JPS60263784A - Control valve using pulse motor - Google Patents
Control valve using pulse motorInfo
- Publication number
- JPS60263784A JPS60263784A JP12105084A JP12105084A JPS60263784A JP S60263784 A JPS60263784 A JP S60263784A JP 12105084 A JP12105084 A JP 12105084A JP 12105084 A JP12105084 A JP 12105084A JP S60263784 A JPS60263784 A JP S60263784A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pulse motor
- control
- flow rate
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、流体を取扱う装置及び機器に用いられて取扱
流体のとりわけ流量を微少1」っ粕密に制御する為の制
御弁に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a control valve used in devices and equipment that handles fluids to precisely control the flow rate of the fluid to be handled.
(従来の技術)
従来、この種の制御弁としては、例えは弁の駆動に空気
圧を利用したタイヤフラム式制御弁やインダクンヨンモ
ータを利用した制御弁等が知られている。(Prior Art) Conventionally, as this type of control valve, for example, a tire flam type control valve that uses air pressure to drive the valve, a control valve that uses an inductor motor, etc. are known.
然しなから、何れの制御弁も、その制御性能の優劣をl
lこめる土たる要件としてのレンジアビリティ並ひに制
御分解能が小さい為に取扱流体の流量を超微少目つ高精
密に制御する事ができなかった。However, the control performance of any control valve is
In addition to rangeability being a critical requirement, the control resolution was also small, making it impossible to control the flow rate of the fluid handled with ultra-small precision.
レンジアビリティとは、周知の如く、制御可能な最大流
計と最小流量の比を云い、これか大きいと制御可能な流
喰範囲が大きくなる。Range ability, as is well known, refers to the ratio of the maximum controllable flow rate to the minimum flow rate, and the larger this ratio is, the larger the controllable flow range becomes.
他方、制御分解能なる用語は、本発明に於ては制御ri
7能な流汁範囲を制御できる最小流量m位で除した商で
あると定義して用いる事とする。即ち、(611宿1−
r11′能な流計範囲が何個に分割できるかを表ね−J
−ものであり、この制御分解能か大きいと制御可能な最
小lハLイi ll(位か制御「1丁能な流宿範囲に比
して小さい事を意味するから、該流率範囲の特に低流吋
1:域ての細かい制御か出来る。On the other hand, the term control resolution is used in the present invention to refer to control resolution.
It is defined and used as the quotient obtained by dividing the range of liquid fluid that can be controlled by the minimum flow rate m that can be controlled. That is, (611 inn 1-
r11' Express how many parts the functional flowmeter range can be divided into.-J
If this control resolution is large, it means that the controllable minimum l is small compared to the flow rate range that can be controlled. Low flow rate 1: Allows fine control over the area.
制御分解能は、前記のレンジアビリティと密接な関係を
nする。レンジアビリティを火きくして、低’(1ドi
:域から人流晴域才ての広いIjj>囲での流用制御を
可能にしたとしても、制御分解能か小さいままであると
すると、制御できる最小流量単位が大きい為に低流量域
での細かい制御ができない事を意味する。Control resolution has a close relationship with the above-mentioned range ability. Expand your range ability to make low '(1 do i)
Even if diversion control is made possible in a wide Ijj area with a wide range of people flow, if the control resolution remains small, the minimum flow rate unit that can be controlled is large, making fine control in low flow areas difficult. It means not being able to.
これを、数値を挙けて具体的に説明する。This will be specifically explained using numerical values.
制御可能な流量範囲が10〜200 ’/l−1rて制
御可能な最小流用単位が0.5 ’/T(rである制御
弁に於て、夫々の定義からレンジアビリティは20、制
御分解能は380となる。For a control valve with a controllable flow rate range of 10 to 200'/l-1r and a controllable minimum flow unit of 0.5'/T (r), the range ability is 20 and the control resolution is It becomes 380.
仮にレンジアビリティが1.000となり、制御可能な
流量範囲が0.2〜200 ’/T−(r と広くなっ
たとしても、制御分解能が380のままであるとすると
制御可能な最小流量単位は約0.531A4rであるか
ら、O−2l?/l−Irに近い低流量域での細かい制
御は実際には不可能である。Even if the rangeability becomes 1.000 and the controllable flow rate range widens to 0.2 to 200'/T-(r), if the control resolution remains 380, the minimum controllable flow rate unit is Since it is approximately 0.531A4r, fine control in the low flow rate region close to O-2l?/l-Ir is actually impossible.
そこで制御分解能を仮に10.000に高める事ができ
れは制御可能な最小流量単位は約0.02 ’/l−1
rであるから、上記の様な低流量域に於ても細かい制御
が可能となるのである。従って、レンジアビリティを大
きくする時は、制御分解能をも同時に大きくする必要か
ある。Therefore, if the control resolution could be increased to 10.000, the minimum controllable flow rate unit would be approximately 0.02'/l-1.
Since it is r, fine control is possible even in the low flow rate range as mentioned above. Therefore, when increasing the range ability, it is necessary to simultaneously increase the control resolution.
尚、単位感度なる用語が周知であるが、これは弁棒の動
きのみに着目したものであるから、駆動部に特徴を有す
る本発明の制御弁の制御性能を評価する要因として採用
する事は適当でない。The term "unit sensitivity" is well known, but since it focuses only on the movement of the valve stem, it cannot be used as a factor for evaluating the control performance of the control valve of the present invention, which has characteristics in the drive section. It's not appropriate.
現在、最も一般的に使用されている空気圧を利用したタ
イヤフラム弐制御弁のレンジアビリティは20〜40程
度であるから制御可能な流量範囲が広い場合には複数の
制御弁を組合せて使用するか、又は流量範囲の変化に合
せて弁体を交換する等の処置が必要であった。更に、こ
の形式の°制御弁に於ては、前記の制御分解能は400
〜600程度と小さく、特に低流量域で要求される微少
且つ精密な制御を行う事はてきなかった。Currently, the range ability of the most commonly used tire flamm control valve that uses air pressure is about 20 to 40, so if the controllable flow rate range is wide, it is recommended to use a combination of multiple control valves. Otherwise, it was necessary to take measures such as replacing the valve body in accordance with changes in the flow rate range. Furthermore, in this type of control valve, the control resolution is 400
It is small, about ~600, and has not been able to perform the minute and precise control required especially in the low flow rate range.
(発明か解決しようとする問題点)
本発明は、叙上の問題点に鑑み、これを解消する為に創
案されたもので、その目的とする処は、レンジアビリテ
ィと制御分解能の両方を飛躍的に大きくして、取扱流体
のとりわけ流量を従来よりも広い範囲に亘って超微少且
つ高精密に制御できる様にした制御弁を提供するにある
。(Problems to be solved by the invention) The present invention was devised in view of the above-mentioned problems and to solve them, and its purpose is to dramatically improve both rangeability and control resolution. It is an object of the present invention to provide a control valve which is enlarged in size and is capable of controlling the flow rate of a handled fluid in an ultra-fine manner and with high precision over a wider range than before.
C問題点を解決するための手段)
本発明の制御弁は、移動可能な弁棒をイm1えて取扱流
体を制御し得る弁本体と、弁本体に支持されたパルスモ
ータと、パルスモータに連繋されてその回転を減速し得
るウオーム減速機構と、ウオーム減速機ff/;と弁本
体の弁棒との間に介設されて回転運動を直線運動に変換
する螺子機構とから114成した事に特徴が存する。Means for Solving Problem C) The control valve of the present invention includes a valve body that can control the handled fluid by imitating a movable valve stem, a pulse motor supported by the valve body, and a pulse motor linked to the pulse motor. and a screw mechanism that is interposed between the worm reducer ff/; and the valve stem of the valve body and converts rotational motion into linear motion. There are characteristics.
つまり、パルスモータとウオーム減速機(14と螺子機
構を用いる事に依り弁本体の弁棒を超微動できる様にし
たものである。In other words, by using a pulse motor, a worm reducer (14), and a screw mechanism, the valve stem of the valve body can be moved very finely.
(作 用)
パルスモータを回転駆動させると、その回転はこれに連
繋されたウオーム減速機]74て減速されだ後、螺子機
構に依り回転運動が直線運動に変換されて弁棒が可動さ
れる。(Function) When the pulse motor is driven to rotate, its rotation is reduced by the worm reducer connected to it]74, and then the rotary motion is converted into linear motion by the screw mechanism, and the valve stem is moved. .
即ち、パルスモータを正逆回転さぜると、弁棒に設けた
弁体を弁箱の弁座に対して当離座てき、これに依り取扱
流体の通断と流量制御が行なえる。That is, when the pulse motor is rotated in the forward and reverse directions, the valve body provided on the valve stem is brought into contact with and unseated from the valve seat of the valve box, thereby allowing passage of the fluid to be handled and control of the flow rate.
(実 施 例) 次に、本発明の実施例を、図面に基ついて説明する。(Example) Next, embodiments of the present invention will be described based on the drawings.
第1図は、本発明の実施例に係る制御弁の構造を示す縦
断正面図。第2図は、第1図の■−■描断平而図面ある
。FIG. 1 is a longitudinal sectional front view showing the structure of a control valve according to an embodiment of the present invention. Fig. 2 is a plain drawing of Fig. 1 drawn from ■-■.
制御弁1は、弁本体2、パルスモータ3、ウオーム減速
機構4、螺子機構5からその主要部か構成されている。The main parts of the control valve 1 include a valve body 2, a pulse motor 3, a worm reduction mechanism 4, and a screw mechanism 5.
弁本体2は、取扱流体を通断並Oに流量制御し得るもの
であり、入口6及び出[17とこれらを連通ずる流路の
途中に形成した弁座8を有する弁箱9と、弁箱9の弁座
8に当離座する弁体10と、弁体10に設けられて弁箱
9にノールされつつ移動可能に支持された弁棒11とか
ら成って居り、この例ではニードル弁型式で特性がリニ
アのものを用いている。The valve body 2 is capable of controlling the flow rate of the fluid to be handled, and includes a valve body 9 having a valve seat 8 formed in the middle of a flow path communicating with the inlet 6 and the outlet 17, and the valve body 9. It consists of a valve body 10 that seats on and leaves the valve seat 8 of a box 9, and a valve rod 11 that is provided on the valve body 10 and is movably supported while being knurled to the valve body 9. In this example, it is a needle valve. A model with linear characteristics is used.
パルスモータ3は、弁本体2に支持されたモノであり、
具体的には弁本体2の上部に取付けられた箱型のハウジ
ング12を介して設けられている。The pulse motor 3 is supported by the valve body 2,
Specifically, it is provided through a box-shaped housing 12 attached to the upper part of the valve body 2.
パルスモーク3は、周知の如く、フィードバックがない
と共に、所定の角度で高精度に回転停止できるものであ
り、その総回転角は入力パルス数の総数に比例し、回転
速度は単位時間当りの入力パルス数に比例するものであ
る。As is well known, Pulsmoke 3 has no feedback and can stop rotating at a predetermined angle with high precision.The total rotation angle is proportional to the total number of input pulses, and the rotation speed is proportional to the input pulse per unit time. It is proportional to the number of pulses.
この例ては、1パルスて1.8度(つまり、200パル
スで1回転)だけ回転するものを用いている。In this example, a device that rotates by 1.8 degrees per pulse (that is, one rotation per 200 pulses) is used.
ウオーム減速機構4は、パルスモータ3に連繋されてそ
の回転を減速し得るものてあり、ウオーム13とこれに
噛合するウオームホイール14とから成す、ウオーム1
3はハウジンク12に回転自在に支持された水平なる駆
動軸15に楔着されていると共に、ウオームホイール1
4は同しくハウジンク12に回転自在に支持された垂直
なる従動軸16に楔着されて層り、駆動軸15とパルス
モータ3の出力軸とはカップリング17に依り連繋され
ている。The worm deceleration mechanism 4 is connected to the pulse motor 3 and can decelerate its rotation, and the worm 1 consists of a worm 13 and a worm wheel 14 meshing with the worm 13.
3 is wedged to a horizontal drive shaft 15 rotatably supported by the housing 12, and the worm wheel 1
4 is wedged and stacked on a vertical driven shaft 16 which is also rotatably supported by the housing 12, and the drive shaft 15 and the output shaft of the pulse motor 3 are linked by a coupling 17.
螺子機構5は、ウオーム減速機構4と弁本体2の弁棒1
1との間に介設されて回転運動を直線運動に変換するも
のであり、この例では多数のホールを内装したボールガ
イドナツト18とこれに螺合させた螺子棒〕9とから成
るホール螺子20が用いられ、ホールカイ1ぐナツト1
8は従動軸16に取付けられていると共に、螺子棒19
は連結部材2Jを介して弁棒11に連結されている。The screw mechanism 5 connects the worm reduction mechanism 4 and the valve stem 1 of the valve body 2.
1 to convert rotational motion into linear motion, and in this example, a hole screw consisting of a ball guide nut 18 having a large number of holes therein and a threaded rod 9 screwed into the ball guide nut 18. 20 is used, whole chi 1 gun nut 1
8 is attached to the driven shaft 16 and a threaded rod 19
is connected to the valve stem 11 via the connecting member 2J.
ポール螺子20の螺子ピッチは、1.5m+nてあり、
弁体10のリフト量か8mになる様にしている。The screw pitch of the pole screw 20 is 1.5m+n,
The lift amount of the valve body 10 is set to 8 m.
而して、螺子機構5は、廻止機構22を含んて居り、こ
れは連結部材21に形設した縦長のガイド部23と、ガ
イド部23を両側から挾むべくハウジング12に軸設さ
れた一対のガイドローラ24とから成り、連結部材21
の昇降運動を許容すると共に回転運動を不能にする機能
を果す。Thus, the screw mechanism 5 includes a rotation stopper mechanism 22, which includes a vertically elongated guide section 23 formed on the connecting member 21, and a shaft provided on the housing 12 to sandwich the guide section 23 from both sides. It consists of a pair of guide rollers 24, and the connecting member 21
It has the function of allowing the vertical movement of the cylinder and disabling rotational movement.
次に、この様な構成に於て、作用を連射する。Next, in such a configuration, the action is repeated.
パルスモータ3を正逆回転すると、その回転力は、カッ
プリンク17→駆動軸I5→ウオーム減速機構4のウオ
ーム13→同じくウオームホイール14→従う動軸16
を経て螺子機構5のボールガイドナツト18に伝達され
る。When the pulse motor 3 is rotated in the forward and reverse directions, the rotational force is generated from the cup link 17 → the drive shaft I5 → the worm 13 of the worm reduction mechanism 4 → the worm wheel 14 → the following driving shaft 16
The signal is transmitted to the ball guide nut 18 of the screw mechanism 5 through.
そして、螺子機構5のボールガイドナツト18が回転す
ると、連結部材21が廻止機構221こ依り昇降可能に
廻止めされているので、螺子棒19が昇降し、連結部材
21、弁棒11、弁体1oは夫々廻止めされつつ昇降す
る。When the ball guide nut 18 of the screw mechanism 5 rotates, the connecting member 21 is prevented from rotating so that it can move up and down by the rotation preventing mechanism 221, so the screw rod 19 moves up and down, and the connecting member 21, the valve stem 11, and the valve The body 1o moves up and down while being stopped from rotating.
従って、弁箱9の弁座8に対して弁体1oが当離座する
ので、弁本体2としては開閉弁し、取扱流体の通断は元
より流量の制御が行なえる。Therefore, since the valve body 1o is seated and unseated with respect to the valve seat 8 of the valve box 9, the valve body 2 can be opened and closed, and the flow rate can be controlled as well as the passage of the fluid to be handled.
而して、本実施例の制御弁1に就いて実験を行なった結
果、制御可能な流量範囲が約0155〜175 ’AI
r で、制御てきる最小流量単位が約o 、oi’/1
−1 +−であった。従って、レンジアビリティは約1
.130、制御分解能は約1’7.500 テ、F、
ッた。As a result of experiments conducted on the control valve 1 of this embodiment, the controllable flow rate range was approximately 0155 to 175'AI.
r, the minimum flow rate unit that can be controlled is approximately o, oi'/1
-1 +-. Therefore, the range ability is approximately 1
.. 130, control resolution is approximately 1'7.500 Te, F,
It was.
又、現在最も一般的に利用されている空気圧を利用した
タイヤプラム式制瀧弁に就いて同様の実験をした結果、
制御可能な流量範囲が約4.6〜150 ’/Hr て
、制御てきる最小流量単位が約0.27’/Hr てあ
った。従って、レンジアビリティは約33、制御分解能
は約540であった。In addition, as a result of similar experiments on the tire plum type waterfall control valve that uses air pressure, which is currently the most commonly used,
The controllable flow rate range was about 4.6 to 150'/Hr, and the minimum controllable flow rate unit was about 0.27'/Hr. Therefore, the rangeability was approximately 33, and the control resolution was approximately 540.
但し、本実施例の制御弁1とタイヤフラム式制御弁とは
、駆動部分のみを交換し、何れもMaxGV値か0.0
035、ΔPが100¥aテ実験シタ。However, in the control valve 1 of this embodiment and the tire flam type control valve, only the driving part is replaced, and both have a MaxGV value of 0.0.
035, ΔP is 100 yen ate experiment.
従って、現在最も一般的に利用されている空気圧を利用
したダイヤフラム式制御弁と比較した場合、本実施例の
制御弁1の方が、レンジアビリティで約34倍、制御分
解能で約32倍優れている事が判明した。Therefore, when compared with the diaphragm type control valve that uses pneumatic pressure, which is currently most commonly used, the control valve 1 of this embodiment is about 34 times better in range ability and about 32 times better in control resolution. It turned out that there was.
尚、弁本体2は、先の実施例では、ニードル弁型式のも
のを用いたか、これに限らず、各種の型式並ひに構造の
ものを採用する事かできる。Although the valve body 2 is of the needle valve type in the previous embodiment, the present invention is not limited to this, and various types and structures may be adopted.
パルスモータ3は、先の実施例では、■パルスで1.8
度たけ回転するものを用いたが、これに限らす、例えは
Iパルスで帆9度だけ回転するものであっても良い。In the previous embodiment, the pulse motor 3 has a pulse speed of 1.8
Although a type that rotates many degrees is used, the configuration is not limited to this, for example, a type that rotates the sail by 9 degrees with an I pulse may be used.
+R子a ’185は、先の実施例では、ヒステリシス
等の関係からポール螺子2oを用いたが、これに限らず
、例えは単なる螺子駒吉これIこ螺合する螺子棒から成
るものでも差支えなく、螺子ピッチも1.5mmに限ら
す、適宜の値に選定できる。In the previous embodiment, the pole screw 2o was used for +R a '185 due to hysteresis, etc., but it is not limited to this, and it may be simply a screw rod that is screwed together. The screw pitch is also limited to 1.5 mm, and can be selected to an appropriate value.
螺子機構5は、先の実施例では、ボールガイドナツト1
8をウオームホイール13側へ、螺子棒19を弁棒11
側へ夫々連繋したか、これに限らす、逆にしても差支え
ない。In the previous embodiment, the screw mechanism 5 is connected to the ball guide nut 1.
8 to the worm wheel 13 side, and the threaded rod 19 to the valve rod 11.
This is limited to whether they are linked to each side, or vice versa.
甥子機構5に含まれる廻止機構22は、先の実施例では
、ハウジング12と連結部材21との間に介設したかこ
れに限らす、弁棒1工が廻止めされつツ昇降するのであ
れは適宜の位置並びに構造にする事ができる。In the previous embodiment, the rotation prevention mechanism 22 included in the valve mechanism 5 is interposed between the housing 12 and the connecting member 21, or is limited to this, and allows the valve stem 1 to move up and down while being prevented from rotating. Therefore, it can be positioned and structured as appropriate.
(発明の効果)
以上既述した如く、本発明に依れば次の様な諸種の効果
を奏する事ができる。(Effects of the Invention) As described above, according to the present invention, the following various effects can be achieved.
(1) レンジアビリティと制御分解能の両方を例えは
30倍以上という様に飛躍的に大きくする小かてき、取
扱流′体のとりわけ流量を従来よりも広い範囲に亘って
超微少且つ高精密に制御できる。(1) A small device that dramatically increases both rangeability and control resolution by more than 30 times, and allows handling of fluids, especially the flow rate, over a wider range than before with ultra-fine and high precision control. can be controlled.
その結果、制御可能な流量範囲に於て従来3〜5台の制
御弁を要していた処を、1台でまかなう事かできるので
頗る経済的であると共に、取扱流体の流量が頻繁に変わ
る多品種少搦生産型のプラント等に採用した場合には極
めて有効である。As a result, the controllable flow rate range that conventionally required 3 to 5 control valves can now be done with one control valve, which is extremely economical, and the flow rate of the fluid to be handled changes frequently. It is extremely effective when adopted in plants that produce a small number of different products.
(2) ウオーム減速機構並ひに螺子機構を設けたので
、パルスモータの回転力を増大させて弁体に伝達する事
かてき、取扱流体の圧力が高い場合でも使用する事がで
きる。(2) Since a worm reduction mechanism and a screw mechanism are provided, the rotational force of the pulse motor can be increased and transmitted to the valve body, and it can be used even when the pressure of the fluid to be handled is high.
(3) ウオーム減速機構を設けたので、取扱流体の圧
力が変動した場合でも弁体か所定の開度位置に保持され
、パルスモータに逆転力が伝達される事がない。(3) Since a worm reduction mechanism is provided, even if the pressure of the fluid being handled fluctuates, the valve body is held at a predetermined opening position, and no reversing force is transmitted to the pulse motor.
従って、故障の誘発を防止でき、常に安定して極めて正
確な流量制御が行なえる。Therefore, failures can be prevented from occurring, and stable and extremely accurate flow rate control can be performed at all times.
(4) 空気圧を利用しない構造であるので、嫌気性条
件か課せられる処では極めて有効である。(4) Since the structure does not utilize air pressure, it is extremely effective in places where anaerobic conditions are imposed.
(5) パルスモータの制御を直接コンピュータで行な
う事がてき、この為に自動化が容易となる。(5) The pulse motor can be controlled directly by a computer, which facilitates automation.
第1図は、本発明の実施例に係る制御弁の構造を示す縦
断正面図。
第2図は、第1図の■−■横断平面回である。
l ・・・制 御 弁
2・・・弁 本 体
3 パルスモータ
4 ウオーム減速機構
5・・・螺子機構
第7図
1
第2図
制 佃 弁
升 本 体
パルスモ−タFIG. 1 is a longitudinal sectional front view showing the structure of a control valve according to an embodiment of the present invention. FIG. 2 is the ■-■ transverse plane rotation of FIG. 1. l... Control Valve 2... Valve body 3 Pulse motor 4 Worm reduction mechanism 5... Screw mechanism Fig. 7 1 2nd diagram system Tsukuda valve sho Main body pulse motor
Claims (1)
、弁本体に支持されたパルスモータと、パルスモータに
連繋されてその回転を減速し7得るウオーム減速機構上
、ウオーム減速機構と弁本体の弁棒との間に介設されて
回転運動を直線運動に変換する螺子機11〜とから構成
した事を特徴とするパルスモータを用いた制御弁。A valve body that is equipped with a movable valve stem and can control handled fluid, a pulse motor supported by the valve body, and a worm reduction mechanism that is connected to the pulse motor to reduce its rotation. A control valve using a pulse motor, characterized in that it is comprised of a screw machine 11 which is interposed between a valve stem of a valve body and converts rotational motion into linear motion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12105084A JPS60263784A (en) | 1984-06-12 | 1984-06-12 | Control valve using pulse motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12105084A JPS60263784A (en) | 1984-06-12 | 1984-06-12 | Control valve using pulse motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60263784A true JPS60263784A (en) | 1985-12-27 |
Family
ID=14801588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12105084A Pending JPS60263784A (en) | 1984-06-12 | 1984-06-12 | Control valve using pulse motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60263784A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63187562U (en) * | 1987-05-19 | 1988-12-01 | ||
US5624165A (en) * | 1994-10-26 | 1997-04-29 | Daewoo Electronics Co., Ltd. | Apparatus for controlling brake pressure applied to the wheels of automobiles using pressure fluid |
US5676432A (en) * | 1995-02-21 | 1997-10-14 | Daewoo Electronics Co., Ltd. | Apparatus for controlling brake pressure applied to the wheels of automobiles using pressure fluid |
JP2010139065A (en) * | 2008-11-12 | 2010-06-24 | Rinnai Corp | Flow control valve |
JP2012122506A (en) * | 2010-12-06 | 2012-06-28 | Rinnai Corp | Flow control valve |
JP2021510334A (en) * | 2018-01-10 | 2021-04-22 | インターサージカル アクチェンゲゼルシャフト | Valve pin for gas flow rate regulator and gas flow rate regulator |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5395316A (en) * | 1977-01-29 | 1978-08-21 | Toyota Motor Co Ltd | Pulse motor drive type flow quantity controlling valve device |
JPS5850376B2 (en) * | 1976-11-24 | 1983-11-10 | 三菱電機株式会社 | display device |
-
1984
- 1984-06-12 JP JP12105084A patent/JPS60263784A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850376B2 (en) * | 1976-11-24 | 1983-11-10 | 三菱電機株式会社 | display device |
JPS5395316A (en) * | 1977-01-29 | 1978-08-21 | Toyota Motor Co Ltd | Pulse motor drive type flow quantity controlling valve device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63187562U (en) * | 1987-05-19 | 1988-12-01 | ||
US5624165A (en) * | 1994-10-26 | 1997-04-29 | Daewoo Electronics Co., Ltd. | Apparatus for controlling brake pressure applied to the wheels of automobiles using pressure fluid |
US5676432A (en) * | 1995-02-21 | 1997-10-14 | Daewoo Electronics Co., Ltd. | Apparatus for controlling brake pressure applied to the wheels of automobiles using pressure fluid |
JP2010139065A (en) * | 2008-11-12 | 2010-06-24 | Rinnai Corp | Flow control valve |
JP2012122506A (en) * | 2010-12-06 | 2012-06-28 | Rinnai Corp | Flow control valve |
JP2021510334A (en) * | 2018-01-10 | 2021-04-22 | インターサージカル アクチェンゲゼルシャフト | Valve pin for gas flow rate regulator and gas flow rate regulator |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE68913944T2 (en) | Procedure for changing the characteristic of a control valve under pressure and control valve. | |
DE2421873C2 (en) | Device for regulating the combustion air supply to a furnace with oil or gas burners for heating systems | |
DE1648059B1 (en) | FLOW MEASURING DEVICE WITH A WIDE MEASURING RANGE | |
DE2142956C3 (en) | Control device for a displacement pump or displacement measuring chamber | |
JPS60263784A (en) | Control valve using pulse motor | |
DE1931354B2 (en) | Method for mixing gases and gas mixing device for gases, in particular for breathing and medical devices | |
DE10111227A1 (en) | Sash door position sensing apparatus for controlling air flow through laboratory fume hood, has sensor for determining opening of cabinet, based on rotation of shaft | |
EP0163602B1 (en) | Arrangement for increasing the driving force of a control motor in a linear positioning drive | |
DE3702958A1 (en) | PRESSURE REGULATOR WITH ADJUSTABLE OUTLET PRESSURE | |
US3536089A (en) | Electric to fluid pressure transducer | |
DE2903713A1 (en) | METHOD AND DEVICE FOR FLOW CONTROL | |
DE2651433A1 (en) | Mixer valve esp. for two components - has one valve plunger with conical ends acting on two valve seatings | |
EP0319933A3 (en) | Calibrated valve for gas detectors | |
EP3545271B1 (en) | Measurement appliance and measurement process for small gas volumes | |
DE69414781T2 (en) | Control device for a hydraulic motor | |
DE838098C (en) | Shut-off element with pipe slides | |
DE2313854A1 (en) | IMPROVEMENTS TO ELECTROHYDRAULIC SERVO VALVES | |
DD254524A1 (en) | COMPUTER-CONTROLLED VALVE | |
DE1431938B2 (en) | Device for controlling a manipulator hand | |
DE10017556A1 (en) | Device for setting vacuum generated in one or more Venturi nozzles has baffle plate displaced linearly in fluid outlet region behind nozzle to set counter pressure | |
DE809975C (en) | Automatic regulation of variables such as pressure, temperature, quantity | |
DE1773257A1 (en) | Measuring device with a fluid amplifier | |
DE886991C (en) | Valve for regulating the operating pressure of a gaseous or liquid pressure medium | |
DE3227116C2 (en) | Pressure control valve for liquids | |
EP0566576A1 (en) | Process and device for mass flow regulation. |