JPS60239375A - 多孔質セラミツク薄膜並びにその製造法 - Google Patents

多孔質セラミツク薄膜並びにその製造法

Info

Publication number
JPS60239375A
JPS60239375A JP9717784A JP9717784A JPS60239375A JP S60239375 A JPS60239375 A JP S60239375A JP 9717784 A JP9717784 A JP 9717784A JP 9717784 A JP9717784 A JP 9717784A JP S60239375 A JPS60239375 A JP S60239375A
Authority
JP
Japan
Prior art keywords
thin film
track
charged particles
irradiation
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9717784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425234B2 (enExample
Inventor
守 佐藤
浩一 山口
松元　武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Kyocera Corp filed Critical Agency of Industrial Science and Technology
Priority to JP9717784A priority Critical patent/JPS60239375A/ja
Publication of JPS60239375A publication Critical patent/JPS60239375A/ja
Publication of JPH0425234B2 publication Critical patent/JPH0425234B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
JP9717784A 1984-05-14 1984-05-14 多孔質セラミツク薄膜並びにその製造法 Granted JPS60239375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9717784A JPS60239375A (ja) 1984-05-14 1984-05-14 多孔質セラミツク薄膜並びにその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9717784A JPS60239375A (ja) 1984-05-14 1984-05-14 多孔質セラミツク薄膜並びにその製造法

Publications (2)

Publication Number Publication Date
JPS60239375A true JPS60239375A (ja) 1985-11-28
JPH0425234B2 JPH0425234B2 (enExample) 1992-04-30

Family

ID=14185298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9717784A Granted JPS60239375A (ja) 1984-05-14 1984-05-14 多孔質セラミツク薄膜並びにその製造法

Country Status (1)

Country Link
JP (1) JPS60239375A (enExample)

Also Published As

Publication number Publication date
JPH0425234B2 (enExample) 1992-04-30

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