JPS6035294U - XY sample stage device - Google Patents

XY sample stage device

Info

Publication number
JPS6035294U
JPS6035294U JP12757483U JP12757483U JPS6035294U JP S6035294 U JPS6035294 U JP S6035294U JP 12757483 U JP12757483 U JP 12757483U JP 12757483 U JP12757483 U JP 12757483U JP S6035294 U JPS6035294 U JP S6035294U
Authority
JP
Japan
Prior art keywords
rail
sample stage
mover
fixed
mounting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12757483U
Other languages
Japanese (ja)
Inventor
内藤　光男
渡辺　登志夫
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP12757483U priority Critical patent/JPS6035294U/en
Priority to DE19843429617 priority patent/DE3429617A1/en
Priority to GB08420812A priority patent/GB2147101B/en
Publication of JPS6035294U publication Critical patent/JPS6035294U/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案の実施例を示し、第１図は正面図、第２図
は平面図、第３図は側面図、第４図は装置配置図である
。 １・・・・・・Ｚ試料台、２・・・・・・Ｘレール取付
板、３・・・・・・ビス、４・・・・・・Ｘレール、５
・・・・・・Ｘ駆動モータ、５ａ・・・・・・モータ軸
、７・・・・・・プーリ、８・・・・・・軸、１０・・
・・・・従動プーリ、１１・・・・・・軸受ハウジング
、１２．１３・・・・・・玉軸受、１４・・・・・・止
め輪、１５・・・・・・タイミングベルト、１６．１７
・・・・・・マイクロスイッチ、１８・・・・・・ドッ
グ、１９・・・・・・Ｙレール取付板、２０・・・・・
・Ｘ移動子、２１，２２・・・・・・すべり案内、２３
・・・・・・ビス、２４・・・・・・Ｙレール、２５・
・・・・・ベルト止め金、２６・・・・・・Ｙ駆動モー
タ、２６ａ・・・・・・モータ軸、２７・・・・・・プ
ーリ、２８・・・・・・従動プーリ、２９・・・・・・
タイミングベルト、３０．３１・・・・・・マイクロス
イッチ、３２・・・・・・ドッグ、３３・・・・・・試
料台、３４・・・・・・Ｙ移動子、３５．３６・・・・
・・すべり案内、３７・・・・・・ベルト止め金、３８
・・・・・・モータ駆動ユニット、３９・・・・・・装
置本体、４０・・・・・・ＸＹ試料台、４１・・・・・
・Ｚ試料台。The drawings show an embodiment of the present invention; FIG. 1 is a front view, FIG. 2 is a plan view, FIG. 3 is a side view, and FIG. 4 is a device layout. 1...Z sample stage, 2...X rail mounting plate, 3...screws, 4...X rail, 5
......X drive motor, 5a...Motor shaft, 7...Pulley, 8...Axis, 10...
... Driven pulley, 11 ... Bearing housing, 12.13 ... Ball bearing, 14 ... Retaining ring, 15 ... Timing belt, 16 .17
...Micro switch, 18...Dog, 19...Y rail mounting plate, 20...
・X mover, 21, 22...Sliding guide, 23
...screw, 24...Y rail, 25.
...Belt stopper, 26 ... Y drive motor, 26a ... Motor shaft, 27 ... Pulley, 28 ... Driven pulley, 29・・・・・・
Timing belt, 30.31...Micro switch, 32...Dog, 33...Sample stage, 34...Y mover, 35.36...・・・
...Sliding guide, 37...Belt stopper, 38
...Motor drive unit, 39...Device main body, 40...XY sample stage, 41...
・Z sample stage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] Ｘレール取付板上に設けられたＸレールと、このＸレー
ルに案内されて移動可能なＸ移動子と、このＸ移動子に
固定され前記Ｘレールと直角方向に配置されたＹレール
を有するＹレール取付板と、このＹレールに案内されて
移動可能なＹ移動子と、このＹ移動子上に固定された試
料台と、前記Ｘレールに固定され該Ｘレールに沿って前
記Ｙレール取付板を駆動する第１のモータと、前記Ｙレ
ールに固定され該Ｙレールに沿って前記試料台を駆動す
る第２のモータと、前記第１および第２のモータをそれ
ぞれ駆動制御するためのモータ駆動ユニットとを有し、
前記Ｘ、Ｙレール取付板および第１、第２モータが装置
本体内に密閉状態で内蔵されている構成からなるＸＹ試
料台装置。A Y having an X rail provided on an X rail mounting plate, an X mover movable guided by this X rail, and a Y rail fixed to this X mover and arranged in a direction perpendicular to the X rail. a rail mounting plate, a Y mover movable guided by the Y rail, a sample stage fixed on the Y mover, and the Y rail mounting plate fixed to the X rail and moving along the X rail. a first motor that drives the sample stage, a second motor that is fixed to the Y rail and drives the sample stage along the Y rail, and a motor drive that drives and controls the first and second motors, respectively. has a unit,
An XY sample stage device comprising a structure in which the X and Y rail mounting plates and the first and second motors are built into the device body in a sealed state.
JP12757483U 1983-08-18 1983-08-18 XY sample stage device Pending JPS6035294U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12757483U JPS6035294U (en) 1983-08-18 1983-08-18 XY sample stage device
DE19843429617 DE3429617A1 (en) 1983-08-18 1984-08-11 SHIFTING DEVICE FOR A SAMPLE TABLE
GB08420812A GB2147101B (en) 1983-08-18 1984-08-16 Sample table moving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12757483U JPS6035294U (en) 1983-08-18 1983-08-18 XY sample stage device

Publications (1)

Publication Number Publication Date
JPS6035294U true JPS6035294U (en) 1985-03-11

Family

ID=14963415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12757483U Pending JPS6035294U (en) 1983-08-18 1983-08-18 XY sample stage device

Country Status (3)

Country Link
JP (1) JPS6035294U (en)
DE (1) DE3429617A1 (en)
GB (1) GB2147101B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009525499A (en) * 2006-02-02 2009-07-09 スマートドライブ テクノロジー リミテッド Control device for microscope

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3538091A1 (en) * 1985-10-25 1987-04-30 Npsk Poluprovodnikova Technika DEVICE FOR COORDINATE POSITIONING
DE3702992A1 (en) * 1987-02-02 1988-08-11 Poehler Hermann Compound-slide guide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284771A (en) * 1969-03-24 1972-08-09 Atomic Energy Authority Uk Improvements in electron beam welding apparatus
DE2057469A1 (en) * 1970-11-23 1972-05-31 Leybold Heraeus Gmbh & Co Kg Device for adjusting the spatial position of objects in a gas-tight room
US4042119A (en) * 1975-06-30 1977-08-16 International Business Machines Corporation Workpiece positioning apparatus
NO146172C (en) * 1980-03-24 1982-08-18 Henry Halleland DEVICE FOR NAVIGATION AFTER MICROCARTS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009525499A (en) * 2006-02-02 2009-07-09 スマートドライブ テクノロジー リミテッド Control device for microscope

Also Published As

Publication number Publication date
GB8420812D0 (en) 1984-09-19
GB2147101A (en) 1985-05-01
GB2147101B (en) 1986-12-03
DE3429617A1 (en) 1985-02-28

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