JPS60258731A - Manufacturing device for magnetic recording device - Google Patents

Abstract

PURPOSE:To prevent the adhesive force of a magnetic layer from being deteriorated due to adhesion of oil to the base by providing a shield member covering the base to an air outlet. CONSTITUTION:A vacuum pump system P1 using oil is connected to the air outlet 13 at the center of upper wall of a chamber 4 so as to discharge the air in the chamber 4. The 1st chamber 4 includes a supply part and a winding part and the moving part of the base 8 is provided with the shield member as a cover shutting of the invasion of oil to said 1st air outlet 13. Then a supply shaft 9, a winding shaft 10, idlers 11, 12, a cooling roll 6, and the carrying path of the base 8 are covered by covers 14, 15, 16. Thus, since the invasion of oil due to rising oil from the air outlet is shut, no oil is adhered to the member and the base 8. Then the deterioration of the adhesive force of the magnetic layer to the base 8 is avoided.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for manufacturing a metal thin film type magnetic recording medium in which a magnetic layer is formed by vacuum deposition or the like.

[Technical background of the invention and its problems]

From the viewpoint of productivity, the manufacturing method for metal thin film type recording media in which the magnetic layer is formed by vacuum deposition is that the substrate is fed out from the feeding shaft, passed through a cooling roll, and then wound onto the winding υ shaft. Most commonly used are those in which the magnetic layer is vacuum-deposited. Since the winding type vacuum evaporation machine of this type uses a vacuum pump that normally uses oil, it is necessary to take measures against so-called oil run-up. Conventional countermeasures have been to use water-cooled baffles and other traps, but it has been difficult to completely remove the oil with these alone. Further, if a nitrogen trap is used, the running cost is extremely high and it is not practical.

It is also possible to use a cryobonder that does not use oil, but in this case, the running cost is high and the equipment becomes large, which is particularly disadvantageous.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned circumstances, and its purpose is to prevent oil from adhering to the substrate of a magnetic recording medium with a relatively simple and inexpensive structure, and to strengthen the adhesion of the magnetic layer to the substrate. An object of the present invention is to provide an apparatus for manufacturing a magnetic recording medium that can prevent deterioration of the magnetic recording medium.

[Summary of the invention]

The present invention provides a shielding member that covers the base at the exhaust port to prevent oil from adhering to the base and deterioration of the adhesive force of the magnetic layer.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described based on the drawings.

The drawing shows an apparatus for manufacturing magnetic recording media. 1 is a vacuum container forming a vacuum chamber 2; The vacuum chamber 2 is partitioned by a partition wall 3 into a first chamber 4 at the top and a second chamber 5 at the bottom. At the center of the partition wall 3 is an opening 7 in which the cooling roll 6 is installed.
is formed. The cooling roll 6 is connected to each of the chambers 4,
It is arranged over 5. Inside the first chamber 4, there is a feeding shaft 9 of a feeding section located above the right side of the cooling roll 6 for feeding out the strip-shaped base 8, and a feeding shaft 9 of a feeding section located above the left side of the cooling roll 6 for winding the base 8. A winding shaft 10 for nine winding parts is installed.

The base body 8 fed out from the feeding shaft 9 is connected to the circumferential surface of the cooling roll 60 via an idler 11 on the feeding side, passes through the second chamber, and passes through the idler 12 on the winding side to the winding shaft 10. It is designed to be wound up.

Furthermore, a first exhaust port 1 is provided in the center of the earthen wall of the first chamber 4.
A vacuum pump system P1 using oil is connected to the first exhaust port 13 to mainly exhaust the inside of the first chamber 4. Moreover, this first chamber part 4
In the portion where the base body 8 moves, including the feeding portion and the winding portion, a shielding member is provided as a cover for blocking oil from rising to the first exhaust port 13. That is, this normal member consists of a cover 14, 15, 16 that covers the upper surface of the cooling roll 6, the feeding shaft 9, the winding shaft 10°, and the movement path of the base body 8 (including the idler 11, 12). The oil coming up from the exhaust port 13 is blocked by the cover 14, 15, 16 and adheres to the base 8, the cooling roll 6 that touches the base 8, the feed shaft 9°, the take-up shaft 10, and the idler 11, 12. It is designed not to.

Further, each of the covers 14, 15, and 16 is removably supported on the cover support column 17, so that they can be easily replaced.

An evaporation source 18 is installed in the second chamber 5 below the cooling roll 6. This evaporation source 18 is heated by an electron beam generation source 9 to create a vapor flow of magnetic material, and directs the vapor flow onto the surface of the base 8 which is in rolling contact with the cooling roll 6 to deposit a magnetic layer. It has become.

In addition, the lower wall of the second chamber 5 mainly includes the second chamber 5.
A second exhaust port 21 is provided to exhaust the air. A vacuum pump system P2 that does not use oil is connected to this second exhaust port 2.

Thus, the base body 8 fed out from the feeding shaft 9 passes through the idler 11 and comes into contact with the cooling roll 6 to face the second chamber 5 . Here, a magnetic layer is deposited by receiving the vapor flow from the evaporation source 18. After this, the idler 12 on the winding side
The film is wound onto the winding shaft 10 through the winding shaft 10.

By the way, the above-mentioned feeding shaft 91 winding shaft 10° idler 1
12. The transfer passages of the cooling roll 6 and the base body 8 are covered with covers 14, 15, and 16, and in order to block the intrusion of oil from the first exhaust port 13 through the oil tank, these members and the base body 8 are covered. No oil will stick to it. Therefore, there is no deterioration in the adhesion of the magnetic layer to the base 8.

[Example of implementation]

Substrate: Polyethylene terephthalate, 12μ thick Evaporation method: Electron beam heating method % formula % Same conditions as the practical example. However, the deposition was carried out without a cover to prevent oil build-up.

Adherence by scratch test) (using Ro, 5 needle)
From the above test results, it was found that the method of the present invention significantly increases the adhesion force.

〔Effect of the invention〕

As explained above, in the manufacturing apparatus of the present invention, a shielding member is provided in the chamber in which the feeding section and the winding section are installed to cover the part through which the substrate passes from the exhaust port, thereby preventing oil from adhering to the substrate. can.

1. Therefore, it is possible to prevent the adhesive force of the magnetic layer from deteriorating due to oil build-up. For example, when used for recording, recording, etc., the magnetic layer is less likely to be scratched or scratched by the spatula r, and stable output can be obtained over a long period of time. In particular, durability is improved when stilling during video playback.

Further, the present invention requires only a simple and inexpensive configuration by adding a shielding member for preventing oil adhesion, and furthermore, the running cost does not increase and is economical.

[Brief explanation of drawings]

The drawing is a schematic diagram of a manufacturing apparatus showing an embodiment of the present invention. 2... Vacuum chamber, 4... First chamber, 5... Second chamber, 6... Cooling roll, 8... Base, 9... Feeding shaft, 10... - Winding shaft, 13...Exhaust port, 14
．． 15°16... Cover, 18... Evaporation source. Applicant's agent Patent attorney Atsushi Tsuboi

Claims (1)

[Claims] A magnetic method in which a substrate is guided from a feeding section to a winding section through a magnetic layer forming section in a vacuum chamber, and a vapor flow of a magnetic material is directed toward the substrate during the transfer of the magnetic layer forming section to form a magnetic layer. In the recording medium manufacturing apparatus, the vacuum chamber has a first chamber in which a feeding section and a winding section are installed, and a second chamber in which a magnetic no-forming section is installed; 1. An apparatus for manufacturing a magnetic recording medium, characterized in that a shielding member for preventing oil adhesion is provided to cover a certain part of a base from an exhaust port.