JPS6036904A - 接触プロ−ブ - Google Patents
接触プロ−ブInfo
- Publication number
- JPS6036904A JPS6036904A JP12288084A JP12288084A JPS6036904A JP S6036904 A JPS6036904 A JP S6036904A JP 12288084 A JP12288084 A JP 12288084A JP 12288084 A JP12288084 A JP 12288084A JP S6036904 A JPS6036904 A JP S6036904A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- housing
- circuit
- contact
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims description 83
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 25
- 238000001514 detection method Methods 0.000 description 20
- 239000003990 capacitor Substances 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 13
- 230000005855 radiation Effects 0.000 description 11
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 238000003754 machining Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 230000002045 lasting effect Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012966 insertion method Methods 0.000 description 1
- 230000007794 irritation Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009419 refurbishment Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Turning (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12288084A JPS6036904A (ja) | 1983-06-14 | 1984-06-14 | 接触プロ−ブ |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US504066 | 1983-06-14 | ||
| JP12288084A JPS6036904A (ja) | 1983-06-14 | 1984-06-14 | 接触プロ−ブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6036904A true JPS6036904A (ja) | 1985-02-26 |
| JPH0369045B2 JPH0369045B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-30 |
Family
ID=14846920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12288084A Granted JPS6036904A (ja) | 1983-06-14 | 1984-06-14 | 接触プロ−ブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6036904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63139515U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1987-03-05 | 1988-09-14 | ||
| JPH01131107U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-02-29 | 1989-09-06 | ||
| JPH0344608U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1989-09-08 | 1991-04-25 | ||
| JP2002079404A (ja) * | 2000-09-05 | 2002-03-19 | Seibu Electric & Mach Co Ltd | 刃物位置寸法管理装置 |
| JP2007531131A (ja) * | 2004-04-01 | 2007-11-01 | マーポス、ソチエタ、ペル、アツィオーニ | 無線信号伝送を用いて機械部品を検査するシステム及び方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55145307U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1979-04-04 | 1980-10-18 | ||
| JPS58169502U (ja) * | 1982-05-06 | 1983-11-12 | 大昭和精機株式会社 | 工作機械用位置測定装置 |
-
1984
- 1984-06-14 JP JP12288084A patent/JPS6036904A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55145307U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1979-04-04 | 1980-10-18 | ||
| JPS58169502U (ja) * | 1982-05-06 | 1983-11-12 | 大昭和精機株式会社 | 工作機械用位置測定装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63139515U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1987-03-05 | 1988-09-14 | ||
| JPH01131107U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-02-29 | 1989-09-06 | ||
| JPH0344608U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1989-09-08 | 1991-04-25 | ||
| JP2002079404A (ja) * | 2000-09-05 | 2002-03-19 | Seibu Electric & Mach Co Ltd | 刃物位置寸法管理装置 |
| JP2007531131A (ja) * | 2004-04-01 | 2007-11-01 | マーポス、ソチエタ、ペル、アツィオーニ | 無線信号伝送を用いて機械部品を検査するシステム及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0369045B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-30 |
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