JPS6028406B2 - Manufacturing method of small contour slip crystal resonator - Google Patents
Manufacturing method of small contour slip crystal resonatorInfo
- Publication number
- JPS6028406B2 JPS6028406B2 JP202677A JP202677A JPS6028406B2 JP S6028406 B2 JPS6028406 B2 JP S6028406B2 JP 202677 A JP202677 A JP 202677A JP 202677 A JP202677 A JP 202677A JP S6028406 B2 JPS6028406 B2 JP S6028406B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- crystal
- manufacturing
- resonator
- contour slip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title claims description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 4
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000218998 Salicaceae Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Description
【発明の詳細な説明】 本発明は、超小型輪郭すべり型水晶振動子に関する。[Detailed description of the invention] The present invention relates to an ultra-small contour slip type crystal resonator.
本発明の目的は、高安定にして安価な水晶振動子の実用
化にある。水晶時計の高精度化に伴なつて、厚みすべり
水晶振動子、中でもＡＴカット水晶振動子が注目されつ
つある。このＡＴカット水晶振動子を用いることによっ
て、時間精度は、かなり改良されるが、このＡＴカット
水晶振動子にも、次のような欠点がある。即ち、小型に
できない。An object of the present invention is to put into practical use a highly stable and inexpensive crystal resonator. As the precision of quartz clocks increases, thickness-slip quartz crystal resonators, especially AT-cut quartz crystal resonators, are attracting attention. Although the time accuracy is considerably improved by using this AT-cut crystal oscillator, this AT-cut crystal oscillator also has the following drawbacks. In other words, it cannot be made smaller.
共振周波数がＭＨ２帯で非常に高い、消費電力が大きい
、同一性能のものを大量につくることができない等であ
る。これらの欠点により、ＡＴカット水晶振動子は高精
度の周波数安定度をもつにもかかわらず実用化されてい
ない。上記の欠点を克服し、安価な高精度電子時計用水
晶振動子の実用化を図るものが本発明になる水晶振動子
である。以下図面により説明する。第１図は従来の輪郭
すべり水晶振動子（ＧＴカット振動子）の具体例である
。The resonance frequency is extremely high in the MH2 band, the power consumption is large, and it is not possible to produce large quantities of products with the same performance. Due to these drawbacks, AT-cut crystal resonators have not been put into practical use despite their high frequency stability. The crystal resonator of the present invention overcomes the above-mentioned drawbacks and aims to put into practical use an inexpensive crystal resonator for high-precision electronic watches. This will be explained below with reference to the drawings. FIG. 1 shows a specific example of a conventional contour slip crystal resonator (GT cut resonator).
図において１１は、輪郭すべり水晶振動子体、１２は１
１の表面上に蒸着によって着けられた電極、１３は振動
子の支持と電極取り出しをかねるホルダである。この振
動子の振動姿態は、輪郭すべり振動であって温度−共振
周波数特性は、常温付近で平らになる優れた特性をもつ
。大きさは共振周波数が１０皿ＨＺ程度で４仇奴角で厚
みが３柳程度である。しかし優れた電気的特性を維持す
るためには、水晶原石から振動子体を形成する工程にお
いて多くの配慮を必要とする。すなわち、良い共振周波
数のエージング特性、高いＱ値を得るためには、振動子
体に歪の残るような成形工程、例えばダイヤモンドカッ
ター等による加工法を探ることができず、研摩によって
仕上げるような歪の残らない加工法を探らなければなら
ない。従って第１図の例では、振動子体は、６面を有す
るので、６回の研摩工程、あるいは、対向する平面を同
時に研摩したとしても３回の研摩工程を採らねばならず
、振動子体を安価に製造することは、非常に難しい。ま
たこのＧＴカット水晶振動子においては、縦，横の辺比
が周波数温度特性に効き、また各々の長さが共振周波数
に影響するため、形状精度は、極めて厳しく、加工は非
常に困難であった。またこのような加工でできたものは
、特性的に、バラッキが大きく、特性の優れたものを量
産することは、困難であった。第２図は本発明の一具体
例の図である。図において２１は、輪郭水晶振動子の振
動部２２は振動部と一体に成形された電極部ト２３は支
持線である。In the figure, 11 is a contour slip crystal oscillator body, 12 is 1
Electrodes 1 are attached by vapor deposition on the surface of 1, and 13 is a holder that supports the vibrator and takes out the electrodes. The vibration mode of this vibrator is contour-slip vibration, and the temperature-resonance frequency characteristic has an excellent characteristic of flattening around room temperature. As for the size, the resonance frequency is about 10 Hz, the thickness is about 3 willows, and the diameter is 4 squares. However, in order to maintain excellent electrical characteristics, many considerations are required in the process of forming a vibrator body from raw crystal. In other words, in order to obtain good resonant frequency aging characteristics and a high Q value, it is impossible to find a molding process that leaves distortion in the vibrator body, such as a processing method using a diamond cutter. We must find a processing method that leaves no residue. Therefore, in the example shown in FIG. 1, since the vibrator body has six surfaces, it must be polished six times, or even if the opposing planes are polished at the same time, it must be polished three times. is extremely difficult to manufacture at low cost. In addition, in this GT-cut crystal resonator, the ratio of vertical and horizontal sides affects the frequency temperature characteristics, and each length affects the resonance frequency, so shape accuracy is extremely strict and processing is extremely difficult. Ta. Moreover, the properties of products made by such processing vary widely, and it has been difficult to mass-produce products with excellent properties. FIG. 2 is a diagram of a specific example of the present invention. In the figure, reference numeral 21 indicates a vibrating portion 22 of the contoured crystal resonator, and electrode portions 23 are support lines formed integrally with the vibrating portion.
この場合、表裏の電極と、水晶振動子体は、同時にエッ
チングによって形成される第２図の水晶振動子を得る工
程例を以下に詳説する。第３図は本発明に係る水晶板が
水晶原石から切り出される方向を示す図である。図にお
いて「Ｘ，Ｙ，Ｚは「それぞれ水晶の電気軸、機械軸、
光軸である。３０は従来のＧＴカット水晶振動子を作る
ための水晶板であり、３１は、本発明の水晶振動子を得
るための水晶板であって「図のように、Ｙ板を×軸を中
心に４５ｏ〜５５ｏ回転した位置に水晶原石より切り出
される。In this case, the front and back electrodes and the crystal resonator body are simultaneously formed by etching.An example of the process for obtaining the crystal resonator shown in FIG. 2 will be described in detail below. FIG. 3 is a diagram showing the direction in which a crystal plate according to the present invention is cut out from a raw crystal stone. In the figure, "X, Y, and Z are the electric axis, mechanical axis, and
It is the optical axis. 30 is a crystal plate for making a conventional GT cut crystal resonator, and 31 is a crystal plate for obtaining a crystal resonator of the present invention. It is cut from a raw crystal at a position rotated from 45o to 55o.
この水晶板は「切り出された後、充分に研摩して、切り
出し工程での加工歪を取り除き所定の厚さの水晶薄板に
仕上げられる。水晶振動子は、この水晶薄板から次に説
明するように、フオトェツチングによって形成される。
先ず、水晶薄板の表裏両面に、例えば、クロムおよびそ
の上に金の金属膜を蒸着によって着ける。次に第４図に
示したように水晶振動子の形状４１にフオトェッチング
により前記クロム−金の金属膜を残す。その後、この水
晶薄板を例えば弗酸と弗化アンモニウムの混合液中浸贋
すれば、クロム−金の金属膜によっておおわれてし、な
い部分の水晶は溶解され、多くの水晶振動子が連なった
ものが得られる。After this crystal plate is cut out, it is sufficiently polished to remove processing distortion during the cutting process and finished into a thin crystal plate of a predetermined thickness.A crystal resonator is made from this thin crystal plate as described below. , formed by phototetching.
First, metal films of, for example, chromium and gold are deposited on both the front and back surfaces of a thin crystal plate by vapor deposition. Next, as shown in FIG. 4, the chromium-gold metal film is left on the shape 41 of the crystal resonator by photo-etching. After that, if this crystal thin plate is immersed in a mixture of hydrofluoric acid and ammonium fluoride, it will be covered with a chromium-gold metal film, and the remaining crystal will be dissolved, resulting in many crystal oscillators connected together. is obtained.
しかる後、第４図の接続部分４２に弱い力を与えれば、
分離した水晶振動子が得られる。この例においては、振
動子形状をしたクロム−金の金属膜は、水晶を溶解する
際の保護マスクとして働くと同時に完成後は、そのまま
振動子の電極膜として働いている。しかし工程数を増せ
ば、電極と振動子外形とは異つた形状のものとすること
ができることは、いうまでもない。又出来上った振動子
がＸ軸に関して、更に角度８だけ傾いて作られることは
言うまでもない。本発明の水晶振動子は、以上説明した
ように非常に簡単で量産に適する工程によって形成する
ことが出来るので非常に安価に製造することが出来る。
又、本発明は振動子外形をフオトェッチングによって形
成するので次のような特徴を有する。○｝ 加工形状に
自由度が大きく、超小型に振動子を形成することができ
る。After that, if a weak force is applied to the connecting part 42 in Fig. 4,
A separated crystal oscillator is obtained. In this example, the chromium-gold metal film in the shape of a vibrator functions as a protective mask when melting the crystal, and at the same time, after completion, serves as the electrode film of the vibrator. However, it goes without saying that if the number of steps is increased, the electrodes and the vibrator can have different shapes. It goes without saying that the completed vibrator is also made tilted by an angle of 8 with respect to the X-axis. As explained above, the crystal resonator of the present invention can be formed by a very simple process suitable for mass production, and therefore can be manufactured at a very low cost.
Further, the present invention has the following features since the outer shape of the vibrator is formed by photo-etching. ○} There is a large degree of freedom in the processing shape, and it is possible to form ultra-small vibrators.
■ 水晶薄板面内で自由に回転角（第３図８）を選ぶこ
とが出来温度特性の調整が可能である。■ The rotation angle (Fig. 3, 8) can be freely selected within the plane of the crystal thin plate, and the temperature characteristics can be adjusted.
｛３’外形寸法を高精度に仕上げることができるので、
輪郭すべり水晶振動子の場合、共振周波数温度特性、共
振周波数の一様なものを作ることができる。【４ー 電
極部も外形成形と同時に行うため工数低減になる。{3' External dimensions can be finished with high precision,
In the case of a contour-slip crystal resonator, it is possible to create a resonant frequency with uniform temperature characteristics and resonant frequency. [4- The electrode part is also formed at the same time as the external forming, which reduces the number of man-hours.
以上のように本発明は、輪郭すべり水晶振動子を水晶簿
板よりフオトェッチング形成するもので、形状が超小型
であり、製造原価が低廉で一様な特性を有し面内回転角
をかえることにより共振周波数の温度特性の調整が可能
であり、水晶腕時計、他の機器の高精度化、低価格化に
大きく貢献するものである。As described above, the present invention forms a contour slip quartz crystal resonator by photoetching from a quartz crystal board, has an ultra-compact shape, is inexpensive to manufacture, has uniform characteristics, and can change the in-plane rotation angle. This makes it possible to adjust the temperature characteristics of the resonant frequency, greatly contributing to higher precision and lower prices for quartz wristwatches and other devices.
第１図は従来の輪郭すべり水晶振動子。
第２図は本発明の輪郭すべり水晶振動子の具体例の図。
第３図は本発明に係る水晶薄板の切り出し角度を示す図
。第４図は本発明の水晶振動子の製造法を示す図。１１
，２１，４１…・・・輪郭すべり水晶振動子、１２，２
２・・・・・・電極膜、１３，２３・・…・支持体、３
０・・・・・・従釆の輪郭すべり水晶振動子をつくるた
めの水晶板、３１・・・・・・本発明の輪郭すべり水晶
振動子をつくるための水晶板、４２・・・・・・接続部
。
多ー凶炎」劇
柊ミー匁
多ソ楓Figure 1 shows a conventional contour slip crystal resonator. FIG. 2 is a diagram of a specific example of the contour slip crystal resonator of the present invention.
FIG. 3 is a diagram showing the cutting angle of a crystal thin plate according to the present invention. FIG. 4 is a diagram showing a method of manufacturing a crystal resonator according to the present invention. 11
, 21, 41... Contour slip crystal resonator, 12, 2
2... Electrode film, 13, 23... Support, 3
0...Crystal plate for making the contour slip crystal resonator of the slave, 31...Crystal plate for making the contour slip crystal resonator of the present invention, 42...・Connection part. Many evil flames” Gekihiragi Me Mometaso Kaede
Claims (1)
してなる小型輪郭すべり水晶振動子の製造方法において
、Ｙ板をＸ軸を中心に４５°〜５５°回転した位置に切
り出された厚さ５００μｍ以下の厚さの薄板を形成する
第１の工程と、前記薄板の表裏両面に前記励振電極の複
数個を配置するとともに前記励振電極を薄板に対して一
定角度βだけ回転させて配置する第２の工程と、前記励
振電極を保護マスクとして型抜きエツチングする第３の
工程とからなることを特徴とする小型輪郭すべり水晶振
動子の製造方法。1. In a method for manufacturing a small profile slip crystal resonator in which excitation electrodes are arranged in pairs on each of the front and back surfaces, the thickness of the Y plate cut out at a position rotated by 45° to 55° around the X axis is A first step of forming a thin plate with a thickness of 500 μm or less, and arranging a plurality of the excitation electrodes on both the front and back surfaces of the thin plate, and rotating the excitation electrodes by a certain angle β with respect to the thin plate. A method for manufacturing a small profile slip crystal resonator, comprising a second step and a third step of cutting and etching the excitation electrode as a protective mask.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202677A JPS6028406B2 (en) | 1977-01-12 | 1977-01-12 | Manufacturing method of small contour slip crystal resonator |
| GB1070/78A GB1592010A (en) | 1977-01-12 | 1978-01-11 | Contour vibrator |
| CH33378A CH641004B (en) | 1977-01-12 | 1978-01-12 | METHOD OF MANUFACTURING A QUARTZ CRYSTAL VIBRATOR AND VIBRATOR OBTAINED BY THIS PROCESS. |
| US06/427,047 US4418299A (en) | 1977-01-12 | 1982-09-29 | Face-shear mode quartz crystal vibrators and method of manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202677A JPS6028406B2 (en) | 1977-01-12 | 1977-01-12 | Manufacturing method of small contour slip crystal resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5387684A JPS5387684A (en) | 1978-08-02 |
| JPS6028406B2 true JPS6028406B2 (en) | 1985-07-04 |
Family
ID=11517809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP202677A Expired JPS6028406B2 (en) | 1977-01-12 | 1977-01-12 | Manufacturing method of small contour slip crystal resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6028406B2 (en) |
-
1977
- 1977-01-12 JP JP202677A patent/JPS6028406B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5387684A (en) | 1978-08-02 |
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