JPS60241201A - Method of trimming low resistance resistor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention (Objective and Technical Field of the Invention) The present invention relates to a method for trimming a resistor used in thin film hybrid integrated circuits, etc. The present invention relates to a method of trimming a low resistance element when forming a plurality of resistors having a wide resistance value range up to 100.

In recent years, with the remarkable development of electronics, various circuit functions are being required, and with regard to the resistors of hybrid integrated circuits, it is becoming necessary to form resistors with resistances of several Ω to several 100 Ω on the same substrate. be.

(Prior Art) Resistors used in thin film hybrid integrated circuits are usually composed of a single-layer resistor film due to cost constraints.

To form a resistor with a high resistance value, a resistive film with a high area resistance value is used, and at the same time, the resistor pattern width W is made narrower and the resistor pattern length Z is made longer. In order to form a resistor of this value, a resistive film having a low area resistance value is used, and at the same time, the pattern width W is made thicker and the resistor pattern length is made shorter.

If the required resistance value is only a high resistance value or only a low resistance value, it can be handled by the method described above, but it can be handled by several ohms to several 1 Ω.
When forming a resistor of 0.00Ω on the same substrate i, it becomes difficult to select the area resistance value of the resistive film.

In order to obtain a high resistance value when the area resistance value is low, the resistance length l
In order to make the resistor longer, the area occupied by the resistor increases, and if the area resistance value is increased, the resistance width W must be widened to obtain a low resistance value, as shown in Figure 1. It is subject to design constraints because it expands in the direction.

Also, to obtain low resistance, a comb-shaped resistor pattern as shown in Figure 2 can be easily considered, and although it is superior to Figure 1 in order to obtain low resistance, the resistor is cut with a laser beam, etc. Beam diameter, beam position accuracy, pattern accuracy, etc. must be considered, and it is important to shorten the distance between conductors, that is, the resistance length, to a certain level.
fc has the disadvantage that it is difficult to obtain low resistance when a resistive film with a high area resistance value is used.

(Structure of the Invention) In order to fundamentally solve the above-mentioned problems, the present invention provides a low-resistance resistor in which two or more resistors each consisting of a conductor film and a resistor film are connected in parallel. The present invention provides a method for trimming a low resistance resistor, which is characterized by adjusting the resistance value by cutting the conductor film and the conductor film alternately in a straight line. 6. It is possible to obtain sufficiently low resistance even when using a resistive film. D.
Moreover, trimming is also possible.

(Operations and Effects of the Invention) The resistance value R of the resistor is the value obtained by multiplying the sheet resistance value Rs by the length l of the resistor and dividing by the width W of the resistor.

i.e. It is.

As explained earlier, Figure 1 shows a low-resistance pattern based on the conventional concept.Since w=io, Rs-50
If the conductor resistance value is zero at 0Ω/mouth, it becomes R-50Ω.

On the other hand, Fig. 2 also has a low resistance pattern, but considering laser trimming, the resistance length cannot be shortened beyond the limit of lt, l/W.
= Easy, so when Rs = 500Ω/mouth and the conductor resistance value is set to zero, R = 25Ω.

Figure 3 shows a low resistance pattern using the trimming method according to the present invention, and when l/W=- or 0G, Rr=500Ω/out, and the conductor resistance value is zero, R=
It becomes 2.5Ω. Although the areas in Figures 1 to 3 are almost the same, the obtained resistance values are greatly different.In order to obtain a low resistance value that can be trimmed, the resistor to which the present invention is applied is the best. I can see that it is excellent.

(Example) An example of the present invention will be specifically described below with reference to FIG.

The example is a tantalum thin film resistor fabricated on an alumina ceramic substrate. The tantalum thin film resistor film and the conductor film (chromium-palladium-gold) were formed using an ordinary magnetron sputtering device, and the conductor was formed using a well-known photoetching technique. After forming the resistor pattern, heat treatment was performed at 350° C. for 5 hours. The sheet resistance value of the resistive film at this time was approximately 500Ω/portion after the heat treatment.

Length 1 of one donated body is 20 fi m *Width W is 400 am
Yes, 10 of these are connected in parallel.The low resistance value required for circuit function is 5Ω, and the high resistance value is 350Ω.
Demeru. The initial resistance value was about 2.5Ω, and the resistance value was adjusted by laser trimming. Laser is Y
Resistance using AG laser.

Cut the conductor one by one, but stop cutting when the resistance value reaches the target range. The position at which cutting is stopped may be either on the conductor or on the resistor, but in FIG. 3, it is on the conductor. In Figure 3, 10 resistors are connected in parallel, so the accuracy with which the resistance can be driven is not high, but the accuracy with which the resistance can be driven can be increased by increasing the number of resistors connected in parallel. .

(Summary of the Invention) As described above, the present invention makes it possible to modify a low resistance pattern and produce a low resistance by changing the laser trimming method without changing the manufacturing method of the resistor. The effect is great and it can be put to practical use.

[Brief explanation of drawings]

1A1 and 2 are plan views of low resistance patterns trimmed by the conventional trimming method, and FIG. 3 is a plan view of the low resistance patterns trimmed by the trimming method of the present invention. In the same figure, 1...resistance film, 2... group/conductor film, 3... old...
This is a cut mark caused by a laser beam. s1 diagram

Claims (1)

[Claims] In a low-resistance resistor in which two or more resistors each consisting of a conductor film and a resistor film are connected in parallel, the resistance value is adjusted by alternately cutting the resistor film and the conductor film in a straight line. A method for trimming a resistor for low resistance.