JPS603516A - Optical rotary encoder - Google Patents
Optical rotary encoderInfo
- Publication number
- JPS603516A JPS603516A JP11052083A JP11052083A JPS603516A JP S603516 A JPS603516 A JP S603516A JP 11052083 A JP11052083 A JP 11052083A JP 11052083 A JP11052083 A JP 11052083A JP S603516 A JPS603516 A JP S603516A
- Authority
- JP
- Japan
- Prior art keywords
- slit plate
- slit
- electroforming
- plate
- executed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 11
- 239000000523 sample Substances 0.000 claims 1
- 238000005323 electroforming Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 6
- 229910052759 nickel Inorganic materials 0.000 abstract description 4
- 238000011161 development Methods 0.000 abstract description 2
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 150000002739 metals Chemical class 0.000 abstract description 2
- 238000007747 plating Methods 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Abstract
Description
【発明の詳細な説明】
本発明は光学式ロータリーエンコーダーの小型軽量化に
係り、特にスリット板の改善に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to reducing the size and weight of an optical rotary encoder, and particularly relates to improving a slit plate.
従来、光学式エンコーダーは第１図に示す様に発光素子
１と受光素子２の間に、回転スリット板３と固定スリッ
ト板４を置き、各光学素子間の透過光量を検出しデジタ
ル信号に変換する。こうした光学式エンコーダーは、一
定の外径内において一回転光りいかに多数信号を取り出
すかによって性能並びに商品価値が決定される。これを
実現させるためにスリット板の高分割化が必要となる。Conventionally, an optical encoder places a rotating slit plate 3 and a fixed slit plate 4 between a light emitting element 1 and a light receiving element 2, as shown in Fig. 1, and detects the amount of light transmitted between each optical element and converts it into a digital signal. do. The performance and commercial value of such optical encoders are determined by how many signals can be extracted per revolution within a certain outer diameter. In order to realize this, it is necessary to make the slit plate highly divided.
従来、スリット板は主としてガラス板にスリット部を写
真プリントする方法と、金属板にケミカルエツチング法
でスリット穴を抜く方法の二種類が主流を占めている。Conventionally, there have been two main methods for producing slit plates: one is to photoprint slits on a glass plate, and the other is to make slit holes in a metal plate using a chemical etching method.
このうち第２図に示すガラス板の写真プリント法は比較
的高分割のものが可能であるが、ガラス板３の加工精度
の悪い点、必要ガラス厚みから来る自重が大きく、回転
慣性トルクが大きくなりすぎる点、さらに加工コストの
高い点から、最近ではこの方式のものは減少している。Among these methods, the photographic printing method of the glass plate shown in Fig. 2 allows relatively high resolution, but it has the disadvantages of poor processing precision of the glass plate 3, a large self-weight due to the required glass thickness, and a large rotational inertia torque. Recently, the use of this method has been decreasing due to the fact that it is too thin and the processing cost is high.
一方、第３１テに示す金属板のフォトエツチング法は、
低コストで高精度のものが得られるが、あまり高分割な
ものはスリット巾が小さくなるに従い。第３図に示す様
にスリット穴の形状が扇形とならず、乙の様に両端がふ
くらんだ形状となる。第４図にスリット部の断面図を示
す。このためスリット穴の巾は０．１ｒＩａｎが限度で
、これより小さくすることは不可能であるという欠点が
あった。On the other hand, the metal plate photoetching method shown in Te 31 is as follows:
High precision can be obtained at low cost, but if the slit width is too high, the slit width will become smaller. As shown in Fig. 3, the shape of the slit hole is not fan-shaped, but has a bulged shape at both ends as shown in Figure B. FIG. 4 shows a sectional view of the slit portion. Therefore, the width of the slit hole is limited to 0.1 rIan, and there is a drawback that it is impossible to make the width smaller than this.
本発明は上記問題点及び欠点を除去する為に、回転スリ
ット板並びＶＣ固定スリット板を電鋳法で製造したもの
を用いてスリット板の高分割を実現することにより、同
一外径の光学式ロータリーエンコーダーの場合、−回転
当りの信号数が従来品の６倍を越える信号量を発生する
光学式ロータリーエンコーダーを提供することを目的と
する。In order to eliminate the above-mentioned problems and drawbacks, the present invention uses rotary slit plates and VC fixed slit plates manufactured by electroforming to achieve high division of the slit plates. In the case of a rotary encoder, an object of the present invention is to provide an optical rotary encoder that generates a signal amount per revolution that is more than six times that of a conventional product.
以下、第５図、第６図と共に本発明の特徴である電鋳ス
リット板について製造方法も含めて説明する。Hereinafter, the electroformed slit plate, which is a feature of the present invention, will be explained along with FIGS. 5 and 6, including its manufacturing method.
第５図は電鋳法で回転スリット板を加工中の図で、８は
金属基板、この上に７に示すレジストマスク処理を行な
い露光現像する。その後電鋳部と基板を剥れ易くするた
め、重クロム酸塩溶液中に浸漬後電鋳を行なう。３はニ
ッケル電鋳によって成長したスリット板である。これを
基板から剥離すれば第６図に示す様な非常に変形の少な
いシャープで高精歴のスリット板ができ上る。尚、これ
の加工の際メッキの成長外だけの写真製版の補正を行な
う。FIG. 5 shows a rotary slit plate being processed by electroforming, with reference numeral 8 a metal substrate, on which a resist mask process shown in 7 is performed, followed by exposure and development. Thereafter, in order to make it easier to separate the electroformed part from the substrate, electroforming is performed after immersion in a dichromate solution. 3 is a slit plate grown by nickel electroforming. If this is peeled off from the substrate, a sharp and highly precise slit plate with very little deformation as shown in FIG. 6 is completed. In addition, during this processing, photolithographic corrections are made only for areas other than the growth of the plating.
尚、前記第５図３の材質はニッケル以外に種々の金属が
使用できるが、スリット板の厚みを小さくするため硬い
金属の方が好ましい。また７のレジストの代りに感光性
樹脂又は受光性インク等も使用できる。Although various metals other than nickel can be used as the material shown in FIG. 5, a hard metal is preferable in order to reduce the thickness of the slit plate. Further, instead of the resist in 7, a photosensitive resin or a light-receiving ink can be used.
さらにスリット板は回転スリット、固定スリット共に同
時に同様の方法で加工することができる上述の如く本発
明により、スリット板のスリット巾は従来の１／３の０
．０３ｒｒｒｒｎ程度まで小さくできるため、分解能が
飛躍的に向上し同径の光学式エンコーダーの１回転当り
の信号数も３倍以上を確保することができた。従って同
一分解能の光学式−ン・−ダーを従来品と比較して、１
／３以下の小 １型軽量化が実現できた。Furthermore, the slit plate can be machined with both rotary slits and fixed slits using the same method.As described above, with the present invention, the slit width of the slit plate can be reduced to 1/3 of that of the conventional one.
．． Since it can be made as small as 0.03rrrrrn, the resolution is dramatically improved and the number of signals per revolution of an optical encoder with the same diameter can be increased by more than three times. Therefore, when comparing an optical scanner with the same resolution to a conventional product,
We were able to achieve a compact 1-inch lightweight design of less than /3.
また、本発明のスリット板は加工上歩留が良くコストダ
ウン効果も有する。Further, the slit plate of the present invention has a high processing yield and also has a cost reduction effect.
第１図は光学式エンコーダーの組立図、第２図はガラス
スリット板の略図、第６図は金属のフォトエツチング法
によるスリット板平面図、第４図は第３図のスリット部
断面図、第５図は電鋳法によるスリット板の加工途中の
図、第６図は電鋳法によるスリット板の平面図を示す。
以 上
出願人 株式会社 浜澤工業
代理人 弁理士 最上 務
第１０
冨２記
第６図
−９１−Figure 1 is an assembly diagram of the optical encoder, Figure 2 is a schematic diagram of a glass slit plate, Figure 6 is a plan view of the slit plate made by metal photo-etching, Figure 4 is a sectional view of the slit part in Figure 3, FIG. 5 shows a slit plate in the middle of processing by electroforming, and FIG. 6 shows a plan view of the slit plate by electroforming. Applicant Hamazawa Industrial Agent Co., Ltd. Patent Attorney Mogami Tsutomu No. 10 Tomi 2 Figure 6-91-
Claims (1)
た複数のスリット穴を、等間隔に配列された回転スリッ
ト板と、これに隣接した位置に固定されその面に先に同
じく複数のスリット穴を持つ固定スリットにより、光学
的透過光量の変化量を検出する構造のロータリーエンコ
ーダーにおいて、前記の回転スリット板並びに固定スリ
ット板に、電鋳品を用いたことを特徴とする光学式ロー
タリーエンコーダー。A plurality of slit holes installed on a shaft that rotates in accordance with the amount of movement of the probe are arranged on a rotating slit plate arranged at equal intervals, and a rotating slit plate fixed at a position adjacent to this plate with a plurality of slit holes attached on the same surface. An optical rotary encoder configured to detect a change in the amount of optically transmitted light using a fixed slit having a slit hole, characterized in that the rotating slit plate and the fixed slit plate are made of electroformed products. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11052083A JPS603516A (en) | 1983-06-20 | 1983-06-20 | Optical rotary encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11052083A JPS603516A (en) | 1983-06-20 | 1983-06-20 | Optical rotary encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS603516A true JPS603516A (en) | 1985-01-09 |
Family
ID=14537875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11052083A Pending JPS603516A (en) | 1983-06-20 | 1983-06-20 | Optical rotary encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS603516A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625126A (en) * | 1985-07-02 | 1987-01-12 | Asahi Chem Ind Co Ltd | Disk for rotary encoder and manufacture thereof |
| JP2015040840A (en) * | 2013-08-23 | 2015-03-02 | オムロン株式会社 | Douser for optical encoder, manufacturing method of the same, and optical encoder using the same |
-
1983
- 1983-06-20 JP JP11052083A patent/JPS603516A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625126A (en) * | 1985-07-02 | 1987-01-12 | Asahi Chem Ind Co Ltd | Disk for rotary encoder and manufacture thereof |
| JP2015040840A (en) * | 2013-08-23 | 2015-03-02 | オムロン株式会社 | Douser for optical encoder, manufacturing method of the same, and optical encoder using the same |
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