Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KKfiledCriticalNikon Corp
Priority to JP58143578ApriorityCriticalpatent/JPS6034441A/ja
Publication of JPS6034441ApublicationCriticalpatent/JPS6034441A/ja
Publication of JPH031972B2publicationCriticalpatent/JPH031972B2/ja