JPS60237455A - Electrophotographic sensitive body - Google Patents

Electrophotographic sensitive body

Info

Publication number
JPS60237455A
JPS60237455A JP9364684A JP9364684A JPS60237455A JP S60237455 A JPS60237455 A JP S60237455A JP 9364684 A JP9364684 A JP 9364684A JP 9364684 A JP9364684 A JP 9364684A JP S60237455 A JPS60237455 A JP S60237455A
Authority
JP
Japan
Prior art keywords
layer
substrate
content
arsenic
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9364684A
Other languages
Japanese (ja)
Inventor
Makoto Miyazawa
宮沢 信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP9364684A priority Critical patent/JPS60237455A/en
Publication of JPS60237455A publication Critical patent/JPS60237455A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • G03G5/04Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Abstract

PURPOSE:To attain high sensitivity in a longer wavelength range and superior stability to a temp. change by forming a photosensitive Se-As layer free from film defects such as pinholes and having a specified structure on an electrically conductive substrate. CONSTITUTION:A photosensitive layer consisting of the 1st layer 2 of 10-30mum thickness made of Se contg. about 20-30wt% As and the 2nd layer 3 of 10- 70mum thickness made of Se contg. about 30-45wt% As is formed on an electrically conductive substrate 1. Since the layer 2 having the lower As content is formed on the substrate 1 side, the temp. of the substrate 1 during vapor deposition can be reduced, so the release of occluded or adsorbed gas from the substrate 1 is inhibited, whereby film defects such as pinholes and image defects resulting from the film defects are prevented. Since the difference in As content between the layers 2, 3 is small, a sensitive body which is hardly affected by its heat history and has durability can be obtd. Since the average As content of the photosensitive layer is high, high sensitivity especially in a longer wavelength range of >=700mum can be attained.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は、−eレン・砒素系光導電材料からなる感光層
を有する電子写真用感光体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field to which the Invention Pertains] The present invention relates to an electrophotographic photoreceptor having a photosensitive layer made of an -e-lene/arsenic-based photoconductive material.

〔従来技術とその間逅点〕[Prior art and points of interest]

セレン・砒素系感光I―の原子組成としては、AsSe
3合金、丁なわぢ砒素含有皐38.8重量%のセレンが
知られている。このAS 2 S e 3からなる蒸着
膜は、5e−Te系蒸着膜に比べて蒸着膜の組成が安定
していること、ならびに長波長鎖域で高感度であるとい
う利点を有する。しかし、As2Se3のガラス転移点
温度は175°Cと高いため、蒸着の際に感光体基体温
度を高温に保たなければ平滑な面が得られず、そのため
に基体内の吸蔵ガス、吸着ガスが加熱により放出してピ
ンホール等の膜欠陥が発生しやすいという欠点がある。
The atomic composition of selenium/arsenic photosensitive I- is AsSe
3 alloy, 38.8% by weight selenium containing arsenic, is known. This vapor-deposited film made of AS 2 S e 3 has the advantage that the composition of the vapor-deposited film is more stable than that of the 5e-Te-based vapor-deposited film, and that it is highly sensitive in the long wavelength chain region. However, since the glass transition temperature of As2Se3 is as high as 175°C, a smooth surface cannot be obtained unless the temperature of the photoreceptor substrate is maintained at a high temperature during vapor deposition. It has the disadvantage that it is easily released by heating and causes film defects such as pinholes.

このような欠陥の発生を防ぐためには、蒸着前に気体の
予備加熱等による脱ガス工程が必要となり、工数がかか
る欠点がある。また蒸着装置も基体の高温加熱のための
能力、高温に耐える設備が必要になるという欠点がある
In order to prevent the occurrence of such defects, a degassing process such as preheating of gas is required before vapor deposition, which has the disadvantage of requiring a lot of man-hours. Further, the vapor deposition apparatus also has the drawback that it requires the ability to heat the substrate to a high temperature and equipment that can withstand high temperatures.

一方、感光層を2層とし、基体側の第一層を純セレン、
その上の第二層をAs4 Se3またはそれに近い組成
にしたものが、例えば特開昭48−102623号公報
により知られている。ところがこのような感光体は、純
セレンと高砒素濃度セレンの熱膨張係数の相違により熱
履歴に弱く、温度変化によって感光層にしわ等の欠陥が
生ずるという欠点がある。また感光層全体としての平均
As#度が少なくなるため、長波長領域の感度も低下す
るという欠点がある。
On the other hand, the photosensitive layer is made of two layers, and the first layer on the substrate side is made of pure selenium.
A second layer thereon having a composition of As4 Se3 or a composition close to it is known, for example, from JP-A-48-102623. However, such photoreceptors are susceptible to thermal history due to the difference in thermal expansion coefficient between pure selenium and selenium with a high arsenic concentration, and have the disadvantage that defects such as wrinkles occur in the photosensitive layer due to temperature changes. Furthermore, since the average As# degree of the photosensitive layer as a whole decreases, there is a drawback that the sensitivity in the long wavelength region also decreases.

r発明の目的〕 本発明は、上述の欠点を除去し、ピンホール等の膜欠陥
が少なく、長波長領域で高感度を有し、かつ温度変化に
対しても安定な電子写真用感光体を低コストで提供する
ことを目的とする。
Purpose of the Invention The present invention eliminates the above-mentioned drawbacks, and provides a photoreceptor for electrophotography that has few film defects such as pinholes, has high sensitivity in a long wavelength region, and is stable against temperature changes. The aim is to provide it at low cost.

〔発明の要点〕[Key points of the invention]

本発明は、電子写真用感光体が導電性基体上に感光層と
して基体側から砒素30重量%を含有するセレンからな
り厚さlO〜30μ濯の第一層と、砒素30〜45重薫
%を含有するセレンからなり厚さ10〜70μmの第二
層とを有することによって上記の目的を達成する。砒素
加〜頷重it%を含むセレンのガラス転移点温度は79
〜105℃であるため、As25eaを蒸着する場合と
比較して低い基体温度で蒸着する事が可能である。
The electrophotographic photoreceptor of the present invention has a first layer made of selenium containing 30% by weight of arsenic from the substrate side and having a thickness of 10 to 30 μm, and a photosensitive layer on a conductive substrate, and a first layer having a thickness of 10 to 45% by weight. The above object is achieved by having a second layer made of selenium containing 10 to 70 μm in thickness. The glass transition temperature of selenium including arsenic addition and nodule it% is 79
Since the temperature is 105° C., it is possible to perform deposition at a lower substrate temperature than when As25ea is deposited.

〔発明の実施例〕 第1図は本発明によって採用された感光体の2層構造を
示し、アルミニウム基体lの上に第一層2と第二層3が
順に積層されている。
[Embodiments of the Invention] FIG. 1 shows a two-layer structure of a photoreceptor adopted according to the present invention, in which a first layer 2 and a second layer 3 are sequentially laminated on an aluminum base l.

実施例1:外径100 IIIの円筒アルミ管の基体1
の上に砒素20重量%含有するセレンからなる第一層2
を約10μmの厚さに真空蒸着によって形成した。この
ときの蒸着槽内の圧力は約1O−3Pa、蒸発源温度は
430°Cとした。基体温度は180’Cで平滑な層が
得られた。この上に砒438.8.7N4%を含有する
セレンからなる第二層3を約刃μmの厚さに形成した。
Example 1: Base 1 of a cylindrical aluminum tube with an outer diameter of 100 III
A first layer 2 consisting of selenium containing 20% by weight of arsenic on top of
was formed by vacuum evaporation to a thickness of about 10 μm. At this time, the pressure in the vapor deposition tank was approximately 10-3 Pa, and the evaporation source temperature was 430°C. A smooth layer was obtained at a substrate temperature of 180'C. On top of this, a second layer 3 made of selenium containing 4% of arsenic 438.8.7N was formed to a thickness of about .mu.m.

このときの槽内圧力は約10 Pa、蒸発源温度は45
0℃で基体温度は同様180℃とした。
At this time, the pressure inside the tank was approximately 10 Pa, and the evaporation source temperature was 45
Similarly, the substrate temperature was 180°C at 0°C.

実施例2:実施例1と同様のアルミニウム基体1上に砒
素30重量%を含有するセレン1−2を厚さく9)μ常
に、砒素38.8重量%を含有するセレン層3を厚さ3
0Amに真壁蒸着によって形成した。このときの蒸着条
件は、圧力10= Pa 、蒸発源温度は第一層2の場
合が430°C,第二層3の場合が450℃、基体温度
はiso’cでめった。
Example 2: Selenium 1-2 containing 30% by weight of arsenic was deposited on the same aluminum substrate 1 as in Example 1.
It was formed by Makabe vapor deposition at 0 Am. The vapor deposition conditions at this time were a pressure of 10 Pa, an evaporation source temperature of 430° C. for the first layer 2, 450° C. for the second layer 3, and a substrate temperature of ISO'C.

比較例・・・実施例と同様のアルミニウム基体上に38
.8重量%の砒素を含有するセレン、すなわちAs2S
e4の単層で約印μmの厚さの感光層を、圧力IQ ”
Pa 、蒸発源温度450 ’C、基体温i 210 
’Cの蒸着条件で真空蒸着した。
Comparative example...38 on the same aluminum substrate as in the example
.. Selenium containing 8% by weight arsenic, i.e. As2S
A photosensitive layer with a thickness of about 1 μm in a single layer of e4 is subjected to pressure IQ ”
Pa, evaporation source temperature 450'C, substrate temperature i 210
Vacuum deposition was performed under the deposition conditions of 'C.

第1表はこれらの感光体の゛4位特性を示1−0第1表 測定条件は、周速3g0m7mで感光体を回転し、基体
を通じての漏、?”l電流が280μAとなるようなコ
ロナ電圧を感光層表面にかけたときの帯電位を膜厚で除
した値を電荷許容度とし、さら會こ501にの露光を与
えたときの電位とfi礪位との比を1から減じた値を光
減衰率、120 Axの露光を与えたときの電位を残留
電位とした。またくり返し疲労特性として帯電、露光の
サイクルを200回くり返したときの帯電低下および残
留電位上昇を示した。
Table 1 shows the characteristics of these photoconductors. 1-0 Table 1 Measurement conditions were that the photoconductor was rotated at a circumferential speed of 3g0m7m, and leakage through the substrate was measured. The charge tolerance is the value obtained by dividing the charging potential by the film thickness when a corona voltage such that the current is 280 μA is applied to the surface of the photosensitive layer, and the potential when exposing the photosensitive layer 501 and the fi The value obtained by subtracting the ratio from 1 to 1 is the optical attenuation rate, and the potential when exposed to 120 Ax is defined as the residual potential.Also, as the repeated fatigue characteristic, the charge decrease when the cycle of charging and exposure is repeated 200 times. and an increase in residual potential.

第2表は、感光体を複写機に実装し、全面黒原稿を複写
した際の白抜は欠陥を計数した結果を示す。
Table 2 shows the results of counting defects in white areas when a photoreceptor is installed in a copying machine and an entirely black original is copied.

第 2 表 率で、曲線21が実施例11曲株nが実施例29曲線3
3が比較例の感光体に対するものである。
In the second table, curve 21 is Example 11, strain n is Example 29, curve 3
3 is for a photoreceptor of a comparative example.

第1.第2表、第2図より次のことが分かる。1st. The following can be seen from Table 2 and Figure 2.

実施例1.2共に比較例と比べて電荷受容度がやや増加
し、光減衰率がやや小さくなるがほぼAs2Se3単層
と同等の電位特性である。くり返しサイクルによる帯電
低下、残留電位上昇共に比較例のノル52se3単層と
同等であり、良好な特性である。波長分光特性について
も比較例と同等で、700 yn以上の長波長領域で感
度を有する。画像欠陥については、実施例1.2共に比
較例に比べて大幅に改善されている。これは、実施例は
比較例に比べて基体との界面近傍のAs濃度を大幅に減
少させているので、それによって低い基体温度でも界面
部をカラス状に平滑に蒸着させることが可能になり、基
体の吸蔵ガス、吸着ガスの蒸着中の放出を抑制できた結
果である。
Both Examples 1 and 2 have a slightly increased charge acceptance and a slightly lower optical attenuation rate than the comparative example, but have almost the same potential characteristics as an As2Se3 single layer. Both the charge reduction and the residual potential increase due to repeated cycles are equivalent to the Nor 52se3 single layer of the comparative example, indicating good characteristics. The wavelength spectral characteristics are also the same as those of the comparative example, with sensitivity in the long wavelength region of 700 yn or more. Regarding image defects, both Examples 1 and 2 are significantly improved compared to the comparative example. This is because the As concentration in the vicinity of the interface with the substrate is significantly reduced in the example compared to the comparative example, which makes it possible to deposit a smooth glass-like interface at the interface even at a low substrate temperature. This is the result of being able to suppress the release of occluded gas and adsorbed gas from the substrate during vapor deposition.

〔発明の効果〕〔Effect of the invention〕

本発明は、セレン・砒素系感光層の基体に近い側に砒素
含有率を加〜刀重量%と低めに抑えた第一層を設けたも
ので、これにより蒸着時の基体温度を下げることが可能
となり、その結果蒸着時の基体からの吸蔵ガス、吸着ガ
スの放出が抑止され、ピンホール等の膜欠陥およびそれ
によって生ずる画像欠陥が減少する。従って、膜欠陥を
防ぐための蒸着前の基体の予備加熱等の脱ガス工程を短
縮又は廃止することが可能となり、製造コストを大幅に
引き下げることができる。また第一層の砒素含有率が加
〜加N量%で、第二層のAS2Se3組成近傍の加〜4
5重量%との差が小さいため、熱履歴の影#を受けにく
い耐久性のある感光体を得ることができる。また本発明
の層構成によれば、全層の平均砒素含有率が23〜43
瀘量%と高い水準にあ乙ので、感度すなわち光減衰車が
大きく、また波長分光特性においても700 m以上の
長波長領域で高い感度を得ることができる。
In the present invention, a first layer is provided on the side of the selenium/arsenic-based photosensitive layer closer to the substrate, and the arsenic content is kept low at 10 to 10% by weight, thereby lowering the substrate temperature during vapor deposition. As a result, release of occluded gas and adsorbed gas from the substrate during vapor deposition is suppressed, and film defects such as pinholes and image defects caused thereby are reduced. Therefore, it is possible to shorten or eliminate a degassing process such as preheating of the substrate before vapor deposition to prevent film defects, and manufacturing costs can be significantly reduced. In addition, the arsenic content of the first layer is from % to 4%, and the arsenic content of the second layer is from % to 4%.
Since the difference from 5% by weight is small, it is possible to obtain a durable photoreceptor that is less susceptible to the effects of thermal history. Further, according to the layer structure of the present invention, the average arsenic content of the entire layer is 23 to 43.
Since the amount of filtering is at a high level of %, the sensitivity, that is, the optical attenuation wheel is large, and the wavelength spectral characteristics also allow high sensitivity to be obtained in the long wavelength region of 700 m or more.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例の感光体の構造を示す断面図、
第2図は本発明の実施例による感光体と比較例の感光体
の波長分光感度線図である。 1・・・基体、2・・・低砒素第一層、3−・・・高砒
素第二層。 第1図 第2図 波長[nm〕−
FIG. 1 is a sectional view showing the structure of a photoreceptor according to an embodiment of the present invention;
FIG. 2 is a wavelength spectral sensitivity diagram of a photoreceptor according to an example of the present invention and a photoreceptor of a comparative example. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Low arsenic first layer, 3-...High arsenic second layer. Figure 1 Figure 2 Wavelength [nm] -

Claims (1)

【特許請求の範囲】[Claims] l)導電性基体上に感光層として基体側から砒素加〜(
9)重量%を含有するセレンからなり厚さlO〜力μ常
の第一層と、砒素30〜451蓋%を含有するセレンか
らなり厚さlO〜70μ洛の第二ノーとを有することを
特徴とする電子写真用感光体。
l) Adding arsenic to a conductive substrate as a photosensitive layer from the substrate side (
9) having a first layer of selenium containing 30 to 451% arsenic and a thickness of lO to 70μ; Characteristic electrophotographic photoreceptor.
JP9364684A 1984-05-10 1984-05-10 Electrophotographic sensitive body Pending JPS60237455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9364684A JPS60237455A (en) 1984-05-10 1984-05-10 Electrophotographic sensitive body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9364684A JPS60237455A (en) 1984-05-10 1984-05-10 Electrophotographic sensitive body

Publications (1)

Publication Number Publication Date
JPS60237455A true JPS60237455A (en) 1985-11-26

Family

ID=14088130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9364684A Pending JPS60237455A (en) 1984-05-10 1984-05-10 Electrophotographic sensitive body

Country Status (1)

Country Link
JP (1) JPS60237455A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6228545B1 (en) 1998-06-11 2001-05-08 Fuji Electric Co., Ltd. Electrophotographic selenium photoconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6228545B1 (en) 1998-06-11 2001-05-08 Fuji Electric Co., Ltd. Electrophotographic selenium photoconductor

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