JPS60237304A - Shape measuring sensor - Google Patents

Abstract

PURPOSE:To measure the three-dimensional shape of an article to be measured with high accuracy by one detection part, by scanning and selecting the output signals of plural detection elements arranged in a matrix form and superposing the same to a reference signal to obtain a detection signal. CONSTITUTION:A detection part A is constituted by arrainging a plurality of dust core coils 1 in a matrix form and a detection operation part B has a resonace circuit 2. A detection control part C is constituted of a reference oscillation circuit 9, first, second and fourth change-over circuits 10a, 10b, 14 connected thereto and a timing circuit 11 and a detection signal output part D consists of a third change-over circuit 12 and a gain adjusting circuit 13. The output signal of each coil 1 is selectively sanned and inputted to the resonance circuit 2 through the change-over circuit 14 changed over by the timing circuit 11 and receives signal width modulation by the reference oscillation signal of the reference oscillation circuit 9. Thereafter, this signal is inputted to the gain adjusting circuit 13 through the change-over circuit 12 and converted to a shape detection signal.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a shape measuring device, and particularly to a shape measuring device for non-contact recognition of the 8-dimensional shape of a temporarily measured object by appropriately arranging a plurality of detection elements. The present invention relates to a shape measuring sensor suitable for automation-only equipment.

(Prior art) Generally, as a shape measurement sensor, the entire shape of the object to be measured is measured using a signal transmission method (OCD) using a television camera using an imaging tube element or a television camera using a solid-state imaging device. something is known. However, this type of sensor is one-dimensional.

Although it is effective for measuring two-dimensional shapes, multiple television cameras are required to measure the three-dimensional shape of temporary measurement objects as automation is promoted. Therefore, recognizing a three-dimensional shape using multiple television cameras requires complicated operations, which not only makes the measuring device large-scale and expensive. ,
It was impossible to recognize special shapes - for example, shapes that were displaced three-dimensionally and in the thickness direction, or the shape of holes with relatively small diameters.

(Problems to be Solved by the Invention) The present invention solves the above-mentioned problems of the conventional shape measurement sensor, and also uses a detection element arranged in a matrix that generates a signal corresponding to the distance from the temporary measurement object. By forming the part into a desired shape and selecting untested signals from each detection element of the detection part, it is possible to enhance not only one-dimensional and two-dimensional shapes but also various three-dimensional shapes. The object of the present invention is to obtain a shape measuring device with recognizable performance.

(Means and effects for solving the problem) The present invention includes a detection unit in which a plurality of detection elements are arranged in a matrix to obtain a signal of a value corresponding to the shape of an object to be measured, and a detection unit in which a plurality of detection elements are arranged in a matrix. a detection operation section that superimposes the signal obtained by each detection element on a reference signal to obtain a detection signal corresponding to the distance between the object to be measured and the detection section; and selectively supplies the reference signal to the detection section. A sensor is constituted by a detection control section and a detection (No. N output section) that selectively outputs the detection signal of the detection operation section.

According to the present invention, the detection unit can be operated with one operation, and data processing is simplified by performing shape recognition using a matrix of detection elements and performing non-contact displacement measurement. Furthermore, in the detection section, the detection elements used may not only be arranged in a plane, but may be arranged in accordance with the shape of the object to be measured.

Furthermore, by changing the size of the detection element used.

It also includes special uses such as improving the resolution of planar shapes.

(Configuration of Embodiment) Embodiment TI of the present invention will be explained below with reference to FIGS. 1 to 7. FIG. 1 shows a shape measurement sensor according to an embodiment of the present invention. 1 Essentially, a detection section A that obtains a detection signal 81 corresponding to the shape of the object to be measured;
The detection signal S, from the detection control O is input, and the control signal S! from the detection control O! A detection operation section B selectively outputs a detection operation signal S3 according to the detection operation section B, and a detection operation signal from the detection operation section B is input, and a detection output signal B4 is output in synchronization with the control signal s3 of the detection operation control section O. It is composed of a detection signal output section and a detection signal output section.

FIG. 2 shows a specific example of the shape measurement sensor shown in FIG. 1, and the detection section A has a plurality of detection elements arranged in a matrix as described later. The detection operation section n includes a plurality of resonant circuits 2a-λ corresponding to the detection elements of the detection section A.
It has n. Each resonance circuit Ja-, 2nd, each capacitor 3-S.

It has a diode 4.7, and between the capacitor 3 and the capacitor, there is a detection element of the detection section A, such as a dust core coil/
is connected. The anode electrode of the diode B is connected to the connection point J between the dust core coil and the capacitor 5 through the capacitor 5, and the tag diode 7 and the resistor t are also connected as shown.

The detection control unit O includes a reference signal generator, such as a reference oscillation circuit, and a first switching circuit 1 connected to this reference oscillation circuit.
0a and the second switching circuit 10b, and their first
and a second switching circuit/(7a and 10b), and a timing circuit l/ for selectively controlling switching.

Therefore, the resonant circuits Ja-Jn are connected to the basic oscillation circuit 9 via the first and second switching circuits /□a and 10b, respectively. The detection signal output section receives the detection scanning signal S3 (S81 * 832 + "' + ") from the detection operation section B.
The circuit is comprised of an eighth switching circuit /2 that selectively switches the Rn) and a gain adjustment circuit /3 that adjusts the gain of the signal input through the third switching circuit.

In the detection unit, as shown in FIG.
A plurality of dust core coils l are arranged and fixed in a matrix on the attached frame/4L. Each dust core coil/ constitutes a part of a resonant circuit Ja-Jn as shown in FIG.

(Operation of the Embodiment) In the shape measurement cell having the above configuration, the reference oscillation circuit 1 is operated from the basic oscillation circuit 7 of the detection control unit C through the first switching circuit loa and the second analog switch circuit lOb. The signal is input to each of the resonant circuits Ja to 2n of section B. The timing circuit l/ of the detection control unit 0 switches the switches of the first and second switching circuits /□a and 10b at a predetermined timing to select the resonant circuit 2a-Jn. Each resonant circuit Ja-, 2n modulates the reference oscillation signal Sl of the reference oscillation circuit in the amplitude of the signal from each dust core coil from the detection section A. After this amplitude modulated signal is shaped into a waveform,
The signal is input to the eighth switching circuit/2 of the detection signal output section.

This third switching circuit 10 receives each output signal from the detection operation section B in synchronization with the first and second switching circuits/□a, 10b of the detection control section C by the timing signal S2 of the timing circuit 1/. It is selected and inputted to the gain adjustment circuit 13. The output of the gain adjustment circuit 13 is input to each processing section E as a shape detection signal B4.

More specifically, as shown in FIG. 3, when the measuring table 17 on which the object to be measured 6 is placed is moved at a speed relative to the detection part A, the object to be measured 16 passes under the detection part A. . The distance between the predetermined dust core coil l of the detection unit and the object to be measured 14 at the time of passing is as shown in FIG.
It changes like this. When the object to be measured 16 approaches the dust coil / of the detection section A, an eddy current is generated in the object to be measured 16 due to the magnetic flux from the dust coil /, and a secondary magnetic field is induced. In the dust core coil/, the voltage changes under the influence of the secondary magnetic field, and the voltage change appears as a function of the distance from the dust core coil/ to the surface 76 of the object to be measured. The voltage signals at three points of the resonant circuit, Za- and Zn, are amplitude-modulated as shown in FIG. 4 due to voltage changes in the dust core coil. No.

Figure curve! ! is the voltage signal at three points during normal operation, and curve 1
1 corresponding to zatti distance fall, λ2ゎ is the distance D! corresponds to

FIG. 6 shows a voltage signal when the object to be measured 14 passes through the detection section A. This voltage signal is rectified by the diode t
The figure will look like curve Tomoe 4. I'm a woman.

In FIG. 6, the song MIt s indicates the characteristic of the dust coil /, and "4" indicates the output characteristic of the detection operation section B.

As shown in the figure, if the distance from the object to be measured 16 to the dust core coil/of the detection unit A is Dl + Dl + D3 according to the shape of the object to be measured 16, then the resonance frequency j
% 2 a −2n (7) The output voltage signal is vl,
v, it becomes lv3. These voltage signals (1-v3) are inputted to the post-processing section E through which the gain is adjusted by the gain adjustment circuit 13 through the third switching circuit 12 of the detection signal output section. As mentioned above, each resonant circuit core a to n of the detection operation section B
are scanned and selected by the detection control section C. The scanning selection also scans and selects the detection signals of each dust core coil/ of the detection section A, and a signal corresponding to the shape of the object to be measured 16 is output from the resonance circuits Ja to Kon. However, in this embodiment, the measuring means is an analog method, so the resolution is excellent.

According to the shape measurement sensor of the present invention, it is possible to measure various shapes of an object to be measured. Objects of shape recognition include two-dimensional press-cut parts, eight-dimensional shapes added in the thickness direction, and three-dimensional internal shapes such as holes.

FIG. 7 shows an example of measuring the internal shape of a hole using the shape measuring sensor of the present invention, and the object to be measured is an object 16 having a hole /Aa. The detection part A has a plurality of dust core coils l arranged in a matrix cylindrical shape in a cylindrical mounting frame/4La having an outer diameter that matches the inner diameter of the hole 76a. When measuring the shape, the detection section A is moved at a predetermined speed S inside the hole/Aa.

Note that in FIG. 7, the distance @d indicates the detection capability range of the detection element, that is, the range of the measured displacement amount.

FIG. 8 shows a shape measuring sensor according to another embodiment of the present invention, which differs from the sensor shown in FIG. The signals from each dust core coil of the detection part A are sent to the fourth circuit.
The scanning input is selectively inputted through the switching circuit section lhiro.

FIG. 9 shows another example of the shape measuring sensor of the present invention, in which the gain adjustment circuit of the detection signal output section is connected to the level amplifier IT and filter amplifier/
q and K, and the processing IHc is composed of a digital processing section and an arithmetic section.

That is, 20 is a sample hold circuit 1.2 that samples the output signal of the detection signal output section at predetermined time intervals.
/ is an analog-digital conversion circuit that converts the sampling data of the sample and hold circuit 20 into digital data, and sword is an input/output circuit.

These sample hold circuit 20 and analog-digital conversion circuit η form a digital processing section. A central processing unit (CPU), main memory J, and auxiliary memory 26 are used as the arithmetic unit.

In the shape measurement sensor shown in FIG. 9, the digital processing section samples and holds the output signal from the detection signal output section using the sample and hold circuit J, and the sampled and held analog value is transferred to the analog-digital conversion circuit 2.
/ to convert to digital data. The converted digital data is passed through the input/output circuit n.
lead to. The CPUU executes predetermined arithmetic processing based on digital data and sends various command signals through the input/output circuit 2/.

Transfer display signals etc. to output circuit power.

(Effects of the Invention) As explained above, in the present invention, a plurality of detection elements that obtain signals of values corresponding to the distance to the object to be measured are arranged in a matrix to form a detection section, and the detection The shape measurement sensor is configured to scan and select the output signals of each detection element of the section and superimpose them on a reference signal to obtain a plurality of detection signals corresponding to the distance from the object to be measured to the detection section. It is possible to obtain a sensor that can measure the eight-dimensional shape of the object to be measured with high accuracy in the detection section and economically.

[Brief explanation of drawings]

FIG. 1 is a block wiring diagram of the shape measurement sensor of the present invention.
Fig. 2 is an electrical wiring diagram of a shape measuring sensor according to an embodiment of the present invention, Fig. 3 is an explanatory diagram showing a detection example, Fig. 4 is a characteristic diagram of the sensor shown in Fig. 2, and Fig. 5 is a 6 is a characteristic diagram of the sensor in FIG. 2, FIG. 7 is an explanatory diagram showing an example of detection by the sensor for shape measurement of the present invention, and FIG. 8 is an explanatory diagram showing an example of shape detection by the sensor of the present invention. FIG. 9 is a block wiring diagram showing an example of a device using the shape measuring sensor according to the present invention. /...Dust core coil which is a detection element, 2.2a~
, 2n... Resonance circuit, 9... Basic oscillation circuit, 10a
, 10b...Switching circuit section, ii...Timing circuit, /2...Second switching circuit section, 13...Gain adjustment circuit, /4L...Third switching circuit section, /4. ...Object to be measured, A...detection section, B...detection operation section, C...
- Detection control section, D... detection signal output section. Figure 5 1 Figure 6 ■ Figure 7 M

Claims (1)

[Claims] gL A detecting section formed by arranging a plurality of detecting elements in a matrix to obtain a signal having a value corresponding to the shape of the measuring object, and detecting the temporary measuring object based on the signal obtained by each detecting element of the detecting section. a detection operation section that selectively outputs a detection signal corresponding to a distance to the detection section; a detection control section that selectively supplies a reference signal to the detection operation section; and a detection control section that selectively outputs a detection signal of the detection operation section. A shape measurement sensor characterized by comprising a detection signal output section for outputting a detection signal.