汚したシ、または塗膜が切れテ
にちて製品の品位を害し歩留シを低下させるようなこと
があったのに対し、この方法によれば、液ははじめから
それ程過剰には供給されないため、裏面にまわシ込むよ
うなことはなくなる。For this, liquid first? Compared to the conventional spinning method that uses flowing water, the film thickness can be controlled more easily and evenly. Not only that, but in the past, when the liquid was flowing down, it would sometimes flow down the outer edge of the substrate and get into the sides and back of the substrate, contaminating the substrate and equipment, and furthermore, the unnecessary coating liquid could be used in subsequent processes. In contrast, with this method, there were cases where the equipment was contaminated or the coating film was broken, impairing the quality of the product and reducing the yield. Since it is not supplied, there is no possibility of it being inserted into the back side.
塗布液の裏まわシ事故を、さらに徹底して防止するため
には、上述した第2のローラーもしくはさらに第3のロ
ー2−に凹部または凸部を設け、第2のローラーによ#
)基板に転写される塗布液が、基板の外周部には付着し
ないようにするととが有効である。この場合、それだけ
口〜ラーによる塗布量を大きくすることができるため、
スピニング後の膜厚の均等性はさらに改曽される。In order to more thoroughly prevent the back-rolling accident of the coating liquid, a recess or a protrusion is provided on the second roller or third row 2-, and the second roller
) It is effective to prevent the coating liquid transferred onto the substrate from adhering to the outer periphery of the substrate. In this case, it is possible to increase the amount of coating from the mouth to the roller, so
The uniformity of the film thickness after spinning is further improved.
上記第2のローラーは、印刷形式名になぞらえて、最終
転写ロー2−の凹部の宣布液を転写する凹板形式のもの
でも、凸版形式のものでもよいが、大量の液を供給する
には凹版ローラーの方が好適である。なおこの方法を適
用する場合には、当初において液が’IIS ;Asさ
れない(稜にスピニングにより延展されるにしても)基
板外周部は、無効部ないし低品位で良い部分であること
が条件となることは9うまでもない。The second roller may be a concave plate type that transfers the declaration liquid in the concave portion of the final transfer row 2-, similar to the name of the printing format, or a letterpress type, but it is not necessary to supply a large amount of liquid. An intaglio roller is preferred. In addition, when applying this method, the condition is that the outer peripheral part of the substrate where the liquid is not subjected to 'IIS;As (even if it is spread to the edges by spinning) is an invalid part or a part that is good in low quality. It goes without saying that it will happen.
ローラーによる転写を行なった段階では、従来一般のロ
ーラー塗布による場合と同様の液層むらが存在し得るが
、スピニングによる延展によシ均等化し解消する。又、
従来のスピニング法やローラーコート法に於ても行なわ
れるように感光剤のpI!ANt大としたり、ビンボー
ル欠陥を解消するため、禎斂回の塗布工程を繰シ返すこ
とも必要に応じて配慮すべきである。 −
〔発明の効果)
以上説り」したように、本発明によれば、はじめに基板
面に咋布液をローラー転与した後、スピニングを豹なう
ことによシ、基板上に高分子物質からなる膜を薄く均一
に形成するととができる。また、過剰な液の供給がない
ために、基板の側面や誂向、さらKはまわりの装置等を
汚すこと、あるいはそれを洗浄する必要もないという利
点tも有する。At the stage of transfer using a roller, there may be unevenness in the liquid layer as in the case of conventional general roller coating, but this is evened out and eliminated by spreading by spinning. or,
As is done in the conventional spinning method and roller coating method, the pI of the photosensitizer! In order to increase the ANt or eliminate the bottle ball defect, consideration should be given to repeating the coating process several times as necessary. - [Effects of the Invention] As explained above, according to the present invention, a polymeric substance is deposited on a substrate by first applying a coating liquid to the substrate surface with a roller and then performing spinning. It is possible to form a thin and uniform film consisting of Furthermore, since there is no excessive supply of liquid, there is also the advantage that the side surfaces and edges of the substrate, as well as the surface of the substrate, do not contaminate surrounding equipment, and there is no need to clean them.
Claims (1)
なる薄膜を形成する方法において、基板に、予めロー2
−表面に展開した塗布液を転写し、次いで基板を上記塗
布液の塗布面にtヨは垂直な軸を中心に回転して塗布膜
を平滑薄膜化した後、乾燥することを特徴とする薄膜形
成方法。In a method of forming a thin film made of a polymeric material by smoothly applying a polymeric solution onto a substrate, the substrate is coated with a low
- A thin film characterized in that the coating solution developed on the surface is transferred, and then the substrate is rotated around an axis perpendicular to the surface coated with the coating solution to make the coating film smooth and thin, and then dried. Formation method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58107663A JPS60403A (en) | 1983-06-17 | 1983-06-17 | Formation of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58107663A JPS60403A (en) | 1983-06-17 | 1983-06-17 | Formation of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60403A true JPS60403A (en) | 1985-01-05 |
Family
ID=14464855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58107663A Pending JPS60403A (en) | 1983-06-17 | 1983-06-17 | Formation of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60403A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4913934A (en) * | 1987-05-06 | 1990-04-03 | The United States Of America As Represented By The Secretary Of The Army | Process for making laser Q-switch |
-
1983
- 1983-06-17 JP JP58107663A patent/JPS60403A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4913934A (en) * | 1987-05-06 | 1990-04-03 | The United States Of America As Represented By The Secretary Of The Army | Process for making laser Q-switch |
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