JPS60258836A - Objective lens for scanning electron microscope - Google Patents
Objective lens for scanning electron microscopeInfo
- Publication number
- JPS60258836A JPS60258836A JP11457384A JP11457384A JPS60258836A JP S60258836 A JPS60258836 A JP S60258836A JP 11457384 A JP11457384 A JP 11457384A JP 11457384 A JP11457384 A JP 11457384A JP S60258836 A JPS60258836 A JP S60258836A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- solenoid
- objective lens
- electron microscope
- objective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
この発明は、大形試料を大角度傾斜させること（１）
ができる高分解能な走査形電子顕微鏡の対物レンズに関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an objective lens for a high-resolution scanning electron microscope that is capable of (1) tilting a large sample at a large angle.
走査形電子顕微鏡における像観察において、大形試料を
大角度傾斜させてｉｉａすることがしばしば要求される
が、従来の走査形電子顕微鏡においては、大形試料を大
角度傾斜させるには、対物レンズ下面と試料の電子ビー
ム照射点までの距離、即ちワーキングディスタンスを長
くとらなければならない。しかし、このワーキングディ
スタンスを長くすると球面収差が増加し、高分解能な像
観察を行うことが極めて不利となり、また困難になると
いう欠点があった。In image observation using a scanning electron microscope, it is often required to tilt a large sample at a large angle. The distance between the bottom surface and the electron beam irradiation point on the sample, that is, the working distance, must be long. However, increasing the working distance increases spherical aberration, making it extremely disadvantageous and difficult to perform high-resolution image observation.
この発明の目的は、対物レンズの下面に、偏向コイルを
重ね巻したソレノイドレンズを付加することにより、大
形試料を大角度傾斜させることができ、かつ高分解能な
像観察ができる走査形電子顕ｍ１鏡の対物レンズを提供
することである。The object of this invention is to use a scanning electron microscope that can tilt a large sample at a large angle and perform high-resolution image observation by adding a solenoid lens with a deflection coil wound overlappingly to the bottom surface of the objective lens. The objective is to provide an m1 mirror objective lens.
（２）
この発明の走査形電子顕微鏡の対物レンズは、対物レン
ズの下面に、偏向コイルを重ね巻したソレノイドレンズ
を付加したもので、ソレノイドレンズ内部の集束磁界分
布を一様にし、ソレノイドレンズ出口で磁界の急激な変
化が生じるように該下面に形成された磁極穴の直径を小
さく絞ることにより、実効的に短焦点レンズの状態で試
料面に電子ビームを照射することができ、しかも大形試
料を大角度で傾斜させることができる。(2) The objective lens of the scanning electron microscope of the present invention has a solenoid lens with a deflection coil wound overlappingly wound on the lower surface of the objective lens, which makes the focused magnetic field distribution inside the solenoid lens uniform and the exit of the solenoid lens. By narrowing down the diameter of the magnetic pole hole formed on the bottom surface so that a sudden change in the magnetic field occurs, it is possible to effectively irradiate the sample surface with an electron beam in the state of a short focal length lens. The sample can be tilted at large angles.
以下、この発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.
第１図において、対物コイル２を設けた対物レンズ１の
下面には、偏向コイル４及びソレノイドコイル５を重ね
巻したソレノイドレンズ３が付設されており、−次電子
ビーム６は、対物レンズ１の出口で第１の焦点８を結ぶ
ようになっている。In FIG. 1, a solenoid lens 3 in which a deflection coil 4 and a solenoid coil 5 are wound in layers is attached to the lower surface of an objective lens 1 provided with an objective coil 2. A first focal point 8 is connected at the exit.
ｌ ソレノイドレンズ３の外径及び長さは、大形の］
′□ 試料１０を少なくとも、例えば６０’傾斜させる
ことができるように、またソレノイドレンズ３下（３）
面と試料１０の電子ビーム照射点ａとの距離、即ちワー
キングディスタンスＬが、例えば１０ｍｍ以ｆになるよ
うに夫々設定されている。またソレノイドレンズ３の下
面には、磁極穴１２が直径を小さく絞られて形成されて
いる。l The outer diameter and length of the solenoid lens 3 are set so that the sample 10 can be tilted at least, for example, by 60', and the lower (3) surface of the solenoid lens 3 and the sample 10 are irradiated with the electron beam. The distance from the point a, that is, the working distance L, is set to be, for example, 10 mm or more f. Further, a magnetic pole hole 12 is formed on the lower surface of the solenoid lens 3 with a narrowed diameter.
つぎに、本発明の詳細な説明する。Next, the present invention will be explained in detail.
対物レンズ１の主面と第１の焦点８までの距離が短いの
で、該第１の焦点８のビームスポットは、球面収差の少
ない良質のスポットとなる。Since the distance between the principal surface of the objective lens 1 and the first focal point 8 is short, the beam spot at the first focal point 8 is a high-quality spot with little spherical aberration.
また第１の焦点８のスポットは、ソレノイドレンズ３内
部で何回か結像して最終的に試料１０−１：で結像する
が、このときソレノイドレンズ３の出口での磁束が急激
に変化しているので、最終的な主面は、ソレノイドレン
ズ３の出口付近に生じ、試料１０上での結像は短焦点レ
ンズの結像と等価になる。またソレノイドレンズ３の磁
極穴１２の直径が小さく絞られて形成されているので、
効果的に短焦点レンズが実現できる。The spot at the first focal point 8 is imaged several times inside the solenoid lens 3 and finally focused on the sample 10-1; however, at this time, the magnetic flux at the exit of the solenoid lens 3 suddenly changes. Therefore, the final main surface is generated near the exit of the solenoid lens 3, and the image formation on the sample 10 is equivalent to that of a short focus lens. Also, since the diameter of the magnetic pole hole 12 of the solenoid lens 3 is narrowed down,
A short focus lens can be effectively realized.
第２図は、第１図に示す走査形電子顕微鏡の対物レンズ
１の軸線上の南東密度分布を表わした図（４）
であり、収差が発生する領域は、■及び■の領域に限定
され、磁界が一様とみなせる■の領域では原理的に収差
の発生はない。また収差は、最終的なレンズ倍率をかけ
た量として現われるため、短焦点で縮小系なものほど収
差が小さくなる。Figure 2 is a diagram (4) showing the southeast density distribution on the axis of the objective lens 1 of the scanning electron microscope shown in Figure 1, and the areas where aberrations occur are limited to the areas ◯ and ◯. , In principle, no aberration occurs in the region (2) where the magnetic field is considered to be uniform. Also, since aberrations appear as an amount multiplied by the final lens magnification, the shorter the focus and reduction type, the smaller the aberrations.
従って、本発明によれば、光学系はワーキングディスタ
ンスが短かく、最終的に短焦点で線中系となるので、収
差の増加をおさえてシャープな一次ビームスポットを試
料１０面に作ることができ、その結果、高分解能な像が
得られる。しかも、ソレノイドレンズ３の構造上、レン
ズ外径をかなり小さく設定することができるので、ワー
キングディスタンスの小さい状態で大形試料の大角度傾
斜が容易となる。Therefore, according to the present invention, the optical system has a short working distance and ultimately becomes a line-center system with a short focus, so it is possible to suppress the increase in aberration and create a sharp primary beam spot on the sample 10 surface. , As a result, a high-resolution image can be obtained. Moreover, since the outer diameter of the solenoid lens 3 can be set to be quite small due to its structure, it is easy to tilt a large sample at a large angle with a small working distance.
なお実験の結果、ワーキングディスタンスが１０１１Ｉ
１１以下ならば実用上十分な分解能が得られることが確
Ｊ忍されている。As a result of the experiment, the working distance was 1011I.
It is believed that if the value is 11 or less, a practically sufficient resolution can be obtained.
上述のとおり、本発明によれば、対物レンズ下面に偏向
コイルを重ね巻したソレノイドレンズが（５）
付加されているので、ソレノイドレンズ内部の集束磁界
分布が一様となり、またソレノイドレンズ出口で磁界の
急激な変化が生じるように、ソレノイドレンズの磁極穴
の直径が小さく絞られているので、実効的に短焦点レン
ズの状態で試料面に電子ブームを照射することができて
高分解能な像が得られ、しかも大形試料の大角度傾斜が
容易に実現できるという効果がある。As described above, according to the present invention, since the solenoid lens (5) in which the deflection coil is wound overlappingly is added to the lower surface of the objective lens, the focused magnetic field distribution inside the solenoid lens becomes uniform, and the magnetic field is reduced at the exit of the solenoid lens. The diameter of the magnetic pole hole of the solenoid lens is narrowed to a small diameter so that a sudden change in the value of Moreover, there is an effect that a large-angle inclination of a large sample can be easily realized.
第１図は本発明に係る走査形電子顕微鏡の対物レンズの
要部と試料との関係を示す縦断面図、第２図は対物レン
ズの軸上磁束密度分布を表わした線図である。
１・・・対物レンズ、３・・・ソレノイドレンズ、４・
・・偏向コイル、１２・・・磁極穴。
代理人 弁理士 高橋明夫
（６）
第１図
あ２図FIG. 1 is a longitudinal sectional view showing the relationship between the main parts of the objective lens of a scanning electron microscope according to the present invention and a sample, and FIG. 2 is a diagram showing the axial magnetic flux density distribution of the objective lens. 1... Objective lens, 3... Solenoid lens, 4...
...Deflection coil, 12...Magnetic pole hole. Agent Patent Attorney Akio Takahashi (6) Figure 1A2
Claims (1)
ドレンズを配置したことを特徴とする走査形電子顕微鏡
の対物レンズ。 ２、前記ソレノイドレンズは、大形の試料を少なくとも
６０°傾斜させることができ、かつ該ソレノイドレンズ
下面と前記試料の電子ビーム照射点との距離を１０＋ｍ
＋以下に設定できるように、その外径及び長さが形成さ
れた特許請求の範囲第１項記載の走査形電子顕微鏡の対
物レンズ。 ３、前記ソレノイドレンズは、該ソレノイドレンズ出口
の磁束密度が急速に変化するように、前記ソレノイドレ
ンズの下面に、直径が小さく絞られた磁極穴を形成した
特許請求の範囲第１項記載の走査形電子顕微鏡の対物レ
ンズ。[Claims] 1. An objective lens for a scanning electron microscope, characterized in that a solenoid lens having a deflection coil wound overlappingly is arranged on the lower surface of the objective lens. 2. The solenoid lens is capable of tilting a large sample by at least 60 degrees, and the distance between the lower surface of the solenoid lens and the electron beam irradiation point of the sample is 10+ m.
2. The objective lens for a scanning electron microscope according to claim 1, wherein the outer diameter and length of the objective lens are set such that the outer diameter and the length thereof can be set to be less than or equal to +. 3. Scanning according to claim 1, wherein the solenoid lens has a magnetic pole hole with a small diameter formed on the lower surface of the solenoid lens so that the magnetic flux density at the exit of the solenoid lens changes rapidly. Objective lens for a shaped electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11457384A JPS60258836A (en) | 1984-06-06 | 1984-06-06 | Objective lens for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11457384A JPS60258836A (en) | 1984-06-06 | 1984-06-06 | Objective lens for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60258836A true JPS60258836A (en) | 1985-12-20 |
Family
ID=14641214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11457384A Pending JPS60258836A (en) | 1984-06-06 | 1984-06-06 | Objective lens for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60258836A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
| JP2014053305A (en) * | 2012-09-07 | 2014-03-20 | Carl Zeiss Microscopy Gmbh | Particle beam device and method for operating particle beam device |
-
1984
- 1984-06-06 JP JP11457384A patent/JPS60258836A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
| JP2014053305A (en) * | 2012-09-07 | 2014-03-20 | Carl Zeiss Microscopy Gmbh | Particle beam device and method for operating particle beam device |
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