JPS6027139A - Method for inspecting connection between package and printed board - Google Patents
Method for inspecting connection between package and printed boardInfo
- Publication number
- JPS6027139A JPS6027139A JP58136069A JP13606983A JPS6027139A JP S6027139 A JPS6027139 A JP S6027139A JP 58136069 A JP58136069 A JP 58136069A JP 13606983 A JP13606983 A JP 13606983A JP S6027139 A JPS6027139 A JP S6027139A
- Authority
- JP
- Japan
- Prior art keywords
- connection
- circuit board
- printed circuit
- contact
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
fal 発明の技術分野
本発明は半導体素子を搭載したパッケージとプリント基
板との間の接続状態を検査する方法に係り8特に高密度
に配列された接続端子を有するリードレスチップキャリ
アをプリント基板に実装した場合の接続検査方法に関す
る。Detailed Description of the Invention fal Technical Field of the Invention The present invention relates to a method for inspecting the connection state between a package mounted with a semiconductor element and a printed circuit board. This invention relates to a connection inspection method when a chip carrier is mounted on a printed circuit board.
(b) 従来技術と問題点 電子計算機等の電子機器の急速な発展に伴い。(b) Conventional technology and problems With the rapid development of electronic devices such as computers.
該電子機器の電子部品の実装の高密度化や小型化が益々
要求されてきた。殊に半導体集積回路は一層その集積度
を増すと共に、セラミック基板を用いた千ノブキャリア
が実用化され、その端子数も増え、そのピンチは小さく
なってきている。There has been an increasing demand for higher density and smaller packaging of electronic components in electronic devices. In particular, as the degree of integration of semiconductor integrated circuits increases, thousand-knob carriers using ceramic substrates have been put into practical use, and the number of terminals has increased, making the pinch smaller.
上述のようなチップキャリアをプリント基板上に実装す
るには、チップキャリアのセラミック基板の接続面(i
ffl常は半導体集積回路の搭載面と反対側の面で以下
チップ基板の裏面と称する)に形成された接続パッドや
バンプを前記プリント基板上の所定位置に載置してその
侭温度をあげて半田付けする所謂リフロー法が多く採用
されている。In order to mount the chip carrier as described above on a printed circuit board, the connection surface (i) of the ceramic substrate of the chip carrier is
ffl Connecting pads and bumps formed on the surface opposite to the surface on which the semiconductor integrated circuit is mounted (hereinafter referred to as the back surface of the chip substrate) are placed at a predetermined position on the printed circuit board and their temperature is raised. The so-called reflow method of soldering is often used.
第1図は広く市販されている標準化されたチソプキャリ
アの構造を示す斜視図である。図から明らかなように該
チップキャリアは正方形または長方形をしたセラミック
のチップ基板1の上に金メッキをしたキャビティ2を有
する小型でリード線のない所謂リードレスパッケージで
ある。FIG. 1 is a perspective view showing the structure of a standardized tissop carrier that is widely available on the market. As is clear from the figure, the chip carrier is a small, so-called leadless package having a gold-plated cavity 2 on a square or rectangular ceramic chip substrate 1.
ICチップ3はチップ基板1の上に固定して実装され、
キャビティ2の底面に配設された接続バッド4と金ボン
ディングまたは半田付けで接続される。前記接続パッド
4はメタライズ法でチップ基板1の表面に形成された外
部端子5に連接しており、その先端はチップ基板1の裏
面に達しており。The IC chip 3 is fixedly mounted on the chip substrate 1,
It is connected to a connection pad 4 disposed on the bottom surface of the cavity 2 by gold bonding or soldering. The connection pad 4 is connected to an external terminal 5 formed on the surface of the chip substrate 1 by a metallization method, and its tip reaches the back surface of the chip substrate 1.
リフロー法による半田付は接続に便利なように金メッキ
等の表面処理が施されて接続部6を構成している。The connection portion 6 is subjected to surface treatment such as gold plating to facilitate connection when soldering by the reflow method.
第2図(a)の平面図と第2図fblの断面図は、さら
に高密度実装を可能にする為のセラミックパッケージの
一種としてのリードレスチップキャリアを示す。The plan view of FIG. 2(a) and the cross-sectional view of FIG. 2fbl show a leadless chip carrier as a type of ceramic package to enable higher density packaging.
前述の第1図に示したリードレスチップキャリアの外部
端子5がチップ基板lの表面に沿って形成されているの
に対し、第2図に示す例においてはビア7と称するタン
グステン等の高融点金属粉末とセラミ・7り粉末とを混
合して焼結して形成した導電性の端子がチップ基板1の
セラミックの中を貫通して、搭載されたICチップ3と
ビア7の下端に設けられたバンプ8とを電気的に接続し
ている。リードレスチップキャリアはバンプ8を介して
プリント基板に実装される。ハンプ8は通常pb−3n
系の鑞材で形成された突起である。9はICチップ3等
の内部保護用のセラミック蓋である。While the external terminals 5 of the leadless chip carrier shown in FIG. 1 are formed along the surface of the chip substrate l, in the example shown in FIG. Conductive terminals formed by mixing and sintering metal powder and ceramic powder pass through the ceramic of the chip substrate 1 and are provided at the lower ends of the mounted IC chips 3 and vias 7. The bumps 8 are electrically connected to each other. The leadless chip carrier is mounted on a printed circuit board via bumps 8. Hump 8 is usually pb-3n
This is a protrusion made of a type of brazing material. 9 is a ceramic lid for internal protection of the IC chip 3 and the like.
第3図はり一ドレスチノブキャリアをプリント基板に実
装した状態でその接続試験を行うためのプローブの使用
方法を示す部分断面図を含む側面図である。リードレス
チップキャリア実装後はビア7とプリント基板10上の
接続用のパッド11との半田接続部はチップ基板lの下
に隠れるので、この接続の良否を検査するため、リード
レスチップキャリア側にはチップ基板1の上面にビア7
の上端に接続された検査用パッド12が形成されており
。FIG. 3 is a side view including a partial cross-sectional view showing a method of using a probe for performing a connection test with the beam rest knob carrier mounted on a printed circuit board. After the leadless chip carrier is mounted, the solder connection between the via 7 and the connection pad 11 on the printed circuit board 10 is hidden under the chip board l. is via 7 on the top surface of chip substrate 1.
A test pad 12 connected to the upper end of the test pad 12 is formed.
バッド11ばプリント基板IOを貫通したスルーホール
13でプリント基板10の反対側の面に設けられた検査
用のバッド14に接続している。The pad 11 is connected to a test pad 14 provided on the opposite surface of the printed circuit board 10 through a through hole 13 passing through the printed circuit board IO.
前述のリードレスチップキャリアとプリント基板10と
の接続部の検査には図示のように、一方では、プローブ
15.プローブ基体16を基板17に植設し導線18で
試験器(図示せず)に接続された接触端子19でリード
レスチップキャリアのチップ基板1上面のパッド12に
接触させ、他方では同様なプローブ20でプリント基板
10の裏面のパッド14に接触させて、電気的導通試験
による方法が採られている。ここにプローブ15はプロ
ーブ基体16に滑合うしていて滑らかにスライドし図に
は見えない小型の蔓巻きばねで下方に付勢されているの
で、プローブ15の先端はバッド12に密接に接触する
ことが出来る構造となっている。To inspect the connection between the leadless chip carrier and the printed circuit board 10, as shown in the figure, on the one hand, probes 15. A probe base 16 is implanted in a substrate 17 and is brought into contact with a pad 12 on the top surface of the chip substrate 1 of the leadless chip carrier with a contact terminal 19 connected to a tester (not shown) through a conductor 18, and a similar probe 20 is placed on the other side. A method is adopted in which an electrical continuity test is performed by contacting the pad 14 on the back surface of the printed circuit board 10. Here, the probe 15 is fitted onto the probe base 16 and slides smoothly, and is biased downward by a small helical spring not visible in the figure, so the tip of the probe 15 comes into close contact with the pad 12. The structure is such that it can be done.
さて、半導体チップをより高密度に実装する要求は留ま
る所を知らない現状においては、リードレスチップキャ
リアの基板のビア7のピンチも益々小さくなっており、
従来は2.5mmが標準であるのに、約半分のピッチに
なっており、さらに高密度化が進められている。第3図
に示すような接触端子19の構造では、プローブ15は
とにかく、プローブ基体16や導線18を接触する部分
の膨らみを収容する余裕が無くなってくる。これに加え
て、ハンプ8の周囲の半田がバンプ8のピンチが小さい
ために、相互にくっついて短絡する問題が発生し易くな
る。これらの諸問題を解決出来るような検査方法の出現
が待望されていた。Now, in the current situation where there is no end to the demand for higher-density packaging of semiconductor chips, the pinch of vias 7 on the substrate of leadless chip carriers is becoming smaller and smaller.
Conventionally, the standard pitch was 2.5 mm, but the pitch is about half that, and higher density is being promoted. In the structure of the contact terminal 19 as shown in FIG. 3, the probe 15 does not have enough room to accommodate the bulge in the portion that contacts the probe base 16 and the conductive wire 18. In addition, since the pinch of the bump 8 is small, the solder around the hump 8 tends to stick to each other and cause a short circuit. The emergence of an inspection method that can solve these problems has been long awaited.
tc)発明の目的
本発明は前述の点に鑑みなされたもので、従来に比して
格段に狭くなったピンチのハンプ8を備えたリードレス
チップキャリアをプリント基板に搭載接続した際に8そ
の接続検査を有効に行うことが出来る検査方法を提供し
ようとするものである。tc) Purpose of the Invention The present invention has been made in view of the above-mentioned points, and the present invention has been made in view of the above-mentioned points. The purpose of this invention is to provide a test method that can effectively perform a connection test.
(d) 発明の構成
上記の発明の目的は、半導体集積回路素子を収容したパ
ンケージをプリント基板上に接続手段を介して接続して
搭載した後当該接続部の接続状況を検査するに際し、一
方では前記パンケージの表面上に形成された接続検査用
バンドに、該パッドにそれぞれ対応して基体に植設され
た高抵抗金属を材料としかつ接触端と反対の端部が導電
性部材で電気的に短絡された複数のプローブを備えてな
る接触端子の接触端で接触し、他方では前記接続部に導
通しかつ前記プリント基板のパンケージ搭載面とは反対
側の表面に配設されたパッドにプローブで個別に接触し
ながら前記接触部を含む抵抗値を個別に測定することに
より容易に達成される。(d) Structure of the Invention The object of the above invention is to provide a method for inspecting the connection status of the connection portion after a pancage containing a semiconductor integrated circuit element is connected and mounted on a printed circuit board via a connection means. The connection test band formed on the surface of the pan cage is made of a high-resistance metal material and embedded in the base body corresponding to each pad, and the end opposite to the contact end is electrically conductive. A contact terminal comprising a plurality of short-circuited probes is brought into contact with a contact end thereof, and a probe is connected to a pad conductive to the connection portion and disposed on a surface of the printed circuit board opposite to the pancage mounting surface. This can be easily achieved by individually measuring the resistance value including the contact portion while making contact with each other.
(el 発明の実施例
以下本発明の実施例につき図面を参照して説明する。第
4図の側面図に本発明に基づいてリードレスチップキャ
リアとプリント基板との接続を検査する方法の一実施例
を示す。Embodiments of the Invention Examples of the present invention will be described below with reference to the drawings. A side view of FIG. Give an example.
本発明を要約すれば、チップ基板1上の密接した検査用
パッド12を抵抗体を介して一括して短絡することで、
出来る文構造を簡素化し、他方プリント基板10内の内
層配線により、プリント基板10の裏面側の接続検査用
のパッド14の位置を拡散して配設し3個別のプローブ
20が配設出来る空間余裕を与えるとともに、プローブ
200個々を流れる電流値からハンプ8間の短絡を検出
しようとするものである。To summarize the present invention, by collectively short-circuiting the closely spaced test pads 12 on the chip substrate 1 via a resistor,
On the other hand, by simplifying the sentence structure that can be created, and by distributing the positions of the pads 14 for connection inspection on the back side of the printed circuit board 10 by using the inner layer wiring in the printed circuit board 10, there is enough space to accommodate three individual probes 20. In addition, a short circuit between the humps 8 is detected from the current value flowing through each probe 200.
第4図は本発明に基づいたリードレスチップキャリアと
プリンj・基板との接続部の検査方法の一実施例を示す
部分断面図を含む側面図である。FIG. 4 is a side view including a partial cross-sectional view showing an embodiment of a method for inspecting a connection portion between a leadless chip carrier and a printed circuit board/substrate according to the present invention.
第3図に示した従来のプローブ15の代わりにニッケル
・クローム鉄等の高抵抗の金属線で形成したプローブ2
1を検査対象とするリードレスチップキャリアの検査用
バッド12に対応して配列し、各々は絶縁板よりなる接
触端子基板22に形成された小孔にスライド出来るよう
に植設されており、かつ各プローブ21の上部にある彎
曲部21aをカバー23でおさえることにより、プロー
ブ21を図の矢印方向に弾性的に付勢する構造の接触端
子24を使用する。カバー23は金属製であるのでプロ
ーブ21はその上端(彎曲部21a)で電気的に短絡さ
れていることになる。Probe 2 made of high resistance metal wire such as nickel chrome iron instead of the conventional probe 15 shown in FIG.
1 are arranged corresponding to the test pads 12 of the leadless chip carrier to be tested, and each is implanted so that it can slide into a small hole formed in a contact terminal board 22 made of an insulating plate, and A contact terminal 24 is used which has a structure in which the curved portion 21a at the top of each probe 21 is held down by a cover 23 to elastically bias the probe 21 in the direction of the arrow in the figure. Since the cover 23 is made of metal, the probe 21 is electrically short-circuited at its upper end (curved portion 21a).
プリント基板10の裏面側の接続検査用パッド14は当
該プリント基板10の内層配線25.あるいは表面配線
により相互の間隔を拡大して配設されているから、従来
の通りのプローブ20を使用することが可能であり、従
って導通試験器(図示せず)によって各プローブ20の
1本毎の試験電流、即ち当該接続部の抵抗を測定するこ
とが出来る。The connection test pad 14 on the back side of the printed circuit board 10 is connected to the inner layer wiring 25 of the printed circuit board 10. Alternatively, since the probes 20 are arranged with increased distance from each other by surface wiring, it is possible to use the conventional probes 20, and therefore each probe 20 can be tested by a continuity tester (not shown). test current, i.e. the resistance of the connection in question.
バンプ8とプリント基板10上の接続用パッド11との
接続が切れていれば、勿論直ぐ発見出来るが。Of course, if the connection between the bump 8 and the connection pad 11 on the printed circuit board 10 is broken, it can be detected immediately.
もし例えば相隣る2個の接続部の半田同志が一体となっ
て短絡している場合には、プローブ21が所定の抵抗値
を有するので、短絡時にはその抵抗値が半分になるので
、これもまた容易に発見することが出来る。For example, if the solders of two adjacent connections are short-circuited together, the probe 21 has a predetermined resistance value, and when the short-circuit occurs, the resistance value is halved, so this also applies. It is also easy to discover.
以上に述べた実施例においてはハンプ8を有するリード
レスチップキャリアの例を取り扱ったが。In the embodiments described above, an example of a leadless chip carrier having a hump 8 was dealt with.
ハンプ8の代わりにピンを備えたような場合でも本発明
による同様の接続部検査方法が適用出来ることはいうま
でもない。It goes without saying that the same connection inspection method according to the present invention can be applied even when a pin is provided instead of the hump 8.
(f) 発明の効果
以上の説明から明らかなように、最近の高度に高密度化
された。ピッチの小さいバンプ列を有するリードレスチ
ップキャリア等とこれを搭載するプリント基板との接続
部の検査に本発明に基づく検査方法を適用すれば、バン
プ8等の接続端子の高密度配列に伴う困難を克復して円
滑容易に前記検査を遂行出来、原価低減1品質向上に多
く寄与出来るという効果がある。(f) Effects of the invention As is clear from the above explanation, the density has been increased to a high degree recently. If the inspection method based on the present invention is applied to the inspection of the connection portion between a leadless chip carrier, etc., which has a row of bumps with a small pitch, and a printed circuit board on which it is mounted, difficulties associated with a high-density arrangement of connection terminals such as bumps 8 can be avoided. This has the effect of overcoming the above problems, allowing the inspection to be carried out smoothly and easily, and greatly contributing to cost reduction and quality improvement.
第1図は広く市販されている標準化されたチップキャリ
アの構造を示す斜視図、第2図はさらに高密度実装を可
能にするビアを有するチップキャリアの平面図および断
面図、第3図はリードレスチップキャリアと搭載プリン
ト基板との接続部の従来の検査方法を示す部分断面図を
含む側面図。
第4図は本発明に基づく同じく検査方法を示す部分断面
図を含む側面図である。
図において、lはチップ基板、3はICチップ。
5はチップキャリアの外部端子、7はビア、8はバンプ
、10はプリント基板、 lL12.14はバンド。Figure 1 is a perspective view showing the structure of a standardized chip carrier that is widely commercially available, Figure 2 is a plan view and cross-sectional view of a chip carrier with vias that enable higher density mounting, and Figure 3 is a lead FIG. 3 is a side view including a partial cross-sectional view showing a conventional inspection method for a connecting portion between a non-chip carrier and a mounted printed circuit board. FIG. 4 is a side view including a partial sectional view showing the same inspection method according to the present invention. In the figure, l is a chip substrate and 3 is an IC chip. 5 is an external terminal of the chip carrier, 7 is a via, 8 is a bump, 10 is a printed circuit board, and 1L12.14 is a band.
Claims (1)
板上に接続手段を介して接続して搭載した後当該接続部
の接続状況を検査するに際し、一方では前記パッケージ
の表面上に形成された接続検査用バンドに、該バンドに
それぞれ対応して基体に植設された高抵抗金属を材料と
しかつ接触端と反対の端部が導電性部材で電気的に短絡
された複数のプローブを備えてなる接触端子の接触端で
接触し、他方では前記接続部に導通しかつ前記プリント
基板のパッケージ搭載面とは反対側の表面に配設された
バンドに、プローブで個別に接触しながら前記接触部を
含む抵抗値を個別に測定することを特徴とするパッケー
ジとプリント基板間の接続検査方法。When a package housing a semiconductor integrated circuit element is connected and mounted on a printed circuit board via a connecting means and the connection status of the connection part is inspected, on the one hand, a connection inspection band formed on the surface of the package is used. A contact terminal comprising a plurality of probes made of a high-resistance metal material and whose ends opposite to the contact ends are electrically short-circuited with a conductive member, implanted in a base body corresponding to each of the bands. A resistance value including the contact portion while individually contacting with a probe a band that is in contact with the contact end and is conductive to the connection portion and arranged on the surface of the printed circuit board opposite to the package mounting surface on the other hand. A connection inspection method between a package and a printed circuit board, which is characterized by individually measuring .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58136069A JPS6027139A (en) | 1983-07-25 | 1983-07-25 | Method for inspecting connection between package and printed board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58136069A JPS6027139A (en) | 1983-07-25 | 1983-07-25 | Method for inspecting connection between package and printed board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6027139A true JPS6027139A (en) | 1985-02-12 |
Family
ID=15166487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58136069A Pending JPS6027139A (en) | 1983-07-25 | 1983-07-25 | Method for inspecting connection between package and printed board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6027139A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03144380A (en) * | 1989-10-30 | 1991-06-19 | Masatoshi Kato | Inspection of ic mounted board |
JP2006284384A (en) * | 2005-03-31 | 2006-10-19 | Fujitsu Ltd | Testing device and test method of semiconductor device |
JP2009052996A (en) * | 2007-08-27 | 2009-03-12 | Texas Instr Japan Ltd | Apparatus for analyzing defect |
-
1983
- 1983-07-25 JP JP58136069A patent/JPS6027139A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03144380A (en) * | 1989-10-30 | 1991-06-19 | Masatoshi Kato | Inspection of ic mounted board |
JP2006284384A (en) * | 2005-03-31 | 2006-10-19 | Fujitsu Ltd | Testing device and test method of semiconductor device |
JP2009052996A (en) * | 2007-08-27 | 2009-03-12 | Texas Instr Japan Ltd | Apparatus for analyzing defect |
JP4489106B2 (en) * | 2007-08-27 | 2010-06-23 | 日本テキサス・インスツルメンツ株式会社 | Failure analysis device |
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