JPS6139327U - manual table - Google Patents

manual table

Info

Publication number
JPS6139327U
JPS6139327U JP12433584U JP12433584U JPS6139327U JP S6139327 U JPS6139327 U JP S6139327U JP 12433584 U JP12433584 U JP 12433584U JP 12433584 U JP12433584 U JP 12433584U JP S6139327 U JPS6139327 U JP S6139327U
Authority
JP
Japan
Prior art keywords
axis
drive shaft
moving stage
stage
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12433584U
Other languages
Japanese (ja)
Inventor
良雄 磯貝
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP12433584U priority Critical patent/JPS6139327U/en
Publication of JPS6139327U publication Critical patent/JPS6139327U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案0”゜ア′叶一ブ″。 一実施例 、.、を示す上面図、第2図は本考案
のマニアルテーブルのY軸微少送り機構を説明するため
の図、第3図は本考案のマニアルテーブルのX軸微少送
り機構を説明するための図、第4図は従来のマニアルテ
ーブルを説明するための図である。 図中、10はテーブルベース、lla,11b,13a
,13bはガイドレール、12はY軸移動ステージ、1
4はX軸移動ステージ、15はY軸微動部、16は第1
の駆動軸、17.22はクランプ部、18はX軸微動部
、19は回転伝達軸、20は第2の駆動軸、21は回転
運動伝達部をそれぞれ示す。
Figure 1 shows the present invention at 0”゜゜゜゜ヷ゙゙. One example. , FIG. 2 is a diagram for explaining the Y-axis minute feed mechanism of the manual table of the present invention, and FIG. 3 is a diagram for explaining the X-axis minute feed mechanism of the manual table of the present invention. FIG. 4 is a diagram for explaining a conventional manual table. In the figure, 10 is a table base, lla, 11b, 13a
, 13b is a guide rail, 12 is a Y-axis moving stage, 1
4 is an X-axis moving stage, 15 is a Y-axis fine movement section, and 16 is a first
, 17.22 is a clamp section, 18 is an X-axis fine movement section, 19 is a rotation transmission shaft, 20 is a second drive shaft, and 21 is a rotation motion transmission section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] テーブルベースの上をY軸方向に移動可能に設けられた
Y軸移動ステージと、該Y軸移動ステージ上をX軸方向
に移動可能に設けられたX軸移動ステージと、Y軸移動
ステージを駆動するY軸微少送り機構と、X軸移動ステ
ージを駆動するX軸微少送り機構とを具備してなるマニ
アルテーブルにおいて、Y軸微少送り機構は、テーブル
ベースの一隅に設けられたY軸微動部と、該Y軸微動部
によってY軸方向に駆動される第1の駆動軸と、Y軸移
動ステージに取付けられ且つ前記第1の駆動軸の任意の
位置に固定できるクランプ部とよりなり、前記X軸微少
送り機構はテーブルベースの一隅に設げられたX軸微動
部と、該X軸微動部によって駆動される回転伝達軸と、
Y軸移動ステージに設けられたX軸移動ステージ駆動用
の第2の駆動軸と、該第2の駆動軸に前記回転伝達軸の
回転を伝える回転運動伝達部と、X軸移動ステージに設
けられ且つ前記第2の駆動軸の任意の位置に固定できる
クランプ部よりなることを特徴とするマニアルテーブル
Drives a Y-axis moving stage that is movable in the Y-axis direction on the table base, an X-axis moving stage that is movable on the Y-axis moving stage in the X-axis direction, and a Y-axis moving stage. In a manual table that is equipped with a Y-axis fine-feeding mechanism that drives an X-axis moving stage, and an X-axis fine-feeding mechanism that drives an , a first drive shaft driven in the Y-axis direction by the Y-axis fine movement section, and a clamp section that is attached to the Y-axis movement stage and can be fixed at any position of the first drive shaft, The axial fine movement mechanism includes an X-axis fine movement part provided at one corner of the table base, a rotation transmission shaft driven by the X-axis fine movement part,
a second drive shaft for driving the X-axis movement stage provided on the Y-axis movement stage; a rotational motion transmission section that transmits rotation of the rotation transmission shaft to the second drive shaft; A manual table comprising a clamp portion that can be fixed at any position on the second drive shaft.
JP12433584U 1984-08-16 1984-08-16 manual table Pending JPS6139327U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12433584U JPS6139327U (en) 1984-08-16 1984-08-16 manual table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12433584U JPS6139327U (en) 1984-08-16 1984-08-16 manual table

Publications (1)

Publication Number Publication Date
JPS6139327U true JPS6139327U (en) 1986-03-12

Family

ID=30683062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12433584U Pending JPS6139327U (en) 1984-08-16 1984-08-16 manual table

Country Status (1)

Country Link
JP (1) JPS6139327U (en)

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